JP2000271893A - Robot for clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive and simple robot capable of sucking dust efficiently, in a robot for use in a clean room. SOLUTION: Moving edges on both sides of a body cover 8 are formed with suction inlet joints 10 and connected with suction duct hoses 11. The suction duct hoses 11 are connected to a suction device 12. The reciprocating motion of a slider 7 generates dust from a screw part 3 and a nut part 4 for a ball screw and a direct-acting guide bearing 6, so that dust is mixed into the air in the body cover 8. With the slider 7 approaching the moving edges, the air is gathered near the moving edges, and is exhausted out of a clean room through the suction inlet joints 10, suction duct hoses 11, and the suction device 12 by the effect of the suction device 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an industrial robot used in a clean room.

[0002]

2. Description of the Related Art An industrial robot used in an industrial field that requires assembly in a clean room, such as a manufacturing process of a semiconductor, a liquid crystal, and a hard disk, is inexpensive with little dust flowing into a work area during operation. Is required. Hereinafter, a conventional clean room robot will be described. (Conventional Example 1) FIG. 4 is a first example showing the configuration of a conventional clean room robot. In FIG. 4, reference numeral 21 denotes a screw portion of a ball screw; 22, a nut portion of a ball screw; 23, a toothed belt; 24, 25 pulleys;
Reference numeral 7 denotes a linear guide bearing, and reference numeral 28 denotes a slider. The motor 26 is supported movably integrally with the slider 28 side.

[0003] The operation of a conventional clean room robot having the above components will be described. This mechanism is
By rotating the motor 26, this rotational force is transmitted via the pulleys 24 and 25 and the toothed belt 23,
The nut portion 22 of the ball screw rotates and moves along the screw portion 21 of the ball screw. At this time, the slider 28 moves along the linear guide bearing 27.

[0004] By the way, a general robot using a ball screw has a configuration in which a screw fixed to a predetermined position is used to rotate the screw portion of the ball screw and move the nut portion side of the ball screw. It is considered that dust is generated by the rotation of the screw portion of the ball screw. To cope with this, according to the above-described conventional clean room robot, the screw portion 21 of the ball screw is fixed and the nut portion is fixed. Since the slider 22 is moved by rotating the slider 22, dust generation itself can be reduced. (Conventional Example 2) FIG. 5 is a second example showing the configuration of a conventional clean room robot. In FIG. 5, 31 is a screw portion of a ball screw, 32 is a nut portion of a ball screw, 33 is a slider, 34 is a linear guide bearing, 35 is a suction pipe,
6 is a suction port joint, 37 is a motor, 38 is a suction device, 3
9 is a suction duct hose, and 45 is a main body cover. A large number of suction ports 40 are provided at appropriate intervals in the suction pipe 35, and a suction duct hose 39 from a suction device 38 is connected to a suction port joint 36 leading to the suction pipe 35. Is operated to suck the inside of the main body cover 45.

As shown in FIG. 6, the ball screw has a structure in which a ball 41 is interposed between a screw groove 31a of a screw portion 31 and a screw groove 32a of a nut portion 32. Grease is provided between the ball 32a and the ball 41. Further, seals 42 are provided at both ends of the nut portion 32 in order to prevent foreign matter from entering the inside of the nut portion 32. Further, the linear motion guide bearing 34 and the slider 33 are configured to be movable via balls 43 and 44 as shown in FIG. 7, and there is grease between them.

The operation and operation of the clean room robot configured as described above will be described. In this configuration, the slider 33 is guided by the linear motion guide bearing 34, and reciprocates the nut portion 32 side of the ball screw by linear motion obtained by converting the rotational motion generated by the motor 37 with the ball screw. In other words, the motor 37 is driven to rotate, and the screw portion 31 of the ball screw is rotated, and the ball 41 is rotated.
The slider 33 is moved by moving the nut portion 32 of the ball screw via the. Then, when the screw portion 31 of the ball screw rotates, the screw portion 31 of the ball screw is rotated.
The dust generated due to the engagement between the ball groove 41 and the screw groove 32a of the nut portion 32 and the ball 41 and the engagement between the slider 33 and the linear motion guide bearing 34 and the balls 43 and 44 are removed by the screw of the ball screw. The suction is performed from the suction port 40 of the suction pipe 35 arranged along the portion 31.

The main cause of dust generation in the clean room robot having this configuration is that grease applied to the screw portion 31 and the nut portion 32 of the ball screw is scattered by the rotation of the ball screw. When the seal 42 of the ball screw slides, grease and wear powder are scattered. The grease applied to the linear guide bearing 34 is the slider 3
3 is scattered by sliding. That is. When the slider 33 operates, the generated dust is first included in the air in the main body cover 45. When the slider 33 approaches the moving end, the body cover 45 is closed.
This is because when the volume between the slider 33 and the slider 33 is small and there is no suction port, air containing dust is scattered outside the main body cover 45.

As described above, dust may be generated in a conventional robot for a clean room, and particularly in a clean room in which a semiconductor forming apparatus or the like is used, a small amount of dust has a large effect on a product. There is a demand for a clean room robot that does not cause dust.

[0009]

However, the above-mentioned conventional clean room robot has the following problems. First conventional example: Although dust generation can be reduced,
The generation of dust cannot be prevented, and the number of components increases, which increases the cost. Second conventional example: The suction flow rate becomes smaller as the suction port 40 is farther from the suction port joint 36, and even if dust can be sufficiently sucked from the suction port 40 near the suction port joint 36, the suction flow from the suction port joint 36 can be reduced. Dust from the distal end cannot be sufficiently sucked. In addition, in order to sufficiently suction from the distal end portion away from the suction port joint 36, a suction device 38 having a large capacity is required. At this time, the suction flow rate of the suction port 40 close to the suction port joint 36 is required. The flow rate becomes more than necessary and wastes energy. In addition, the suction port 40
Are provided not only at both ends but also in the middle, and the suction force from the suction port 40 is weak overall.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide an inexpensive clean room robot which consumes less energy while preventing generation of dust.

[0011]

In order to achieve this object, a clean room robot according to the present invention comprises a motor having a ball screw on an output shaft, a slider capable of moving by engaging with the ball screw, and a slider. A clean room robot that includes a linear motion guide bearing that guides the robot to move linearly, and a main body cover that covers at least the ball screw and the slider, and is configured to suction dust in the main body cover together with air from a suction port, The suction port is provided only in the main body cover or in the vicinity of both moving ends in which the slider can move in the main body cover.

With the above configuration, it is possible to provide an inexpensive and low-energy clean room robot while preventing generation of dust.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 is a motor having a ball screw on an output shaft, a slider movable by engaging with the ball screw, and a linear guide for guiding the slider to move in a straight line. A clean room robot comprising a bearing, a body cover that covers at least a ball screw and a slider, and configured to suck dust in the body cover together with air from a suction port, wherein the suction port is formed by a main body cover or a main body cover. Provided only in the vicinity of both moving ends where the slider can move.

With the above structure, the suction port is provided only near the body cover or at both ends of the body cover where the slider can move, so that the suction flow rate from the suction port can be adjusted to an appropriate flow rate. It is possible to prevent useless energy from being consumed. According to a second aspect of the present invention, in the clean room robot according to the first aspect, air containing dust flows from an opening of a movement path of the slider at a position facing a work area where an object to be moved by the robot moves. It is provided with a dust-proof cover that blocks the inflow toward the work area.

According to the above configuration, it is possible to prevent air containing dust from flowing into the working area from the opening of the moving path of the slider. According to a third aspect of the present invention, there is provided the clean room robot according to the first or second aspect, further comprising control means for controlling suction forces from both suction ports to be substantially the same.

According to a fourth aspect of the present invention, in the clean room robot according to the third aspect, sensors are provided at both suction ports, and the suction force from the two suction ports is controlled to be substantially the same based on the result from the sensors. Means. According to a fifth aspect of the present invention, there is provided the clean room robot according to the first or second aspect, further comprising control means for increasing the suction force of the suction port in the slider moving direction in accordance with the movement of the slider.

According to a sixth aspect of the present invention, there is provided a motor having a ball screw on an output shaft, and a slider capable of engaging with the ball screw and moving in parallel with a work area in which a moving object to be moved by a robot moves. An X-axis portion including at least a ball cover and a body cover that covers the slider; a motor integrally fixed to the slider of the X-axis portion, having a ball screw on an output shaft; and a moving direction of the X-axis portion. A Y-axis portion having a slider movable in a direction perpendicular to the main body and a body cover covering at least these ball screws and the slider; and a Y-axis portion attached to the slider of the Y-axis portion for holding the moving object. Means for a clean room, comprising:
In the body cover of the shaft, a suction duct having a suction port is provided at a position facing the tip of the ball screw, which is the moving end of the slider, and an L-shaped suction joint is connected to the rear of the suction duct. In addition, a suction port is also provided in the rear part of the main body cover of the Y-axis part, and an L-shaped suction joint is connected to this suction port so that suction is performed from behind the main body cover.

According to the above configuration, even if dust falls from the suction duct hose, the dust can be prevented from entering the work area. Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an external view of a clean room robot according to an embodiment of the present invention, and FIG.
And (b) is a plan sectional view showing the X-axis part of the clean room robot and a side view seen from the direction of arrow A in FIG. 2 (a), and FIG. 3 is a plan sectional view showing the Y-axis part of the clean room robot. It is.

As shown in FIG. 1, the clean room robot has a work means mounting portion for mounting a holding mechanism (arm, chuck, etc.) such as a work arm for holding a moving object to be moved by the clean room robot and a chuck. 15, an X-axis unit 1 for moving the moving object in the X-axis direction, a Y-axis unit 2 for moving the moving object in the Y-axis direction, and control means 16. A hatched portion in FIG. 1 is a work range 14 in which the work means mounting portion 15 can be moved. In other words, as will be described in detail later, the working means mounting portion 15 to which the holding mechanism is fixed is movably mounted in the Y-axis direction by the Y-axis portion 2, and the working means mounting portion 15 and the Y-axis portion 2 are As a result, the holding mechanism (work means mounting portion 15) for holding the moving object is configured to be movable in the X-axis direction and the Y-axis direction.

As shown in FIGS. 2 (a) and 2 (b), the X-axis portion 1 has a screw portion 3 and a nut portion 4 of a ball screw, a motor 5 for rotating the screw portion 3 of the ball screw, and a nut of the ball screw. A slider 7 attached to the portion 4 and slidably provided on a linear motion guide bearing 6 arranged along the X-axis direction, and a main body cover 8 for covering these components are provided. In addition, suction ports 9a and 9b are formed at positions corresponding to both ends 3a and 3b of the screw portion 3, which are end points (moving ends) of a moving range of the slider 7 in the main body cover 8, and respective positions are formed. Suction port joint 10
A suction device 12 such as a blower attached to a wall of a clean room or the like is connected to the suction port joint 10 via a suction duct hose 11.
The air containing dust is exhausted to the outside of the clean room from the vicinity of both ends 3a and 3b. Then, the suction operation by the suction device 12 and the driving operation of the motor 5 are controlled by the control unit 16. In FIG. 1, reference numerals 8a and 8b denote openings formed in the main body cover 8 to allow a part of the slider 7 and the working means mounting portion 15 to pass therethrough.

As shown in FIG. 3, also in the Y-axis portion 2,
Similarly to the X-axis part 1, the screw part 3 and the nut part 4 of the ball screw and the motor 5 for rotating the screw part 3 of the ball screw
And a slider 7 attached to the nut portion 4 of the ball screw and slidable on a linear motion guide bearing 6 arranged along the X-axis direction, and a main body cover 8 covering these components.
Are provided. However, unlike the X-axis section 1, the suction duct 1 in which the suction port 17a is formed only at the tip end in the main body cover 8 of the Y-axis section 2 is different from the X-axis section 1.
7 is provided so that air at the distal end portion in the main body cover 8 can be sucked through the suction duct 17 from an L-shaped suction joint 18 connected to the rear part of the main body cover 8 to the rear suction device side. Make up. Further, a suction port 9c is provided at a rear portion of the main body cover 8, and the suction port 9c is configured to be able to be sucked toward a rear suction device via an L-shaped suction joint 19. 20 is an L-shaped suction joint 1
This is a suction duct hose that connects the suction devices 8 and 19 to the suction device.

As shown in FIGS. 1, 2 (a) and 2 (b), the Y-axis portion 2 covers the periphery of both side walls from the lower surface of the Y-axis portion 2 so as to face the work area 11. A dustproof cover 13 is attached so as to protrude from the Y-axis portion 2. In the above-described configuration, dust is generated from the ball screw portion and the linear motion guide bearing 6 by the reciprocating operation of the slider 7, and the air inside the main body cover 6 contains a large amount of dust. When the slider 7 approaches the moving end, the dusty air gathers near both ends 3a and 3b of the screw portion 3 while being pushed by the slider 7, and the dusty air is collected by the suction device 1.
Due to the suction effect of 2, the air is exhausted out of the clean room through the suction port joint 10, the suction duct 17, the suction duct hoses 11 and 20, and the suction device 12.

That is, when the slider 7 moves to the vicinity of both ends 3a and 3b of the screw portion 3, the air in the body cover 6 is pressed, and the opening 7a of the moving path of the slider 7 is moved.
The air tends to be discharged together with the dust from the suction port 9a, 9b, 9c, 17 provided at the moving end.
It can be prevented by sucking from a. Here, for example, the moving speed of the slider 7 is 1100 mm / s
In the case of (1), if the suction force is 0.65 m ³ / min, good suction can be performed.

In this case, since only the moving end of the slider 7 is suctioned, it is possible to minimize the suction loss. The suction may be performed at all times, but when the number of operations (the number of times the slider 7 is driven) is small, the suction may be performed only when the slider 7 moves to the vicinity of both ends 3a and 3b. In this case, use when unnecessary is suppressed and the efficiency becomes higher. Also, with the movement of the slider 7, the suction ports 9a, 9b to which the slider 7 approaches,
The suction force of only 9c and 17a may be increased, in which case dust can be collected more efficiently, and the slider 7
If the volume is gradually increased or decreased with respect to the movement of the vehicle, the recovery efficiency is further improved.

In general, the suction force in the case of constant suction is preferably the same for both suction ports 9a, 9b, 9c and 17a. The suction force may be kept constant by the control means 16, If a sensor is provided in the ports 9a, 9b, 9c, 17a and the suction force of both the suction ports 9a, 9b, 9c, 17a is maintained at a constant level, suction unevenness is eliminated, and dust can be sucked properly. Movement becomes smooth. Alternatively, when the amount of dust generated is large, it is possible to increase the suction force of the side with more dust, and in this case, it is possible to improve the dust collection rate.

The control of the suction is performed by the control means 16 provided in the suction device 12, but the suction device 12 and the control means 16 at this time are not common to the X-axis portion 1 and the Y-axis portion 2, , May be provided separately. By providing the suction ports 9a, 9b, 9c, 17a only near the moving end of the slider 7 where dust easily occurs,
Suction of dusty air and outside (in a clean room)
The suction device 12 can be used at a low cost and with low energy consumption, while preventing discharge to the outside. Further, the suction ports 9a, 9b, 9c, 17a provided in the X axis section 1 and the Y axis section 2
Since the suction ports 9a, 9b, 9c, 17a and the suction device 12 are directly connected by the suction duct hoses 11, 20, even if the suction condition in the suction device 12 is not particularly controlled, each suction port 9a, 9b , 9c, and 17a, the dust can be sucked at a smaller flow rate than in the related art since the suction diversion is substantially uniform.

As described above, the dustproof cover 13 is attached to the Y-axis portion 2 so as to cover the periphery of both side walls from the lower surface of the Y-axis portion 2 so as to face the work area 11.
When the slider 7 of the X-axis unit 1 moves synchronously with the Y-axis unit 2, air containing dust is temporarily directed to the work area 11 from the opening 7 a of the movement path of the slider 7 of the X-axis unit 1. Even if the air dust is blown out, the dust of the air is blocked by the dustproof cover 13 and is prevented from entering the work area 11. That is, due to the effect of the dust-proof cover 13 provided on the working range 11 side of the slider 7, the dust that could not be completely sucked does not scatter to the working range 11 side but flows to the opposite side to the working range 11.

The Y-axis part 2 is a slider 7 of the X-axis part 1.
For example, as shown in FIG. 2, when the suction duct hose for suction is connected to the side surface of the main body cover as shown in FIG. 2, the suction hose is passed over the working area. As a result, dust may fall from the suction duct hose due to vibrations or the like caused by the operation of the Y-axis portion. However, the Y-axis part 2 of this clean room robot
Since the suction duct hose 19 is connected to the rear of the main body cover 8 unlike the X-axis section 1 in the case of, even if dust falls from the suction duct hose 19, the working range 11
Can be prevented from invading.

[0029]

As described above, according to the present invention, by providing the suction port only near the main body cover or both moving ends where the slider can move within the main body cover, the suction flow rate from the suction port can be properly controlled. The flow rate can be reduced, and dust can be sucked at a smaller flow rate than before,
It is possible to prevent useless energy from being consumed. Also,
Since the structure of the clean room robot of the present invention is very simple, it can be realized by slightly modifying a linear motion (orthogonal) robot or the like for a general environment, and an inexpensive clean room robot can be realized.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the appearance of a clean room robot according to an embodiment of the present invention.

2 (a) and 2 (b) are a cross-sectional plan view showing an X-axis portion of the same clean room robot and a side view as viewed from the direction of arrow A in FIG. 2 (a).

FIG. 3 is a plan sectional view showing a Y-axis portion of the clean room robot.

FIG. 4 is a schematic side sectional view of a conventional robot for a clean room.

5A and 5B are a plan sectional view and a side view of another conventional clean room robot.

FIG. 6 is a partially cutaway perspective view showing the configuration of a ball screw in the conventional clean room robot.

FIG. 7 is a sectional view showing a configuration of a slider and a linear motion guide bearing in the conventional clean room robot.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 X-axis part 2 Y-axis part 3 Ball screw thread part 4 Ball screw nut part 5 Motor 6 Linear guide bearing 7 Slider 8 Main body cover 9a, 9b, 9c, 17a Suction port 10 Suction port joint 11, 20 Suction duct hose DESCRIPTION OF SYMBOLS 12 Suction device 13 Dust-proof cover 14 Working range 15 Working means mounting part 16 Control means 17 Suction duct 18, 19 Suction joint

Claims (6)

[Claims] 1. A motor having a ball screw on an output shaft, a slider that is movable by engaging with the ball screw, a linear guide bearing that guides the slider to move linearly, and covers at least the ball screw and the slider. A clean room robot comprising: a main body cover; and suctioning dust in the main body cover together with air from a suction port, wherein the suction port is moved in both directions in which the slider in the main body cover or the main body cover can move. A clean room robot provided only near the end. 2. A dustproof cover, which is provided at a position facing a work area where an object to be moved by a robot moves, from blocking an air containing dust from flowing into the work area from an opening of a movement path of the slider. The clean room robot according to claim 1, further comprising: 3. The clean room robot according to claim 1, further comprising control means for controlling suction forces from both suction ports to be substantially the same. 4. The clean room robot according to claim 3, further comprising a sensor provided in each of the suction ports, and control means for controlling the suction force from the both suction ports to be substantially the same based on a result from the sensor. 5. The clean room robot according to claim 1, further comprising control means for increasing a suction force of a suction port in a slider moving direction as the slider moves. 6. A motor having a ball screw on an output shaft, a slider engaged with the ball screw and movable in parallel with a work area in which a moving object to be moved by a robot moves, and at least these ball screws. An X-axis portion having a body cover that covers the slider and a slider; a motor integrally fixed to the slider of the X-axis portion, having a ball screw on the output shaft; and a direction orthogonal to the moving direction of the X-axis portion. A clean room, comprising: a Y-axis portion having a slider movable in the Y-axis direction, a body cover for covering at least the ball screw and the slider, and means for holding the moving object attached to the slider of the Y-axis portion. A suction port provided in the body cover of the Y-axis portion at a position facing a tip end of a ball screw which is a moving end of the slider. In addition to providing a girder suction duct, an L-shaped suction joint is connected to a rear portion of the suction duct, and a suction port is also provided on a rear portion of the main body cover of the Y-axis portion. A clean room robot configured to connect a suction joint of a mold and suction from the back of the body cover.