JPH01269259A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH01269259A
JPH01269259A JP9854488A JP9854488A JPH01269259A JP H01269259 A JPH01269259 A JP H01269259A JP 9854488 A JP9854488 A JP 9854488A JP 9854488 A JP9854488 A JP 9854488A JP H01269259 A JPH01269259 A JP H01269259A
Authority
JP
Japan
Prior art keywords
layer
magneto
optical recording
recording medium
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9854488A
Other languages
Japanese (ja)
Inventor
Kenji Torasawa
虎沢 研示
Satoshi Washimi
聡 鷲見
Yasuko Fuchigami
淵上 靖子
Sadao Sakamoto
阪本 貞夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP9854488A priority Critical patent/JPH01269259A/en
Publication of JPH01269259A publication Critical patent/JPH01269259A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve characteristics and to reduce cost by using broad materials by providing a 1st layer having tensile stress and the 2nd layer having compressive stress to the magneto-optical medium constituted by laminating and forming plural films on a substrate. CONSTITUTION:The magnetic recording layer 2 consisting of TbFeCo is formed on the substrate 1 consisting of a polycarbonate resin. An Si2N4 film 3 is formed as the 1st layer having the tensile stress on the magnetic recording layer 2 and further, a UV curing resin layer 4 is formed as the 2nd layer having the compressive stress thereon. The camber of the substrate 1 is thus decreased and the use of the Si2N4 film 3 as the protective film of the magnetic recording layer 2 is enabled. The characteristics are, therefore, improved and the cost is reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光磁気記録媒体に関し、更に詳述すればその多
層構造の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magneto-optical recording medium, and more specifically to an improvement in its multilayer structure.

〔従来技術〕[Prior art]

光磁気記録媒体は、磁性記録層の保護及び特性の向上を
図るため、誘電体層又は金属層を設けた多層構造にて形
成される。例えば特開昭60−131659号公報には
磁性記録層の酸化劣化を防止するために、SiJm保護
層を設けたものが開示されており、特公昭62−274
58号公報には、レーザ光により加熱される磁性記録層
の放射層としてSi+Na層を設け、磁性記録層の特性
の向上を図ったものが開示されている。
Magneto-optical recording media are formed with a multilayer structure including dielectric layers or metal layers in order to protect the magnetic recording layer and improve its characteristics. For example, Japanese Patent Publication No. 60-131659 discloses a magnetic recording layer provided with a SiJm protective layer in order to prevent oxidative deterioration;
Japanese Patent No. 58 discloses a structure in which a Si+Na layer is provided as a radiation layer of a magnetic recording layer heated by laser light to improve the characteristics of the magnetic recording layer.

また一般に光磁気記録媒体のカー効果は小さいので、多
層構造にすることにより、カー効果を大きくすることが
例えば「日本応用磁気学会誌J Vol。
Furthermore, since the Kerr effect of magneto-optical recording media is generally small, it is possible to increase the Kerr effect by creating a multilayer structure, for example, as described in "Journal of the Japan Society of Applied Magnetics J Vol.

9.11h2.1985.105頁に記載されている。9.11h2.1985, page 105.

このように光磁気記録媒体においては、従来多層構造と
することが多かった。
As described above, magneto-optical recording media have conventionally often had a multilayer structure.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら光磁気記録媒体を多層構造とした場合に、
各層の内部応力によって光磁気記録媒体に反りが生じる
ことがある。一般に光磁気記録媒体では、反りの角度を
光学ヘッドの性能的要求から5 mrad以下にする必
要示ある。このため多層膜の成膜条件の制御が困難とな
り、また内部応力の大きな材料を使用できないという問
題があった。
However, when the magneto-optical recording medium has a multilayer structure,
Warpage may occur in the magneto-optical recording medium due to internal stress in each layer. Generally, in magneto-optical recording media, it is necessary to keep the angle of warpage to 5 mrad or less in view of the performance requirements of the optical head. This makes it difficult to control the conditions for forming a multilayer film, and there is also the problem that materials with large internal stress cannot be used.

本発明は斯かる事情に鑑みなされたものであり、引張応
力を有する層と圧縮応力を有する層とを組合せることに
より、多層膜の各別の内部応力による反りの発生を抑制
し、材料選択の幅を拡大し、その特性の向上及びコスト
低減を可能とした光磁気記録媒体を提供することを目的
とする。
The present invention was made in view of the above circumstances, and by combining a layer with tensile stress and a layer with compressive stress, it is possible to suppress the occurrence of warping due to the internal stress of each multilayer film, and to improve material selection. It is an object of the present invention to provide a magneto-optical recording medium that can expand the width of the recording medium, improve its characteristics, and reduce its cost.

〔課題を解決するための手段〕[Means to solve the problem]

本発明に係る光磁気記録媒体は、基板上に複数の膜を積
層形成してある光磁気記録媒体において、引張応力を有
する第1層と、圧縮応力を有する第2層とを具備するこ
とを特徴とする。
A magneto-optical recording medium according to the present invention is a magneto-optical recording medium in which a plurality of films are layered on a substrate, and includes a first layer having tensile stress and a second layer having compressive stress. Features.

〔作用〕[Effect]

基板上に形成された引張応力を有する第1層によって基
板は膜面側から基板側に反りを生じようとする。一方圧
縮応力を有する第2層によって基板は基板側から膜面側
に反りを生じようとする。
The first layer having tensile stress formed on the substrate tends to cause the substrate to warp from the film surface side to the substrate side. On the other hand, due to the second layer having compressive stress, the substrate tends to warp from the substrate side to the film surface side.

従って第1層及び第2層によって基板は平衡状態となり
反りを減少させる。
Therefore, the first and second layers bring the substrate into equilibrium and reduce warping.

〔実施例〕〔Example〕

以下本発明をその実施例を示す図面に基づき詳述する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below based on drawings showing examples thereof.

第1図は本発明に係る光磁気記録媒体の一実施例を示す
模式的断面図であり、lはポリカーボネート樹脂又はア
クリル樹脂等の透明樹脂からなる基板であり、該基板1
上にはTbFeCoT iからなる磁性記録層2、保護
層であるSi3N4膜3及びオーバコート層である紫外
線硬化樹脂層4がこの順で積層されている。
FIG. 1 is a schematic cross-sectional view showing one embodiment of the magneto-optical recording medium according to the present invention, where l is a substrate made of a transparent resin such as polycarbonate resin or acrylic resin;
A magnetic recording layer 2 made of TbFeCoTi, a Si3N4 film 3 serving as a protective layer, and an ultraviolet curing resin layer 4 serving as an overcoat layer are laminated thereon in this order.

また第2図〜第5図は本実施例の効果を確認するために
行った2種類の光磁気記録媒体を示す図であり、第2図
は引張応力を有する材料を積層した光磁気記録媒体を示
す模式的断面図、第3図は第2図に示す光磁気記録媒体
の反り状態を示す模式的斜視図、第4図は圧縮応力を有
する材料を積層した光磁気記録媒体を示す模式的断面図
、第5図は第4図に示す光磁気記録媒体の反り状態を示
す模式的斜視図である。
Furthermore, Figures 2 to 5 are diagrams showing two types of magneto-optical recording media used to confirm the effects of this example, and Figure 2 is a magneto-optical recording medium in which materials having tensile stress are laminated. FIG. 3 is a schematic perspective view showing a warped state of the magneto-optical recording medium shown in FIG. The cross-sectional view, FIG. 5, is a schematic perspective view showing a warped state of the magneto-optical recording medium shown in FIG. 4.

第2図に示す光磁気記録媒体は実施例の紫外線硬化樹脂
層4を積層していない場合を示し、厚さ1.2mm、直
径120 mmのポリカーボネート樹脂の基板1上にT
bPeCo 900人厚0磁性記録層2及び800人厚
人厚tJ、膜3を成膜したものである。
The magneto-optical recording medium shown in FIG. 2 shows the case where the ultraviolet curable resin layer 4 of the example is not laminated, and a T film is placed on a polycarbonate resin substrate 1 with a thickness of 1.2 mm and a diameter of 120 mm.
A magnetic recording layer 2 of bPeCo with a thickness of 900 mm and a film 3 with a thickness of tJ of 800 mm were formed.

Si3N4膜3は磁性記録層2の保護効果が大きいが、
内部応力が大きいため、基板の反りが発生しやすい。特
に基板にプラスチックを用いた場合は、基板の強度が弱
いため反りは顕著となる。この場合、第3図に示す如く
、光磁気記録媒体は5i)N4膜3の引張応力により基
板1を内壁とした碗状に反りを生じており、周縁部で最
大10mradの反り角が計測された。
Although the Si3N4 film 3 has a great protective effect on the magnetic recording layer 2,
Because the internal stress is large, the board is likely to warp. In particular, when plastic is used for the substrate, the strength of the substrate is weak, so warping becomes noticeable. In this case, as shown in FIG. 3, the magneto-optical recording medium is warped in the shape of a bowl with the substrate 1 as the inner wall due to the tensile stress of the 5i) N4 film 3, and a maximum warp angle of 10 mrad was measured at the periphery. Ta.

第4図に示す光磁気記録媒体は実施例の5iJ4膜3を
積層していない場合を示し、厚さ1.2mm、直径12
0龍のポリカーボネート樹脂の基板1上にTbFeCo
 900人厚0磁性記録層2及び10μm厚の紫外線硬
化樹脂層4を成膜したものである。
The magneto-optical recording medium shown in FIG. 4 shows the case where the 5iJ4 film 3 of the example is not laminated, and has a thickness of 1.2 mm and a diameter of 12 mm.
TbFeCo on substrate 1 made of polycarbonate resin
A magnetic recording layer 2 with a thickness of 900 mm and an ultraviolet curing resin layer 4 with a thickness of 10 μm were formed.

紫外線硬化樹脂層4は基Fi1に対して圧縮応力が働く
ため、第5図に示す如く光磁気記録媒体は基板1を外壁
とした碗状に反りを生じており、周縁部で最大6 mr
adの反り角が計測された。
Since compressive stress acts on the base Fi1 in the ultraviolet curing resin layer 4, the magneto-optical recording medium is warped in a bowl shape with the substrate 1 as the outer wall, as shown in FIG.
The warpage angle of ad was measured.

前述したことから明らかな如(543N4膜3及び紫外
線硬化樹脂層4は基板lに反対方向の反りを生じさせ、
その形状も略同様であることが知見された。そこで本発
明の光磁気記録媒体では両者を組合せ積層したので、反
り角を最大5 mrad以下に抑えることが可能となっ
た。
As is clear from the above (the 543N4 film 3 and the ultraviolet curing resin layer 4 cause the substrate l to warp in the opposite direction,
It was found that the shapes were also approximately the same. Therefore, in the magneto-optical recording medium of the present invention, both are combined and laminated, making it possible to suppress the warp angle to a maximum of 5 mrad or less.

このように本実施例では引張応力を有する第1層として
5iJn膜3を、また圧縮応力を有する第2層として紫
外線硬化樹脂N4を用いたので、基板1の反りを小さく
することが可能となり、磁性記録層2の保護膜として効
果の大きい5iJn使用が可能となった。
In this way, in this example, the 5iJn film 3 was used as the first layer having tensile stress, and the ultraviolet curing resin N4 was used as the second layer having compressive stress, so it was possible to reduce the warpage of the substrate 1. 5iJn, which is highly effective, can now be used as a protective film for the magnetic recording layer 2.

なお、本実施例では5iJ4膜と紫外線硬化樹脂層とを
組合せたが、本発明はこれに限るものではなく、引張応
力と圧縮応力とを有する層を組合せたものであれば広く
応用可能であることは言うまでもない。
Although the 5iJ4 film and the ultraviolet curing resin layer were combined in this example, the present invention is not limited to this, and can be widely applied as long as layers having tensile stress and compressive stress are combined. Needless to say.

〔効果〕〔effect〕

以上詳述した如く本発明の光磁気記録媒体によれば、多
層膜の各別の内部応力による反りを圧縮応力を有する層
と引張応力を有する層とを組合せることにより低減でき
、幅広い材料を用いて多層構造の光磁気記録媒体を作成
できると共に、その特性向上及びコスト低減を可能とす
る等価れた効果を奏する。
As detailed above, according to the magneto-optical recording medium of the present invention, warping due to internal stress of each layer of the multilayer film can be reduced by combining a layer with compressive stress and a layer with tensile stress, and a wide range of materials can be used. It is possible to create a magneto-optical recording medium with a multilayer structure by using the present invention, and the same effect can be achieved by making it possible to improve the characteristics and reduce the cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る光磁気記録媒体の一実施例を示す
模式的断面図、第2図は引張応力を有する材料を積層し
た光磁気記録媒体を示す模式的断面図、第3図は第2図
に示す光磁気記録媒体の反りの状態を示す模式的斜視図
、第4図は圧縮応力を有する材料を積層した光磁気記録
媒体を示す模式的断面図、第5図は第4図に示す磁気記
録媒体の反りの状態を示す模式的斜視図である。 l・・・基板 2・・・磁性記録層 3・・・SiJ、
膜4・・・紫外線硬化樹脂層 特 許 出願人  三洋電機株式会社 代理人 弁理士  河 野  登 夫 答  1 囚 算 2 図 簿 3 図 算 5 図
FIG. 1 is a schematic cross-sectional view showing an embodiment of a magneto-optical recording medium according to the present invention, FIG. 2 is a schematic cross-sectional view showing a magneto-optical recording medium laminated with materials having tensile stress, and FIG. FIG. 2 is a schematic perspective view showing the state of warpage of the magneto-optical recording medium, FIG. 4 is a schematic cross-sectional view showing the magneto-optical recording medium laminated with materials having compressive stress, and FIG. FIG. 3 is a schematic perspective view showing a warped state of the magnetic recording medium shown in FIG. l...Substrate 2...Magnetic recording layer 3...SiJ,
Membrane 4...Ultraviolet curable resin layer patent Applicant: Sanyo Electric Co., Ltd. Agent Patent attorney: Noboru Kono Answer 1. Prison calculation 2. Book 3. Illustration 5.

Claims (1)

【特許請求の範囲】 1、基板上に複数の膜を積層形成してある光磁気記録媒
体において、 引張応力を有する第1層と、圧縮応力を有する第2層と
を具備することを特徴とする光磁気記録媒体。
[Claims] 1. A magneto-optical recording medium in which a plurality of films are layered on a substrate, characterized by comprising a first layer having tensile stress and a second layer having compressive stress. magneto-optical recording medium.
JP9854488A 1988-04-20 1988-04-20 Magneto-optical recording medium Pending JPH01269259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9854488A JPH01269259A (en) 1988-04-20 1988-04-20 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9854488A JPH01269259A (en) 1988-04-20 1988-04-20 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH01269259A true JPH01269259A (en) 1989-10-26

Family

ID=14222629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9854488A Pending JPH01269259A (en) 1988-04-20 1988-04-20 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH01269259A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61133067A (en) * 1984-11-30 1986-06-20 Tdk Corp Optomagnetic recording medium
JPS61144744A (en) * 1984-12-17 1986-07-02 Kyocera Corp Optomagnetic recording medium and its production
JPS6240651A (en) * 1985-08-15 1987-02-21 Tdk Corp Photomagnetic recording medium
JPS6374144A (en) * 1986-09-18 1988-04-04 Sanyo Electric Co Ltd Magneto-optical recording medium
JPH01199339A (en) * 1988-02-03 1989-08-10 Canon Inc Optical recording medium

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61133067A (en) * 1984-11-30 1986-06-20 Tdk Corp Optomagnetic recording medium
JPS61144744A (en) * 1984-12-17 1986-07-02 Kyocera Corp Optomagnetic recording medium and its production
JPS6240651A (en) * 1985-08-15 1987-02-21 Tdk Corp Photomagnetic recording medium
JPS6374144A (en) * 1986-09-18 1988-04-04 Sanyo Electric Co Ltd Magneto-optical recording medium
JPH01199339A (en) * 1988-02-03 1989-08-10 Canon Inc Optical recording medium

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