JPH012381A - Piezoelectric element - Google Patents
Piezoelectric elementInfo
- Publication number
- JPH012381A JPH012381A JP62-158701A JP15870187A JPH012381A JP H012381 A JPH012381 A JP H012381A JP 15870187 A JP15870187 A JP 15870187A JP H012381 A JPH012381 A JP H012381A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- conductive
- piezoelectric
- layer
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 9
- 239000011241 protective layer Substances 0.000 claims description 8
- 239000003973 paint Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005336 cracking Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- VJPLIHZPOJDHLB-UHFFFAOYSA-N lead titanium Chemical compound [Ti].[Pb] VJPLIHZPOJDHLB-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は圧力、振動、音響等のセンサーあるいは駆動素
子として広範囲に利用可能な圧電素子の改良に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to the improvement of a piezoelectric element that can be widely used as a sensor or drive element for pressure, vibration, sound, etc.
〈従来の技術〉
一般に圧電体とは誘電体で電気的極性の大きい物質で、
機械的応力を加えて変形させると電荷を発生し、逆に電
圧を加えると機械的変形をおこすものをいい、圧電素子
は圧電体のこの性質を利用して、圧力、振動、音響等の
センサーあるいは駆動素子として使用しているものであ
る。<Prior art> In general, a piezoelectric material is a dielectric material with high electrical polarity.
A piezoelectric element generates an electric charge when deformed by applying mechanical stress, and mechanically deforms when a voltage is applied. Piezoelectric elements utilize this property of piezoelectric materials to detect pressure, vibration, sound, etc. Or it is used as a driving element.
従来の圧電素子の構成は＠３図に示すように圧電体１の
両面に真空蒸着あるいはスパッタリング等によりＡｕ、
Ａｊ’あるいはＮｉ等の導電被膜層２を形成し、リード
線３を接続して電極としている。As shown in Figure 3, the conventional piezoelectric element has a structure in which Au, Au,
A conductive film layer 2 made of Aj' or Ni is formed, and lead wires 3 are connected to serve as electrodes.
〈発明が解決しようとする問題点〉
上記のように構成してなる圧電素子であれば、圧電体１
に形成された導電被膜層２は薄くて物理的強度が低く、
また圧電体ｌの曲げ、振動にともない、くりかえし圧縮
、引張り応力を受けるため、第４図の部分拡大図に示す
ように割れ２ａを生じやすく、従って一旦割れを生じる
と導電被膜層２ｂと導電被膜層２Ｃ間の導通が断たれる
ため、ＩＪ−ド線３の接続されていない導電被膜層２ｃ
の部分は電極として働かなくなってｌ、まい、圧電素子
としての性能が損われてしまうという問題点があった０
本発明は上記問題点を解決するためになされたものであ
り、その目的きする処は電極の割れを防止し・、また万
−割れを生じた場合でも電極の導通を確保し、圧電素子
としての性能が損われないようにした圧電素子を提供す
ることにある。<Problems to be solved by the invention> If the piezoelectric element is configured as described above, the piezoelectric body 1
The conductive coating layer 2 formed on is thin and has low physical strength.
Furthermore, as the piezoelectric body 1 is repeatedly subjected to compressive and tensile stress due to bending and vibration, cracks 2a are likely to occur as shown in the partially enlarged view of FIG. 4. Therefore, once a crack occurs, the conductive coating layer 2b Since the conduction between the layers 2C is broken, the conductive coating layer 2c to which the IJ-do wire 3 is not connected
There is a problem in that the part does not work as an electrode, and the performance as a piezoelectric element is impaired.The present invention has been made to solve the above problems, and the present invention has been made to solve the above problems. The object of the present invention is to provide a piezoelectric element that prevents cracking of the electrodes, ensures continuity of the electrodes even if cracking occurs, and prevents the performance of the piezoelectric element from being impaired.
く問題点を解決するための手段〉
本発明の圧電素子は圧電体１の表面に真空蒸着あるいは
スパッタリング等により導電被膜層２を形成して電極と
した圧電素子の該導電被膜層２の上面に導電性フィルム
あるいは導電性ペイント等の導電性を有する保護層４を
設けてなる構成にしたものである。Means for Solving the Problems> The piezoelectric element of the present invention has a conductive film layer 2 formed on the surface of a piezoelectric body 1 by vacuum evaporation or sputtering, and then used as an electrode on the upper surface of the conductive film layer 2 of the piezoelectric element. It has a structure in which a protective layer 4 having conductivity such as a conductive film or conductive paint is provided.
く作 用〉
保護層４にて導電被膜層２の物理的な傷付きが保護され
、また導電被膜層２の割れ２ａの起点となるミクロクラ
ックの発生が保護層４によりくい止められるため、割れ
２ａを生じにくく、また万−割れ２ａを発生した場合で
も保護層４に導電性をもたせているため、保護層４を介
して導電被膜層２ｂ−保護層４二導電被膜層２ｃと導通
が確保されるため、圧電素子としての機能が損われるこ
とがなくなる。Function> The protective layer 4 protects the conductive coating layer 2 from physical damage, and the protective layer 4 prevents the generation of microcracks that are the starting point of the cracks 2a in the conductive coating layer 2. Furthermore, even if cracks 2a occur, the protective layer 4 has conductivity, so continuity between the conductive coating layer 2b and the protective layer 4 and the conductive coating layer 2c is ensured through the protective layer 4. Therefore, the function as a piezoelectric element is not impaired.
〈実施例〉
以下本発明の圧電素子の一実施例を第１図及び第２図と
ともに説明するが上記従来例と同一部分は同一符号を符
して説明する。<Example> Hereinafter, an example of the piezoelectric element of the present invention will be described with reference to FIGS. 1 and 2, and the same parts as the above-mentioned conventional example will be described with the same reference numerals.
第１図において、ｌは圧電体で、該圧電体ｌにはチタン
峻ジルコン酸鉛（ＰＺＴ）のセラミック薄板あるいはポ
リフッ化ビニリデン（ＰＶＤＦ）のフィルム等を用い、
この表面に真空蒸着、スパッタリングあるいはメツキ等
によりＡｕ （金）。In FIG. 1, l is a piezoelectric body, and the piezoelectric body l is made of a thin ceramic plate of titanium-lead zirconate (PZT) or a film of polyvinylidene fluoride (PVDF).
Au (gold) is applied to this surface by vacuum evaporation, sputtering, plating, etc.
Ａ／（アルミニウム）あるいはＮｉにッケル）等の導電
被膜層２を形成する。A conductive film layer 2 of A/(aluminum) or Ni (nickel) is formed.
該導電被膜層２にリード線３を接続して電極とする。さ
らにその上面にＡｇ（銀）粉、Ｃｕ（銅）粉。A lead wire 3 is connected to the conductive film layer 2 to serve as an electrode. Furthermore, Ag (silver) powder and Cu (copper) powder are placed on the top surface.
カーボン粉等を導電フィラーとし、アクリル樹脂・ビニ
ール樹脂、フェノール樹脂、エポキシ樹脂等をバインダ
ーとする導電性プラスチック、導電性ペイントあるいは
導電性ペイント等の導電性を有する保護膜４を形成する
。A protective film 4 having conductivity is formed using conductive plastic, conductive paint, or conductive paint using carbon powder or the like as a conductive filler and acrylic resin, vinyl resin, phenol resin, epoxy resin, or the like as a binder.
尚、上記保護膜４の形成方法には例えば導電性プラスチ
ックではバインダーがアクリル樹脂・ビニール樹脂等の
熱可塑性プラスチックの場合、溶融させて圧電体ｌと共
押し出しする方法や、フェノール樹脂・エポキシ樹脂等
の熱硬化性プラスチックの場合、圧電体ｌに塗布した後
加熱硬化させる方法、またあるいはあらかじめフィルム
化した導電性プラスチックを導電性接着剤によりラミネ
ートする方法等が考えられるが、その他のいずれの方法
でも本発明の効果が得られるのはいうまでもない。また
圧電体１．導電被膜層２あるいは導電性を有する保護膜
４の材質等も上記実施例に限定されるものではない。The method for forming the protective film 4 includes, for example, a method of melting a conductive plastic and co-extruding it with the piezoelectric material 1 when the binder is a thermoplastic such as acrylic resin or vinyl resin, or a method of melting the conductive plastic and extruding it together with the piezoelectric material 1, or using a method such as phenol resin, epoxy resin, etc. In the case of thermosetting plastics, it is possible to apply them to the piezoelectric body and then heat cure them, or to laminate a conductive plastic that has been made into a film with a conductive adhesive, but any other method can be used. Needless to say, the effects of the present invention can be obtained. Also, piezoelectric body 1. The material of the conductive film layer 2 or the conductive protective film 4 is not limited to the above embodiments.
〈発明の効果〉
本発明の圧電素子は上記のような構成であるから、電極
となる導電被膜層の割れを防止し、もし万−割れを生じ
た場合でも電極の導通を確保できるため圧電素子として
の性能が損われず、寿命の長い信頼性の優れた圧電素子
を得ることができる。<Effects of the Invention> Since the piezoelectric element of the present invention has the above-described configuration, cracking of the conductive coating layer that becomes the electrode can be prevented, and even if cracking occurs, continuity of the electrode can be ensured. It is possible to obtain a piezoelectric element with excellent reliability and long life without any loss in performance.
第１図は本発明の圧電素子の一実施例の構成を示す断面
図、第２図は第１図の要部拡大断面図、第３図は従来の
圧電素子の一実施例の構成を示す断面図、第４図は第３
図の要部拡大断面図である。
図面中、１は圧電体、２は導電被膜層、２ａは割れ、３
はリード線、４は保護層を示す。
代理人 弁理士 杉 山 毅 至（他１名）話１図FIG. 1 is a sectional view showing the configuration of an embodiment of the piezoelectric element of the present invention, FIG. 2 is an enlarged sectional view of the main part of FIG. Cross-sectional view, Figure 4 is the 3rd
FIG. 2 is an enlarged cross-sectional view of the main part of the figure. In the drawing, 1 is a piezoelectric body, 2 is a conductive coating layer, 2a is a crack, and 3
4 indicates a lead wire, and 4 indicates a protective layer. Agent Patent Attorney Takeshi Sugiyama (and 1 other person) Story 1 Illustration
Claims (1)
により導電被膜層を形成して電極とした圧電素子におい
て、該導電被膜層の上面に導電性フィルムあるいは導電
性ペイント等の導電性を有する保護層を設けたことを特
徴とする圧電素子。1. In a piezoelectric element in which a conductive film layer is formed on the surface of a piezoelectric body by vacuum deposition or sputtering, and used as an electrode, a protective layer having conductivity such as a conductive film or conductive paint is provided on the top surface of the conductive film layer. A piezoelectric element characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62158701A JPS642381A (en) | 1987-06-25 | 1987-06-25 | Piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62158701A JPS642381A (en) | 1987-06-25 | 1987-06-25 | Piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH012381A true JPH012381A (en) | 1989-01-06 |
| JPS642381A JPS642381A (en) | 1989-01-06 |
Family
ID=15677471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62158701A Pending JPS642381A (en) | 1987-06-25 | 1987-06-25 | Piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642381A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103623U (en) * | 1990-02-09 | 1991-10-28 |
-
1987
- 1987-06-25 JP JP62158701A patent/JPS642381A/en active Pending
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