JPH01276033A - Detecting device for minute displacement - Google Patents

Detecting device for minute displacement

Info

Publication number
JPH01276033A
JPH01276033A JP10499788A JP10499788A JPH01276033A JP H01276033 A JPH01276033 A JP H01276033A JP 10499788 A JP10499788 A JP 10499788A JP 10499788 A JP10499788 A JP 10499788A JP H01276033 A JPH01276033 A JP H01276033A
Authority
JP
Japan
Prior art keywords
permanent magnets
magnetic
minute
measured
magnetic pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10499788A
Other languages
Japanese (ja)
Inventor
Taku Murakami
卓 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP10499788A priority Critical patent/JPH01276033A/en
Publication of JPH01276033A publication Critical patent/JPH01276033A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To measure a minute angle displacement with high accuracy by detecting a phase variation of magnetic pulses by tow pieces of permanent magnets. CONSTITUTION:Magnetic pulses by permanent magnets 2, 3, respectively for turning by using an axis 1 by magnetization to a permanent magnet material as an axis are detected by sensors 4, 5. Based on a phase variation of the magnetic pulses which are detected by these sensors 4, 5, an angle displacement by the axis 1 is detected. Accordingly, being different from the case of a gear, etc. are used by magnetization of a minute permanent magnet, a minute angle displacement can be measured with high accuracy by simple constitution.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、伝動軸の伝達トルクや相対位置変位等の測定
装置に関し、特に、微小値を精度良く検出することがで
きる微小変位検出装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a measuring device for measuring transmission torque and relative positional displacement of a power transmission shaft, and particularly relates to a minute displacement detecting device that can accurately detect minute values. It is something.

(従来の技術) 一般に1回転軸、固定軸を問わず、伝動軸にトルクを加
えた場合、該伝動軸には軸方向に対して45′の方向に
歪が生じる。
(Prior Art) Generally, when torque is applied to a power transmission shaft, regardless of whether it is a one-rotation shaft or a fixed shaft, strain is generated in the power transmission shaft in a direction of 45' with respect to the axial direction.

従来、前記伝動軸に作用するトルクを検出するには、第
5図に示すごとく、伝動軸21の軸方向に所定間隔を有
して、歯車12.13を固定し、該歯車22.23の歯
の相対位置の変位を磁気センサ又はフォトマル24.2
5にて検出することにより測定していた。
Conventionally, in order to detect the torque acting on the transmission shaft, as shown in FIG. Displacement of the relative position of the teeth is measured using a magnetic sensor or photomultiplier 24.2.
It was measured by detecting at 5.

(発明が解決しようとする課題) 前記従来の技術に於ては、二つの歯車の相対変位を測定
しているため、歯の加工精度がトルクの測定精度を決め
ることになるが、歯車の加工精度にはコスト的にも限度
があり、微小相対位置の変化、即ち微小トルクを測定す
ることができなかった。
(Problems to be Solved by the Invention) In the above-mentioned conventional technology, the relative displacement of two gears is measured, so the machining accuracy of the teeth determines the measurement accuracy of torque. Accuracy is limited in terms of cost, and it has not been possible to measure minute changes in relative position, that is, minute torques.

また、測定精度のために、歯車の加工精度を上げようと
すると、コスト的に高価な装置となる欠点があった。
In addition, when attempting to improve the machining accuracy of gears due to measurement accuracy, there is a drawback that the device becomes expensive in terms of cost.

(課題を解決するための手段) 本発明は前記従来の技術に於ける課題を解決するために
なされたもので、所定間隔を有する二個の永久磁石と、
該二個の永久磁石の磁気パルスを、各々検出する磁気セ
ンサから成り、各磁気パルスの位相の変化を検出するこ
とにより。
(Means for Solving the Problems) The present invention has been made to solve the problems in the conventional technology, and includes two permanent magnets having a predetermined interval,
It consists of a magnetic sensor that detects the magnetic pulses of the two permanent magnets by detecting a change in the phase of each magnetic pulse.

前記二個の永久磁石の相対位置変化を測定することを特
徴とする微小角変位検出装置に関する。
The present invention relates to a minute angular displacement detection device that measures a change in the relative position of the two permanent magnets.

(作用) 前記構成による本発明の微小変位検出装置は。(effect) The minute displacement detection device of the present invention has the above configuration.

所定間隔を有する二個の永久磁石の各々から発するパル
スを測定し1例えば軸に作用するトルク等、測定物の条
件変化による9前後の各パルスの位相差を検出すること
により、前記二個の永久磁石間の相対変位を測定するこ
とができる。
By measuring the pulses emitted from each of two permanent magnets having a predetermined interval, and detecting the phase difference between the pulses around 9 due to changes in the conditions of the object to be measured, such as torque acting on the shaft, Relative displacement between permanent magnets can be measured.

従って、二個の永久磁石間の相対変位と、測定物の条件
変化の関係を、予め測定しておけば。
Therefore, if the relationship between the relative displacement between the two permanent magnets and the change in the conditions of the object to be measured is measured in advance.

前記永久磁石の相対変位を測定することによって、測定
物の条件変化を測定することができる。
By measuring the relative displacement of the permanent magnets, changes in the conditions of the object to be measured can be measured.

(実施例) 以下1本発明の実施例である。伝動軸のトルク検出装置
について、第1図〜第4図に基づいて詳述する。
(Example) The following is an example of the present invention. The torque detection device for the transmission shaft will be described in detail based on FIGS. 1 to 4.

第1図は1本実施例のトルク検出装置であり。FIG. 1 shows a torque detection device according to one embodiment.

1は材質S 43 C,直径10φの伝動軸、2及び3
は材質Fe−CrCoを主成分とする。直径30φの磁
性体で、外周に120パルスの着磁を行った永久磁石で
ある。
1 is a transmission shaft made of material S43C and has a diameter of 10φ, 2 and 3
The main component is Fe-CrCo. It is a permanent magnet made of a magnetic material with a diameter of 30φ and magnetized with 120 pulses on the outer periphery.

4.5は前記永久磁石2及び3の磁気パルスを検出する
ためのMR素子であり、6.7は該MR素子4及び5の
磁気パルスを計測器(図示せず)に導くためのリード線
である。
4.5 is an MR element for detecting the magnetic pulses of the permanent magnets 2 and 3, and 6.7 is a lead wire for guiding the magnetic pulses of the MR elements 4 and 5 to a measuring instrument (not shown). It is.

なお、4及び5のMR素子は、ホール素子等。Note that the MR elements 4 and 5 are Hall elements, etc.

磁気パルスを検出できれば、必ずしもMR素子に限定さ
れない。
It is not necessarily limited to an MR element as long as it can detect magnetic pulses.

また、永久磁石2及び3.の着磁は、第2図に示すごと
く、純鉄の磁心材8に、スイッチ11を介して電源10
に接続されたコイル9を巻きつけ、永久磁石材料2a、
3aを所定角ずつ回転して、コイルを発振させ、同期さ
せることで。
Moreover, permanent magnets 2 and 3. As shown in FIG.
The coil 9 connected to the permanent magnet material 2a,
By rotating 3a by a predetermined angle to oscillate the coil and synchronize it.

表面から全周に360個の垂直着磁を行った。360 perpendicular magnetizations were performed from the surface to the entire circumference.

次に作用について説明すると、第1図に於て。Next, the operation will be explained with reference to FIG.

永久磁石2及び3の着磁位置を円周方向で完全に一致す
るよう着磁しておくと、MR素子4及 4び5によって
検出される磁気パルスは第3図に示されるように位相差
がなく完全に一致する。
If the permanent magnets 2 and 3 are magnetized so that their magnetized positions completely match in the circumferential direction, the magnetic pulses detected by the MR elements 4 and 5 will have a phase difference as shown in FIG. There is no exact match.

伝動軸lにトルクを作用すると、伝動軸1が捩られ、永
久磁石2及び3の着磁位置にズレが生じ、MR素子4及
び5で検出される磁気パルスにも、第4図に示すように
位相差δがが生じる。前記位相差δは、永久磁石2及び
3上の着磁個数が360個であるため、(δ/l波長)
度の角度変化となるので、伝動軸lの材料の剛性からト
ルクの値を算出することができる。
When torque is applied to the transmission shaft 1, the transmission shaft 1 is twisted, the magnetized positions of the permanent magnets 2 and 3 are shifted, and the magnetic pulses detected by the MR elements 4 and 5 are also affected as shown in FIG. A phase difference δ occurs. The phase difference δ is (δ/l wavelength) because the number of magnetized magnets on the permanent magnets 2 and 3 is 360.
Since the angle changes in degrees, the torque value can be calculated from the rigidity of the material of the transmission shaft l.

(発明の効果) 以上の通りであるため1本発明は着磁の精度を簡単に上
げることができるので、低コストで且つ、測定精度を向
上することができると共に。
(Effects of the Invention) As described above, the present invention can easily improve the accuracy of magnetization, thereby reducing costs and improving measurement accuracy.

微小角の検出も精度良く測定することができる。It is also possible to accurately detect small angles.

また、装置がコンパクトになり、非接触式であることか
ら耐久性も向上すると云う長所がある。
Further, the device has the advantage of being compact and having improved durability since it is a non-contact type.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は1本発明の実施例である伝動軸のトルク検出装
置、第2図は第1図に於ける永久磁石の着磁装置、第3
図は本発明の実施例に於て。 トルクが作用していないときの磁気パルス、第4図は第
3図に於て、トルクが作用したときの磁気パルス、第5
図は従来の技術を示す図である。 1・・・伝動軸     2.3・・・永久磁石2a、
3a・・・永久磁石材料 4.5・・・MR素子  6.7・・・リード線8・・
・磁心材     9・・・コイルlO・・・電源  
    11・・・スイッチ特許出願人 株式会社小松
製作所 代理人 (弁理士)岡 1)和 喜 第1図 第2図
Fig. 1 shows a torque detection device for a transmission shaft which is an embodiment of the present invention, Fig. 2 shows a magnetizing device for a permanent magnet in Fig. 1, and Fig. 3
The figure shows an example of the present invention. The magnetic pulse when no torque is applied, Figure 4, is the same as that in Figure 3, and the magnetic pulse when torque is applied, Figure 5.
The figure shows a conventional technique. 1... Transmission shaft 2.3... Permanent magnet 2a,
3a... Permanent magnet material 4.5... MR element 6.7... Lead wire 8...
・Magnetic core material 9...Coil lO...Power supply
11...Switch patent applicant Komatsu Ltd. Representative (patent attorney) Oka 1) Kazuyuki Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 所定間隔を有する二個の永久磁石と、該二個の永久磁石
の磁気パルスを、各々検出する磁気センサから成り、各
磁気パルスの位相の変化を検出することにより、前記2
個の永久磁石の相対位置の変化を測定することを特徴と
する微小変位検出装置。
It consists of two permanent magnets having a predetermined interval and a magnetic sensor that detects the magnetic pulses of the two permanent magnets, and detects the change in the phase of each magnetic pulse.
A minute displacement detection device characterized by measuring changes in the relative positions of two permanent magnets.
JP10499788A 1988-04-27 1988-04-27 Detecting device for minute displacement Pending JPH01276033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10499788A JPH01276033A (en) 1988-04-27 1988-04-27 Detecting device for minute displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10499788A JPH01276033A (en) 1988-04-27 1988-04-27 Detecting device for minute displacement

Publications (1)

Publication Number Publication Date
JPH01276033A true JPH01276033A (en) 1989-11-06

Family

ID=14395738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10499788A Pending JPH01276033A (en) 1988-04-27 1988-04-27 Detecting device for minute displacement

Country Status (1)

Country Link
JP (1) JPH01276033A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018128407A (en) * 2017-02-10 2018-08-16 日立金属株式会社 Turbo rotation sensor and turbo charger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018128407A (en) * 2017-02-10 2018-08-16 日立金属株式会社 Turbo rotation sensor and turbo charger

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