JPH01269042A - Ozone sensor - Google Patents
Ozone sensorInfo
- Publication number
- JPH01269042A JPH01269042A JP9905488A JP9905488A JPH01269042A JP H01269042 A JPH01269042 A JP H01269042A JP 9905488 A JP9905488 A JP 9905488A JP 9905488 A JP9905488 A JP 9905488A JP H01269042 A JPH01269042 A JP H01269042A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- silver
- electrodes
- resistance value
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 58
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052709 silver Inorganic materials 0.000 claims abstract description 38
- 239000004332 silver Substances 0.000 claims abstract description 38
- 239000010409 thin film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 15
- 239000010408 film Substances 0.000 claims description 11
- 239000007789 gas Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 230000002070 germicidal effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- VNONINPVFQTJOC-ZGXDEBHDSA-N dioscin Chemical compound O([C@@H]1[C@@H](CO)O[C@H]([C@@H]([C@H]1O)O[C@H]1[C@@H]([C@H](O)[C@@H](O)[C@H](C)O1)O)O[C@@H]1CC2=CC[C@H]3[C@@H]4C[C@H]5[C@@H]([C@]4(CC[C@@H]3[C@@]2(C)CC1)C)[C@@H]([C@]1(OC[C@H](C)CC1)O5)C)[C@@H]1O[C@@H](C)[C@H](O)[C@@H](O)[C@H]1O VNONINPVFQTJOC-ZGXDEBHDSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 235000019645 odor Nutrition 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 229910000108 silver(I,III) oxide Inorganic materials 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は雰囲気中のオゾンを検知するオゾンセンサに
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to an ozone sensor that detects ozone in the atmosphere.
従来、オゾンは種々の利用法があり２例えば冷蔵庫内の
におい消しに用いることが知られている。Conventionally, ozone has been used in various ways, 2 for example, it is known to be used to eliminate odors in refrigerators.
これは冷厳庫内に殺菌灯を設け、その放射する紫外線に
より庫内にオゾンを生成させ、そのオゾンによυ庫内の
においを除去するものである。このようなオゾンの利用
においては、オゾンの毒性を考慮するとその発生量の制
御が必要であり、その制御方法としてオゾン濃度をセン
サによ夕検知してオゾン発生量を加減することが考えら
れる。このような場合に必要となるオゾンセッサとして
は例えば１９８６年にオゾン水処理研究会事務局発行の
「上水処理におけるオゾン技術」に示されたものがあフ
、第５図にその１ｐＩ成図を示す。これはオゾンが特定
の波長の光を吸収する性質を利用したもので、第５図に
示すごとく、ポンプ（図示せず］により被測定気体を流
す検出側気体セルａＩ６とオゾンを含まない基準気体を
流す基準側気体セルｒｉ９と全並列に配量すると共に、
オゾンに吸収されやすい波長の光を放射する光源■を設
け、この光源偶からの光を上記両セル（ＩＩ、 ａ９に
プリズムＱυを介してシャッター＠の操作によ）交互に
通過するようにして、その通過光をレンズ（至）、プリ
ズム＠を介して受光素子四で検出するようにしたもので
ある。基準側気体セルａ９では光がほぼ１００％通過す
るのに対し、検出側気体セルａｓではその中を流れる気
体のオゾンによシ光が吸収され、オゾン濃度に応じてそ
の通過光量が異なるので、基準側と検出側では受光素子
（ハ）の検出電圧が異なり、オゾン濃度はその検出電圧
差として検出されるものである。This involves installing a sterilizing lamp inside the refrigerator, emitting ultraviolet rays to generate ozone inside the refrigerator, and using the ozone to remove odors inside the refrigerator. In such use of ozone, it is necessary to control the amount of ozone generated in consideration of its toxicity, and one conceivable method for this control is to detect the ozone concentration with a sensor and adjust the amount of ozone generated. An example of an ozone processor needed in such a case is the one shown in ``Ozone Technology in Water Treatment'' published by the Office of the Ozone Water Treatment Study Group in 1986. Figure 5 shows its 1pI diagram. show. This takes advantage of the property of ozone to absorb light of a specific wavelength, and as shown in Figure 5, the gas cell aI6 on the detection side flows the gas to be measured using a pump (not shown), and the reference gas that does not contain ozone is used. While distributing the amount in parallel with the reference side gas cell ri9 that flows,
A light source (■) that emits light with a wavelength that is easily absorbed by ozone is provided, and the light from this light source is made to alternately pass through both cells (II, a9 through the prism Qυ by operating the shutter @). , the passing light is detected by a light receiving element 4 via a lens and a prism. Almost 100% of the light passes through the reference side gas cell a9, whereas in the detection side gas cell as, the light is absorbed by the ozone in the gas flowing therein, and the amount of light passing therethrough varies depending on the ozone concentration. The detection voltage of the light receiving element (c) is different between the reference side and the detection side, and the ozone concentration is detected as the difference between the detection voltages.
上記のように従来のオゾンセンサは検出側、基準側気体
セルのほか、プリズム、レンズ、ポンプなど多くの構成
要素が必要で大型、複雑、高価であり、かつ光学的装置
のため組み立てを精密にしなければならないという問題
点があった。As mentioned above, conventional ozone sensors require many components such as detection side and reference side gas cells, prisms, lenses, pumps, etc., and are large, complex, and expensive, and because they are optical devices, they require precision assembly. There was a problem that it had to be done.
この発明はこのような問題点を解決するためになされ几
もので、小型で安価なオゾンセンサを得ることを目的と
する。The present invention has been made to solve these problems, and its object is to obtain a compact and inexpensive ozone sensor.
この発明に係るオゾンセンサは、基体表面に設けられ雰
囲気中のオゾンによシ酸化して抵抗値が変化する銀薄膜
と、この銀薄膜に接触して設けられ、その銀薄膜の抵抗
値を測定するための電極とを備えたものである。The ozone sensor according to the present invention includes a thin silver film that is provided on the surface of a substrate and whose resistance value changes when oxidized by ozone in the atmosphere, and a thin silver film that is provided in contact with the thin silver film and measures the resistance value of the thin silver film. It is equipped with electrodes for
この発明においては、基体表面に設けられた銀薄膜は常
温において、雰囲気中の酸素によっては酸化されずメゾ
ンによって酸化されて酸化銀となシその抵抗値が変化し
、この銀薄膜に接触して設けられた電極を用いてその抵
抗値変化を検出することによジオシン量が検知できる。In this invention, at room temperature, the silver thin film provided on the surface of the substrate is not oxidized by oxygen in the atmosphere, but is oxidized to silver oxide, and its resistance value changes. The amount of dioscine can be detected by detecting the change in resistance value using the provided electrode.
第１因はこの発明の一実施例を示すオゾンセンサの断面
肉、第２因はその上面図であり、 （１１は基体として
のアルミナの基板、（２）はこの基板（１１の一方の表
面の両端部に設けられ２例えば金、白金。The first factor is the cross-sectional thickness of an ozone sensor showing an embodiment of the present invention, and the second factor is its top view. (11 is an alumina substrate as a base, (2) is one surface of this substrate (11) For example, gold or platinum.
銀等の貴金属からなる一対の電極、（３）はこの一対の
電極（２）ｔ−覆うようにして上記基板（１）表面に蒸
着された銀薄膜、（４）は上記電極（２）から引きださ
れ之リード線である。（５）は上記基板（１）の銀薄膜
（３）の設けられた表面とは反対側の面に設けられたヒ
ータ。A pair of electrodes made of a noble metal such as silver, (3) a thin silver film deposited on the surface of the substrate (1) so as to cover the pair of electrodes (2), and (4) a thin film formed from the electrode (2). This is the lead line that is drawn out. (5) is a heater provided on the surface of the substrate (1) opposite to the surface on which the silver thin film (3) is provided.
（６）はこのヒータ（５）の両端位置の上記基板（１）
表面上に設けられたヒータ側電極、（７）〜はこのヒー
タ側電極（６）から引きだされたヒータ側リード線であ
る。(6) is the above board (1) at both ends of this heater (5).
The heater side electrodes (7) to (7) provided on the surface are heater side lead wires drawn out from this heater side electrode (6).
このような構成のオゾンセンサにおいて、リード線（４
１に′ＪＬ極（２）間の抵抗値変化を検出できるような
回路を接続しておき、このセンサをオゾンを検出すべき
雰囲気中に置いてその電極（２）間の抵抗値を監視する
。雰囲気中にオゾンが存在すると銀薄膜（３）がそのオ
ゾンにより酸化され。In an ozone sensor with such a configuration, the lead wire (4
Connect a circuit that can detect the change in resistance between the 'JL pole (2) to 1, place this sensor in the atmosphere where ozone is to be detected, and monitor the resistance between the electrodes (2). . When ozone exists in the atmosphere, the silver thin film (3) is oxidized by the ozone.
２Ａｇ ＋ ０３−Ａｇ２Ｏ＋０２ （１１という反
応が起こる。すると電極（２）間の抵抗値は銀薄膜（３
）が酸化する前よシも増加するので、この抵抗値増加に
よジオシンを検知できるものである。The reaction 2Ag + 03-Ag2O+02 (11) occurs. Then, the resistance value between the electrodes (2) is equal to that of the silver thin film (3
) increases before oxidation, so dioscine can be detected by this increase in resistance.
また、銀薄膜（３１が一度酸化され次場合には、ヒータ
側リード線（７）からヒータ（５）に電流を流し、基板
（１）を介して銀薄膜Ｔ３１ｉ３００℃以上に加熱すれ
ば、酸化銀は
２Ａｇ２０−一→４Ａｇ ＋ ０２（２１という反応を
おこして還元され、銀薄膜（３）は初期状態に戻るので
、この初期化動作を定期的または電極（２）間抵抗値に
応じて行うことによりこのセンサは繰り返し使用できる
。このとき基板（１１は耐熱性を有する必要がある。In addition, if the silver thin film (31) has been oxidized once, if the current is passed from the heater side lead wire (7) to the heater (5) and the silver thin film T31 is heated to 300°C or higher through the substrate (1), the oxidation can be performed. Silver is reduced by the reaction 2Ag20-1 → 4Ag + 02 (21), and the silver thin film (3) returns to its initial state, so this initialization operation is performed periodically or according to the resistance value between the electrodes (2). This allows the sensor to be used repeatedly.In this case, the substrate (11) must be heat resistant.
上述のように電極（２）間の抵抗値変化を検出してオゾ
ン検知を行う回路の一例を第３図に示す。この回路にお
いては可変抵抗（８）、オゾンセンサ（９）。FIG. 3 shows an example of a circuit for detecting ozone by detecting a change in the resistance value between the electrodes (2) as described above. In this circuit a variable resistor (8) and an ozone sensor (9).
ダイオードａＯからなる直列回路が交流電源ａ９に並列
接続され、さらにダイオード（１２，リレーα３．５Ｃ
Ｒａ４）、ダイオードα９からなる直列回路が並列接続
されている またリレー０のスイッチ部（１３ａ）は一
方が交流電源αυ、ダイオード０２間、もう一方はオゾ
ンセンサ（９）のヒータ（５）１表示ランプαｅ、タイ
マー開からなる並列回路を介して５ＣＲ（１４，ダイオ
ードα５間に接続されている。５ＯＲａ４１のゲートは
オゾンセンサ（９）、ダイオード００間に接続されてい
る。A series circuit consisting of a diode aO is connected in parallel to an AC power supply a9, and a diode (12, relay α3.5C
A series circuit consisting of Ra4) and diode α9 is connected in parallel. Also, the switch part (13a) of relay 0 has one side between AC power supply αυ and diode 02, and the other side is the heater (5) 1 display of ozone sensor (9). It is connected between 5CR (14) and diode α5 through a parallel circuit consisting of lamp αe and timer open. The gate of 5ORa41 is connected between ozone sensor (9) and diode 00.
オゾンセンサ（９）がオゾンを検知するとその抵抗値か
増加し、その結果８ＣＲ（１４１がＯＮからＯＦＦ’と
なってリレーαｊのスイッチ部（１３りが閉成し。When the ozone sensor (9) detects ozone, its resistance value increases, and as a result, 8CR (141) changes from ON to OFF', and the switch section (13) of relay αj closes.
タイマーａηが作動して表示ランプａＳ、 ヒータ（５
）に通電され２表示ランプａｌｌの点灯によりオゾン検
知を知らせるとともに、ヒータ（５）によシ銀薄膜（３
）が加熱され、その初期化が行われる。この初期化に際
し、銀薄膜（３）の抵抗値が低下し８０Ｒ（１４１が再
びＯＮしてリレーαりのスイッチ部（１３ａ）が開する
がタイマーαηが例えば３分間、ヒータ（５）と表示ラ
ンプαｅへの通電を保持するので、銀薄膜（３）の初期
化は中断されることなく行われる。この回路において１
表示ランプαＧのかわりにベル、ブザー等を設けてもよ
いし、オゾン発生を制御する回路を接続してもよい。な
お、銀薄膜（３）は直流電源を使用すると移行現象を起
こす可能性があるので交流電源ａｎを用いた。The timer aη operates and the display lamp aS and heater (5
) is energized and all of the 2 indicator lamps are turned on to notify that ozone has been detected, and the heater (5) is energized to turn on the silver thin film (3).
) is heated to initialize it. During this initialization, the resistance value of the silver thin film (3) decreases and 80R (141) is turned on again and the switch part (13a) of the relay α opens, but the timer αη displays the heater (5) for 3 minutes, for example. Since the lamp αe is kept energized, the initialization of the silver thin film (3) is performed without interruption.
A bell, a buzzer, etc. may be provided in place of the indicator lamp αG, or a circuit for controlling ozone generation may be connected. Note that for the silver thin film (3), an alternating current power source was used since there is a possibility that migration may occur if a direct current power source is used.
第１図、第２図に示したような構造のオゾンセ／すにお
いて、縦１５■、横１０■なる形状の銀薄膜を１ｏ−３
ｒ ｍｍｌ’１ｇ 〕程度の真空度で蒸着し、かつ電極
（２）間抵抗がほぼ７５０［Ω］、５［ＫΩ〕、２３〔
ＫΩ〕となるようにした３種類のものを試作して抵抗値
変化の測定を行った。２０［／］の試験槽の中にこの試
作したオゾンセンサと３．５ ［Ｗ］の殺菌灯を入れ、
殺菌灯の点灯開始からの経過時間と。In an ozone tank with the structure shown in Figures 1 and 2, a silver thin film of 15 cm in length and 10 cm in width was deposited at 1o-3.
rmml'1g], and the resistance between the electrodes (2) was approximately 750[Ω], 5[KΩ], and 23[Ω].
Three types of prototypes with a resistance value of 1,000 KΩ were manufactured and the changes in resistance values were measured. This prototype ozone sensor and a 3.5 [W] germicidal lamp were placed in a 20 [/] test tank.
The elapsed time from the start of the germicidal lamp lighting.
電極間の抵抗値変化を測定したところ表−１のような結
果を得た。When the resistance change between the electrodes was measured, the results shown in Table 1 were obtained.
表−１殺菌灯点灯経過時間と電極間抵抗値変化表−１か
られかるように殺菌灯点灯にょシ発生するオゾンのため
銀薄膜（３）が駿化し１時間経過にともなって電極（２
）間の抵抗値が増加しておシ、この抵抗値変化によフォ
ノンが検知できるものである。なお２点灯開始後３０分
経過したときのオゾン１１度は約５Ｐであった。Table 1: Elapsed lighting time of germicidal lamp and change in inter-electrode resistance value As shown in Table 1, when the germicidal lamp is turned on, the silver thin film (3) becomes cloudy due to the ozone generated, and as one hour passes, the electrode (2)
) increases, and phonons can be detected from this resistance change. Note that 30 minutes after the start of the second lighting, ozone 11 degrees was about 5P.
この発明においてはオゾンを検知するものとして銀薄膜
（３）を用いているが、これは銀が室温では空気中のオ
ゾンによって酸化され、酸素によっては酸化されないと
いう性質をもっためである。例えば銀のイオン化傾向に
近い水銀は室温では液体であり、毒性もあるため取フ扱
いが不便である。In this invention, a silver thin film (3) is used as a means for detecting ozone, and this is because silver has the property of being oxidized by ozone in the air at room temperature, but not by oxygen. For example, mercury, which has a similar ionization tendency to silver, is a liquid at room temperature and is toxic, making it inconvenient to handle.
また銅は還元させるためには１０００［℃］以上の還元
温度が必要であシ、白金、金はオゾンで酸化されない。Further, in order to reduce copper, a reduction temperature of 1000[° C.] or higher is required, and platinum and gold are not oxidized by ozone.
従ってオゾンによって酸化され、空気−中で比較的低い
温度で還元される銀が適しているものである。Therefore, silver that is oxidized by ozone and reduced in air at relatively low temperatures is suitable.
なお、上記実施例では電極（２）を基板（１）上に設け
その電極（２）を覆うようにして銀薄膜（３）を蒸着し
たものを示したが、この電極（２）を基板（１１に埋め
込むようにして設は九夛、または第４図に示すように基
板（１１に銀薄膜（２）を蒸着し、その銀薄Ｍ（３）上
に電極（２）を固着または押しつけるようにして設けて
もよい。In the above example, the electrode (2) was provided on the substrate (1) and the silver thin film (3) was deposited to cover the electrode (2), but this electrode (2) was placed on the substrate (1). 11, or as shown in Figure 4, a thin silver film (2) is deposited on the substrate (11), and the electrode (2) is fixed or pressed onto the thin silver film (3). It may also be provided.
さらに上記実施例では基体として平板状の基板（１１を
用いたものを示したが、この基体に中空の筒状のものを
用い、その外表面に銀薄膜（３）、内部にヒータ（５）
を設けるようにしてもよい。Furthermore, in the above embodiment, a flat substrate (11) was used as the base, but a hollow cylindrical base was used, with a thin silver film (3) on the outer surface and a heater (5) inside.
may be provided.
以上のようにこの発明によれば、基体表面に設けられた
銀薄膜と、この銀薄膜に接触するようにして設けられた
一対の電極とによりオゾンセンサを構成したので、雰囲
気中のオゾンＫｇＫシ銀薄膜が酸化して抵抗値が変化し
、その抵抗値変化を電極から検出することによりオゾン
が検知でき、簡単な構造で小形軽量のオゾンセンサが得
られるという効果がある。As described above, according to the present invention, an ozone sensor is configured by a thin silver film provided on the surface of a substrate and a pair of electrodes provided in contact with this thin silver film. The silver thin film is oxidized and its resistance value changes, and ozone can be detected by detecting the change in resistance value from the electrode, which has the effect of providing a small and lightweight ozone sensor with a simple structure.
第１図はこの発明の一実施例を示すオシ／センサの断面
図、第２図はこのオゾンセンサの上面図。
第３図はこのオゾンセンサを用いてオゾン検知を行う回
路の一例を示す回路図、第４図はこの発明の他の実施例
を示す断面図、第５図は従来のオシ／センサの構成図で
ある。
図において、（１）は基板、（２）は電極、（３）は銀
薄膜である。
なお２図中同一符号は同一または相当部分を示す。FIG. 1 is a sectional view of an ozone sensor showing an embodiment of the present invention, and FIG. 2 is a top view of this ozone sensor. Fig. 3 is a circuit diagram showing an example of a circuit for detecting ozone using this ozone sensor, Fig. 4 is a sectional view showing another embodiment of the present invention, and Fig. 5 is a configuration diagram of a conventional ozone/sensor. It is. In the figure, (1) is a substrate, (2) is an electrode, and (3) is a silver thin film. Note that the same reference numerals in the two figures indicate the same or corresponding parts.
Claims (1)
抵抗値が変化する銀薄膜に接触して設けられ、その銀薄
膜の抵抗値測定用の一対の電極とを備えたオゾンセンサ
。An ozone sensor comprising a pair of electrodes for measuring the resistance value of the silver thin film, which is provided on the surface of a substrate and is provided in contact with a thin silver film whose resistance value changes when oxidized by ozone in the atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9905488A JPH01269042A (en) | 1988-04-21 | 1988-04-21 | Ozone sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9905488A JPH01269042A (en) | 1988-04-21 | 1988-04-21 | Ozone sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01269042A true JPH01269042A (en) | 1989-10-26 |
Family
ID=14236920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9905488A Pending JPH01269042A (en) | 1988-04-21 | 1988-04-21 | Ozone sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01269042A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH041563A (en) * | 1990-04-18 | 1992-01-07 | Matsushita Electric Ind Co Ltd | Ozone detecting element and production thereof |
| US5184077A (en) * | 1990-04-05 | 1993-02-02 | G-C Acquisition, Inc. | Abrasion-resistant, high pressure dielectric sensors |
| JP2009133710A (en) * | 2007-11-30 | 2009-06-18 | Iwasaki Electric Co Ltd | Detection method and device of active oxygen species |
-
1988
- 1988-04-21 JP JP9905488A patent/JPH01269042A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5184077A (en) * | 1990-04-05 | 1993-02-02 | G-C Acquisition, Inc. | Abrasion-resistant, high pressure dielectric sensors |
| JPH041563A (en) * | 1990-04-18 | 1992-01-07 | Matsushita Electric Ind Co Ltd | Ozone detecting element and production thereof |
| JP2009133710A (en) * | 2007-11-30 | 2009-06-18 | Iwasaki Electric Co Ltd | Detection method and device of active oxygen species |
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