JPH01264619A - Thin-film magnetic head - Google Patents

Thin-film magnetic head

Info

Publication number
JPH01264619A
JPH01264619A JP9411788A JP9411788A JPH01264619A JP H01264619 A JPH01264619 A JP H01264619A JP 9411788 A JP9411788 A JP 9411788A JP 9411788 A JP9411788 A JP 9411788A JP H01264619 A JPH01264619 A JP H01264619A
Authority
JP
Japan
Prior art keywords
magnetic
head
magnetic pole
coil
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9411788A
Other languages
Japanese (ja)
Inventor
Masanobu Fujisaki
藤崎 昌伸
Mitsuaki Atobe
光朗 跡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP9411788A priority Critical patent/JPH01264619A/en
Publication of JPH01264619A publication Critical patent/JPH01264619A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3183Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To improve head efficiency by forming a gap for writing and magnetic paths together with an excitation coil on a nonmagnetic substrate and disposing the magnetic paths flatly without superposing the same. CONSTITUTION:The thin-film magnetic head is formed by forming a lower magnetic pole 2, an insulating layer 3, the plane coil 4, an insulating layer 5, and an upper magnetic pole 6 respectively to prescribed shapes on the nonmagnetic substrate 1. The magnetic pole 6 and magnetic pole 2 of this magnetic head are connected in the outside circumferential part. The magnetic pole 6 and the coil 4 in contact with the magnetic pole 6 are in contact with each other respectively via the layer 3 and the layer 5. The magnetic pole 6 and the magnetic pole 2 are superposed on each other on the plane. The magnetic resistance between both is thereby increased much larger than the magnetic resistance of the main magnetic paths. The magnetic leakage between both is, therefore, decreased and the magnetic efficiency is improved.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、磁気記録用、及び磁気印写装置に用いられる
磁気ヘッドに関するものであり、非磁性基板上に形成さ
れる平面形状の磁気ヘッドに関している。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a magnetic head used for magnetic recording and magnetic printing devices, and relates to a planar magnetic head formed on a non-magnetic substrate. It's about.

[従来の技術] 従来の磁気ヘッドは、一般に機械加工により作られるバ
ルクヘッドと薄膜製造プロセスによる薄膜ヘッドがある
。バルクヘッドと薄膜ヘッドはそれぞれ特徴を有してお
り、磁気記録装置の要素として数多く利用されている。
[Prior Art] Conventional magnetic heads generally include bulk heads made by machining and thin film heads made by a thin film manufacturing process. Bulk heads and thin film heads each have their own characteristics, and are widely used as elements of magnetic recording devices.

磁気印写装置はさまざまな特徴を有しており、その作る
画像品質、スピード、マルヂコビー性、環境に対する画
像品質の安定性など、さまざまな良い点を有している。
Magnetic printing apparatuses have various characteristics and have various advantages, such as the image quality they produce, speed, multicolor property, and stability of image quality with respect to the environment.

ところが、複写機を始めページプリンター分野において
も、静電方式の製品が主流になっている。これはひとえ
に書き込みを受け持つヘッドが低価格で良い物が出来な
かったからである。  □ 通温゛は、磁気記録装置で用いられるヘッドの技術をそ
のまま磁気印写装置に流用する場合が多く、フェライト
や、金属磁性体にコイルを巻いたバルクヘッドが多く用
いられている。
However, electrostatic type products have become mainstream in the field of page printers, including copying machines. This is simply because the head that handles writing could not be made at a low price and of good quality. □ For heating, head technology used in magnetic recording devices is often applied directly to magnetic printing devices, and bulk heads with coils wound around ferrite or metal magnetic materials are often used.

一方少ないヘッドの数で早い印写をしようとすると、ヘ
ッドのコストは問題なくなり磁気記録媒体を高速で運動
させれば良くなる。その際にはヘッドの高速応答性が必
要になることは言うまでもない。
On the other hand, if you try to print quickly with a small number of heads, the cost of the heads will not be an issue and you can just move the magnetic recording medium at high speed. Needless to say, in this case, a high-speed response of the head is required.

他方、磁気記録装置で用いられ始めている薄膜ヘッドの
技術を用いた書き込みヘッドも提案されている。薄膜ヘ
ッドはマルチ化することは容易であり一つの方向である
On the other hand, write heads using thin film head technology, which is beginning to be used in magnetic recording devices, have also been proposed. Thin film heads can be easily multi-layered in one direction.

[発明が解決しようとする課題] バルクのヘッドを多数用いる場合にはそのコストはほぼ
数に比例して高くなるために、マルチ化やライン化はや
りにくい。時開57−73745等に記載されている例
などは、3380個もの単独なヘッドを並べている。
[Problems to be Solved by the Invention] When a large number of bulk heads are used, the cost increases almost in proportion to the number of heads, so it is difficult to create multiple heads or lines. In the example described in Jikai No. 57-73745, as many as 3,380 individual heads are arranged.

少ないヘッドの数で磁気印写装置を構成するには、磁気
記録媒体を高速で運動ぜねばならなくなると共に、ヘッ
ドも高速で移動させなければならず、大掛かりなシステ
ムとなってしまう。特許登録番号1251698等はこ
のような例である。
In order to configure a magnetic printing apparatus with a small number of heads, the magnetic recording medium must be moved at high speed, and the heads must also be moved at high speed, resulting in a large-scale system. Patent registration number 1251698 is an example of this.

薄膜ヘッドでたくさん安定した品質のヘッドを作るとな
ると問題が生じ始めるし、ラインヘッドなどの様に、大
きなサイズのものは、製造装置の関係も有り、作ること
が非常に難しくなる。時開60−119615等のもの
はこれらの例である。
Problems begin to arise when producing a large number of thin-film heads of stable quality, and large-sized ones such as line heads become extremely difficult to produce due to the manufacturing equipment involved. Examples of these include Jikai 60-119615.

薄膜ヘッドは高密度にヘッドを形成でき、その形状は、
平面的ということが大きな特徴になっている。ところが
薄膜ヘッドは上下の磁極がコイルを挟む構造になってい
るために、上下の磁極の距離が非常に近接している。こ
のため、コイル部を通して洩れる磁束が多くなり、ヘッ
ドの効率を下げる結果になっている。さらに、できるだ
け上下に磁極を離す力めに、コイルの絶縁層を厚くする
必要が有るために、製造工程中に段差が大きくなり、製
造上の困難さがつきまとっており、これが製造上の課題
になっている。
The thin film head can be formed with high density, and its shape is
A major feature is that it is flat. However, since the thin film head has a structure in which the upper and lower magnetic poles sandwich the coil, the distance between the upper and lower magnetic poles is very close. For this reason, a large amount of magnetic flux leaks through the coil portion, resulting in a decrease in the efficiency of the head. Furthermore, in order to separate the magnetic poles as much as possible vertically, it is necessary to thicken the insulating layer of the coil, resulting in large steps during the manufacturing process, which poses manufacturing difficulties. It has become.

更に一般の薄膜ヘッドはギャップ深さを形成するために
、g1械加工で加工している工程になっている。この為
、ミクロン単位の公差が要求されて、製造上のネックと
なっている。
Furthermore, general thin film heads are processed using G1 machining in order to form the gap depth. For this reason, tolerances on the order of microns are required, which poses a manufacturing bottleneck.

[課題を解決するための手段] 本発明では上記の問題を解決するために、非磁性基板上
に励磁コイルと共に、書き込み用のギャップと、強磁性
体からなる磁路を形成し、磁路を平面的に重ならずに配
置する。重ならずに配置することにより、無駄な磁束の
洩れがなくなり、ヘッド効率が向上する。本発明の概略
斜視図を第1図に示す。本発明の薄膜磁気ヘッドの断面
を第2図に示す。
[Means for Solving the Problems] In order to solve the above problems, the present invention forms a writing gap and a magnetic path made of a ferromagnetic material together with an excitation coil on a non-magnetic substrate, and the magnetic path is Arrange them horizontally without overlapping. By arranging them without overlapping, unnecessary leakage of magnetic flux is eliminated and head efficiency is improved. A schematic perspective view of the present invention is shown in FIG. FIG. 2 shows a cross section of the thin film magnetic head of the present invention.

非磁性基板上にスパイラル状に形成された平面コイルを
取り巻くように上下の磁極が配置されているが、コイル
が発生する磁界は片方の磁極からコイルの外側に出て、
逆側の磁極へと流れ込む構成になっている。すなわち、
等測的にはコイルを90度傾けて、第3図のようになっ
ていると考えると理解しやすい。
Upper and lower magnetic poles are arranged to surround a planar coil formed in a spiral shape on a non-magnetic substrate, but the magnetic field generated by the coil exits from one magnetic pole to the outside of the coil.
The structure is such that it flows into the opposite magnetic pole. That is,
Isometrically, it is easier to understand if you consider that the coil is tilted 90 degrees, as shown in Figure 3.

本発明によるヘッドは、上磁極と下磁極とが平面的に重
なっていないために、以下の特徴を有することになる。
The head according to the present invention has the following characteristics because the upper magnetic pole and the lower magnetic pole do not overlap in a plane.

すなわち、一般の薄膜ヘッドと異なり、上下磁極間の洩
れが非常に少なくなり、ヘッド効率が向上する。さらに
製造工程上での課題として、段差があるところをつなぐ
ことになるわけであるが、この際に段差が1段少なくな
り、製作が容易になる。
That is, unlike a general thin film head, leakage between the upper and lower magnetic poles is extremely reduced, improving head efficiency. Another issue in the manufacturing process is to connect the parts where there are differences in level, but in this case, the difference in level is reduced by one, making manufacturing easier.

さらに、本発明によるヘッドは、コイルの中央部に書き
込みギャップを位置させることにより、コイルが発生ず
る磁界を効率よく利用できる。
Furthermore, the head according to the present invention can efficiently utilize the magnetic field generated by the coil by locating the write gap in the center of the coil.

また、先に述べたように、高速の磁気印写装置を実現す
るには、安定した品質のマルチヘッドや、ラインヘッド
が必要であるが、本発明により、これが実現できること
となる。
Further, as mentioned above, in order to realize a high-speed magnetic printing device, a multi-head or a line head with stable quality is necessary, and the present invention makes it possible to realize this.

マルチヘッドや、ラインヘッドを有する磁気印写装置に
おいては、チャンネル数を増すことにより高速化が計れ
るために、磁気記録媒体と記録ヘッドとの相対速度を極
端には早くする必要がなくなる。このため記録ヘッドと
磁気記録媒体とを接触させても信頼性が保てるようにな
り、簡単な構造で磁気印写装置が構成できる。
In a magnetic printing apparatus having a multi-head or a line head, the speed can be increased by increasing the number of channels, so there is no need to extremely increase the relative speed between the magnetic recording medium and the recording head. Therefore, reliability can be maintained even when the recording head and the magnetic recording medium are brought into contact with each other, and the magnetic printing apparatus can be configured with a simple structure.

[実施例1] 以下実施例に基づいて本発明を具体的に説明する。[Example 1] The present invention will be specifically described below based on Examples.

本実施例の概略斜視図は第1図である。非磁性のアルミ
ナ基板1上に、下磁極2、絶縁層3、平面=Iイル4、
絶縁層5、上磁極6をそれぞれ所定の形状に形成してゆ
き、薄膜磁気ヘッドを構成する。
FIG. 1 is a schematic perspective view of this embodiment. On a non-magnetic alumina substrate 1, a lower magnetic pole 2, an insulating layer 3, a plane = I-il 4,
The insulating layer 5 and the upper magnetic pole 6 are each formed into a predetermined shape to constitute a thin film magnetic head.

本実施例の薄膜磁気ヘッドの断面は第2図である。」二
磁極6と下磁極1とは外周部で接続されている。−1−
、磁極6、下磁極1に接している平面コイル4は、それ
ぞれ絶縁層3、絶縁層5を介して接している。
FIG. 2 shows a cross section of the thin film magnetic head of this embodiment. '' The two magnetic poles 6 and the lower magnetic pole 1 are connected at the outer periphery. -1-
, the planar coil 4 which is in contact with the magnetic pole 6 and the lower magnetic pole 1 are in contact with each other via an insulating layer 3 and an insulating layer 5, respectively.

それぞれの薄膜は通常の薄膜工程で形成され、それぞれ
、所定の形状にバターニングされる。
Each thin film is formed by a normal thin film process and patterned into a predetermined shape.

本発明のポイントは、上磁極6と下磁極1とが平面上で
重なることがなく、両者の間の磁気抵抗が、メインの磁
路の磁気抵抗と比較してはるかに大きく、両者の間で磁
気漏れが相当に少ないことである。
The key point of the present invention is that the upper magnetic pole 6 and the lower magnetic pole 1 do not overlap on a plane, and the magnetic resistance between them is much larger than that of the main magnetic path. There is considerably less magnetic leakage.

[実施例2] ポリイミドを基板として、実施例1とほぼ同じ+f/i
成のヘッドをアレイ状に形成1ツて磁気印写装置用の磁
気ヘッドを制作した。1つのヘッド単位のサイズは約1
mm、ビッヂは1.5mmである。
[Example 2] Almost the same +f/i as Example 1 using polyimide as a substrate
A magnetic head for a magnetic printing device was fabricated by forming a magnetic head in the form of an array. The size of one head unit is approximately 1
mm, and the bit is 1.5 mm.

ヘッドを多列dに配置することにより、密度を増すこと
が可能である。
By arranging the heads in multiple rows d, it is possible to increase the density.

[発明の効果] 以上述べてきたように、本発明により、磁気記録装置に
おいて用いられる高性能なマルチヘッドが容易に形成で
きる。
[Effects of the Invention] As described above, according to the present invention, a high-performance multi-head used in a magnetic recording device can be easily formed.

磁路がコイル部の外fl!llにまで延びていることか
ら、マルチヘッドにした際に隣のヘッドに悪影響するク
ロストークも少なくなり、高密度にする際に有利となる
The magnetic path is outside the coil part! 11, crosstalk that adversely affects adjacent heads is reduced when multi-heads are used, which is advantageous when increasing density.

また、高性能なマルチヘッドが容易に形成できることか
ら、高速な磁気印写装置が実現できる。
Furthermore, since a high-performance multi-head can be easily formed, a high-speed magnetic printing device can be realized.

本発明の説明ては書き込みギャップをコイルの中心部に
位置させたもので説明したが、書き込みギャップがコイ
ルの外側にあっても本発明の大部分の効果は変わらない
Although the present invention has been described with the write gap located at the center of the coil, most of the effects of the present invention remain the same even if the write gap is located outside the coil.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁気書き込みヘッドの概略斜視図を示
すものである。 第2図は本発明の磁気書き込みヘッドの断面を示すもの
である。 第3図は本発明の磁気書き込みヘッドを理解するために
コイルを90度回転した概念図である。 第4図はハードディスクドライフで用いられている一般
的な薄膜ヘッドの断面図である。 ] 非磁性基板 2 下磁極 3 絶縁層 4 平面コイル 5 絶縁層 6 上磁極 7 保護層 以上 出願人 セイコーエプソン株式会社
FIG. 1 shows a schematic perspective view of a magnetic write head of the present invention. FIG. 2 shows a cross section of the magnetic write head of the present invention. FIG. 3 is a conceptual diagram in which the coil is rotated 90 degrees in order to understand the magnetic write head of the present invention. FIG. 4 is a cross-sectional view of a general thin film head used in hard disk drives. ] Non-magnetic substrate 2 Lower magnetic pole 3 Insulating layer 4 Planar coil 5 Insulating layer 6 Upper magnetic pole 7 Protective layer and above Applicant Seiko Epson Corporation

Claims (3)

【特許請求の範囲】[Claims] (1)非磁性基板上に形成される平面形状のヘッドにお
いて、励磁コイルと共に、書き込み用のギャップと、強
磁性体からなる磁路を有し、劾書き込みギャップがスパ
イラル状の平面コイルの中心部に位置し、励磁路が平面
的に重ならずに配置されたことを特徴とする薄膜磁気ヘ
ッド。
(1) In a planar head formed on a non-magnetic substrate, it has a write gap and a magnetic path made of ferromagnetic material together with an excitation coil, and the write gap is at the center of the spiral planar coil. 1. A thin film magnetic head, characterized in that excitation paths are arranged in a plane without overlapping each other.
(2)磁化可能な広がり面を持つ磁気記録媒体と、これ
に磁気潜像を書き込めるヘッドを有し、磁気潜像を磁気
記録媒体上に形成し、次いで磁性トナーにより顕像化す
る磁気印写装置で用いられる、第1項記載の薄膜磁気ヘ
ッド。
(2) Magnetic printing, which has a magnetic recording medium with a magnetizable spreading surface and a head capable of writing a magnetic latent image onto the magnetic recording medium, forms the magnetic latent image on the magnetic recording medium, and then visualizes it with magnetic toner. 2. The thin film magnetic head according to item 1, which is used in an apparatus.
(3)非磁性基板が柔軟な材料で形成され、磁気潜像を
磁気記録媒体上に形成する際に、磁気記録媒体と接触し
ていることを特徴とする第2項記載の薄膜磁気ヘッド。
(3) The thin film magnetic head according to item 2, wherein the nonmagnetic substrate is made of a flexible material and is in contact with the magnetic recording medium when forming the magnetic latent image on the magnetic recording medium.
JP9411788A 1988-04-15 1988-04-15 Thin-film magnetic head Pending JPH01264619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9411788A JPH01264619A (en) 1988-04-15 1988-04-15 Thin-film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9411788A JPH01264619A (en) 1988-04-15 1988-04-15 Thin-film magnetic head

Publications (1)

Publication Number Publication Date
JPH01264619A true JPH01264619A (en) 1989-10-20

Family

ID=14101486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9411788A Pending JPH01264619A (en) 1988-04-15 1988-04-15 Thin-film magnetic head

Country Status (1)

Country Link
JP (1) JPH01264619A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0762388A2 (en) * 1995-09-12 1997-03-12 Thomson-Csf Magnetic recording/reproducing head
EP0892390A1 (en) * 1997-07-18 1999-01-20 STMicroelectronics S.r.l. A head with partial reading means for a disk storage device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0762388A2 (en) * 1995-09-12 1997-03-12 Thomson-Csf Magnetic recording/reproducing head
FR2738657A1 (en) * 1995-09-12 1997-03-14 Thomson Csf MAGNETIC RECORDING / READING HEAD
EP0762388A3 (en) * 1995-09-12 1997-03-19 Thomson-Csf Magnetic recording/reproducing head
US5745329A (en) * 1995-09-12 1998-04-28 Thomson-Csf Magnetic recording/reading head
EP0892390A1 (en) * 1997-07-18 1999-01-20 STMicroelectronics S.r.l. A head with partial reading means for a disk storage device
US6532130B1 (en) 1997-07-18 2003-03-11 Stmicroelectronics, S.R.L. Head for reading magnetically stored data

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