JPH01286478A - Beam uniformizing optical system and manufacture thereof - Google Patents
Beam uniformizing optical system and manufacture thereofInfo
- Publication number
- JPH01286478A JPH01286478A JP63114681A JP11468188A JPH01286478A JP H01286478 A JPH01286478 A JP H01286478A JP 63114681 A JP63114681 A JP 63114681A JP 11468188 A JP11468188 A JP 11468188A JP H01286478 A JPH01286478 A JP H01286478A
- Authority
- JP
- Japan
- Prior art keywords
- light
- fly
- lens
- eye lens
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 13
- 230000004907 flux Effects 0.000 abstract description 3
- 238000009827 uniform distribution Methods 0.000 abstract 2
- 230000000903 blocking effect Effects 0.000 abstract 1
- 238000012421 spiking Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70941—Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は照明光学系に係り、特に、レーザビームを光源
とし、フライアイレンズと集光レンズを用いて光束の強
度分布の均一化を図るビーム均一化光学系に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an illumination optical system, and in particular, uses a laser beam as a light source and uses a fly-eye lens and a condensing lens to uniformize the intensity distribution of the luminous flux. It relates to a beam homogenizing optical system.
〔従来の技術］
エキシマレーザからのビームのような中心軸に対して対
称な強度分布を持つ光ビームから均一な強度分布（例は
矩形の強度分布）を持つ光束を得るためには、特開昭６
２−９２９１３号公報に記載のように、フライアイレン
ズと集光レンズの組合せによる照明光学系が用いられる
。[Prior Art] In order to obtain a luminous flux having a uniform intensity distribution (for example, a rectangular intensity distribution) from a light beam having an intensity distribution symmetrical about the central axis, such as a beam from an excimer laser, it is necessary to Showa 6
As described in Japanese Patent No. 2-92913, an illumination optical system is used which is a combination of a fly's eye lens and a condensing lens.
上記従来技術では、フライアイレンズは、光源となるレ
ーザビームの径よりも十分小さい径の要素レンズを多数
集合したものにより構成される。In the above-mentioned conventional technology, the fly's eye lens is configured by a collection of a large number of element lenses each having a diameter sufficiently smaller than the diameter of a laser beam serving as a light source.
このようなフライアイレンズでは、その要素レンズ間の
境界に照射されたレーザ光は、要素レンズの端部で散乱
されたり、境界からの漏れなどにより迷光となる。これ
らの迷光は集光レンズにより微小点に集光され、照射面
において、局部的な強度分布の不均一（スパイク状の光
）を生じるという問題があった。In such a fly's eye lens, laser light irradiated onto the boundaries between the element lenses becomes stray light due to scattering at the ends of the element lenses or leakage from the boundaries. There is a problem in that these stray lights are condensed into a minute point by a condensing lens, causing local unevenness in the intensity distribution (spike-like light) on the irradiation surface.
本発明の目的は、迷光による局部的な強度分布の不均一
を生じないビーム均一化光学系を提供することにある。An object of the present invention is to provide a beam homogenizing optical system that does not cause local unevenness in intensity distribution due to stray light.
本発明のビーム均一化光学系は、フライアイレンズの境
界面と集光面とに対応する遮蔽部と透過孔とを有する遮
光板を、フライアイレンズの出射側に配置することにあ
る。The beam-uniforming optical system of the present invention is characterized in that a light-shielding plate having a shielding portion and a transmission hole corresponding to the boundary surface and the condensing surface of the fly-eye lens is disposed on the exit side of the fly-eye lens.
この結果、境界面および集光面から迷光および集光が出
射される。迷光は遮蔽部により阻止され、集光のみが透
過孔を通過するので、均一なレーザビームを得ることが
できる。As a result, stray light and condensed light are emitted from the boundary surface and the condensing surface. Since stray light is blocked by the shielding part and only the focused light passes through the transmission hole, a uniform laser beam can be obtained.
以下１本発明の実施例を第１図（ａ）ないしくｄ）によ
り説明する。An embodiment of the present invention will be described below with reference to FIGS. 1(a) to d).
エキシマレーザ発振器からのレーザ光１は、平行光線と
なり、フライアイレンズ２に入射する。A laser beam 1 from an excimer laser oscillator becomes a parallel beam and enters a fly's eye lens 2.
レーザ光１の強度分布は、同図（ｂ）に示すように、中
心に対してほぼ対称な分布となっている。The intensity distribution of the laser beam 1 is approximately symmetrical with respect to the center, as shown in FIG. 2(b).
フライアイレンズ２は同一形状（第１図（ａ）では四角
柱）、同一焦点距離の要素レンズ２ａを多数集合して構
成されている。フライアイレンズ２に入射したレーザ光
１は、集光面である要素レンズ２ａの大きさに分割され
、その出射光側において、それぞれ、微小な空間に集光
されて、多数の２次点光源３を形成する。一方、フライ
アイレンズ２の境界２ｂで生じた迷光４は集光されずに
進む、光源３および迷光４は遮光板５に入射する。The fly's eye lens 2 is composed of a large number of lens elements 2a having the same shape (a square prism in FIG. 1(a)) and the same focal length. The laser beam 1 incident on the fly's eye lens 2 is divided into the sizes of the element lenses 2a, which are condensing surfaces, and each is condensed into a minute space on the outgoing light side to form a large number of secondary point light sources. form 3. On the other hand, the stray light 4 generated at the boundary 2b of the fly's eye lens 2 travels without being condensed, and the light source 3 and the stray light 4 enter the light shielding plate 5.
遮光板５は光源３および迷光４と対応する個所に透過孔
５Ａおよび遮蔽部５Ｂを形成している。The light shielding plate 5 has transmission holes 5A and shielding portions 5B formed at locations corresponding to the light source 3 and the stray light 4.
この形成方法は、銅板の一方面に黒色又は白色のコーテ
ィングを施した後、コーティング面よりある程度層した
位置にフライアイレンズを設置し、フライアイレンズに
レーザ光又は光を照射し、その出射光をコーティング面
に照射すれば、各要素レンズの焦点光がコーティング面
に照射され、コーティング面を焼いて印しか付くので、
この印個所を機械的又は化学的に透過孔を形成し、透過
孔以外は遮蔽部を形成していることになる。遮光板５は
微調整機構部６に支持されている。微調整機構部６は遮
光板５を矢印で示すＸ、Ｙ方向に移動するようにして、
集光３および迷光４が透過孔５Ａおよび遮蔽部５Ｂに対
応するように微調整できるように構成されている。透過
孔５Ａを通過した光は集光レンズ７によって集光され、
被照射面８においてそれぞれ重ね合されて同図（ｄ）の
ような均一な強度分布を持つ光束１０を形成する。This formation method involves applying a black or white coating to one side of a copper plate, then installing a fly-eye lens at a position a certain distance from the coated surface, irradiating the fly-eye lens with a laser beam or light, and emitting the light. When irradiated onto the coating surface, the focused light of each element lens will be irradiated onto the coating surface, burning the coating surface and leaving a mark.
Transmission holes are formed mechanically or chemically at the marked locations, and the areas other than the transmission holes form shielding parts. The light shielding plate 5 is supported by a fine adjustment mechanism section 6. The fine adjustment mechanism section 6 moves the light shielding plate 5 in the X and Y directions shown by the arrows.
It is configured such that the light condensing light 3 and the stray light 4 can be finely adjusted to correspond to the transmission hole 5A and the shielding part 5B. The light passing through the transmission hole 5A is condensed by the condenser lens 7,
They are superimposed on each other on the irradiated surface 8 to form a light beam 10 having a uniform intensity distribution as shown in FIG. 2(d).
この構成では、要素レンズ２ａの集光面および境界２ｂ
から集光３および迷光４を出射する。集光３は透過孔５
Ａを通過するが、迷光４は遮蔽部５Ｂにより阻止される
。もし、迷光４が阻止されないで、被照射面８を照射す
れば、同図（ｅ）に示すようなスパイク状の光１１を生
じるが、この迷光４を遮蔽部５Ｂで阻止することにより
、集光３のみが透過孔５Ａを通過し、被照射面８に照射
されるので、同図（ｄ）に示すような均一な強度分布の
レーザ光を得ることができる。したがって、本発明のレ
ーザ光で被加工物をたとえば焼入れする時に均一な硬さ
の焼入れが出来る。In this configuration, the condensing surface of the element lens 2a and the boundary 2b
A condensed light 3 and a stray light 4 are emitted from the light source. Light condensing 3 is transmission hole 5
However, the stray light 4 is blocked by the shielding part 5B. If the stray light 4 is not blocked and irradiates the irradiated surface 8, a spike-shaped light 11 as shown in FIG. Since only the light 3 passes through the transmission hole 5A and is irradiated onto the irradiated surface 8, it is possible to obtain laser light with a uniform intensity distribution as shown in FIG. Therefore, when a workpiece is hardened using the laser beam of the present invention, it is possible to harden the workpiece to a uniform hardness.
次に、第２図に示す実施例は、複数個の要素レンズ２ａ
を支持部材２０で一体に支持してフライアイレンズ２を
形成する。フライアイレンズ２の出射側の支持部材２０
を突出し、この突出部に遮光板５を取付ける。遮光板５
には透過孔５Ａおよび遮蔽部５Ｂを設けである。このた
め、上述の遮光板５をフライアイレンズ２に対して正確
に配置するためには微調機構９を必要としたが、この実
施例の遮光板５は、フライアイレンズ２に固定すること
により解決できる。フライアイレンズ２に対する遮光板
５の位置は、計算により、又はＨｅ−Ｎｅレーザ等の可
視光を利用した実験により容易に決定できる。Next, the embodiment shown in FIG. 2 has a plurality of element lenses 2a.
are integrally supported by a support member 20 to form a fly's eye lens 2. Support member 20 on the exit side of the fly eye lens 2
is projected, and the light shielding plate 5 is attached to this projection. Light shielding plate 5
A transmission hole 5A and a shielding part 5B are provided in the hole. Therefore, the fine adjustment mechanism 9 was required to accurately position the light shielding plate 5 with respect to the fly's eye lens 2, but the light shielding plate 5 of this embodiment can be fixed to the fly's eye lens 2. Solvable. The position of the light shielding plate 5 with respect to the fly's eye lens 2 can be easily determined by calculation or by experiment using visible light such as a He-Ne laser.
第３図の実施例は、集光レンズ７とフライアイレンズ２
の位置が逆の場合である。この場合、フライアイレンズ
２による２次点光源３のできる位置は、要素レンズ２ａ
の間隔と同じにならないが。The embodiment shown in FIG. 3 has a condensing lens 7 and a fly-eye lens 2.
This is the case when the positions of are reversed. In this case, the position where the secondary point light source 3 is formed by the fly-eye lens 2 is the element lens 2a.
Although the interval is not the same as that of .
その位置は、要素レンズ２ａの間隔、及び焦点距離、集
光レンズ７の焦点距離等から計算できる。The position can be calculated from the distance between the element lenses 2a, the focal length, the focal length of the condenser lens 7, etc.
又、可視光を用いた実験からも知ることができる。It can also be learned from experiments using visible light.
遮光板５に当った光は反射されると迷光となる事がある
ため、吸収されることが望ましい。又。Since the light hitting the light shielding plate 5 may become stray light if reflected, it is desirable that the light be absorbed. or.
遮光板５には、集光した光を通過させる空間の加 。The light shielding plate 5 is provided with a space that allows the collected light to pass through.
工などの微細加工が要求される。さらに吸収した光を熱
として放熱するため、熱伝導が良い事が要求される。こ
れらの要求を考慮すると遮光板５の材質としては銅板が
適していた。遮光板５を銅板で製作することにより、迷
光の発生を低減でき。Microfabrication such as machining is required. Furthermore, since the absorbed light is radiated as heat, it is required to have good thermal conductivity. Considering these requirements, a copper plate was suitable as the material for the light shielding plate 5. By making the light shielding plate 5 from a copper plate, the generation of stray light can be reduced.
又、安価に製作できるという効果がある。Moreover, it has the effect of being able to be manufactured at low cost.
遮光板５の製作方法は、銅板又は銅板上に施した黒色コ
ーティング面に、フライアイレンズ２の出射光を照射し
て、印をした後、印個所に透過孔５Ａを形成すれば、遮
蔽部５Ｂも同時に出来るので製作が容易であるばかりで
なく、また透過孔５Ａは各要素レンズ２ａからの出射光
を照射した個所に形成するので、正確に透過孔５Ａおよ
び遮蔽部５Ｂとを形成できる。The method for manufacturing the light shielding plate 5 is to irradiate a copper plate or a black coating surface on a copper plate with the light emitted from the fly's eye lens 2 to mark a mark, and then form a transmission hole 5A at the marked location, thereby forming a shielding part. 5B can be formed at the same time, making it easy to manufacture. Furthermore, since the transmission holes 5A are formed at the locations irradiated with the light emitted from each element lens 2a, the transmission holes 5A and the shielding portions 5B can be formed accurately.
本発明によれば、フライアイレンズで生じる迷光を除去
できるので、迷光による局部的な強度分布の不均一をな
くし、均一なレーザ光を得ることができる。According to the present invention, since stray light generated by a fly's eye lens can be removed, local unevenness in intensity distribution due to stray light can be eliminated and uniform laser light can be obtained.
第１図（ａ）は本発明の実施例であるビーム均一化光学
系の構成図、同図（ｂ）は同図（ａ）の遮光板の側断面
、同図（ｃ）ないし同図（ｄ）は同図（ａ）のレーザ光
の強度分布特性図、同図（８）は従来のレーザ光の強度
分布特性図、第２図は本発明の別の実施例として示した
フライアイレンズの支持部材の側断面図、第３図は本発
明の別の実施例として示したビーム均一化光学系の構成
図である。
２・・・フライアイレンズ、２ａ・・・要素レンズ、２
ｂ・・・境界、５・・・遮光板、５Ａ・・・透過孔、５
Ｂ・・・遮蔽部。FIG. 1(a) is a block diagram of a beam uniformizing optical system according to an embodiment of the present invention, FIG. 1(b) is a side cross-section of the light shielding plate in FIG. 1(a), and FIG. d) is a characteristic diagram of the intensity distribution of the laser beam shown in (a) of the same figure, (8) is a characteristic diagram of the intensity distribution of the conventional laser beam, and FIG. 2 is a fly-eye lens shown as another embodiment of the present invention. FIG. 3 is a side cross-sectional view of the support member of FIG. 2...Fly eye lens, 2a...Element lens, 2
b... Boundary, 5... Light shielding plate, 5A... Transmission hole, 5
B... Shielding part.
Claims (1)
レンズと、フライアイレンズからの光を集光する集光レ
ンズと、集光レンズからの複数の光を照射面上に重ね合
せる被照射面とを備えた光学系において、要素レンズと
要素レンズとの間の境界と要素レンズとに対応する遮蔽
部と透過孔とを形成した遮光板を、フライアイレンズの
出射側に設置することを特徴とするビーム均一化光学系
。 ２、要素レンズと要素レンズとの間の境界と要素レンズ
とに対応する遮蔽部と透過孔とを形成した遮光板を、フ
ライアイレンズと集光レンズとの間に配置することを特
徴とする特許請求の範囲第１項記載のビーム均一化光学
系。 ３、要素レンズと要素レンズとの間の境界と要素レンズ
とに対応する遮蔽部と透過孔とを形成した遮光板を、集
光レンズとフライアイレンズとの間に配置し、集光レン
ズの設置位置をフライアイレンズの入射側に配置するこ
とを特徴とする特許請求の範囲第１項記載のビーム均一
化光学系。 ４、複数個の要素レンズを支持部材で一体に支持してフ
ライアイレンズを形成し、フライアイレンズの出射側に
支持部材を突出し、この突出部に遮光板を取付け、この
遮光板に要素レンズと要素レンズとの間の境界と要素レ
ンズとに対応した遮蔽部と透過孔とを形成することを特
徴とする特許請求の範囲第１項記載のビーム均一化光学
系。 ５、上記遮光板を移動させる微調整機構部に遮光板を支
持することを特徴とする特許請求の範囲第１項ないし第
４項記載のビーム均一化光学系。 ６、上記遮光板を銅部材で形成することを特徴とする特
許請求の範囲第１項ないし第４項記載のビーム均一化光
学系。 ７、複数個の要素レンズを組合せて構成したフライアイ
レンズと、フライアイレンズからの光を集光する集光レ
ンズと、集光レンズからの複数の光を照射面上に重ね合
せる被照射面とを備えた光学系の製造方法において、レ
ーザ光を反射される板部材上にコーティングを施し、コ
ーティング面上にフライアイレンズを配置し、フライア
イレンズからの出射光をコーティング面に照射して印を
形成し、印個所に透過孔を、それに以外に遮蔽部を、そ
れぞれ設け、遮光板を形成することを特徴とするビーム
均一化光学系の製造法。 ８、レーザ光を反射される板部材上にフライアイレンズ
を配置し、フライアイレンズからの出射光を板部材面に
照射して印を形成し、印個所に透過孔を、それ以外に遮
蔽部を、それぞれ設け、遮光板を形成することを特徴と
する特許請求の範囲第８項記載のビーム均一化光学系の
製造方法。 ９、上記板部材に銅部材を使用することを特徴とする特
許請求の範囲第７項ないし第８項記載のビーム均一化光
学系の製造法。[Claims] 1. A fly-eye lens configured by combining a plurality of element lenses, a condenser lens that condenses light from the fly-eye lens, and a condenser lens that directs the plurality of lights from the condenser lens onto an irradiation surface. In an optical system equipped with an irradiated surface that is superimposed on an irradiated surface, a light shielding plate having a shielding part and a transmission hole corresponding to the boundary between the element lenses and the element lenses is placed on the exit side of the fly's eye lens. A beam homogenizing optical system characterized by being installed in. 2. A light shielding plate having a shielding portion and a transmission hole corresponding to the boundary between the element lenses and the element lens is disposed between the fly eye lens and the condensing lens. A beam homogenizing optical system according to claim 1. 3. A light shielding plate having a shielding part and a transmission hole corresponding to the boundary between the element lenses and the element lens is placed between the condenser lens and the fly's eye lens, and 2. The beam homogenizing optical system according to claim 1, wherein the installation position is located on the incident side of the fly's eye lens. 4. A fly-eye lens is formed by integrally supporting a plurality of element lenses with a support member, the support member is protruded from the emission side of the fly-eye lens, a light-shielding plate is attached to this protrusion, and the element lens is attached to this light-shielding plate. 2. The beam homogenizing optical system according to claim 1, wherein a shielding portion and a transmission hole are formed corresponding to the boundary between the element lens and the element lens. 5. The beam homogenizing optical system according to any one of claims 1 to 4, characterized in that the light shielding plate is supported by a fine adjustment mechanism for moving the light shielding plate. 6. The beam uniformizing optical system according to any one of claims 1 to 4, wherein the light shielding plate is made of a copper member. 7. A fly-eye lens configured by combining multiple element lenses, a condenser lens that condenses light from the fly-eye lens, and an irradiated surface that superimposes multiple lights from the condenser lens on the irradiation surface. In a method of manufacturing an optical system, a coating is applied to a plate member that reflects laser light, a fly-eye lens is placed on the coated surface, and the light emitted from the fly-eye lens is irradiated onto the coated surface. 1. A method for manufacturing a beam uniformizing optical system, which comprises forming a mark, providing a transmission hole at the mark location, and providing a shielding portion in other areas to form a light shielding plate. 8. Place a fly-eye lens on the plate member where the laser beam is reflected, and form a mark by irradiating the light emitted from the fly-eye lens onto the plate member surface, and create a transmission hole at the mark location and shield the rest. 9. The method of manufacturing a beam uniformizing optical system according to claim 8, wherein a light shielding plate is formed by providing a light shielding plate. 9. A method for manufacturing a beam uniformizing optical system according to claims 7 to 8, wherein a copper member is used for the plate member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63114681A JPH01286478A (en) | 1988-05-13 | 1988-05-13 | Beam uniformizing optical system and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63114681A JPH01286478A (en) | 1988-05-13 | 1988-05-13 | Beam uniformizing optical system and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01286478A true JPH01286478A (en) | 1989-11-17 |
Family
ID=14643975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63114681A Pending JPH01286478A (en) | 1988-05-13 | 1988-05-13 | Beam uniformizing optical system and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01286478A (en) |
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- 1988-05-13 JP JP63114681A patent/JPH01286478A/en active Pending
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