JPH01282446A - Measurement of transmissivity - Google Patents
Measurement of transmissivityInfo
- Publication number
- JPH01282446A JPH01282446A JP11097488A JP11097488A JPH01282446A JP H01282446 A JPH01282446 A JP H01282446A JP 11097488 A JP11097488 A JP 11097488A JP 11097488 A JP11097488 A JP 11097488A JP H01282446 A JPH01282446 A JP H01282446A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- image data
- transmittance
- measuring method
- transmittance measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title abstract description 15
- 238000002834 transmittance Methods 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 16
- 238000005286 illumination Methods 0.000 claims description 13
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000000691 measurement method Methods 0.000 claims description 8
- 238000012937 correction Methods 0.000 claims description 2
- 238000009499 grossing Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光透過性を持つ物品の光透過率やその分布、周
期開口を持つ工業製品、例えばシャドーマスク、メツシ
ュ、布等の開口率やその分布を測定する透過率測定方法
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the light transmittance and its distribution of light-transmitting articles, the aperture ratio and the like of industrial products with periodic apertures, such as shadow masks, meshes, cloth, etc. This invention relates to a transmittance measurement method for measuring the distribution.
従来、光透過性を持つ物品の光透過率やその分布、シャ
ドーマスク、メツシュ、布等の周期開口を持つ工業製品
の開口率やその分布の測定には、第５図に示すように投
光器４３からの照射光を受光器４１で受光するように構
成し、試料を介在させた場合と介在させない場合、また
は遮光状態での受光器出力をもとにして光透過率を測定
していた。Conventionally, in order to measure the light transmittance and its distribution of light-transmitting articles, and the aperture ratio and its distribution of industrial products with periodic apertures such as shadow masks, meshes, and cloth, a projector 43 is used as shown in FIG. The light transmittance was measured based on the output of the light receiver with and without a sample intervening, or in a light shielded state.
ところで、例えば第６図に示すように、ブラウン管に使
用されているシャドーマスクの透過率を測定するような
場合には、本来、ブラウン管内でのビーム方向で透過率
の測定を行う必要があるが、投受光器のセントで測定し
ようとすると、第７図に示すように投受光器を角度をつ
けてとり付ける必要があり、そのため構造が複雑になる
いう問題があった。また、従来の測定方法では、一対の
検出部と試料を相対的に移動すれば任意位置のデータを
得ることができるが、測定点が多い場合には移動を繰り
返すため測定に時間がかかり、また多数の検出器を用い
ると、測定時間は短縮できたとしても装置が高価になる
と共に、測定点が固定されるという問題があった。By the way, as shown in Figure 6, for example, when measuring the transmittance of a shadow mask used in a cathode ray tube, it is originally necessary to measure the transmittance in the beam direction inside the cathode ray tube. When attempting to measure using the center of the light emitter and receiver, it is necessary to attach the light emitter and receiver at an angle as shown in FIG. 7, which poses a problem in that the structure becomes complicated. In addition, with conventional measurement methods, it is possible to obtain data at any position by moving a pair of detection parts and the sample relatively, but if there are many measurement points, it takes time to repeat the movement, and If a large number of detectors are used, even if the measurement time can be shortened, there are problems in that the equipment becomes expensive and the measurement points are fixed.
本発明は上記問題点を解決するためのもので、短時間に
任意の位置の透過率を測定できる透過率測定方法を提供
することを目的とする。The present invention is intended to solve the above-mentioned problems, and an object of the present invention is to provide a transmittance measuring method that can measure transmittance at an arbitrary position in a short time.
そのために本発明の透過率測定方法は、冷却型ＣＣＤカ
メラなどを用い、試料なしで照明部を撮像した画像デー
タと、試料を置いて撮像した画像データとに基づいて試
料の透過率を測定することを特徴とする。To this end, the transmittance measurement method of the present invention uses a cooled CCD camera or the like to measure the transmittance of a sample based on image data taken of the illumination section without the sample and image data taken with the sample placed. It is characterized by
本発明の透過率測定方法は、電子冷却方式等により冷却
して暗電流やノイズを無視できる程度まで大幅に減少さ
せ、暗い領域での長時間露光が可能で、積算光量に対す
る映像信号の直線性が良い冷却型ＣＣＤカメラやイメー
ジディセクタにより面露光により試料がある場合とない
場合の撮像画像データを得、これらの画像データの演算
により短時間に任意の位置の透過率を測定することがで
きる。The transmittance measurement method of the present invention uses electronic cooling to significantly reduce dark current and noise to a negligible level, enables long-term exposure in dark areas, and provides linearity of the video signal with respect to the integrated light amount. By using a cooled CCD camera or image dissector, which has good surface exposure, we can obtain captured image data with and without a sample, and by calculating these image data, we can measure the transmittance at any position in a short time. .
以下、実施例を図面に基づき説明する。 Examples will be described below based on the drawings.
第１図は本発明の一実施例を示す図で、図中、１は冷却
型ＣＣＤカメラ、２は画像処理装置、３はレンズ、４は
シャッタ、５はシャッタ駆動装置、６は試料、７は照明
装置、８は’ｉｓである。FIG. 1 is a diagram showing an embodiment of the present invention, in which 1 is a cooled CCD camera, 2 is an image processing device, 3 is a lens, 4 is a shutter, 5 is a shutter drive device, 6 is a sample, and 7 is a lighting device, and 8 is 'is'.
冷却型ＣＣＤカメラ１は、電子冷却方式等により冷却し
て暗電゛流やノイズを無視できる程度まで大幅に減少さ
せ、暗い領域での長時間露光が可能なＣＣＤカメラで、
積算光量に対する映像信号の直線性が良好であることが
特徴であり、従来の高感度テレビカメラでも映し出せな
かった暗い領域を高画質で鮮明に写し出すことができ、
１画素・１秒間当たり数個オーダーの光子まで検出する
ことが可能である。The cooled CCD camera 1 is a CCD camera that is cooled using an electronic cooling method or the like to significantly reduce dark current and noise to a negligible level, and is capable of long-time exposure in dark areas.
It is characterized by good linearity of the video signal with respect to the integrated light amount, and can clearly capture dark areas with high image quality that could not be captured even with conventional high-sensitivity TV cameras.
It is possible to detect up to several photons per pixel per second.
このようなＣＣＤカメラ１を使用し、電源８で駆動され
る照明装置７により試料６を照射し、その透過光をレン
ズ３を介して結像させている。Using such a CCD camera 1, a sample 6 is irradiated by an illumination device 7 driven by a power source 8, and the transmitted light is formed into an image through a lens 3.
このとき、試料なしで撮像した画像データを１６、試料
を入れて撮像した画像データをＩ、シャッター４を閉じ
て撮像した画像データを１０とすると、試料上の点の透
過率Ｔは、
Ｉｔ−１゜
として計算できる。ここで■、Ｉｏ、ＩＩは対応する位
置の画像データであり、シャッター閉（光１−０）のと
きの画像データが無視できれば、Ｔ＝Ｉ／Ｉ。At this time, if the image data taken without the sample is 16, the image data taken with the sample in is I, and the image data taken with the shutter 4 closed is 10, then the transmittance T of a point on the sample is It- It can be calculated as 1°. Here, ■, Io, and II are image data at corresponding positions, and if the image data when the shutter is closed (light 1-0) can be ignored, then T=I/I.
として透過率が得られる。この演算は画像処理装匿２に
より各画像データをフレームメモリに記憶した後、画面
間演算で行うことができる。そして、ＣＣＤカメラの画
素数が５１２Ｘ５＋２とすれば、この演算で約２５万点
の透過率データが得られることになる。The transmittance is obtained as . This calculation can be performed by inter-screen calculation after each image data is stored in the frame memory by the image processing device 2. If the number of pixels of the CCD camera is 512×5+2, this calculation will yield transmittance data of approximately 250,000 points.
ところで、第１図の透過率測定方法では、−画素毎のデ
ータのバラツキがそのままデータに影響を与えるため高
精度の測定を行うためには測定点を中心とする小領域の
画像データ、例えば５Ｘ５ｐｉＸ”１ＯＸｌＯｐ ｉ
ｘなどの平均値を演算する必要がある。測定点が限られ
ている場合には、ＣＰＵによる処理でも演算に要する時
間は少なくてすむが、測定点が多くなるとＣＰＵによる
処理では多くの時間を要するので、その場合には透過率
データが得られたフレームメモリに画像処理の１ｆｉＩ
ｉである平滑フィルタ処理を行った後、所定の画像デー
タを読み出すようにすれば高速化することが可能となる
。By the way, in the transmittance measurement method shown in Fig. 1, - Variations in data for each pixel directly affect the data, so in order to perform high-precision measurement, image data of a small area centered around the measurement point, for example 5 x 5 pi ”1OXlOp i
It is necessary to calculate the average value of x, etc. If the number of measurement points is limited, the time required for calculation by the CPU can be reduced, but if the number of measurement points is large, the processing by the CPU will require a lot of time. 1fiI of image processing in the frame memory
If predetermined image data is read out after performing the smoothing filter process i, it is possible to increase the speed.
前述したように、冷却型ＣＣＤは積算光量に対する映像
信号の直線性が良好であることが特徴であるが、透過−
９の低い試料を測定する場合には、試ネ４なしで撮像し
た画像データ１１をｍａｘに近い値に設定しても試料を
入れて撮像した画像データＩの値が小さくなり直線性の
僅かな誤差や暗電流などが透過率偵に影響する。As mentioned above, the cooled CCD is characterized by good linearity of the video signal with respect to the integrated light amount, but the transmission -
When measuring a sample with a low value of 9, even if the image data 11 taken without the sample 4 is set to a value close to max, the value of the image data I taken with the sample will be small, resulting in slight linearity. Errors, dark current, etc. affect transmittance.
このため、！及び■、を撮像するときに、これらの二つ
の画像データレヘルがほぼ等しく、十分な大きさを持つ
ように撮像した方が精度の高い結果が得られ、その場合
画像処理には、補正演算が必要となる。For this reason,! When capturing images of becomes.
そのための一つの方法として１１撮像時の露光時間が、
Ｉの時の１／Ｔとなる様にシャッタを動作させてＩと１
．をほぼ同じ値とすることが可能である。One way to do this is to set the exposure time during image capture in 11.
Operate the shutter so that it becomes 1/T when I and 1.
．． It is possible to have almost the same value.
しかし、メカシャフタには、動作時間のバラツキがある
ため、特にシャフタ開時間が短い場合には誤差が大きく
なる欠点があり、この誤差が無視できない場合には、シ
ャツタ開時間を測定し、その値によりデータを補正すれ
ば良い。However, mechanical shutters have the disadvantage that the operating time varies, so the error becomes large, especially when the shutter opening time is short. If this error cannot be ignored, measure the shutter opening time and use the value. Just correct the data.
第２図はこれを実現するための本発明の一実施例を示す
図であり、第１図と同一番号は同一内容を示している。FIG. 2 is a diagram showing an embodiment of the present invention for realizing this, and the same numbers as in FIG. 1 indicate the same contents.
なお、図中、９はハーフミラ−１１０は光センサ、１１
は測定装置である。In addition, in the figure, 9 is a half mirror, 110 is an optical sensor, 11
is a measuring device.
本実施例では、ハーフミラ−９により撮像時の光の一部
をセンサｌＯで検出し、検出信号が得られている時間を
測定装置１１で測定することにより露光時間を求める。In this embodiment, a sensor 10 detects a part of the light when an image is captured by the half mirror 9, and the exposure time is determined by measuring the time during which a detection signal is obtained using the measuring device 11.
こうして求めた露光時間によりデータを補正し、Ｉと１
１の二つの画像データレヘルをほぼ等しくすることがで
きる。The data is corrected using the exposure time obtained in this way, and I and 1
The two image data levels of 1 can be made approximately equal.
また、冷却型ＣＯＤの蓄積時間を変化させ、例えば試料
を入れて撮像した画像データｌの方を長くしてＩと１１
のレベルを等しくしてもよい。この場合、時間の設定は
十分な精度で行えるが、光透過率が低い場合、Ｉｔ を
撮像する時間がＩの時の１／Ｔ倍であるため、例えば透
過率が０．１％程度のときには１０００倍の時間を必要
とすることになる。In addition, by changing the storage time of the cooling type COD, for example, the image data l captured with the sample inserted is longer than the image data I and 11.
may have the same level. In this case, the time can be set with sufficient accuracy, but if the light transmittance is low, the time to image It is 1/T times that of I, so for example, if the transmittance is about 0.1%, This would require 1000 times more time.
またＩと１１の撮像時に光源の明るさを変えても同様な
結果を得ることができる。Further, similar results can be obtained by changing the brightness of the light source when imaging I and 11.
第５図、第７図で示した従来の投受光器を用いる方法で
は、測定点が限られているため、シャドーマスクなど、
所定形状の試料の決められた位置の透過率データを求め
るためには、測定系に対して、試料を位置決めした上で
測定しなければならなかった。これに対し、本発明の方
法では透過率データが高分解能の画像データとして得ら
れるため、この画像データを処理して試料の位置や回転
などを自動的に認識して、所定位置のデータを得ること
ができ容易に自動測定化が可能である。また測定対称品
種の変更も、メカ調整なしでプログラムの変更だけで対
応できる。In the conventional method using a light emitter/receiver shown in Figs. 5 and 7, measurement points are limited, so shadow masks, etc.
In order to obtain transmittance data at a predetermined position of a sample having a predetermined shape, the sample must be positioned with respect to the measurement system and then measured. In contrast, in the method of the present invention, transmittance data is obtained as high-resolution image data, and this image data is processed to automatically recognize the position and rotation of the sample to obtain data at a predetermined position. This allows for easy automatic measurement. In addition, changes in the product to be measured can be handled simply by changing the program without mechanical adjustment.
第３図は照明光の変動、バラツキ、ドリフト等の測定値
の変化が問題となる場合の測定方法を示す図である。FIG. 3 is a diagram showing a measurement method when changes in measured values such as fluctuations, variations, and drifts of illumination light pose a problem.
本実施例では、試料６に対して照明装置７による視野２
１を図示するように大きくとり、撮像領域に試料によっ
て遮られない部分がある様にしてその領域に透過率が一
定の基（板２２を配置し、各撮像データ毎に基！！板の
画像データを読み出すようにすれば、例えば照明光の強
さが変動ずれば基準板２２の部分の露光量も同様に変動
するので、ここのデータを用いて補正を行うことにより
、照明光の変動の影響を除き、再現性を向上させること
ができる。In this embodiment, the field of view 2 provided by the illumination device 7 for the sample 6 is
1 is made large as shown in the figure, and a substrate (plate 22) with a constant transmittance is placed in the imaging area so that there is a part that is not blocked by the sample. If the data is read out, for example, if the intensity of the illumination light fluctuates, the exposure amount of the reference plate 22 will also fluctuate, so by making corrections using this data, the fluctuations in the illumination light can be corrected. It is possible to eliminate the influence and improve reproducibility.
シャドーマスクの透過率測定は、前述したように、本来
、ブラウン管内でのビーム方向で行う必要があるが、こ
の場合の測定方法を第４図により説明する。As mentioned above, the transmittance of the shadow mask must be measured in the beam direction within the cathode ray tube, and the measuring method in this case will be explained with reference to FIG.
第４図は本発明の他の実施例を示す図で、図中、３１は
光源、３２はフレネルレンズ、３３はシャドーマスクで
ある。FIG. 4 is a diagram showing another embodiment of the present invention, in which 31 is a light source, 32 is a Fresnel lens, and 33 is a shadow mask.
図において、光源３１からの光でシャドーマスクを照明
露光し、このとき試料に対する距離と冷却型ＣＣＤカメ
ラの撮影領域との関係で撮影角度を選ぶことにより、ブ
ラウン管内でのシャドーマスクに対するビーム方向に近
似した角度θで測定することができる。In the figure, a shadow mask is illuminated and exposed with light from a light source 31, and by selecting the photographing angle in relation to the distance to the sample and the photographing area of the cooled CCD camera, the beam direction relative to the shadow mask within the cathode ray tube is adjusted. Measurement can be performed using an approximate angle θ.
この場合、測定領域各点での照明光の平行度が必要な場
合には、図示するようにフルネルレンズ３２を集光レン
ズとして用いることによりシャドーマスクやアパーチャ
グリルのような大面積の試料も簡単な照明装置で測定す
ることができる。In this case, if parallelism of the illumination light at each point in the measurement area is required, the Foursnel lens 32 can be used as a condensing lens as shown in the figure to accommodate large-area samples such as shadow masks and aperture grilles. Can be measured with a simple lighting device.
以上のように本発明によれば、冷却型ＣＣＤカメラを用
いて面露光で画像データを得るようにしたので、従来に
比して高速、高分解能で透過率データを得ることができ
、しかも画像処理により試料の位置を認識し、試料上の
所定位置の透過率データが得られ、透過率計測や、検査
の自動化にも有効である。As described above, according to the present invention, since image data is obtained by surface exposure using a cooled CCD camera, transmittance data can be obtained at higher speed and higher resolution than in the past. Through processing, the position of the sample can be recognized and transmittance data at a predetermined position on the sample can be obtained, and it is also effective for transmittance measurement and automation of inspection.
第１図は本発明の一実施例を示す図、第２図は露光時間
を測定するようにした本発明の他の実施例を示す図、第
３図は照明光の変動、測定値の変化を補正するようにし
た本発明の他の実施例を示す図、第４図は撮影角度をつ
けた本発明の他の実施例を示す図、第５図は投受光器を
用いた従来の透過率測定方法を示す図、第６図はシャド
ーマスクに対するビームの入射角度を示す図、第７図は
投受光器を試料に対して角度をつけてセントする従来の
例を示す図である。
■・・・冷却型ＣＣＤカメラ、２・・・画像処理装置、
３・・・レンズ、４・・・シャフタ、５・・・シャッタ
駆動装置、６・・・試料、７・・・照明装置、８・・・
電源、９・・・ハーフミラ−１ｌＯ・・・光センサ、１
１・・・測定装置、３１・・・３１．３２・・・フレネ
ルレンズ、３３・・・シャドーマスク。
出 願 人 大日本印刷株式会社代理人 弁理士
蛭 川 昌 信（外４名）第１図
→−−人一、６ド耗
第２図
第３図
２２導焦曵
／
第４図
２．＼ ３３シイドつ７７り
第５図
第６図
第７図Fig. 1 is a diagram showing one embodiment of the present invention, Fig. 2 is a diagram showing another embodiment of the present invention in which exposure time is measured, and Fig. 3 is a diagram showing fluctuations in illumination light and changes in measured values. FIG. 4 is a diagram showing another embodiment of the present invention with a shooting angle, and FIG. 5 is a diagram showing a conventional transmission method using a light emitter and receiver. FIG. 6 is a diagram showing the angle of incidence of the beam on the shadow mask, and FIG. 7 is a diagram showing a conventional example in which the projector/receiver is centered at an angle with respect to the sample. ■...Cooled CCD camera, 2...Image processing device,
3... Lens, 4... Shutter, 5... Shutter drive device, 6... Sample, 7... Illumination device, 8...
Power supply, 9...Half mirror-1lO...Light sensor, 1
1... Measuring device, 31... 31.32... Fresnel lens, 33... Shadow mask. Applicant Dai Nippon Printing Co., Ltd. Agent Patent Attorney Masanobu Hirukawa (4 others) Figure 1 - - - 6 doss Figure 2 Figure 3 22 Guidance / Figure 4 2. ＼ 33Side Tsu77riFigure 5Figure 6Figure 7
Claims (12)
像データと、試料を置いて撮像した画像データとに基づ
いて試料の透過率を測定することを特徴とする透過率測
定方法。(1) A transmittance measurement method characterized by measuring the transmittance of a sample based on image data obtained by capturing an image of an illumination section without a sample and image data captured with a sample placed thereon using a photographing device.
載の透過率測定方法。(2) The transmittance measuring method according to claim 1, wherein the photographing device is a cooled CCD camera.
するようにした請求項１記載の透過率測定方法。(3) The transmittance measuring method according to claim 1, wherein the transmittance is measured by subjecting each image data to a smoothing process.
条件を設定する請求項１記載の透過率測定方法。(4) The transmittance measuring method according to claim 1, wherein the imaging conditions are set so that the levels of each image data are approximately equal.
を制御することにより行う請求項４記載の透過率測定方
法。(5) The transmittance measuring method according to claim 4, wherein the imaging conditions are set by controlling the exposure time using a mechanical shutter.
を補正するようにした請求項５記載の透過率測定方法。(6) The transmittance measuring method according to claim 5, wherein the shutter opening time is measured and the variation error in the opening time is corrected.
間の設定により行う請求項４記載の透過率測定方法。(7) The transmittance measuring method according to claim 4, wherein the imaging conditions are set by setting the storage time of the cooled CCD camera.
う請求項４記載の透過率測定方法。(8) The transmittance measuring method according to claim 4, wherein the imaging conditions are set by setting the brightness of the light source.
料上の所定位置の透過率データを測定する請求項１記載
の透過率測定方法。(9) The transmittance measuring method according to claim 1, wherein the position of the sample is recognized from the captured image data and transmittance data at a predetermined position on the sample is measured.
撮像し、試料によって遮ぎられない部分の画像データに
より補正を行う請求項１記載の透過率測定方法。(10) The transmittance measuring method according to claim 1, wherein the image is captured so that a part of the illumination section enters the imaging area together with the sample, and the correction is performed using image data of a part not blocked by the sample.
であり、撮像に寄与する照明光と試料のなす角度がブラ
ウン管内で試料を通過する電子ビームとの角度に等しく
なる様な撮像条件とした請求項１記載の透過率測定方法
。(11) The sample is a shadow mask or an aperture grill, and the imaging conditions are such that the angle between the illumination light contributing to imaging and the sample is equal to the angle between the electron beam passing through the sample in a cathode ray tube. Transmittance measurement method.
ズを用いる請求項１１記載の透過率測定方法。(12) The transmittance measuring method according to claim 11, wherein a Fresnel lens is used as the condenser lens of the illumination section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63110974A JP2790283B2 (en) | 1988-05-07 | 1988-05-07 | Transmittance measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63110974A JP2790283B2 (en) | 1988-05-07 | 1988-05-07 | Transmittance measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01282446A true JPH01282446A (en) | 1989-11-14 |
| JP2790283B2 JP2790283B2 (en) | 1998-08-27 |
Family
ID=14549212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63110974A Expired - Fee Related JP2790283B2 (en) | 1988-05-07 | 1988-05-07 | Transmittance measurement method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2790283B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7369243B2 (en) | 2003-05-28 | 2008-05-06 | Fujifilm Corporation | Optical measuring apparatus and optical measuring method |
| JP2008309805A (en) * | 2008-09-26 | 2008-12-25 | Fujifilm Corp | Light measuring instrument and light measuring method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506759U (en) * | 1973-05-17 | 1975-01-23 | ||
| JPS56129845A (en) * | 1980-03-14 | 1981-10-12 | Matsushita Electronics Corp | Inspecting method for color filter |
| JPS586435A (en) * | 1981-07-06 | 1983-01-14 | Fuji Photo Film Co Ltd | Measuring method for optical characteristics of microcolor filter |
-
1988
- 1988-05-07 JP JP63110974A patent/JP2790283B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506759U (en) * | 1973-05-17 | 1975-01-23 | ||
| JPS56129845A (en) * | 1980-03-14 | 1981-10-12 | Matsushita Electronics Corp | Inspecting method for color filter |
| JPS586435A (en) * | 1981-07-06 | 1983-01-14 | Fuji Photo Film Co Ltd | Measuring method for optical characteristics of microcolor filter |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7369243B2 (en) | 2003-05-28 | 2008-05-06 | Fujifilm Corporation | Optical measuring apparatus and optical measuring method |
| JP2008309805A (en) * | 2008-09-26 | 2008-12-25 | Fujifilm Corp | Light measuring instrument and light measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2790283B2 (en) | 1998-08-27 |
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