JPH01268078A - Excimer laser oscillating apparatus - Google Patents

Abstract

PURPOSE:To make a gas flow between electrodes uniform and make discharge uniform, by forming planar supporting members with which both bases for supporting facing electrodes are linked, making the members parallel with the gas flow between both bases, and arranging a plurality of the members in the perpendicular direction with respect to the direction of the gas flow in a separated pattern. CONSTITUTION:In an excimer laser oscillating apparatus, supporting members 19 with which two bases 3 and 4 for supporting facing electrodes ER are linked are formed with electric conductors, and the supporting members 19 serve the role of a charging and discharging wiring part A. In this apparatus, said supporting members 19 are made to be planar shapes and are made parallel with the direction of gas flow between both bases 3 and 4. A plurality of the members are arranged in the perpendicular direction with respect to the direction of the gas flow in a separated pattern. In this constitution, the planar supporting members 19 which serve the role of the charging and discharging wiring A do not hinder the gas flow through a main discharging part 1. Conversely, the gas flow can be straightened. Therefore, the gas flow from a fan 6 which is disturbed with a heat exchanger 7 is corrected with the supporting members 19. The gas flow between the electrodes is made uniform, and the discharge can be made uniform.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a UV pre-ionization discharge excited excimer laser oscillation device.

[Conventional technology]

The main circuit of the above excimer laser oscillation device is shown in Figure 2, where 01 is a main (charging) conadenser, Sw is a thyratron, C2 is a peaking (discharging) capacitor, ER is a pair of main discharge electrodes, G is a pre-(ii1 ionization gap), and a main discharge section 1 is constituted by the peaking capacitor C2 and the main discharge electrode ERN pre-ionization gap G.In this main discharge section 1, a main capacitor is connected during charging and discharging. It has a charge/discharge wiring section A through which current passes when charging the peaking capacitor C2 from C1.

The main discharge section 1 in the laser oscillation device is constructed as shown in FIG. 3, and includes a base 3 fixed to a chamber 2 and a pair of main discharge electrodes on an opposing base 4 located in the chamber 2. ER and peaking capacitor C2,
C2 and pre(ii) ionization gaps G, G are provided, respectively, and an electric circuit is connected to both bases 3.4.

The two bases 3.4 are connected by the charging/discharging wiring section A, and the charging/discharging wiring section A is composed of a rigid support member 5, and the opposing base 4 is connected to the charging/discharging wiring section A. It is supported by a support member 5 that also serves as a wiring section A.

A fan 6 and a heat exchanger 7 are provided in the chamber 2, and when the fan 6 is driven, the gas in the chamber 2 crosses the opposing parts of the bases 3 and 4 and returns via the heat exchanger 7. The gas is circulated to equalize the gas flow within the chamber 2.

The conventional supporting member 5 has a columnar shape with a circular or square cross section.

[Problem to be solved by the invention]

The conventional supporting member 5 is disposed between both bases 3.4 in a direction transverse to the gas flow caused by the fan 6, but since the cross-sectional shape of the supporting member 5 is circular or square, this supporting member The gas that collided with the base 5 became a turbulent flow, and the gas flow between the bases 3 and 4 was disturbed, which was an obstacle in trying to make the gas flow uniform and the discharge uniform.

The present invention has been made in view of the above, and the support member that also serves as the charging/discharging wiring section does not impede the gas flow.
On the contrary, it is an object of the present invention to provide an excimer laser oscillation device that can rectify the gas flow.

[Means to solve the problem]

In order to achieve the above object, the excimer laser oscillation device according to the present invention comprises an electrically conductive material as a support member that connects both bases that support opposing electrodes, and uses this support member to connect the charging/discharging wiring. In an excimer laser oscillation device that also serves as The structure is as follows.

[For production]

The gas flow passing between both bases is rectified by a support member that also serves as a plate-shaped charging/discharging wiring section, so that the gas flow passing between both bases is made uniform.

〔Example〕

An embodiment of the present invention will be described based on FIG.

In this embodiment, the same members as those shown in FIGS. 2 and 3 are designated by the same reference numerals, and the description thereof will be omitted.

FIG. 1 shows a main discharge section 1 disposed within a chamber 2, in which a base 3 and a counter base 4 are connected on both sides of the base 3 by pillars 8 so as to be spaced apart from each other. Between the two bases 3 and 4, electrically conductive plates 9 are installed parallel to the one direction of gas flow at a plurality of positions in a direction perpendicular to one direction of gas flow 4, on the upper side of one direction of gas flow and on the downstream side. , each plate 9 also serves as a charging/discharging wiring section A.

In the above configuration, the gas passing between the bases 3 and 4 of the main discharge section 1 is rectified by the plurality of plates 9.

The thinner each plate 9 is, the more the above-mentioned rectification effect can be expected, but a further rectification effect can also be obtained by making both ends of the gas flow in one direction streamlined.

[Effect of idea]

According to the present invention, the plate-shaped support member that also serves as the charging/discharging wiring A does not obstruct the gas flow passing through the main discharge section 1, and on the contrary, the gas flow can be rectified. Therefore, the gas flow disturbed by the fan 6 and the heat exchanger 7 is corrected by the supporting member, and the gas flow between the electrodes is made uniform, thereby making it possible to make the discharge uniform.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the main parts of the present invention, FIG. 2 is a main circuit diagram of an excimer laser oscillation device, and FIG. 3 is a schematic structural explanatory diagram showing a main discharge section. 1 is the main discharge part, 2 is the chamber, 3 is the base, 4 is the opposing base, and A is the charging/discharging wiring part. Applicant Komatsu Manufacturing Co., Ltd. Representative Patent Attorney Masaaki Yonehara

Claims (1)

[Claims] In an excimer laser oscillation device in which a support member connecting two bases 3 and 4 that support opposing electrodes is made of an electrical conductor, and this support member also serves as a charging/discharging wiring section A, the support member is shaped like a plate. and both bases 3 and 4
1. An excimer laser oscillation device characterized in that a plurality of excimer laser oscillation devices are arranged parallel to the flow direction of a gas flow passing through the space and spaced apart in a direction perpendicular to the flow direction of the gas flow.