JPH01289685A - Dust dispersion preventing mechanism of linear motion mechanism - Google Patents

Dust dispersion preventing mechanism of linear motion mechanism

Info

Publication number
JPH01289685A
JPH01289685A JP63113078A JP11307888A JPH01289685A JP H01289685 A JPH01289685 A JP H01289685A JP 63113078 A JP63113078 A JP 63113078A JP 11307888 A JP11307888 A JP 11307888A JP H01289685 A JPH01289685 A JP H01289685A
Authority
JP
Japan
Prior art keywords
slider
air
fan
housing
linear movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63113078A
Other languages
Japanese (ja)
Inventor
Kyoichi Mori
恭一 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP63113078A priority Critical patent/JPH01289685A/en
Publication of JPH01289685A publication Critical patent/JPH01289685A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0058—Means for cleaning manipulators, e.g. dust removing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To prevent scatter of dust effectively by furnishing an eaves which is pressed by motion of a slider to shut the air directed upward, installing a fan which sends the air in a casing in the direction opposite to the motion of the slider to decrease the difference of air pressure on both sides of the slider, and arranging an air pump for exhaustion of the air from the casing. CONSTITUTION:That portion of the air pressed by a slider 4 which is directed upward is shut by eaves 10a, 10b in the upper part of the slider 4 to be directed ahead, and then falls to be attracted into exhaust holes 7a, 7b. In the direction opposite to the motion of the slider 4 the air is sent forcedly by a fan 11 installed in the lower part of the slider 4 to lower the pressure difference of the airs on both side of the slider 4 to a great extent, which together with forced exhaust from the exhaust holes 7a, 7b on both sides of an air pump 9, eliminates the portion directed upward. This prevents the air, i.e. dust, from scattering upward from a gap in a cover 2b on the oversurface of a casing 2.

Description

【発明の詳細な説明】 ［産業−１−の利用骨！ＦＰ］ この発明は、半導体などの電子部品のハンドリング装置
に使用する直線移動機構の塵埃発散防止機構に関するも
のである。[Detailed Description of the Invention] [Industry-1- Use of bone! FP] The present invention relates to a dust emission prevention mechanism for a linear movement mechanism used in a handling device for electronic components such as semiconductors.

［従来の技術］ 半導体などの電子部品は塵埃による汚染を排除するため
にクリーンルーム内で製造または検査される。製造、検
査においては部品ワークは、ハンドリング装置により移
動されるが、ハンドリング装置に使用される移動機構に
は当然、発塵性のないものが必要である。しかしながら
、移動機構には機械的な摩擦ないしは接触部分が必ず付
随しており、多少にかかわらず発塵は避けられない。[Prior Art] Electronic components such as semiconductors are manufactured or inspected in a clean room to eliminate contamination by dust. During manufacturing and inspection, component workpieces are moved by a handling device, and the moving mechanism used in the handling device must naturally be one that does not generate dust. However, the moving mechanism always involves mechanical friction or contact parts, and dust generation is unavoidable regardless of the amount.

第３図（ａ）、（ｂ）および（Ｃ）はハンドリング装置
に使用されている直線移動機構の例を示すもので、移動
機構１は横断面が長方形で適当な長さの筐体２の内に、
縦方向の両側板２ａの間にボールねじ３を軸支して駆動
モータ６により回転する。ボールねじに嵌合したスライ
ダー４は、ボールねじの回転により筐体の底部に設けら
れた２条のガイドレール５に沿って移動する。スライダ
ーの」一部にはワークが載置されて所定の移動がなされ
る。また、ワークを二次元的に移動する必要があるとき
は、上記の機構のスライダーの上にさらに同様の移動機
構を、互いに直角方向に重ねて使用される。Figures 3 (a), (b) and (C) show examples of linear movement mechanisms used in handling devices. Inside,
A ball screw 3 is pivotally supported between both vertical side plates 2a and rotated by a drive motor 6. The slider 4 fitted into the ball screw moves along two guide rails 5 provided at the bottom of the housing due to the rotation of the ball screw. A workpiece is placed on a portion of the slider and is moved in a predetermined manner. Furthermore, when it is necessary to move the workpiece two-dimensionally, a similar moving mechanism is used on top of the slider of the above mechanism, superimposed at right angles to each other.

上記の直線移動機構においては、ボールねじとこれに嵌
合するスライダーの間、およびスライダーとガイドレー
ルの間には摺動摩擦による金属微粒子またはオイルミス
トなどの塵埃が発生する。In the above linear movement mechanism, dust such as metal particles or oil mist is generated between the ball screw and the slider fitted thereto, and between the slider and the guide rail due to sliding friction.

そこで１ユ記の機構においては筐体の上面をカバー２ｂ
により覆って、塵埃の発散を防止している。Therefore, in the mechanism of Book 1, the upper surface of the housing is covered with 2b.
to prevent dust from dispersing.

図の場合は、スライダーの上部を幅の狭い２つの頭部４
ａに分けて、この間もカバーして、カバー面積を可及的
に広くしである。しかしながら、図（Ｃ）に示すように
スライダーが矢印Ｒの右方向に移動するときは、右側の
エアは圧力が上がり、反対の左側のエア圧は低下する。In the case of the figure, the top of the slider is connected to two narrow heads 4.
This is divided into sections a and covered during this period to make the covered area as wide as possible. However, as shown in Figure (C), when the slider moves to the right of arrow R, the pressure of the air on the right side increases, and the air pressure on the opposite left side decreases.

この差圧によりエアの−・部はスライダーの周辺、特に
比較的広い下部の空間を矢印Ｂのように左側に通り抜け
るが、なお圧力差があるので、その他のエアはスライダ
ーの頭部とカバーのギャップから−Ｌ方に発散し、クリ
ーンルームを汚染する。スライダーが左に移動するとき
も同様である。Due to this pressure difference, the - part of the air passes through the area around the slider, especially the relatively wide space at the bottom, to the left as shown by arrow B. However, since there is still a pressure difference, other air flows between the head of the slider and the cover. It emanates from the gap in the -L direction and contaminates the clean room. The same applies when the slider moves to the left.

」１記のスライダーの移動に伴う両側のエア圧の差を小
さくするためには、スライダーの周辺の空間の断面積を
広くとって、エアに対する抵抗を減少することが考えら
れるが、機構全体をコンパクトにすることが必要なため
に、それには限度がある。また、スライダーに貫通孔を
設ける方法も限界があり、あまり有効でないことが確認
されている。In order to reduce the difference in air pressure on both sides as the slider moves as described in item 1, it is conceivable to increase the cross-sectional area of the space around the slider to reduce the resistance to the air. There are limits to this because of the need to make it compact. Furthermore, it has been confirmed that the method of providing through holes in the slider has limitations and is not very effective.

［解決しようとする課題］ 以」〕に対し、て１．筐体内のエアを強制的に外部に排
気する方法が有効であるとして、この発明の発明者によ
る先行技術がある。[Problem to be solved] 1. There is a prior art proposed by the inventor of the present invention in which a method of forcibly exhausting the air inside the housing to the outside is effective.

第４図（ａ）、（ｂ）は上記の先行技術を説明するもの
で、竿体内のエアを強制的に外部に排気する方法とその
作用を説明する構造図である。筐体の底面２ｃの両端付
近にそれぞれ排気孔７ａ、７ｂを設けて、排気管８を経
てポンプ９により外部にυｒ気する。この方法は既に実
施されているもので、各部の設計値を例示すると、筐体
の大きさは横断面が０．３ｍ角で長さ１−５ｍ１容積は
１３５リツタであり、スライダーのストローク数は最大
毎分４往復し、片ｉｎの移動時間はほぼ、７．５秒以下
である。これに対して、ポンプにυＦ気量が２５０リッ
タ／秒の大型のものを使用した実績によると、排気ｔｎ
が大きいにも拘らず意外にも、筐体のカバーのギャップ
から塵埃を含むエアが排出されることが認められ、この
方法は未だ完全ではないことか判明している。この理由
として、図（ｂ）に示すようにスライダー４がｔＪ［気
孔７より遠い中央付近にある場合について考える。移動
するスライダーに押されたエアの流れをみると、低い位
置のエアは矢印Ｃ１のように排気孔に吸入されるが、ス
ライダーの上部の表面に近いエアには排気孔の吸引力が
及ばず矢印Ｃ２の方向に向って発散するものと考えられ
る。このようなエアの流れは、筐体の断面積、スライダ
ーの位置、速度ないしはポンプの吸引力などの多くの要
素に関係し、これらによりＬ方に発散するエアの量が変
わることは勿論である。FIGS. 4(a) and 4(b) explain the above-mentioned prior art, and are structural diagrams illustrating a method of forcibly exhausting the air inside the rod body to the outside and its operation. Exhaust holes 7a and 7b are provided near both ends of the bottom surface 2c of the casing, and air is exhausted to the outside by a pump 9 via an exhaust pipe 8. This method has already been implemented, and to give an example of the design values of each part, the size of the housing is 0.3 m square in cross section, 1-5 m in length, and 135 liters in volume, and the number of strokes of the slider is It makes a maximum of 4 round trips per minute, and the travel time for one inch is approximately 7.5 seconds or less. On the other hand, according to the experience of using a large pump with a υF air volume of 250 liters/sec, the exhaust tn
Despite the large size, it was surprisingly found that air containing dust was exhausted from the gap in the housing cover, indicating that this method is still not perfect. As to the reason for this, consider the case where the slider 4 is located near the center far from tJ [stoma 7] as shown in FIG. Looking at the flow of air pushed by the moving slider, the air at a lower position is sucked into the exhaust hole as shown by arrow C1, but the suction force of the exhaust hole does not reach the air near the top surface of the slider. It is considered that the light diverges in the direction of arrow C2. This air flow is related to many factors such as the cross-sectional area of the housing, the position of the slider, the speed, or the suction force of the pump, and it goes without saying that the amount of air released in the L direction changes depending on these factors. .

なお」二記の実例においては、ポンプが比較的大型であ
るために動作呂がかなり大きくて、静かなりリーンルー
ムの作業者にとっては騒音きなり作業に支砕することも
問題である。In the example described in Section 2, since the pump is relatively large, the operating space is quite large, which poses a problem for workers in quiet lean rooms, who are disturbed by the noise caused by the work.

この発明は以上に述べた直線移動機構に対する従来の不
完全な塵埃の発散防止機構を補完してより良好なものと
し、併せてポンプをより小型化して騒音を低減すること
ができる塵埃発散防止機構を提供することを目的とする
ものである。This invention complements and improves the conventional incomplete dust emission prevention mechanism for the linear movement mechanism described above, and also makes the pump more compact and reduces noise. The purpose is to provide the following.

［課題を解決するための手段］ この発明は、横断面が長方形の筐体の縦方向の両側板に
軸支され、駆動モータにより回転するボールねじき、ボ
ールねじに嵌合し、その回転により筐体の底面に設けら
れた２条のガイドレールに沿って移動するスライダーと
、筐体の上面のカバーに、スライダーの頭部の移動に対
するギャップを設けてなる直線移動機構の塵埃発散防止
機構であって、スライダーの−１［にスライダーに押圧
されて上方に向うエアを遮断する庇と、スライダーの下
部に筐体内のエアをスライダーとの移動と反対方向に送
風して、移動によってスライダーの両側に生ずるエアの
圧力差を減少するファンとをそれぞれ固定し、また筐体
の両側板近くの底面に２個の排気孔と、これより筐体内
のエアを排気する排気管およびエアポンプとにより構成
されたものである。[Means for Solving the Problems] The present invention is a ball screw that is pivotally supported by both longitudinal side plates of a housing having a rectangular cross section and is rotated by a drive motor, and the ball screw is fitted into the ball screw and the housing is rotated by the rotation of the ball screw. This dust emission prevention mechanism is a linear movement mechanism that consists of a slider that moves along two guide rails provided on the bottom of the body, and a gap provided in the cover on the top of the housing for the movement of the head of the slider. At -1 of the slider, there is an eave that blocks the air that is pushed upward by the slider, and at the bottom of the slider, the air inside the housing is blown in the opposite direction to the movement of the slider, and the movement causes air to flow to both sides of the slider. A fan that reduces the pressure difference of the air that is generated is fixed, and it also consists of two exhaust holes on the bottom near both side plates of the housing, an exhaust pipe and an air pump that exhaust the air from inside the housing. It is something.

１−記に対するｌ実施態様として、スライダーの底面に
ファンおよびファンを回転する）ｒンモータを取り付け
、モータ制御回路を設けてスライダーの移動速度にほぼ
比例した回転数でファンを回転する。As an embodiment for item 1-1, a fan and a motor for rotating the fan are attached to the bottom of the slider, and a motor control circuit is provided to rotate the fan at a rotation speed approximately proportional to the moving speed of the slider.

また他の実施態様として、スライダーの下部で、２条の
ガイドレールの間の空間に、スライダーの両側のエアに
対する縦方向のエアダクトを設けてその中央部にファン
を固定し、ボールねじの回転数に比例した回転数でファ
ンを回転する係合機構およびファンに対する回転軸を配
設したものである。In another embodiment, a vertical air duct for the air on both sides of the slider is provided in the space between the two guide rails at the bottom of the slider, and a fan is fixed in the center of the air duct, and the rotation speed of the ball screw is This system includes an engagement mechanism that rotates the fan at a rotational speed proportional to , and a rotation shaft for the fan.

［作用］ 以十の構成による、この発明の直線移動機構の塵埃発散
防止機構においては、スライダーの」一部に設けた庇に
より、スライダーに押圧されたエアのうち、」１方に向
かうものは遮断されて前方に向かい、さらに下降して排
気孔に吸引される。さらに、スライダーの下部に設けた
ファンにより、スライダーの移動と反対方向にエアが強
制的に送風されるので、従来の自然通風の場合に比較し
て両側のエア圧の差が大幅に低下し、両側の排気孔より
の強制排気と相まって上方に向かうものがなくなり、ギ
ャップより発散する塵埃が防止される。[Function] In the dust dispersion prevention mechanism of the linear movement mechanism of the present invention having the above ten configurations, the eaves provided in a part of the slider cause the air pressed against the slider to flow in one direction. It is blocked, moves forward, descends further, and is sucked into the exhaust hole. Furthermore, the fan installed at the bottom of the slider forces the air in the opposite direction of the slider's movement, significantly reducing the difference in air pressure on both sides compared to conventional natural ventilation. Combined with the forced exhaust from the exhaust holes on both sides, there is no upward movement, and dust is prevented from emitting from the gap.

以上において、ファンの回転方向をスライダーの移動方
向により反転し、また回転数を移動速度に比例して行う
ことが必要であるので、モータ制御回路により、スライ
ダーの駆動モータと関連させてファンモータを制御し、
または、係合機構によりボールねじの回転方向に従い、
その回転数に比例してファンを回転するものである。In the above, it is necessary to reverse the direction of rotation of the fan according to the direction of movement of the slider, and to make the number of rotations proportional to the movement speed. control,
Or, according to the rotation direction of the ball screw by the engagement mechanism,
The fan is rotated in proportion to the rotation speed.

［実施例］ 第１図（ａ）、（ｂ）および（Ｃ）はこの発明による直
線移動機構の塵埃発散防止機構に対する第１の実施例の
構造図とモータ制御回路のブロック構成図である。図（
ａ）、（ｂ）において、移動機構１は第３図で説明した
ものと同様のもので、筺体２の縦方向の両側板２１１に
ボールねじ３を軸支し、これを駆動モータ６により回転
する。ボールねじに嵌合したスライダー４は、その回転
により２条のガイドレール５に沿って移動する。この移
動機構に対して、スライダーの−Ｌ部の両側に、スライ
ダーに押圧されて上方に向かうエアを遮断するための庇
１０ａ、ＩＯｂを設ける。庇の横幅はスライダーと同じ
とする。縦方向の長さは、長いほど効果が大きいが、そ
の分だけスライダーの移動範囲が狭くなることを考慮し
て、実験により上向きエアの遮断効果ができる限り大き
（なるように設定する。次に、スライダーの下部にファ
ン！！とこれを回転するファンモータ１２を取り付ける
。さらに、前記した先行技術に従って筐体の両側板２ａ
に近い位置で底面２ｃに２個の排気孔７ａ、７ｂを設け
、排気管８を経てポンプ９に接続する。図（Ｃ）は、ス
ライダーに対する駆動モータ６とファンモータ１２に対
するモータ制御回路Ｉ３を示し、移動機構制御部（図示
省略）によりモータ制御回路が制御されて駆動モータが
所定の方向、回転数の回転をなし、これに比例してファ
ンモータが回転する。[Embodiment] FIGS. 1(a), 1(b) and 1(C) are a structural diagram and a block diagram of a motor control circuit of a first embodiment of a dust diffusion prevention mechanism of a linear movement mechanism according to the present invention. figure(
In a) and (b), the moving mechanism 1 is similar to that explained in FIG. do. The slider 4 fitted into the ball screw moves along the two guide rails 5 by its rotation. For this moving mechanism, eaves 10a and IOb are provided on both sides of the -L portion of the slider to block air that is pushed upward by the slider. The width of the eaves is the same as the slider. The longer the length in the vertical direction, the greater the effect, but taking into consideration that the range of movement of the slider will be narrowed accordingly, we set it so that the effect of blocking upward air is as large as possible through experiments.Next. , a fan!! and a fan motor 12 for rotating the fan are attached to the bottom of the slider.Furthermore, according to the prior art described above, side plates 2a of the casing are installed.
Two exhaust holes 7a and 7b are provided on the bottom surface 2c at a position close to , and are connected to a pump 9 via an exhaust pipe 8. Figure (C) shows a motor control circuit I3 for the drive motor 6 for the slider and the fan motor 12, and the motor control circuit is controlled by a moving mechanism control section (not shown), so that the drive motor rotates in a predetermined direction and at a predetermined number of rotations. The fan motor rotates in proportion to this.

以」二の構成による移動機構の塵埃発散防止の作用を説
明すると、第１図（ａ）においてスライダー４が矢印Ｒ
の右方に移動すると、これに押圧されたエアのうち、上
部付近のエアは庇１０ａに遮断されて１．方に発散せず
、それより低い位置のエアとともに前方に向う。また下
部付近のエアの−ｉ９３はファンにより矢印Ｅのように
左方に送風され、他の一部はｌ−、方のエアと合流して
、ポンプの吸引力により排気孔７ａに集まって排出され
る。この場合、ファンの送風力はスライダーの移動速度
に比例しているので、抑圧されたエアの圧力は増加する
ことがなくほぼ一定に保たれる。また、ファンによる強
制送風により、ポンプの排気量は従来上り小さくするこ
とが可能である。To explain the dust emission prevention effect of the moving mechanism using the second configuration, the slider 4 moves in the direction of the arrow R in FIG.
When moving to the right, the air near the top of the air pressed by this is blocked by the eaves 10a and 1. It does not diverge in the direction, but heads forward with the air at a lower position. Also, -i93 of the air near the bottom is blown to the left by the fan as shown by arrow E, and the other part merges with the air from l-, and is collected at the exhaust hole 7a by the suction force of the pump and discharged. be done. In this case, since the force blown by the fan is proportional to the moving speed of the slider, the pressure of the suppressed air does not increase and remains approximately constant. Further, by forcing air by a fan, the displacement of the pump can be made smaller than conventional methods.

以−Ｌにおけるエアの流れは、スライダーの位置、庇の
長さ、ファンの形状と回転数、ポンプの吸引力（ＦＪＦ
気ｍ）など多（の要素により複雑に変化するもので、実
験などにより、塵埃の完敗をできる限り防止するととも
に、ポンプを小さくして騒音を低ドするように各部を設
定することが必要である。The air flow in L is determined by the position of the slider, the length of the eaves, the shape and rotation speed of the fan, and the suction force of the pump (FJF
It changes in a complicated manner depending on many factors such as air (m), etc., and it is necessary to set each part by experiment etc. to prevent complete destruction of dust as much as possible, and to make the pump smaller and reduce noise. be.

第２図（ａ）、（ｂ）は、この発明による直線移動機＋
１＋ｉの塵埃発散防市機構に対する第２の実施例を小す
もので、図において、Ｃｒ！、体内のスライダーのド部
の空間に筐体の縦方向にカバー１４を設け、両側の端を
底面に固定してエアガイドを構成する。カバーの縦方向
の範囲は国体の両側板との間に矢印Ｇ、　Ｈのようにエ
アを」二部から下方に流すように間を開け、その中央に
ファン１１を固定する。ファンの回転軸ＩＧにはプーリ
１５ｂを、ボールねじ３にはプーリ１５ａを取り付けて
これらをベルトで係合する。ボールねじの回転数に比例
してファンが回転する。この場合の塵埃発散防１１−．
の作用はｔ記とほぼ同様であり、またポンプを小型化す
ることができる。FIGS. 2(a) and 2(b) show the linear moving machine +
This is a smaller version of the second embodiment for the dust emission prevention mechanism of 1+i, and in the figure, Cr! A cover 14 is provided in the vertical direction of the housing in the space of the slider inside the body, and both ends are fixed to the bottom surface to form an air guide. The vertical range of the cover is such that air is allowed to flow downward from the two parts as shown by arrows G and H on both sides of the National Athletic Meet, and a fan 11 is fixed in the center of the gap. A pulley 15b is attached to the rotating shaft IG of the fan, and a pulley 15a is attached to the ball screw 3, and these are engaged with a belt. The fan rotates in proportion to the rotation speed of the ball screw. Dust emission prevention in this case 11-.
The action is almost the same as that in section t, and the pump can be made smaller.

［発明の効果］ 以１−の説明により明らかなように、この発明による直
線移動機構の塵埃発散防市機構においては、スライダー
の移動により押圧されるエアは、庇により遮断されると
ともに、ファンにより筐体内のエアを強制送風してスラ
イダーの両側のエア圧の差がほぼなくなり、さらにポン
プにより筺体内のエアを排気することにより、筐体り而
のカバーのギャップより上方に発散するエア、すなわち
塵埃が防１１−される。またファンによるスライダーの
両側のエア圧の差が小さくなることにより、従来に比し
てポンプを小型化して騒音を低下することが可能となる
もので、クリーンルーム内で使用する半導体などの電子
部品のハンドリング装置に適用してえられる効果には大
きいものがある。[Effects of the Invention] As is clear from the explanation in 1- below, in the dust dispersion prevention mechanism of the linear movement mechanism according to the present invention, the air pressed by the movement of the slider is blocked by the eaves and is also blocked by the fan. By forcing the air inside the housing to almost eliminate the difference in air pressure on both sides of the slider, and then exhausting the air inside the housing with a pump, the air that emanates above the gap in the cover of the housing, i.e. Dust is prevented. In addition, by reducing the difference in air pressure between the sides of the slider caused by the fan, it is possible to make the pump smaller and reduce noise compared to conventional pumps, making it possible to reduce the noise of electronic components such as semiconductors used in clean rooms. There are great effects that can be obtained when applied to handling equipment.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図（ａ）、（ｂ）および（Ｃ）は、この発明による
直線移動機構の塵埃発散防止機構における第１の実施例
の構造図とモータ制御回路のブロック構成図、第２図（
ａ）および（ｂ）は、この発明による直線移動機構の塵
埃発散防ｒｌ：、機構における第２の実施例の構造図、
第３図（ａ）、（ｂ）および（ｃ）は直線移動機構の構
造図、第４図（ａ）および（ｂ）は先行技術にかかる塵
埃発散防止ヒ機横とその作用の説明する構造図である。 １・・・直線移動機構、　　２・・・筐体、２ａ・・・
筺体の側板、　　２ｂ・・・筺体のカバー、２ｃ・・・
筐体の底面、　　３・・・ボールねじ、４・・・スライ
ダー、　　　　４ａ・・・スライダーの頭部、５・・・
ガイドレール、　　８・・・駆動モータ、７・・・排気
孔、　　　　　８・・・排気管、９・・・エアポンプ、
！０・・・庇、 ■・・・ファン、１２・・・ファンモータ、１３・・・
モータ制御回路、１４・・・エアダクトのカバー、ＩＧ
・・・プーリ、ＩＧ・・・ファンの回転軸。FIGS. 1(a), (b), and (C) are a structural diagram of a first embodiment of a dust emission prevention mechanism for a linear movement mechanism according to the present invention, a block configuration diagram of a motor control circuit, and FIG.
a) and (b) are structural diagrams of a second embodiment of the dust diffusion prevention rl of the linear movement mechanism according to the present invention;
Figures 3 (a), (b) and (c) are structural diagrams of the linear movement mechanism, and Figures 4 (a) and (b) are structures illustrating the side of the dust emission prevention mechanism and its function according to the prior art. It is a diagram. 1... Linear movement mechanism, 2... Housing, 2a...
Side plate of the housing, 2b...Cover of the housing, 2c...
Bottom surface of the housing, 3...Ball screw, 4...Slider, 4a...Slider head, 5...
Guide rail, 8... Drive motor, 7... Exhaust hole, 8... Exhaust pipe, 9... Air pump,
! 0...Eave, ■...Fan, 12...Fan motor, 13...
Motor control circuit, 14...air duct cover, IG
...Pulley, IG...Rotating shaft of the fan.

Claims (3)

【特許請求の範囲】[Claims] （１）、横断面が長方形の筺体の縦方向の両側板に軸支
され、駆動モータにより回転するボールねじと、該ボー
ルねじに嵌合し、その回転により上記筐体の底面に設け
られた２条のガイドレールに沿って移動するスライダー
と、上記筐体の上面のカバーに、該スライダーの頭部の
移動に対するギャップを設けてなる直線移動機構におい
て、該スライダーの上部に該スライダーに押圧されて上
方に向かうエアを遮断する庇と、該スライダーの下部に
筐体内のエアをスライダーの移動と反対方向に送風して
、該移動によりスライダーの両側に生ずるエアの圧力差
を減少するファンをそれぞれ固定し、かつ上記筺体の底
面の上記両側板に接近した位置に２個の排気孔と、該排
気孔より上記筺体内のエアを排気する排気管およびエア
ポンプとにより構成されたことを特徴とする、直線移動
機構の塵埃発散防止機構。(1) A ball screw that is rotatably supported by the longitudinal side plates of a housing having a rectangular cross section and rotated by a drive motor; In a linear movement mechanism comprising a slider that moves along two guide rails and a cover on the top surface of the casing with a gap for movement of the head of the slider, the top of the slider is pressed by the slider. an eave that blocks air from moving upward, and a fan located below the slider that blows air inside the housing in the opposite direction to the movement of the slider to reduce the pressure difference between the air that occurs on both sides of the slider due to the movement. The housing is fixed and is configured with two exhaust holes at positions close to the both side plates on the bottom surface of the housing, and an exhaust pipe and an air pump for exhausting air inside the housing from the exhaust holes. , a dust emission prevention mechanism for linear movement mechanisms. （２）、上記スライダーの底面に上記ファンおよびファ
ンを回転するファンモータを取り付け、上記スライダー
の移動速度にほぼ比例した回転数で該ファンを回転する
モータ制御回路を設けた、請求項１記載の直線移動機構
の塵埃発散防止機構。(2) The fan and a fan motor for rotating the fan are attached to the bottom surface of the slider, and a motor control circuit is provided for rotating the fan at a rotation speed approximately proportional to the moving speed of the slider. Dust emission prevention mechanism for linear movement mechanism. （３）、上記スライダーの下部で、上記２条のガイドレ
ールの間の空間に、上記スライダーの両側のエアに対す
る縦方向のエアダクトを設け、該エアダクトの中央部に
上記ファンを固定し、上記ボールねじの回転数に比例し
た回転数で該ファンを回転する係合機構およびファンに
対する回転軸を配設した、請求項１記載の直線移動機構
の塵埃発散防止機構。(3) At the bottom of the slider, a vertical air duct for the air on both sides of the slider is provided in the space between the two guide rails, and the fan is fixed to the center of the air duct, and the fan is fixed to the center of the air duct. 2. The dust emission prevention mechanism for a linear movement mechanism according to claim 1, further comprising an engagement mechanism that rotates the fan at a rotation speed proportional to the rotation speed of the screw, and a rotation shaft for the fan.
JP63113078A 1988-05-10 1988-05-10 Dust dispersion preventing mechanism of linear motion mechanism Pending JPH01289685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63113078A JPH01289685A (en) 1988-05-10 1988-05-10 Dust dispersion preventing mechanism of linear motion mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63113078A JPH01289685A (en) 1988-05-10 1988-05-10 Dust dispersion preventing mechanism of linear motion mechanism

Publications (1)

Publication Number Publication Date
JPH01289685A true JPH01289685A (en) 1989-11-21

Family

ID=14602922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63113078A Pending JPH01289685A (en) 1988-05-10 1988-05-10 Dust dispersion preventing mechanism of linear motion mechanism

Country Status (1)

Country Link
JP (1) JPH01289685A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10264075A (en) * 1997-03-25 1998-10-06 Shin Meiwa Ind Co Ltd Clean robot
WO2002003451A1 (en) * 1999-03-15 2002-01-10 Thk Co., Ltd. Linear actuator with dustproof mechanism
JP2004313908A (en) * 2003-04-15 2004-11-11 Seiko Epson Corp Dust-exhaust device for droplet-discharge equipment, droplet-discharge equipment provided therewith, electro-optic equipment, its manufacturing method, and electronic equipment
JP2011101907A (en) * 2009-11-10 2011-05-26 Seiko Epson Corp Scalar robot
CN103433913A (en) * 2013-08-17 2013-12-11 昆山利特自动化设备有限公司 Single-shaft mechanical arm
JP2013251432A (en) * 2012-06-01 2013-12-12 Yaskawa Electric Corp Transfer robot and local clean device including the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10264075A (en) * 1997-03-25 1998-10-06 Shin Meiwa Ind Co Ltd Clean robot
WO2002003451A1 (en) * 1999-03-15 2002-01-10 Thk Co., Ltd. Linear actuator with dustproof mechanism
JP2004313908A (en) * 2003-04-15 2004-11-11 Seiko Epson Corp Dust-exhaust device for droplet-discharge equipment, droplet-discharge equipment provided therewith, electro-optic equipment, its manufacturing method, and electronic equipment
JP2011101907A (en) * 2009-11-10 2011-05-26 Seiko Epson Corp Scalar robot
JP2013251432A (en) * 2012-06-01 2013-12-12 Yaskawa Electric Corp Transfer robot and local clean device including the same
US8807911B2 (en) 2012-06-01 2014-08-19 Kabushiki Kaisha Yaskawa Denki Transfer robot and equipment front end module including transfer robot with vent part
CN103433913A (en) * 2013-08-17 2013-12-11 昆山利特自动化设备有限公司 Single-shaft mechanical arm

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