JPH01280206A - Fine size measurement x-ray device - Google Patents
Fine size measurement x-ray deviceInfo
- Publication number
- JPH01280206A JPH01280206A JP63107687A JP10768788A JPH01280206A JP H01280206 A JPH01280206 A JP H01280206A JP 63107687 A JP63107687 A JP 63107687A JP 10768788 A JP10768788 A JP 10768788A JP H01280206 A JPH01280206 A JP H01280206A
- Authority
- JP
- Japan
- Prior art keywords
- straight line
- camera
- scale
- ray
- ray source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 8
- 238000003384 imaging method Methods 0.000 claims description 8
- 230000007547 defect Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Closed-Circuit Television Systems (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は例えば物体の内部における微小の欠陥あるいは
構成等の寸法をそのＸ線透視像によって正確に測定する
装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for accurately measuring the dimensions of, for example, minute defects or structures inside an object using an X-ray fluoroscopic image thereof.
例えば金属片あるいは合成樹脂等の内部における気泡、
亀裂または分解し得ない小型機器の内部寸法等を測定す
るためにはＸ線による拡大透視像を観測する必要がある
。この場合、微小焦点のＸ線源を用いて試料の拡大透視
像を観測することにより、測定しようとする部分を拡大
してその寸法の測定を行うことができる。しかし測定し
ようとする例えば欠陥部分の試料内における位置が判明
していない場合は、Ｘ線源から上記欠陥までの距離を確
定し得ないために、像の倍率が不明となってその大きさ
を正確に測定することが出来ない。For example, air bubbles inside a metal piece or synthetic resin, etc.
In order to measure cracks or internal dimensions of small devices that cannot be disassembled, it is necessary to observe enlarged fluoroscopic images using X-rays. In this case, by observing an enlarged perspective image of the sample using an X-ray source with a fine focus, it is possible to enlarge the part to be measured and measure its dimensions. However, if the position of the defective part to be measured within the sample is not known, the distance from the X-ray source to the defect cannot be determined, so the magnification of the image is unknown and its size cannot be determined. Unable to measure accurately.
従って本発明はこのような欠点を伴うことなく、物体の
内部における被測定部の位置が判明していない場合にお
いても、被測定部を拡大して観測すると共にその寸法を
正確に測定することのできる装置を提供するものである
。Therefore, the present invention does not involve such drawbacks, and even when the position of the part to be measured inside an object is not known, it is possible to enlarge and observe the part to be measured and to accurately measure its dimensions. The purpose is to provide a device that can do this.
本発明の装置は、微小焦点Ｘ線源とＸ線撮像カメラとの
間に配置される試料の保持台を、上記Ｘ線源とカメラの
撮像面の中央部とを通る直線に対して直角な一定の方向
へ移動させる機構と、その移動距離の測定部とを設けた
ものである。すなわちカメラで撮像した像をテレビジョ
ン受像機等のスクリーンで観測しながら、保持台を移動
させて寸法を測定しようとする部分の一方の端部をスク
リーンにおける前記直線の位置に一致させ、このときの
保持台位置を読み取って記憶し、保持台を再び移動させ
て他方の端部を上記直線と一致させ、この場合における
保持台位置と前記位置とから、その間の移動距離を算出
することによって試料の内部における欠陥等の寸法を測
定することができる。かつ拡大された像の観測によって
測定を行うから、保持台の移動位置を精密に制御するこ
とができる。更にその測定点が何れもＸ線源とカメラに
おける撮像面の中心点とを結ぶ直線上に配置された状態
において、位置の読み取りを行うから、斜め投射による
像の歪みの影響等を受けないと共に像の倍率に関係なく
正確な測定を行い得る等の作用効果がある。In the apparatus of the present invention, a sample holding stage disposed between a microfocus X-ray source and an X-ray imaging camera is placed at right angles to a straight line passing through the X-ray source and the center of the imaging surface of the camera. It is provided with a mechanism for moving in a fixed direction and a measuring section for measuring the distance of movement. That is, while observing the image captured by the camera on the screen of a television receiver or the like, move the holding stand so that one end of the part whose dimensions are to be measured coincides with the position of the straight line on the screen; Read and memorize the holding table position, move the holding table again so that the other end coincides with the above straight line, and calculate the moving distance between the holding table position in this case and the above position. It is possible to measure the dimensions of defects, etc. inside the device. In addition, since the measurement is performed by observing the magnified image, the moving position of the holding table can be precisely controlled. Furthermore, since the positions are read while all of the measurement points are placed on a straight line connecting the X-ray source and the center point of the imaging surface of the camera, the measurement points are not affected by image distortion due to oblique projection. There are effects such as being able to perform accurate measurements regardless of the magnification of the image.
第１図は本発明実施例の側面図で、固定基台ｌに垂直な
支柱２を設けて、基台ｌの内部にこの支柱を紙面内にお
いて水平方向へ移動させる機構を設けると共に基台の適
当な位置にその移動距離を指示する目盛３を設け、かつ
支柱２に指標４を取り付けである。また支柱２には、上
下に移動させて所望の位置へ停止させることのできる腕
５を取り付けて、支柱２に腕５の位置を指示する目盛６
を設けると共に腕５に指標７を形成しである。この腕５
の先端にＸ線の透過材で形成した試料保持台８を取り付
け、また前記基台１の側面にＸ線撮像カメラ９を固着す
ると共にその垂直上方に上記保持台８を介して微小焦点
のＸ線源！０を配置しである。FIG. 1 is a side view of an embodiment of the present invention, in which a fixed base l is provided with a vertical support 2, a mechanism is provided inside the base l to move this support horizontally in the plane of the paper, and the base A scale 3 indicating the distance of movement is provided at an appropriate position, and an indicator 4 is attached to the support 2. Furthermore, an arm 5 that can be moved up and down and stopped at a desired position is attached to the column 2, and a scale 6 is attached to the column 2 to indicate the position of the arm 5.
At the same time, an index 7 is formed on the arm 5. this arm 5
A sample holder 8 made of an X-ray transparent material is attached to the tip of the base 1, and an X-ray imaging camera 9 is fixed to the side of the base 1, and a micro-focused Line source! 0 is placed.
このようなＸ線装置を用いて、任意の試料の内部に生じ
た空洞ｐのような傷を検出すると共にその寸法を測定す
ることができる。すなわち上記試料ＩＩを保持台８上に
乗せてＸ線源１０からＸ線を照射すると共に支柱２を矢
印Ｘのように適当な位置へ移動させると、試料を透過し
たＸ線がカメラ９に入射するから、その出力ビデオ信号
を受像機に加えることによって傷ｐの像を得ることがで
きる。第２図ａ、ｂは上記受像機におけるスクリーン１
２を示したもので、線源ｌＯからカメラ９の感光面にＸ
線が垂直に入射する点ｑを通り、かつ支柱２の移動方向
に対して直角な直線の像に相当するスクリーン１２上の
直線を図にｒで表しである。すなわちａは支柱２を第１
図に矢印Ｘで示したように移動させてｇｉＪｐの像Ｓに
おける右端を上記直線ｒと一致させた状態で、このとき
指標４で指示される目盛３の値をｍとする。また支柱２
を再び矢印Ｘのように移動させて、ｂのように像Ｓの左
端を直線ｒと一致させ、この状態における指標４の指示
値をｎとすると、傷ｐの紙面内における水平方向の幅は
明らかに（ｍ −ｎ ）で与えられると共に像Ｓの倍率
は指標７によって指示される目盛６の値で与えられる。Using such an X-ray device, it is possible to detect a flaw such as a cavity p generated inside an arbitrary sample and to measure its dimensions. That is, when the sample II is placed on the holding table 8 and irradiated with X-rays from the X-ray source 10, and the support column 2 is moved to an appropriate position as indicated by the arrow X, the X-rays that have passed through the sample are incident on the camera 9. Therefore, by applying the output video signal to a receiver, an image of the flaw P can be obtained. Figures 2a and 2b show the screen 1 in the above receiver.
2, from the radiation source lO to the photosensitive surface of the camera 9.
A straight line on the screen 12 that passes through the point q where the line is perpendicularly incident and corresponds to the image of the straight line perpendicular to the direction of movement of the support column 2 is represented by r in the figure. That is, a is the first pillar 2.
When the right end of the image S of giJp is aligned with the straight line r by moving it as shown by the arrow X in the figure, the value on the scale 3 indicated by the index 4 at this time is assumed to be m. Also, pillar 2
is moved again in the direction of arrow It is clearly given by (m - n ) and the magnification of the image S is given by the value of the scale 6 indicated by the index 7.
すなわち第２図ａの状態からｂの状態まで支柱２を移動
させた場合における目盛３の値の差によって、傷ｐの紙
面内における巾をＸ線像の拡大率に関係なく求めること
ができる。かつ本発明の装置においては線源１０からカ
メラ９の撮像面に垂直に入射するＸ線の位置、すなわち
直線ｒの位置を確定しておくだけで、試料内における傷
ｐの位置、特に深さ方向の位置に全く関係なく、その巾
を正確に測定することができる。しかも傷ｐの拡大され
た像Ｓによって、その両端を直線ｒと順次一致させるか
ら、極めて精密な制御並びに測定が行われると共に傷ｐ
が極めて大きく第２図ａ、ｂにおける像Ｓの一部が視野
外に突出するような場合でも支障なく観測を行い得る等
、本発明は極めて優れた効果がある。なお前記（ｍ −
ｎ ）の値はこれをリニヤエンコーダ等の電気的測定手
段よることも勿論可能である。That is, the width of the flaw P in the plane of the paper can be determined by the difference in the values on the scale 3 when the support 2 is moved from the state shown in FIG. 2 a to the state shown in FIG. In addition, in the apparatus of the present invention, the position of the flaw p in the sample, especially the depth, can be determined by simply determining the position of the X-rays that are perpendicularly incident on the imaging surface of the camera 9 from the radiation source 10, that is, the position of the straight line r. Its width can be accurately measured regardless of its directional position. Moreover, since both ends of the flaw p are successively aligned with the straight line r using the enlarged image S of the flaw p, extremely precise control and measurement can be performed, and the flaw p
The present invention has extremely excellent effects, such as allowing observation to be made without any trouble even in cases where the image S in FIGS. 2a and 2b is extremely large and a portion of the image S protrudes outside the field of view. Note that (m −
It is of course possible to determine the value of n) by using electrical measuring means such as a linear encoder.
第１図は本発明実施例の正面図、第２図は第１図の装置
で撮像されたＸ線透過像を示す図である。
なお図において、１は基台、２は支柱、３は目盛、４は
指標、５は腕、６は目盛、７は指標、８は試料保持台、
９はＸ線撮像カメラ、ＩＯはＸ線源、ＩＩは試料である
。FIG. 1 is a front view of an embodiment of the present invention, and FIG. 2 is a diagram showing an X-ray transmission image taken by the apparatus shown in FIG. In the figure, 1 is a base, 2 is a support, 3 is a scale, 4 is an indicator, 5 is an arm, 6 is a scale, 7 is an indicator, 8 is a sample holding table,
9 is an X-ray imaging camera, IO is an X-ray source, and II is a sample.
Claims (1)
を測定しようとする試料の保持台を配置すると共に前記
Ｘ線源とＸ線撮像カメラの中心部とを通る直線に対して
直角な方向へ上記保持台を移動させる機構とその移動距
離の測定部とを設けたことを特徴とする微小寸法測定Ｘ
線装置A holding table for a sample whose dimensions are to be measured is placed between a microfocus X-ray source and an X-ray imaging camera, and a straight line passing through the X-ray source and the center of the X-ray imaging camera is placed. Minute dimension measurement
line equipment
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63107687A JP2686770B2 (en) | 1988-05-02 | 1988-05-02 | Micro dimension measurement X-ray equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63107687A JP2686770B2 (en) | 1988-05-02 | 1988-05-02 | Micro dimension measurement X-ray equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01280206A true JPH01280206A (en) | 1989-11-10 |
| JP2686770B2 JP2686770B2 (en) | 1997-12-08 |
Family
ID=14465424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63107687A Expired - Lifetime JP2686770B2 (en) | 1988-05-02 | 1988-05-02 | Micro dimension measurement X-ray equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2686770B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2802404C2 (en) * | 2019-04-26 | 2023-08-28 | Тиама | Method and installation for linear dimensional control of manufactured objects |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6325310U (en) * | 1986-07-31 | 1988-02-19 |
-
1988
- 1988-05-02 JP JP63107687A patent/JP2686770B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6325310U (en) * | 1986-07-31 | 1988-02-19 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2802404C2 (en) * | 2019-04-26 | 2023-08-28 | Тиама | Method and installation for linear dimensional control of manufactured objects |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2686770B2 (en) | 1997-12-08 |
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