JPH01273215A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPH01273215A JPH01273215A JP10167088A JP10167088A JPH01273215A JP H01273215 A JPH01273215 A JP H01273215A JP 10167088 A JP10167088 A JP 10167088A JP 10167088 A JP10167088 A JP 10167088A JP H01273215 A JPH01273215 A JP H01273215A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- magnetic
- film
- diaphragm
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims abstract description 11
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 8
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 8
- 239000011733 molybdenum Substances 0.000 claims abstract description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 7
- 230000003197 catalytic effect Effects 0.000 claims abstract description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 7
- 239000010937 tungsten Substances 0.000 claims abstract description 7
- 238000000354 decomposition reaction Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000000843 powder Substances 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 235000006732 Torreya nucifera Nutrition 0.000 description 1
- 244000111306 Torreya nucifera Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
・〔産業上の利用分野〕
この発明は磁気ディスク装置に搭載される磁気ディスク
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk mounted in a magnetic disk device.
コンピュータの外部記憶装置の一つである固定磁気ディ
スク装置の主構成部は磁気ディスク七磁気ヘントスライ
ダで構成されている。第３図の断面構成図にその概念を
示す。The main component of a fixed magnetic disk device, which is one of the external storage devices of a computer, is composed of a magnetic disk and a seven-magnetic hent slider. The concept is shown in the cross-sectional configuration diagram in FIG.
＋ｌ）け磁気ディスク、（６）は磁気へラドスライダ。+l) is a magnetic disk, (6) is a magnetic rad slider.
＋７１ｉサスペンシヨン、（８）はスピンドルである。+71i suspension, (8) is the spindle.
磁気ディスク（りは記録情報が書かれてそれを保持する
媒体でちゃ、磁気ヘンデスライダ（６）は磁気ディスク
ｆｌｌに記録情報を書き込んだシ読み出したりする装置
である。サスペンション（７）は磁気ヘッドスライダ（
６）を磁気ディスクに押付けるバネであり、スピンドル
（８）は磁気ディスク＋１）を矢印方向に回転させる装
置である。A magnetic disk is a medium on which recorded information is written and retained.A magnetic head slider (6) is a device that writes and reads recorded information on a magnetic disk.Suspension (7) is a magnetic head slider. (
The spindle (8) is a device that rotates the magnetic disk +1) in the direction of the arrow.
固定ディスク装置において磁気ディスク（１）に記録情
報を書き込んだシ読み比したりする場合は。When comparing the reading and writing of recorded information written on the magnetic disk (1) in a fixed disk device.
矢印方向に磁気ディスクｆｉｌを高速回転（例えば３６
００ ｒｐｍ） させる。この回転により生じる空気
流で、磁気ヘントスライダ（６）は空気軸受の原理で磁
気ディスクｆｌ）表面よりサブミクロンのすきまを保っ
て浮上する。すなわちサスペンション（７）の押付力と
空気流の押上刃が約９合って磁気ヘッドスライダ〔６）
は安定浮上する。Rotate the magnetic disk fil at high speed in the direction of the arrow (for example, 36
00 rpm). Due to the airflow generated by this rotation, the magnetic Hent slider (6) flies above the surface of the magnetic disk fl) with a submicron gap maintained on the principle of air bearing. In other words, the pressing force of the suspension (7) and the push-up blade of the air flow match approximately 9, and the magnetic head slider [6]
floats stably.
一方、出気ディスク装置を使用しない時はスピンドル（
８）の回転は停止し、磁気へラドスライダはサスペンシ
ョンによシ押し付けられ磁気ディスク上に接触した状態
となる。On the other hand, when the air outlet disk device is not in use, the spindle (
8) stops rotating, and the magnetic helide slider is pressed against the suspension and comes into contact with the magnetic disk.
第４図と第５図は第３図における磁気ヘンドスライダ付
近の拡大断面構成図で、第４図は磁気ディスク装置の稼
動時（磁気ディスクは回転している）、第５図は磁気デ
ィスク装置の停止時（磁気ディスクは停止している）を
それぞれ示す。Figures 4 and 5 are enlarged sectional views of the vicinity of the magnetic hend slider in Figure 3. Figure 4 shows the magnetic disk drive when it is in operation (the magnetic disk is rotating), and Figure 5 shows the magnetic disk drive when it is in operation (the magnetic disk is rotating). Indicates when the disk is stopped (the magnetic disk is stopped).
磁気ディスク装置は以上のような機構をとるため、磁気
ディスク（１）の稼動時開始時には磁気ヘントスライダ
（６）は磁気ディスク（１）表面をとすシながら浮上す
る。同様に停止時にも磁気ディスクｆｌ）表面をこすり
ながら停止する。この動作をコンタクト・スタート−ス
トップ（以下ａＳＳと記す）、！−いう。Since the magnetic disk device has the above-described mechanism, the magnetic hent slider (6) flies over the surface of the magnetic disk (1) when the magnetic disk (1) starts operating. Similarly, when stopping, the magnetic disk fl) is stopped while rubbing the surface. This operation is called contact start-stop (hereinafter referred to as aSS). -Say.
磁気ディスク装置には、このような磁気ディスク（１）
と磁気ヘントスライダ（６）間の摺動現象があるため、
磁気ディスク（１）、磁気ヘッドスライダ（６）ともに
次第に摩耗してくる。いずれか摩耗しても。A magnetic disk device includes such a magnetic disk (1)
Because there is a sliding phenomenon between the and magnetic hent slider (6),
Both the magnetic disk (1) and the magnetic head slider (6) gradually wear out. Even if one of them wears out.
その摩耗粉はヘッドクラッシュの直接の原因となる。こ
のような摩耗等を抑えるため、磁気ディスクには保護膜
としてダイヤモンド状炭素膜（ＤＬＣ膜と略記）が設け
られていた。第６図は従来の磁気ディスク（１）の構成
を示す断面図で、ｆ２）は基板。The wear particles are a direct cause of head crashes. In order to suppress such wear and the like, magnetic disks have been provided with a diamond-like carbon film (abbreviated as DLC film) as a protective film. FIG. 6 is a sectional view showing the structure of a conventional magnetic disk (1), where f2) is a substrate.
（３）は基板（２）上に形成された磁性膜、（４）は磁
性膜（２）上に形成されるダイヤモンド状炭素保護膜で
ある。(3) is a magnetic film formed on the substrate (2), and (4) is a diamond-like carbon protective film formed on the magnetic film (2).
こ（７）Ｄ Ｌ Ｏ＠ｔａｐ−ＪＣＶ Ｄ法等によツ”
（Ｈ２、ＣＨ４等のガスを用いて成膜されていた。(7) DL O@tap-JCV D method etc.”
(The film was formed using gases such as H2 and CH4.
以上のように従来の磁気ディスク（１）でけ、ＤＬＣ保
Ｗｌ膜（４）を直接磁性膜（３）上に成膜してい念。と
ころがこのＤＬＣ保護膜は成膜する時に、下地に鉄ニッ
ケル、コバルト等の炭化水素分解の触媒となる金属があ
ると黒鉛構造の炭素が析出しやす（。As described above, with the conventional magnetic disk (1), the DLC WL film (4) is formed directly on the magnetic film (3). However, when this DLC protective film is formed, if there is a metal such as iron-nickel or cobalt that acts as a catalyst for hydrocarbon decomposition in the underlying layer, graphite-structured carbon tends to precipitate ().
黒鉛構造の炭素膜ができる。この黒鉛構造の炭素膜は非
常に弱＜、ａＳＳを行なうとすぐ削れてしオい摩耗粉を
発生し、ヘッドクラッシュの原因をつくるという問題が
あった。A carbon film with a graphite structure is created. This carbon film with a graphite structure is very weak and has the problem of being easily scraped off when aSS is performed, generating abrasion powder and causing a head crash.
従来磁性膜（３）には酸化鉄、コバルトやニッケルを含
む合金等が用いられておシ、酸化鉄はわずかでＦｉある
がＤＬＯ膜の成膜に使用されるＨ２ ガスで還元され
鉄ができるため、上述のようにＤＬＣ膜成膜時に同時に
黒鉛構造の炭素膜が生じるという問題点があった。第１
図（ａ）（ｔ＋）は従来の黒鉛構造の炭素膜も析出した
ＤＬＣ保護模を有する磁気ディスクのＣ８Ｓ時のＡＺ比
出力びディスクヘッド間摩擦出力を示す波形図で、（ａ
）はＡＥＩｔｌ力、（ｂ）は摩擦出力を表わしている。Conventionally, the magnetic film (3) has been made of iron oxide, an alloy containing cobalt or nickel, etc. Iron oxide has only a small amount of Fi, but it is reduced to iron by the H2 gas used to form the DLO film. Therefore, as described above, there is a problem in that a carbon film having a graphite structure is simultaneously formed during the formation of a DLC film. 1st
Figures (a) and (t+) are waveform diagrams showing the AZ specific output and disk head friction output during C8S of a magnetic disk with a conventional DLC protective pattern in which a carbon film with a graphite structure is also deposited.
) represents the AEItl force, and (b) represents the friction output.
第７図かられかるようにｃｓｓｔサイクル中（磁気ディ
スク装置稼動中）常時ディスク・ヘッドの摩擦力がｍ力
され、またＡｍ出力が大きく乱れている。さらにＣＢＳ
後の磁気ヘッドスライダ（６１のスライダ面の参考写真
２から、スライダ面には摩耗粉が多く付着しているのが
わかる。これが進むとヘッドクラッシュとなってくる。As can be seen from FIG. 7, the frictional force of the disk head is constantly m during the csst cycle (while the magnetic disk device is in operation), and the Am output is greatly disturbed. Furthermore, CBS
From reference photo 2 of the slider surface of the later magnetic head slider (61), it can be seen that there is a lot of abrasion powder adhering to the slider surface. As this progresses, a head crash will occur.
この発明は上記のような問題点を解消するためになされ
たもので、磁気ディスクの摩耗を抑えａＳＳ％性が良好
な磁気ディスクを得ることを目的とする。This invention was made to solve the above-mentioned problems, and aims to obtain a magnetic disk that suppresses wear of the magnetic disk and has a good aSS% property.
この発明の磁気ディスクは磁性膜とこの磁性膜に形成さ
れるダイヤモンド状炭素保護膜との間に炭化水素分解の
触媒機能を持たないモリブデンまたはタングステンの隔
ｊ漠を設けたものである。The magnetic disk of the present invention has a gap made of molybdenum or tungsten, which does not have a catalytic function for decomposing hydrocarbons, between a magnetic film and a diamond-like carbon protective film formed on the magnetic film.
この発明におけるモリブデンまたはタングステンの隔膜
は炭化水素分解の触媒機節を持たずダイヤモンド状炭素
膜成膜時に黒鉛構造を有する脆い炭素膜の析出を抑制す
ることができる。また上。The molybdenum or tungsten diaphragm in this invention does not have a catalytic mechanism for hydrocarbon decomposition and can suppress the precipitation of a brittle carbon film having a graphite structure during the formation of a diamond-like carbon film. Above again.
下膜との密着性も良い。Good adhesion to the inferior membrane.
従って摩耗粉の発生を防止し、０８８時におけるヘッド
クラッシュに対する信頼性が向上する。Therefore, generation of abrasion powder is prevented and reliability against head crash at 088 is improved.
第１図はこの発明の一実施例の磁気ディスク（１）を示
す断面図で９図において、（２）は基板でこの場合けＡ
Ａ’−Ｍｇ 合金基板、（３）は磁性層で、この場合は
ｒ Ｆ’ｅ２Ｃ１５膜、（４）はダイヤモンド状炭素
保護膜で、この場合は厚さ４００λ、（５）は磁性層（
３）とＤＬＣ保護膜（４）との間に設けられた隔膜で、
この場合は厚さが１００大のモリブデン膜である。Fig. 1 is a sectional view showing a magnetic disk (1) according to an embodiment of the present invention, and in Fig. 9, (2) is a substrate;
A'-Mg alloy substrate, (3) is the magnetic layer, in this case rF'e2C15 film, (4) is the diamond-like carbon protective film, in this case thickness 400λ, (5) is the magnetic layer (
3) and the DLC protective film (4),
In this case, the molybdenum film is 100 mm thick.
この実施例の磁気ディスクｆｌ）を従来例と同様の東件
で試作し、Ｃ８Ｓ試験を行った。その結果を第２図に示
す。第２図（ａ）（ｂ）けａＳＳ時の（ａ）Ａｍ出力及
び（ｂｌディスク・ヘッド間摩擦出力を示す波形図で、
第２図かられかるようにディスク争ヘンド間の摩擦力Ａ
Ｅ比出力非常に安定していた。またＣ８８試験後の磁気
ヘッド・スライダ（６）のスライダ面の参考写真１に示
すようにスライダ面には殆ど摩耗粉の付着が見られず、
この磁気ディスクは耐しγ粍性に富みＣ８Ｓ特性の優れ
たものであることが認められ念。A magnetic disk (fl) of this example was manufactured as a prototype by Token, similar to the conventional example, and a C8S test was conducted. The results are shown in FIG. Figure 2 (a) and (b) are waveform diagrams showing (a) Am output and (bl) disk-head friction output during aSS,
As can be seen from Figure 2, the frictional force A between the discs
E specific output was very stable. Furthermore, as shown in reference photo 1 of the slider surface of the magnetic head slider (6) after the C88 test, almost no wear particles were observed on the slider surface.
This magnetic disk was recognized as being highly resistant to gamma oxidation and having excellent C8S characteristics.
なお、上記実施例では隔膜（５）としてモリブデンを用
いたが、タングステンであっても良く、同様に炭化水素
分解の触媒機能が無（、膜との密着性も良いので同様の
効果を奏する。In the above embodiment, molybdenum was used as the diaphragm (5), but tungsten may also be used, which similarly has no catalytic function for hydrocarbon decomposition (but also has good adhesion to the membrane, so the same effect can be achieved).
以上のように、この発明によれば磁性膜とこの磁性、ｒ
＠に形成されるダイヤモンド状炭素保膿膜との間に炭化
水素分解の触媒機能を持たないモリブデンまたはタング
ステンの隔膜を設けることによシ、黒鉛構造の炭素膜の
析出を抑えることができ。As described above, according to the present invention, the magnetic film and its magnetism, r
By providing a diaphragm made of molybdenum or tungsten, which does not have a catalytic function for hydrocarbon decomposition, between the diamond-like carbon impurity-retaining film formed on the carbon, the precipitation of the graphite-structured carbon film can be suppressed.
耐摩耗性に優れａＳＳ特性が良好な磁気ディスクが得ら
れる効果がある。This has the effect of providing a magnetic disk with excellent wear resistance and good aSS characteristics.
第１図はこの発明の一実施例の磁気ディスクを示す断面
図、第２図（８）はこの発明の一実施例の磁気ディスク
のＡＫ出力を、同図（１））け同摩擦出力を示す波形図
、第３図は一般的な磁気ディスク装置を示す断面構成図
、、第４図は第３図の装置稼動時の要部拡大断面構成図
、第５図は第３図の装置停止時の要部拡大断面構成図、
第６図は従来の磁気ディスクを示す断面図、第１図（ａ
）け従来の磁気ディスクのＡＫ田力を同図（ｂ）は同摩
擦出力を示す波形図である。
図において、（１）は磁気ディスク、Ｃ２）は基板、（
３）は磁性膜、（４）はダイヤモンド状炭素保護膜、（
５）は隔膜である。
なお図中、同一符号は同−又は相当部分を示す。
代即人大岩増雄
第 １ 図
１゛石笠景ｊバ又り
２ 基与
３．５磁柱曙
４・９−イヤモシト“戚ｑ１萱曙
５ 隔膜
第３図
第 ４ 図
第５図FIG. 1 is a sectional view showing a magnetic disk according to an embodiment of the present invention, FIG. 2 (8) shows the AK output of the magnetic disk according to an embodiment of the present invention, and FIG. 3 is a cross-sectional configuration diagram showing a general magnetic disk device, FIG. 4 is an enlarged sectional configuration diagram of the main parts of the device in FIG. 3 when it is in operation, and FIG. 5 is a diagram showing the device in FIG. An enlarged cross-sectional diagram of the main parts of the time,
FIG. 6 is a sectional view showing a conventional magnetic disk, and FIG.
) is a waveform diagram showing the friction output of a conventional magnetic disk. In the figure, (1) is a magnetic disk, C2) is a substrate, (
3) is a magnetic film, (4) is a diamond-like carbon protective film, (
5) is a diaphragm. In the drawings, the same reference numerals indicate the same or equivalent parts. Masuo Oiwa No. 1 Figure 1 Ishikasa Keiji Bar Matari 2 Base 3.5 Magnetic Pillar Akebono 4 and 9 - Iyamashito "Relation Q1 Kaya Akebono 5 Diaphragm Figure 3 Figure 4 Figure 5
Claims (1)
保護膜との間に炭化水素分解の触媒機能を持たないモリ
ブデンまたはタングステンの隔膜を設けた磁気ディスク
。A magnetic disk in which a molybdenum or tungsten diaphragm, which does not have a catalytic function for hydrocarbon decomposition, is provided between a magnetic film and a diamond-like carbon protective film formed on the magnetic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10167088A JPH01273215A (en) | 1988-04-25 | 1988-04-25 | Magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10167088A JPH01273215A (en) | 1988-04-25 | 1988-04-25 | Magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01273215A true JPH01273215A (en) | 1989-11-01 |
Family
ID=14306804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10167088A Pending JPH01273215A (en) | 1988-04-25 | 1988-04-25 | Magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01273215A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5562982A (en) * | 1992-09-30 | 1996-10-08 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium |
| KR100370768B1 (en) * | 1995-10-24 | 2003-03-29 | 삼성전자 주식회사 | Disk device of hard disk drive |
-
1988
- 1988-04-25 JP JP10167088A patent/JPH01273215A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5562982A (en) * | 1992-09-30 | 1996-10-08 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium |
| US5679454A (en) * | 1992-09-30 | 1997-10-21 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium |
| KR100370768B1 (en) * | 1995-10-24 | 2003-03-29 | 삼성전자 주식회사 | Disk device of hard disk drive |
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