JPH0128675Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is used for semiconductor packages in opener equipment that exposes semiconductor chips sealed in plastic and can be used for inspection during failure analysis or quality checks. The present invention relates to a pump for an opener device that injects a dissolving liquid into a liquid.

[Prior Art] A conventional pump for an opener device has a structure in which a rotary impeller provided in a casing is driven by a drive shaft, and a melting liquid is injected from a nozzle by rotation of the rotary impeller. ing.

[Problems to be solved by the invention] For example, sulfuric acid is used as the dissolving liquid injected in such a pump. In order to improve dissolution efficiency, sulfuric acid is heated to approximately 290°C using a heater.

Therefore, steam is generated within the casing. It was necessary to seal the area around the drive shaft, since if this steam were to flow along the drive shaft to the bearing and drive parts, it could cause failures.

The seal around the drive shaft is generally sealed by a seal member, but as mentioned above, since sulfuric acid is used at high temperatures, heat resistance and acid resistance are required, and the life of the seal member is extremely short.

Therefore, the object of this invention is to provide a pump for an opener device that ensures a stable seal over a long period of time.

[Means for Solving the Problem] In order to achieve the above object, this invention provides a rotary blade wheel within a casing provided with an engine plate, and communicates with the blade wheel chamber of the rotary blade wheel so that the edge A nozzle is provided below the plate, and a drive shaft extending from the rotary impeller and protruding outward from the casing is rotatably supported, and the casing is provided with a seal portion through which air flows around the axis of the drive shaft. It is provided.

[Operation] In such a pump, the dissolving liquid shaken out by the rotary impeller driven by the drive shaft is injected from the nozzle toward the edge plate side.
At this time, the seal portion prevents the steam generated within the casing from escaping toward the drive portion.

[Embodiment] Hereinafter, an embodiment of this invention will be described in detail with reference to the drawings of FIGS. 1 and 2.

In the figure, 1 indicates a casing, and the casing 1 is made of a heat-resistant and acid-resistant material.

The upper part 3 of the casing 1 is provided with an edge plate 7 on which a semiconductor 5 is set, and an intake port 11 leading to a sulfuric acid storage layer 9. The sulfuric acid in the sulfuric acid storage layer 9 is fed into the casing 1 by opening a control valve (not shown) when the sulfuric acid in the casing 1 completes its work and is discharged.

The sulfuric acid in the casing 1 fed through the intake port 11 is heated to about 290° C. by the heater 13.
The power source 15 of the heater 13 is controlled by a temperature sensor (not shown) so that the temperature of the sulfuric acid is approximately 290°C.

On the other hand, at the bottom of the casing 1, a partition wall 17 forms a blade wheel chamber 21 in which the rotary wheel 19 is housed. A discharge section 23 for sending out is provided. Further, the impeller chamber 21 communicates with a nozzle 25 disposed below the edge plate 7.

The rotary impeller 19 is made of a heat-resistant and acid-resistant material, and has the function of sending out the dissolving liquid to the nozzle 25 side by high-speed rotation of the impeller 19. Installation is supported.

The drive shaft 29 is connected to the partition wall 17 from the rotor wheel 19.
It extends through the opening 17a of the casing 1, passes through the upper part 3 of the casing 1, and is rotatably supported in the upper part 3 of the casing 1 by a bearing 31 such as a bearing. A pulley 33 is provided at the shaft end of the drive shaft 29 extending from the bearing 31, and the pulley 33 is connected to the pulley 35 of the motor 27 via a transmission belt 37.

Further, the casing 1 through which the drive shaft 29 passes
A seal portion 39 is provided in the holder.

The seal portion 39 is provided with a passage 41 through which air flows around the drive shaft 29 . aisle 4
One end of the air pump 1 is connected and communicated with the discharge port 47 of the air pump 45 through the suction port 43 . Also, passage 41
The other end is open to the outside, and air from the suction port 43 passes through the passage 41 and escapes into the atmosphere.

Note that 49 indicates a control valve that releases steam generated within the casing 1 into the atmosphere.

In the pump configured in this way, the rotation of the rotary impeller 19 causes the hot sulfuric acid in the impeller chamber 21 to flow through the nozzle 2.
5 and is injected toward the edge plate 7 side. As a result, the semiconductor 5 set on the edge plate 7
The package is dissolved. The injection continues until the tip is exposed.

On the other hand, the seal portion 39 prevents steam generated within the casing 1 from escaping toward the bearing 31 side. As a result, the bearing 31 is not affected by steam, and the drive shaft 29 can rotate stably for a long period of time.

[Effects of the invention] As explained above, according to the pump of the opener device of this invention, the area around the drive shaft is sealed by air, so it can be used for a long period of time even in places where heat resistance and acid resistance are required. This ensures a stable seal. Furthermore, since there is no seal resistance, it is very preferable on rotating surfaces.

[Brief explanation of drawings]

FIG. 1 is a schematic cross-sectional view showing the opener device of this invention, and FIG. 2 is a plan view of the same. Explanation of main drawing symbols, 1...Casing, 7
...Edge plate, 19...Rotor wheel, 21...
...Blade wheel chamber, 25...Nozzle, 29...Drive shaft, 3
9...Seal part.

Claims (1)

[Scope of utility model registration request] A rotary impeller is provided within a casing provided with an edge plate, and a nozzle is provided below the edge plate in communication with the impeller chamber of the rotary impeller, and a drive extending from the rotary impeller and protruding outward from the casing. A pump for an opener device, characterized in that the shaft is rotatably supported, and the casing is provided with a seal portion through which air flows around the drive shaft.