JPH01243861A - Oscillatory wave motor - Google Patents

Oscillatory wave motor

Info

Publication number
JPH01243861A
JPH01243861A JP63070070A JP7007088A JPH01243861A JP H01243861 A JPH01243861 A JP H01243861A JP 63070070 A JP63070070 A JP 63070070A JP 7007088 A JP7007088 A JP 7007088A JP H01243861 A JPH01243861 A JP H01243861A
Authority
JP
Japan
Prior art keywords
phase
absorber
vibration
rotor
frequency voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63070070A
Other languages
Japanese (ja)
Inventor
Hitoshi Mukojima
仁 向島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP63070070A priority Critical patent/JPH01243861A/en
Publication of JPH01243861A publication Critical patent/JPH01243861A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To decrease the distortion of an oscillation absorber, by dividing said oscillation absorber such as rubber to be provided on the mover side into small parts and by providing said absorber with a plurality of notches. CONSTITUTION:An oscillatory wave motor is composed of an elastic body 1, a piezoelectric element 2, a flexible printed-circuit board 3, a oscillation isolator 4, a pressuring disc spring 5, a rotor 6, a felt-fixing stand 7, a pressurizing and regulating spacer 8, a whirl-stop 9, a fixed tube 10, an absorber 11, an output connecting plate 12, a ball bearing inner ring and output tube 13 and others. Said absorber 11 has divided parts 11a to reduce a distortion by thermal expansion. Also, said piezoelectric element 2 is polarized according to the pattern of its electrodes 2a-2b to adhere to the elastic body 1 and two frequency voltages are applied through the flexible printed-circuit board 3 from the outside so that a progressive wave is generated in said elastic body 1. Said rotor 6 is friction-driven by said progressive wave. Thus, the oscillation absorber 11 absorbs the portion of oscillation, which cannot be completely absorbed by the rotor 6, to transmit the rotation of said rotor 6.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、振動体上に発生する進行性振動波により移動
体を駆動する振動波モータに関するもので、とくに、該
移動体の不要振動を吸収ならびに減衰させる吸振体の構
造に関するものである。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a vibration wave motor that drives a moving body by progressive vibration waves generated on a vibrating body. It relates to the structure of a vibration absorber that absorbs and damps vibrations.

[従来の技術] 振動波モータは、超音波モータともいわれ、振動体上の
圧電素子に周波電圧を印加し、振動体に進行性振動波を
発生させ、該振動波により移動体を駆動するもので、従
来の電磁モータに比較して、巻線を必要としないため、
小型になり、低速回転時にも高トルクが得られるという
利点があり、近年注目されている。
[Prior Art] A vibration wave motor, also called an ultrasonic motor, applies a frequency voltage to a piezoelectric element on a vibrating body to generate progressive vibration waves on the vibrating body, and drives a moving body with the vibration waves. Compared to conventional electromagnetic motors, it does not require windings.
It has been attracting attention in recent years because it has the advantage of being small and being able to obtain high torque even when rotating at low speeds.

該振動波モータの振動体を励振する手段としては、圧電
素子、電歪素子、磁歪素子など、印加される周波電圧に
応じて周期的に変形する電気−機械エネルギー変換素子
を用いればよい。
As a means for exciting the vibrating body of the vibration wave motor, an electro-mechanical energy conversion element, such as a piezoelectric element, an electrostrictive element, or a magnetostrictive element, which periodically deforms according to the applied frequency voltage may be used.

ところで、この種の進行波型の振動波モータは、中空リ
ング形状が簡単に実現できるので、−眼レフカメラ用レ
ンズのフォーカス用アクチ、ユエータとして利用されて
いる。その際、振動波モータが発生する数μmの振動を
吸収するために、全体を大きくして剛性を上げるのでは
なく、第4・図に示すように、ゴム等からなる単純なリ
ング形状の吸振体21を用いて小型化を行なっている。
By the way, this kind of traveling wave type vibration wave motor can be easily realized in a hollow ring shape, so it is used as a focusing actuator and a yuator for lenses for reflex cameras. At this time, in order to absorb the vibrations of several micrometers generated by the vibration wave motor, instead of increasing the overall size and increasing the rigidity, as shown in Figure 4, a simple ring-shaped vibration absorber made of rubber or the like is used. The body 21 is used to achieve miniaturization.

しかし、振動波モータを構成する部材が主に金属である
ので、ゴム等からなる吸振体21との熱膨張率の差が大
きく、そのため、歪を発生してしまう。
However, since the members constituting the vibration wave motor are mainly made of metal, there is a large difference in coefficient of thermal expansion from the vibration absorber 21 made of rubber or the like, which causes distortion.

いま、移動体であるロータをAn、吸振体21をブチル
ゴム、出力連結板をBsで、中心直径を72.25m+
nとすると、常温を23℃とした場合からの径方向の各
温度における変形量と吸振体21に発生する歪は第1表
に示されるとおりとなる。
Now, the rotor which is a moving body is An, the vibration absorber 21 is butyl rubber, the output connecting plate is Bs, and the center diameter is 72.25 m +
When n is the case, the amount of deformation and the strain generated in the vibration absorber 21 at each temperature in the radial direction from the case where the normal temperature is 23° C. are as shown in Table 1.

なお吸振体21の厚みを約1 nonとすると、2〜3
μmの歪による厚みむらが生じることになり、進行波振
幅数μmに対して無視できない量となる。
Note that if the thickness of the vibration absorber 21 is approximately 1 non, then 2 to 3
Thickness unevenness occurs due to distortion of μm, which is a non-negligible amount for a traveling wave amplitude of several μm.

[発明が解決しようとする課題] 前述のように、従来の技術においては、振動波モータを
構成する部材が主に金属であり、ゴム等からなる吸振体
21は単純なリング形状であるため、環境温度の変化で
、吸振体21との熱膨張率の差が大きく、そのため、前
述の第1表に示すように、吸振体に歪が発生し、この歪
は数μmの進行波に対して悪影響を与え、ひいては、振
動、音の発生を大きくするという問題点がある。
[Problems to be Solved by the Invention] As mentioned above, in the conventional technology, the members constituting the vibration wave motor are mainly metal, and the vibration absorber 21 made of rubber or the like has a simple ring shape. Due to changes in the environmental temperature, there is a large difference in the coefficient of thermal expansion between the vibration absorber 21 and the vibration absorber 21. As a result, as shown in Table 1 above, distortion occurs in the vibration absorber. There is a problem in that it has an adverse effect and, in turn, increases the generation of vibration and sound.

本発明は、このような問題点を解決しようとするもので
ある。すなわち、本発明は、環境温度変化で熱膨張率の
違いからくる吸振体の歪を減少し、温度変化によって、
振動、音が発生しないようにした振動波モータを提供す
ることを目的とするものである。
The present invention attempts to solve these problems. That is, the present invention reduces the distortion of the vibration absorber caused by the difference in thermal expansion coefficient due to environmental temperature changes, and
The object of the present invention is to provide a vibration wave motor that does not generate vibration or sound.

[課題を解決するための手段コ 上記目的を達成するために、本発明は、位相・差的に配
置または分極されたA相とB相とから構成された1対の
電気−機械エネルギー変換素子群の、前記A相に第1の
周波電圧を印加することにより発生する第1の定在波と
前記B相に該第1の周波電圧と所定量位相がずれた第2
の周波電圧を印加することにより発生する第2の定在波
との合成により進行性振動波を発生する振動体と、該進
行性振動波により摩擦駆動される移動体とを有する振動
波モータにおいて、該移動体の不要振動を吸収ならびに
減衰させるゴム等による吸振体を固定体の間に介し、し
かも、該吸振体が細かく分割されているか、複数の切込
みを有する構造であるかにした。
[Means for Solving the Problems] In order to achieve the above objects, the present invention provides a pair of electro-mechanical energy converting elements comprising an A phase and a B phase arranged or polarized in a phase-differential manner. A first standing wave generated by applying a first frequency voltage to the A phase of the group and a second standing wave that is out of phase by a predetermined amount from the first frequency voltage to the B phase.
A vibration wave motor having a vibrating body that generates a progressive vibration wave by combining with a second standing wave generated by applying a frequency voltage of , and a moving body frictionally driven by the progressive vibration wave. A vibration absorber made of rubber or the like that absorbs and damps unnecessary vibrations of the moving body is interposed between the fixed bodies, and the vibration absorber is finely divided or has a structure having a plurality of notches.

[作 用] 本発明によれば、移動体側に設けられたゴム等の吸振体
が細かく分割されているか、あるいは複数の切込みを有
するので、環境温度変化で熱膨張率の違いからくる吸振
体の歪が減少され、温度変化による振動、音の発生がな
くなる。
[Function] According to the present invention, the vibration absorber made of rubber or the like provided on the moving body side is finely divided or has a plurality of notches, so that the vibration absorber is not affected by differences in thermal expansion coefficient due to environmental temperature changes. Distortion is reduced, and vibration and sound generation due to temperature changes are eliminated.

[実施例コ 第1図は本発明の第1実施例を示している。[Example code] FIG. 1 shows a first embodiment of the invention.

第1図において、1は金属からなる弾性体、2は電気−
機械エネルギー変換素子としての圧電素子、3はフレキ
シブルプリント回路板、4は主にフェルト等の振動絶縁
体、5は加圧用皿ばね、6は主に金属からなる移動体と
してのロータ、7はフェルト固定用の台、8は加圧調整
用のスペーサ、9は前記弾性体1用の回転止め、10は
固定筒、11は子にゴム等からなる吸振体、12は出力
連結板、13は玉軸受内輪兼出力筒、14は押え環、1
5は玉軸受外輪、16はボール、17,18.19は固
定用ビス、20は固定台である。
In FIG. 1, 1 is an elastic body made of metal, and 2 is an electric body.
A piezoelectric element as a mechanical energy conversion element, 3 a flexible printed circuit board, 4 a vibration insulator mainly made of felt, 5 a disc spring for pressure, 6 a rotor as a moving body mainly made of metal, and 7 a felt. A fixing table, 8 a spacer for pressure adjustment, 9 a rotation stopper for the elastic body 1, 10 a fixed cylinder, 11 a vibration absorber made of rubber or the like, 12 an output connecting plate, and 13 a ball. Bearing inner ring/output cylinder, 14 is a holding ring, 1
5 is a ball bearing outer ring, 16 is a ball, 17, 18, 19 are fixing screws, and 20 is a fixing base.

第1図に示した振動波モータの動作原理および基本構造
は、特開昭62−21358号公報に記載されているも
のと、はぼ同様である。
The operating principle and basic structure of the vibration wave motor shown in FIG. 1 are almost the same as those described in Japanese Patent Laid-Open No. 62-21358.

まず、圧電素子2は両面の電8i2a、2bのパターン
に従って分極処理され、弾性体1と接着しである。
First, the piezoelectric element 2 is polarized according to the pattern of the electrodes 8i2a and 2b on both sides, and is bonded to the elastic body 1.

前記圧電素子2には、フレキシブルプリント回路板3を
通じて、外部から互いに位相のずれた(たとえば、±9
0°)2つの周波電圧を印加すると、共振による曲げ振
動の数μmの進行波が弾性体1に発生する。弾性体1に
は、効率を向上するために、台形断面で、しかも、複数
のくし歯状接触部1bを有している。
The piezoelectric element 2 is externally connected to the piezoelectric element 2 through a flexible printed circuit board 3 with a phase shift of ±9
When two frequency voltages (0°) are applied, a traveling wave of several micrometers due to bending vibration is generated in the elastic body 1 due to resonance. The elastic body 1 has a trapezoidal cross section and a plurality of comb-like contact portions 1b in order to improve efficiency.

前記ロータ6は、弾性体1上の耐摩耗材1aを介して接
触し、進行波に従って摩擦駆動される。またロータ6に
は、数μmの進行波に追従し、しかも、振動を吸収する
ためのフランジ状ばね部6aが形成されている。
The rotor 6 contacts the elastic body 1 via the wear-resistant material 1a and is frictionally driven according to the traveling wave. Further, the rotor 6 is formed with a flange-shaped spring portion 6a that follows a traveling wave of several micrometers and absorbs vibrations.

前記吸振体11は、ロータ6で完全に吸振できない部分
を吸振し、しかも、ロータ6の回転を伝達するものであ
る。ロータ6の回転は、出力連結板12を介してビス1
8で固定される出力筒13から出力として取り出せる。
The vibration absorber 11 absorbs vibrations in parts of the rotor 6 that cannot be completely absorbed, and also transmits the rotation of the rotor 6. The rotation of the rotor 6 is controlled by the screw 1 via the output connecting plate 12.
It can be taken out as an output from the output cylinder 13 fixed at 8.

出力筒13は玉軸受内輪も兼ねており、ボール16、外
輪15、押え環14で軸受を構成している。
The output tube 13 also serves as an inner ring of a ball bearing, and the ball 16, outer ring 15, and presser ring 14 constitute the bearing.

前記弾性体1は、台7に固定されたフェルト等の振動絶
縁体4で保持されて、振動を絶縁している。さらに、台
7は加圧用皿ばね5で加圧され、ロータ6と弾性体1の
間の摩擦力をスペーサ8で調整して、固定台20が固定
筒1oにビス19で固定されている。
The elastic body 1 is held by a vibration insulator 4 such as felt fixed to a stand 7 to insulate vibrations. Further, the table 7 is pressurized by a pressure plate spring 5, the frictional force between the rotor 6 and the elastic body 1 is adjusted by a spacer 8, and the fixed table 20 is fixed to the fixed cylinder 1o with screws 19.

前記弾性体1は、ロータ6の反作用で勅〈可能性がある
ので、回転止め9でくし歯状の溝1bを利用して回転し
ないように係合し、固定筒10にビス17で固定されて
いる。
Since the elastic body 1 may be damaged by the reaction of the rotor 6, it is engaged with the rotation stopper 9 using the comb-shaped grooves 1b to prevent it from rotating, and is fixed to the fixed cylinder 10 with screws 17. ing.

第2図は第1図の吸振体11を拡大し示している。この
吸振体11は、分割部11aを有して、つまり、周方向
に、多数に分割されており、前述の第1表に示した熱膨
張による歪を著しく低減する効果がある。
FIG. 2 shows an enlarged view of the vibration absorber 11 shown in FIG. This vibration absorber 11 has a divided portion 11a, that is, is divided into a large number of parts in the circumferential direction, and has the effect of significantly reducing the distortion due to thermal expansion shown in Table 1 above.

第3図は本発明の第2実施例を示したもので、第3図で
は吸振体11のみを示している。
FIG. 3 shows a second embodiment of the present invention, in which only the vibration absorber 11 is shown.

この第2実施例では、吸振体11は、周方向に多数の内
側切込みllbと多数の外側切込み1cが、交互に設け
られている。この場合も、熱膨張による歪は、これらの
切込みlb、lcによって吸収され、第2図の場合と同
様な効果があるうえ、分割されていないので、一体的に
作成可能であって、取り扱いが簡便である。
In this second embodiment, the vibration absorber 11 is provided with a large number of inner cuts llb and a large number of outer cuts 1c alternately in the circumferential direction. In this case as well, the strain caused by thermal expansion is absorbed by these cuts lb and lc, which has the same effect as in the case of Fig. 2, and since it is not divided, it can be made in one piece and is easy to handle. It's simple.

[発明の効果] 以上説明したように、本発明の振動波モータによれば、
吸振体を細かく分割するか、あるいは複数の切込みを入
れるかをしであるので、温度変化に基づく熱膨張による
歪を著しく低減し、ひいては、温度変化による振動、音
の発生を押える効果がある。
[Effects of the Invention] As explained above, according to the vibration wave motor of the present invention,
By dividing the vibration absorber into smaller pieces or by making multiple cuts, it is possible to significantly reduce distortion caused by thermal expansion caused by temperature changes, which in turn has the effect of suppressing vibrations and noise caused by temperature changes.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1実施例を示した一部断面図、第2
図は第1図の吸振体の拡大平面図、第3図は吸振体のみ
を示した本発明の第2実施例の拡大平面図、第4図は従
来の吸振体を示した拡大平面図である。 1・・・弾性体     2・・・圧電素子4・・・振
動絶縁体   5・・・加圧用皿ばね6・・・ロータ 
    1o・・・固定筒11・・・吸振体    1
2・・・出カ連結板岸  1) 正  行間。d肺
Fig. 1 is a partial sectional view showing the first embodiment of the present invention;
The figure is an enlarged plan view of the vibration absorber shown in FIG. 1, FIG. 3 is an enlarged plan view of the second embodiment of the present invention showing only the vibration absorber, and FIG. 4 is an enlarged plan view showing the conventional vibration absorber. be. 1... Elastic body 2... Piezoelectric element 4... Vibration insulator 5... Pressure disc spring 6... Rotor
1o... Fixed tube 11... Vibration absorber 1
2...Output connection board 1) Positive line spacing. d lung

Claims (2)

【特許請求の範囲】[Claims] 1. 位相差的に配置されているか、分極されているか
の、いずれかによるA相とB相とから構成された1対の
電気−機械エネルギー変換素子群の、前記A相に第1の
周波電圧を印加することにより発生する第1の定在波と
前記B相に該第1の周波電圧と所定量位相がずれた第2
の周波電圧を印加することにより発生する第2の定在波
との合成により進行性振動波を発生する振動体を備え、
かつ、該進行性振動波により摩擦駆動される移動体を備
えた振動波モータにおいて、該移動体の不要振動を吸収
ならびに減衰させる吸振体が固定体の間に介在され、し
かも、該吸振体が細かく分割されたものからなることを
特徴とする振動波モータ。
1. Applying a first frequency voltage to the A phase of a pair of electro-mechanical energy conversion element groups consisting of an A phase and a B phase, which are either arranged phase-differentially or polarized. A first standing wave generated by applying a voltage to the B phase and a second frequency voltage whose phase is shifted by a predetermined amount from the first frequency voltage.
a vibrating body that generates a progressive vibration wave by combining with a second standing wave generated by applying a frequency voltage of
Further, in a vibration wave motor including a moving body that is frictionally driven by the progressive vibration waves, a vibration absorber that absorbs and damps unnecessary vibrations of the moving body is interposed between the fixed bodies, and the vibration absorber is A vibration wave motor characterized by being made up of finely divided parts.
2. 位相差的に配置されているか、分極されているか
の、いずれかによるA相とB相とから構成された1対の
電気−機械エネルギー変換素子群の、前記A相に第1の
周波電圧を印加することにより発生する第1の定在波と
前記B相に該第1の周波電圧と所定量位相がずれた第2
の周波電圧を印加することにより発生する第2の定在波
との合成により進行性振動波を発生する振動体を備え、
かつ、該進行性振動波により摩擦駆動される移動体を備
えた振動波モータにおいて、該移動体の不要振動を吸収
ならびに減衰させる吸振体が固定体の間に介在され、し
かも、該吸振体が複数の切込みを有するものからなるこ
とを特徴とする振動波モータ。
2. Applying a first frequency voltage to the A phase of a pair of electro-mechanical energy conversion element groups consisting of an A phase and a B phase, which are either arranged phase-differentially or polarized. A first standing wave generated by applying a voltage to the B phase and a second frequency voltage whose phase is shifted by a predetermined amount from the first frequency voltage.
a vibrating body that generates a progressive vibration wave by combining with a second standing wave generated by applying a frequency voltage of
Further, in a vibration wave motor including a moving body that is frictionally driven by the progressive vibration waves, a vibration absorber that absorbs and damps unnecessary vibrations of the moving body is interposed between the fixed bodies, and the vibration absorber is A vibration wave motor comprising a plurality of notches.
JP63070070A 1988-03-24 1988-03-24 Oscillatory wave motor Pending JPH01243861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63070070A JPH01243861A (en) 1988-03-24 1988-03-24 Oscillatory wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63070070A JPH01243861A (en) 1988-03-24 1988-03-24 Oscillatory wave motor

Publications (1)

Publication Number Publication Date
JPH01243861A true JPH01243861A (en) 1989-09-28

Family

ID=13420912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63070070A Pending JPH01243861A (en) 1988-03-24 1988-03-24 Oscillatory wave motor

Country Status (1)

Country Link
JP (1) JPH01243861A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012012028A2 (en) * 2010-07-19 2012-01-26 Baker Hughes Incorporated Pressure mitgating dielectric debris seal for pothead interface

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012012028A2 (en) * 2010-07-19 2012-01-26 Baker Hughes Incorporated Pressure mitgating dielectric debris seal for pothead interface
WO2012012028A3 (en) * 2010-07-19 2012-03-29 Baker Hughes Incorporated Pressure mitgating dielectric debris seal for pothead interface
GB2495461A (en) * 2010-07-19 2013-04-10 Baker Hughes Inc Pressure mitigating dielectric debris seal for pothead interface
US8491282B2 (en) 2010-07-19 2013-07-23 Baker Hughes Incorporated Pressure mitigating dielectric debris seal for a pothead interface
GB2495461B (en) * 2010-07-19 2015-07-01 Baker Hughes Inc Pressure mitigating dielectric debris seal for a pothead interface
NO340119B1 (en) * 2010-07-19 2017-03-13 Baker Hughes Inc Pressure-lowering dielectric seal for pothead interface

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