JP3989324B2 - Displacement fine adjustment device - Google Patents

Description

[0001]
[Technical field to which the invention belongs]
The present invention, for example, in a grinding apparatus, when a tool or a workpiece is moved by a minute amount to perform grinding with high accuracy, the tool or workpiece can be moved and positioned by a minute amount with high accuracy, Alternatively, the present invention relates to a displacement amount fine-tuning device that can be used in various positioning tables and electron microscopes in genetic engineering, especially when finely adjusting a displacement amount in the order of nm (nano meter, 10 ⁻⁹ m). It is related with what was devised so that the precision of can be improved.
[0002]
[Prior art]
As a displacement amount fine adjustment device, for example, there is one disclosed in JP-A-2001-347436. This is due to the applicant of the present patent application, and there is disclosed a displacement fine adjustment device having the following configuration.
First, a pair of elastic members are arranged, and one ends of the pair of elastic members are connected to the fixed portion. The other ends of the pair of elastic members are connected to the moving part. The moving part is connected to the fixed part via a pair of girder members so as to be slightly displaceable.
[0003]
Further, a drive plate is connected and arranged between the pair of elastic members, and the drive plate is driven by drive means such as a micrometer provided separately to elastically displace the pair of elastic members, Thereby, the moving part is moved by a minute amount via the pair of beam members.
This will be described in detail. In an initial state, the pair of elastic members are in an elastic return state, that is, an elastic force is not accumulated. On the other hand, the center of the drive plate is slightly curved in the counter-pressing direction.
[0004]
In this state, when the driving means is driven and the driving plate is pressed, the driving plate is displaced from a curved state to a straight state, whereby the pair of elastic members are elastically displaced outward. Due to the elastic displacement of the pair of elastic members, the moving part moves a minute amount via the pair of girder members (see Patent Document 1).
[0005]
[Patent Document 1]
JP 2001-347436 A
[Problems to be solved by the invention]
The conventional configuration has the following problems.
That is, in the case of the conventional displacement amount fine adjustment device, the moving portion is configured to be displaced via the pair of girder members. In other words, the pair of girder members are elastically deformed. At this time, the pair of girder members are elastically deformed, so that the size of the gap between the moving portion and the fixed portion varies. When viewed in the vertical direction, the height of the moving part will fluctuate.
Such fluctuation hardly causes a problem when the displacement amount is small, but the fluctuation also becomes large when the displacement is relatively large. Therefore, there is a problem when it is desired to secure a relatively large displacement stroke.
[0007]
The present invention has been made based on such points, and the object of the present invention is to prevent the distance between the moving portion and the fixed portion from fluctuating due to elastic deformation of the girder member. Another object of the present invention is to provide a displacement amount fine adjustment device that can ensure a relatively large stroke.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, a displacement amount fine adjustment device according to claim 1 of the present invention includes a pair of elastic members opposed to each other, a fixed portion in which one ends of the pair of elastic members are connected, and the pair of elastic members. The elastic member is connected to the other end of the elastic member and connected to the fixed portion via a girder member. The moving portion is slightly displaced by the elastic deformation of the pair of elastic members, and the pair of elastic members. A displacement amount fine adjustment device comprising: a drive unit that elastically deforms the member to slightly displace the moving unit; and the drive unit includes a drive plate that is connected and arranged between the pair of elastic members. And a pressing means for pressing the drive plate , wherein the drive plate is set in a state of being pushed out in the pressing direction by a small amount in the initial state, and the pair of elastic members is in the initial state in the initial state. Fine by the drive plate It is set in a state where it is pulled by a small amount, and the driving plate is further pushed out by the pressing means of the driving means to pull the pair of elastic members in a direction approaching each other, thereby slightly moving the moving part. And the moving part is always in pressure contact with the fixed part side in a direction perpendicular to the moving direction.
The displacement fine adjustment device according to claim 2 is the displacement fine adjustment device according to claim 1, wherein the girder member is configured as a member having a spring force, and the moving portion is fixed by the spring force. It is characterized by always being in pressure contact with the side.
According to a third aspect of the present invention, there is provided the fine displacement amount adjusting device according to the second aspect, wherein the girder member is formed in a curved shape so as to exert a spring force, The urging member is inserted against the spring force of the girder member between the fixed portion and the movable portion is always pressed against the fixed portion side by the spring force of the girder member. It is what.
According to a fourth aspect of the present invention, there is provided the fine displacement amount adjusting device according to the third aspect, wherein the biasing member is fixed to the moving portion side and the fixed portion side. It is comprised from the fixed part side biasing member fixed, It is comprised so that these movement part side biasing members and fixed part side biasing members may be slidably contacted.
According to a fifth aspect of the present invention, in the fine displacement amount adjusting device according to any one of the first to fourth aspects, the driving means is driven by a drive motor. Is.
[0009]
That is, the displacement fine adjustment device according to the present invention includes a pair of opposing elastic members, a fixed portion in which one end of the pair of elastic members is continuously provided, and the other end of the pair of elastic members in a continuous manner. And a moving part that is connected to the fixed part via a girder member and is slightly displaced via the girder member by elastic deformation of the pair of elastic members, and the movement by elastically deforming the pair of elastic members. A displacement amount fine adjustment device comprising a driving means for minutely displacing the part, wherein the moving part is configured to be constantly pressed against the fixed part side in a direction perpendicular to the moving direction. With this, it is possible to prevent fluctuations in the distance between the moving part and the fixed part.
At that time, as a configuration in which the girder member is provided with a spring force, it is conceivable that the moving portion is always pressed against the fixed portion side by the spring force.
Specifically, for example, the girder member is formed in a curved shape so that a spring force can be exerted, and a biasing member is interposed between the moving portion and the fixed portion against the spring force of the girder member. It can be considered that the moving part is always pressed against the fixed part side by the spring force of the girder member.
As an example of the configuration of the urging member, the urging member is composed of a moving part side urging member fixed to the moving part side and a fixed part side urging member fixed to the fixed part side. The movable portion side urging member and the fixed portion side urging member are configured to be in sliding contact with each other.
In addition, various types of driving means are conceivable. For example, it may be driven by a driving motor.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a plan view showing an overall configuration of a displacement fine adjustment device according to the present embodiment. First, a pair of elastic members 1 and 1 are provided, and one end (right end in FIG. 1) of these pair of elastic members 1 and 1 is connected to the fixed portion 3 side. On the other hand, the other end (left end in FIG. 1) of the pair of elastic members 1, 1 is connected to the moving unit 5.
[0011]
Although it is the said moving part 5, as shown in FIG. 1 thru | or FIG. 4, it is a block shape and it is a X-axis direction (FIG. 1, FIG. 2) with respect to the fixing | fixed part 3 via a pair of girder members 7 and 7. It is attached so that it can move in the middle and left and right directions. The pair of beam members 7 and 7 are extended in a direction (vertical direction in FIG. 1) orthogonal to the X-axis direction.
[0012]
The pair of elastic members 1, 1 are configured to be elastically deformed by the driving means 9. The driving means 9 includes a driving plate 11 connected and arranged between the pair of elastic members 1 and 1, and a stepping motor 13 as a pressing means for pressing the driving plate 11 via a pressing shaft portion 12. It is composed of
In this embodiment, a configuration in which the stepping motor 13 is used as the pressing means and driven by an automatic operation is described as an example. However, this may be performed manually using a micrometer or the like. .
[0013]
FIG. 2 shows an enlarged view of the drive plate 11 of the pair of elastic members 1 and 1 and the drive means 9. As shown in FIG. 2, the pair of elastic members 1 and 1 are set in a state of being pulled in a direction approaching each other in an initial state. The driving plate 11 of the driving means 9 is set in a state where it is previously pressed in the left direction in FIG.
1 and 2 show the pair of elastic members 1 and 1 and the drive plate 11 in an extremely curved state for the sake of easy understanding. A predetermined minute amount (L ₁ ) is pulled in a direction approaching each other, and the drive plate 11 is set in a state of being pressed by a predetermined minute amount (L ₂ ) in the left direction in the drawing.
[0014]
The reason for setting the initial state as described above is as follows. In other words, conventionally, the moving portion is moved by curving the pair of elastic members away from each other by compressing the drive plate outward by the pressing means. However, in this case, the drive plate is buckled, which causes a problem that the elastic displacement of the pair of elastic members and, consequently, the accuracy of movement of the moving portion is lowered.
[0015]
Therefore, in the case of this embodiment, such a compression method is stopped and a tension method is adopted. That is, the moving portion 5 is moved by pressing the drive plate 11 by the stepping motor 13 as the pressing means and pulling the pair of elastic members 1 and 1 in a direction approaching each other. As a result, the drive plate 11 is tensioned rather than compressed, and the buckling due to compression, which has been a problem in the past, is eliminated, and the problems due to buckling can be eliminated.
[0016]
As described above, in the initial state, the pair of elastic members 1 and 1 are already set in a state where they are pulled inward by a predetermined minute amount (L ₁ ). Similarly, the drive plate 11 is also set in a state where a predetermined minute amount (L ₂ ) is pressed by a stepping motor 13 as a pressing means. This is due to the following reason.
[0017]
That is, if the pair of elastic members 1 and 1 are set in a straight state, that is, in a state where they are not pulled in any direction, when the tension starts to act in such a state, in the initial stage of operation, There is a possibility that the displacement of the pair of elastic members 1 and 1 becomes irregular. On the other hand, if it is set in a state where it is pulled in advance by a predetermined minute amount (L ₁ ) as in the present embodiment, the elastic displacement at the initial stage of operation becomes stable, and eventually the moving part 5 The accuracy of the displacement is also stabilized.
[0018]
Further, the reason why the drive plate 11 is set in a state where it is pressed by a predetermined minute amount (L ₂ ) in the initial state is the same, in order to stabilize the displacement of the drive plate 11 at the initial stage of operation. Thereby, the elastic displacement of the pair of elastic members 1 and 1, that is, the accuracy of movement of the moving unit 5 is intended to be improved.
[0019]
Further, as shown in FIGS. 1 and 2, the drive plate 11 is provided with thick portions 15 and 15 on both sides of a pressing portion by a stepping motor 13 as a pressing means. The thick portions 15 and 15 are thin portions 17 and 17 on both sides. By adopting such a configuration, the left and right balance of the elastic displacement of the drive plate 11 is balanced, whereby the displacement of the pair of elastic members 1 and 1 is balanced and the movement of the moving unit 5 is performed. It is intended to improve the accuracy of.
The pair of elastic members 1, 1, the fixed portion 3, the moving portion 5, the drive plate 11 of the drive means 9, etc. are all integrally formed from a steel material that has been subjected to a quenching process. It is manufactured by high-precision cutting using a cut electrical discharge machine or a laser machine. Holes indicated by reference numerals 8 and 8 in the figure indicate holes to be drilled when machining with a wire cut electric discharge machine.
[0020]
A displacement detection sensor 25 is installed on the left side of the moving unit 5 in FIG. The displacement detection sensor 25 includes a sensor main body 27 and a contact 29 that protrudes and is arranged from the sensor main body 27. The contact 29 is in contact with and disposed with respect to the moving unit 5, and the contact 29 is moved by the movement of the moving unit 5, thereby detecting the amount of displacement of the moving unit 5.
[0021]
Next, the pair of girder members 7 and 7 already described will be described in detail. As shown in FIG. 6 (a), the girder members 7 and 7 are formed so as to be curved outward so as to exhibit a spring force. A pair of urging means 51 and 51 are interposed between the lower surface of the moving unit 5 and the fixed unit 3. By inserting the pair of biasing means 51, 51, the moving unit 5 is set slightly lifted against the spring force of the pair of girder members 7, 7. Thereby, the moving part 5 is set in a state in which it is always pressed against the fixed part 5 side by the spring force of the pair of beam members 7 and 7. By adopting such a configuration, even when the moving unit 5 is displaced in the X-axis direction, the moving unit 5 is always pressed against the fixed unit 5 side and is held at the same height position.
[0022]
As shown in FIG. 6A, the urging means 51 includes a moving part side urging member 53 adhered and fixed to the moving part 5 side and a fixed part side attached and fixed to the fixed part 3 side. And a force member 55. The moving part side urging member 53 and the fixed part side urging member 55 are brought into sliding contact with the surfaces 53a, 55a opposed to each other.
[0023]
The operation will be described based on the above configuration.
First, at the initial stage, the moving unit 5 returns to the left side in FIGS. At this time, the pair of girder members 7 and 7 are in a state as shown in FIG. That is, the pair of girder members 7 and 7 are slightly inclined to the left side in FIG.
From this state, the slider 21 is moved to the left in FIG. As a result, the drive plate 11 is further pressed from the state shown in FIGS. 1 and 2 and deformed into a convexly curved state on the left side in the drawing.
[0024]
Here, the deformation of the drive plate 11 will be described in detail. Since the drive plate 11 is provided with thick portions 15 and 15 on the left and right, when pressed as described above, both sides of the thick portions 15 and 15, that is, the central thin portion 17 respectively. The three portions of the thin-walled portions 17 and 17 outside the thick-walled portions 15 and 15 are specified as portions that are more easily deformed. Thus, by positively specifying the deformed portion at the center portion and the left and right end portions, it is possible to balance the left and right deformations, thereby balancing the elastic deformation of the pair of elastic plates 1 and 1. As a result, the accuracy of the minute displacement of the moving part 5 can be improved.
[0025]
Due to the elastic deformation of the drive plate 11, the pair of elastic members 1 and 1 are pulled and curved in a direction closer to each other from the state shown in FIG. 1. As a result, the moving unit 5 is slightly displaced toward the right side in FIGS. That is, as shown in FIG. 6 (b), the pair of girder members 7 and 7 are deformed from the state inclined to the left side as shown in FIG. 6 (a) to the right side. Thereby, the moving part 5 is slightly displaced toward the right side in FIG. The minute displacement of the moving unit 5 is detected by the displacement amount detection sensor 25. Moreover, the state which moved further from the state shown in FIG.6 (b) is shown in FIG.6 (c).
Incidentally, the state shown in FIG. 6A is the origin position, the state shown in FIG. 6B is the 1/2 stroke position, and the state shown in FIG. 6C is the full movement stroke position. The pair of girder members 7 and 7 are inclined to the left in the drawing at the origin position, the pair of girder members 7 and 7 are in a neutral state at the 1/2 stroke position, and the pair of girder members 7 and 7 are at the full stroke position. The girder members 7 and 7 are inclined to the right in the figure.
[0026]
When the stepping motor 13 is rotated in the reverse direction from the above state, the slider 21 moves to the right in FIGS. As a result, the drive plate 11 gradually returns to the state shown in FIGS.
[0027]
Due to the deformation of the drive plate 11, the pair of elastic members 1, 1 also gradually return to the state shown in FIGS. 1 and 2, whereby the moving part 5 is slightly displaced toward the left side in FIGS. Will do. The minute displacement of the moving unit 5 is detected by the displacement amount detection sensor 25. Further, the change in the pair of girder members 7 and 7 at that time returns to the original state in the order of FIGS. 6C to 6B to 6A.
[0028]
Further, when the moving unit 5 is displaced, the moving unit 5 is constantly pressed against the fixed unit 5 side. That is, the height of the moving unit 5 is always kept constant.
[0029]
As described above, according to this embodiment, the following effects can be obtained.
First, when the moving part 5 is slightly displaced, the moving part 5 is always pressed against the fixed part 5 by the spring force of the pair of girder members 7 and 7, so that the height of the moving part 5 does not change. . Thereby, the precision of the minute displacement can be increased.
In addition, the range of use can be expanded, such as being able to be used even with relatively large strokes.
In the case of this embodiment, the urging means 51 is composed of two members, ie, a moving part side urging member 53 and a fixed part side urging member 55, and as a result, each moving part side The urging member 53 and the fixed portion side urging member 55 need only be able to provide only the smoothness of the one side 53a, 55a with high accuracy, and can be processed more easily.
[0030]
The present invention is not limited to the one embodiment.
First, in the one embodiment, the pair of girder members 7 and 7 are configured to exert a spring force. However, a separate elastic member may be arranged to press the moving portion by the elastic force of the elastic member. Conceivable.
In the case of the above-described embodiment, a pair of urging means is provided. However, the urging means is not limited to this and may be one, three or more.
Further, although the urging means is composed of a pair of urging members, it is conceivable to use this as one urging member.
Further, in the case of the one embodiment, the case of the uniaxial type has been described as an example, but the present invention can be similarly applied to the biaxial type.
[0031]
【The invention's effect】
As described above in detail, according to the displacement amount fine adjustment device according to the present invention, when the moving portion is slightly displaced, the distance between the moving portion and the fixed portion changes because it is always pressed against the fixed portion side. There is no. Thereby, the precision of the minute displacement can be increased.
In addition, the range of use can be expanded, such as being able to be used even with relatively large strokes.
Further, when the urging means is composed of two members, the moving part side urging member and the fixed part side urging member, each moving part side urging member and the fixed part side urging member are It suffices if only the smoothness of one side can be provided with high accuracy, and the processing becomes easier.
[Brief description of the drawings]
FIG. 1 is a diagram showing an embodiment of the present invention, and is a plan view showing an overall configuration of a displacement fine adjustment device.
FIG. 2 is a diagram showing an embodiment of the present invention, and is an enlarged view of a portion II in FIG.
FIG. 3 is a diagram showing an embodiment of the present invention, and is a view taken in the direction of arrows III-III in FIG. 1;
4 is a diagram showing an embodiment of the present invention, and is a cross-sectional view taken along the line IV-IV in FIG.
FIG. 5 is a diagram showing an embodiment of the present invention, and is a view taken along the line VV in FIG. 1;
6A and 6B are diagrams showing an embodiment of the present invention, in which FIG. 6A is an enlarged cross-sectional view showing a part a in FIG. 4, and FIGS. 6B and 6C are states of operation; FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Elastic member 3 Fixed part 5 Moving part 7 Girder member 9 Drive means 11 Drive plate 13 Stepping motor 15 Thick part 17 Thin part 51 Plate-like member

Claims (5)

A pair of opposing and disposed elastic members;
A fixing portion in which one end of the pair of elastic members is continuously provided;
The other end of the pair of elastic members is provided continuously, and a moving portion that is provided continuously to the fixed portion via a girder member and that is slightly displaced by the elastic deformation of the pair of elastic members;
Driving means for elastically deforming the pair of elastic members to slightly displace the moving unit;
In the displacement fine adjustment device comprising:
The driving means is composed of a driving plate arranged and arranged between the pair of elastic members, and a pressing means for pressing the driving plate,
The drive plate is set in a state where it is pushed out by a small amount in the pressing direction in the initial state, and the pair of elastic members are set in a state where the drive plate is pulled by a small amount in the initial state,
The driving part is further pushed out by the pressing means of the driving means, and the moving portion is slightly displaced by pulling the pair of elastic members in a direction approaching each other,
The displacement fine adjustment device according to claim 1, wherein the moving part is always in pressure contact with the fixed part side in a direction orthogonal to the moving direction. The displacement fine adjustment device according to claim 1,
The girder member is configured as a member having a spring force, and the displacement amount fine adjustment device is characterized in that the moving portion is always pressed against the fixed portion by the spring force. The displacement fine adjustment device according to claim 2,
The girder member is formed in a curved shape so that a spring force can be exerted, and an urging member is interposed between the moving part and the fixed part against the spring force of the girder member, thereby The displacement fine adjustment device characterized in that the moving part is always pressed against the fixed part side by the spring force of the girder member. In the displacement fine adjustment device according to claim 3,
The urging member is composed of a moving part side urging member fixed to the moving part side and a fixed part side urging member fixed to the fixed part side, and is fixed to the moving part side urging member. A displacement amount fine adjustment device characterized in that the part side biasing member is slidably contacted. In the displacement amount fine adjustment device according to any one of claims 1 to 4,
The displacement fine adjustment device according to claim 1, wherein the drive means is driven by a drive motor.

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