JPH01272944A - Fine moving device - Google Patents

Abstract

PURPOSE:To facilitate the manufacture, to obtain a high speed reduction rate, and to reduce the size of the device by combining a plane base, a swing base having a radius work surface which is worked at the same time, and a plane plate material which can be bent. CONSTITUTION:When a linear motor 6 is moved forth as shown by an arrow C, a swing element 2 made of a magnetic body rolls by an angle theta as shown by a two alternate long and two short dashes line and the point where the swing element abuts on the plane base 1 moves from a point A1 to a point B1. Then the radius-R surface of the swing element 2 is pressed strongly with the magnetic force from the plane base 1 and rolls without slipping. Further, the plate material 3 made of a nonmagnetic body which can be bent is fitted to an end part of a surface having a radius (r) concentrically (point A) with the radius R. Then the center point of the radii R and (r) right above the abutting point also moves from a point A to a point B, and while the plate material 3 is wound around the (r) formation surface 2a of the swing element 2 on the side where it is fixed to the swing element 2, its opposite end part 3a moves forth slightly along the plane base 1 as shown by the arrow C. A body to be moved is connected to the side of this end part 3a and then moved finely with accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a fine movement device used for adjusting the position of an optical lens in a precision measuring device, a semiconductor manufacturing device, etc., and a sample moving device.

[Conventional technology]

FIG. 3 is a sectional view showing a conventional fine movement device, in which the moving table 7
A bellows-like flexible member 8 that can be expanded and contracted in the axial direction is integrally formed or fixed near the outer periphery of the holder, and the end seat 9 is connected to the upper surface of the fixing base 15, and the bolt 10 is Fixed. A first nut 11 for a ball screw is fixed with a bolt 12 at the center of the abdomen of the movable table 7, and a fixed table 15 under the extension of the axis of this first nut 11 is also a nut for a ball screw. The second nut 13 is inserted and fixed with the bolt 14. Note that the thread pitch P1 of the first nut 11 is slightly smaller than the thread pitch P2 of the second nut 13. 14 is a ball, which is connected to the first and second nuts 11 with its center as a border.
．． Ball screw 14 with pitch P and P2 screwed together with 13
a, 14b are formed. The shaft end of the ball screw 14 is connected to a drive motor with a reduction gear (not shown).

The conventional fine movement device has the above structure, and the starting position (bottom dead center) of the moving table 7 starts from a state where the flexible member 8 is slightly extended, and the required maximum movement amount is The internal stress of 8 is within the elastic limit, and within that range, the moving table 7 moves up and down (fine movement) by forward and reverse drive of the motor.
The amount of movement is, for example, PI = P2
In the case of 0.1 mm, the ball screw I4 moves 0.1+mn every time it rotates.

[Problem to be solved by the invention]

With the conventional fine-movement equipment described above, it is necessary to process slightly different pitches continuously and with high precision, especially in the production of ball screws and nuts. In addition, there were problems such as the overall size of the device.

This invention was made in order to solve these problems, and it is an object of the present invention to provide a precision fine movement device that facilitates the manufacture of the device, provides a high reduction ratio (fine movement), and makes the entire device compact. With the goal.

[Means to solve the problem]

The w1 motion device according to the invention of B is provided with an elastically bendable plate material sandwiched between a flat table and an oscillator that moves while being pressed against the outer peripheral surface of (radius), and one end of the plate material is It is fixed to a molding surface with a radius slightly smaller than the radius R of the oscillator, and the other end is connected to the object to be moved.

[Effect]

In this invention, since the radius R and r surface of the rocker can be machined simultaneously, a machined surface with minute steps and high precision can be easily obtained.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a cross-sectional view showing one embodiment of the present invention. In the figure, numeral 1 is a flat table in which a permanent magnet (not shown) is embedded. Reference numeral 2 denotes an oscillator made of a magnetic material, and the surface of the approximately radius is strongly pressed by the magnetic force from the flat table 1, making it possible to move the oscillator without slipping.

Further, a radius r is formed concentrically with the radius R (point A), and a plate member 3, which is an elastically bendable planar non-magnetic material, is attached to the end of the surface with fixing screws 4. The thickness of this plate material 3 is slightly smaller than the (R-r) dimension. on the other hand,
An arm portion 2b for providing transfer is provided at the upper center of the rocker 2, and its end portion is attached to a gate-shaped frame 5 or connected to a near motor 6. As shown in FIG. 2, which shows the side view of FIG.
It is fixed to the flat table 1 while serving as a guide to roll it in a certain direction. Further, the plate 3 is movable while being guided by the recess at the center of the bottom of the rocker 2.
The end portion 3a side is connected to a moving object (not shown).

Next, the operation will be explained. In FIG. 1, when the linear motor 6 is moved forward in the direction of arrow C, the oscillator 2 moves at an angle θt! as shown by the two-dot chain line. The contact point between the oscillator 2 and the flat table 1 moves from point A1 to point Bl. The center point of the radius R, which is perpendicular to this contact point, similarly moves from point A to point B, and the amount of movement is θR (the unit of θ is radian). At this time, the plate material 3 is wound along the r-shaped surface 2a of the oscillator 2 from the side fixed to the oscillator 2, and the opposite end 3a is wrapped along the upper surface of the flat base 1 as shown by the arrow. Move forward slightly in the C direction. Its advance amount 1
2 becomes θR-θr=θ(R-r). Therefore, the amount of movement 11 of the center point in the radius R and the plate material 3, for example, R=
When molded to 1000 mm and r = 999.9 mm, I2 is 1 / 10000 for a motion of 11
= 0.1μ. That is, if the object to be moved is connected to the end portion 3a side of the plate material 3, it becomes possible to move the object to be moved slightly with high accuracy.

In addition, as a means for bringing the R surface of the oscillator 2 into contact with the flat table 1, a permanent magnet was installed on the flat table 1. However, a pair of electromagnets were installed before and after the flat table to attract the surface and to adjust the current value. It can also be controlled and driven. Alternatively, the structure may be such that the frame 5 presses the oscillator 2 via a spring. For driving, a linear motor is used in the upper part, but a cylinder using air or liquid pressure, a temperature-sensitive actuator that applies thermal expansion of an object, a piezoelectric element, a magnetostrictive element, etc. can also be used.

Further, in the above embodiment, the present invention is applied to precision measuring equipment, semiconductor manufacturing equipment, etc., but the arm portion 2b of the oscillator 2 shown in FIG. It is also applicable to pressing, attaching a cutting blade or the like to the end 3a of the plate material 3, and performing trial cutting or movement while using a microscope. Furthermore, if the table to be moved is heavy, it is also possible to attach the two sets of fine movement devices to the object to be moved, facing each other, and use the plate while constantly applying tension to the plate.

〔Effect of the invention〕

As described above, according to the present invention, the structure is simply a combination of a rocking table having R and R processing surfaces that can be processed simultaneously with a flat table, and a flat plate material that can be elastically bent. In addition to obtaining fine movement with a high reduction ratio, processing, assembly, and maintenance are extremely easy, and the device can be made smaller and lighter, resulting in an inexpensive device.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a side view thereof, and FIG. 3 is a longitudinal sectional view showing a conventional fine movement device. In the figure, 1 is a flat table, 2 is an oscillator, 2 is a bar molding surface, 3 is a plate, the end opposite to 3al, 4 is a fixing screw, 5 is a frame, and 6 is a linear motor.

Claims (1)

[Claims] On the plane table, a surface concentric with the radius R and having a smaller radius than the radius R is formed on the contact side of the rocker which rolls while being pressed against the outer peripheral surface of the radius R, and at one end of the molded surface, An elastically bendable planar plate is fixed along the forming surface of the r, and an end of the plate opposite to the fixed side is movable in parallel with the flat table. Fine movement device.