JPH01236925A - Apparatus to decompose halogenated acyclic hydrocarbon - Google Patents
Apparatus to decompose halogenated acyclic hydrocarbonInfo
- Publication number
- JPH01236925A JPH01236925A JP63061038A JP6103888A JPH01236925A JP H01236925 A JPH01236925 A JP H01236925A JP 63061038 A JP63061038 A JP 63061038A JP 6103888 A JP6103888 A JP 6103888A JP H01236925 A JPH01236925 A JP H01236925A
- Authority
- JP
- Japan
- Prior art keywords
- acyclic hydrocarbon
- gas
- ozone
- halogenated acyclic
- decomposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- -1 halogenated acyclic hydrocarbon Chemical class 0.000 title claims abstract description 25
- 229930195733 hydrocarbon Natural products 0.000 title abstract description 6
- 239000004215 Carbon black (E152) Substances 0.000 title abstract 5
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000007599 discharging Methods 0.000 claims abstract 3
- 238000000354 decomposition reaction Methods 0.000 claims description 21
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 15
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052753 mercury Inorganic materials 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 238000006386 neutralization reaction Methods 0.000 abstract description 3
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 abstract description 2
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 239000004338 Dichlorodifluoromethane Substances 0.000 description 8
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 8
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000005437 stratosphere Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical class Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はハロゲン化非環式炭化水素化合物、特にフッ化
炭化水素、塩素化炭化水素あるいはフッ化、塩素化混合
の非環式炭化水素化合物の分解装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is directed to the decomposition of halogenated acyclic hydrocarbon compounds, particularly fluorinated hydrocarbons, chlorinated hydrocarbons, or mixed fluorinated and chlorinated acyclic hydrocarbon compounds. Regarding equipment.
従来の技術
ハロゲン化非環式炭化水素化合物は非常に安定な物質で
あるため、特別な処置を施さない限り自然に分解するこ
とはない。この種の物質は大気中に放出されると成層圏
にまで拡散し、成層圏中にあるオゾン層において、初め
て分解される。この分解において、成層圏中のオゾンが
消費され、オゾンに吸収されている紫外線（短波長）が
、直接地表にふりそそぐことになる。その結果、生物に
有害な紫外線により遺伝子や細胞が傷つけられ生体系に
大きな影響をあたえることが憂慮されている。これらノ
゛ロゲン化炭化水素化合物を容易に分解する方法が強く
望まれ、大気中に排出する量を大巾に減少する方策がと
られようとしている。BACKGROUND OF THE INVENTION Halogenated acyclic hydrocarbon compounds are very stable substances and will not spontaneously decompose unless special treatment is applied. When these substances are released into the atmosphere, they diffuse into the stratosphere and are first broken down in the ozone layer within the stratosphere. During this decomposition, ozone in the stratosphere is consumed, and the ultraviolet rays (short wavelengths) that are absorbed by ozone fall directly onto the earth's surface. As a result, there are concerns that ultraviolet rays, which are harmful to living organisms, may damage genes and cells and have a major impact on biological systems. A method for easily decomposing these halogenated hydrocarbon compounds is strongly desired, and measures are being taken to drastically reduce the amount emitted into the atmosphere.
従来、この種の安定な・・ロダン化非環式炭化水素化合
物を分解する方法としては、１２００°Ｃ以上の高温で
燃焼する方法がある。この方法は高温に耐える炉が必要
であること、燃焼により兄生する・・ロゲン化水素例え
ば塩化水素、フッ化水素に耐える炉が必要であることな
どから、犬がかりな設備を要し高価になる欠点があった
。このような欠点を解決する方法として、・・ロゲン化
芳香族化合物と水酸化カリウムの共存下で加熱する方法
が提案されている（例えば、特公昭５１−３７８３１号
公報）。Conventionally, as a method for decomposing this type of stable rhodanized acyclic hydrocarbon compound, there is a method of burning it at a high temperature of 1200° C. or higher. This method requires a furnace that can withstand high temperatures, and requires a furnace that can withstand hydrogen chlorides, such as hydrogen chloride, and hydrogen fluoride, which are produced by combustion, so it requires complicated equipment and is expensive. There was a drawback. As a method for solving these drawbacks, a method of heating in the coexistence of a rogogenated aromatic compound and potassium hydroxide has been proposed (for example, Japanese Patent Publication No. 51-37831).
兄明が解決しようとする課題
このような従来の方法では、比較的低沸点であるハロゲ
ン化非環式炭化水素化合物に適用した場合分解率低くさ
らにバッチ処理が必要であるという欠点を有している。The problem that Animei is trying to solve These conventional methods have the drawbacks of low decomposition rates and the need for batch processing when applied to halogenated acyclic hydrocarbon compounds, which have relatively low boiling points. There is.
本発明はこのような点を改良するためになされたもので
、ハロゲン化非環式炭化水素化合物を高い分解率で連続
的に分解する装置を提供することを目的とする。The present invention was made to improve these points, and an object of the present invention is to provide an apparatus for continuously decomposing halogenated acyclic hydrocarbon compounds at a high decomposition rate.
課題を解決するための手段
本発明は上記課題を解決するための技術的な手段は、ハ
ロゲン化非環式炭化水素化合物にオゾンを反応させ分解
するものである。さらに、ハロゲン化非環式炭化水素化
合物をオゾン共存下において紫外光を照射し分解するも
のである。Means for Solving the Problems The technical means of the present invention for solving the above problems is to react a halogenated acyclic hydrocarbon compound with ozone and decompose it. Further, the halogenated acyclic hydrocarbon compound is decomposed by irradiating it with ultraviolet light in the presence of ozone.
作用
本発明によれば、ハロゲン化非環式炭化水素化合物をオ
ゾンと反応させるかあるいはオゾンと共存下に紫外光を
照射することにより高い分解率で、連続的に分解するこ
とが可能となる。従って、このような方法を用いてハロ
ゲン化非環式炭化水素化合物の処理設備を構築すれば例
えば、半導体工場における洗浄工程に使用されているハ
ロゲン化非環式炭化水素化合物を大気中に放出する量を
大巾に削減することができ、成層圏のオゾン層破壊に歯
止めを欠けることが可能となる。According to the present invention, it is possible to continuously decompose a halogenated acyclic hydrocarbon compound at a high decomposition rate by reacting it with ozone or by irradiating it with ultraviolet light in the coexistence of ozone. Therefore, if a treatment facility for halogenated acyclic hydrocarbon compounds is constructed using such a method, for example, the halogenated acyclic hydrocarbon compounds used in the cleaning process at a semiconductor factory will be released into the atmosphere. It is possible to significantly reduce the amount of carbon dioxide, making it possible to put a stop to the depletion of the stratospheric ozone layer.
実施例
以下本発明の実施例を図面と共に説明する。図面は本発
明の方法を証明するために使用した装置の模式図である
。図中１は分解反応容器、２は低圧水銀ランプ、３はオ
ゾン発生器、４はオゾン発生器に酸素ガスを供給するた
めの供給口、６は排ガス中に含まれるハロゲン化水素を
吸収するためのスクラバー、６は排水中に含まれる酸成
分を中和するための中和槽、アはガスの取入口、８は排
出口を示す。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. The drawing is a schematic representation of the apparatus used to demonstrate the method of the invention. In the figure, 1 is a decomposition reaction vessel, 2 is a low-pressure mercury lamp, 3 is an ozone generator, 4 is a supply port for supplying oxygen gas to the ozone generator, and 6 is for absorbing hydrogen halide contained in exhaust gas. 6 is a neutralization tank for neutralizing acid components contained in wastewater, A is a gas intake port, and 8 is a discharge port.
（実施例１）
上記の装置を用いて、１１００ＰＰのジクロロジフロロ
メタンを含む空気（１０ｏ１／ｂｒｓ ）ｉ７の導入口
から分解反応容器に導入するとともに、酸素をオゾン発
生器に通じて生成したオゾン（生成量： ０．５９ ／
ｈｒｓ ）を分解反応容器に導入した。(Example 1) Using the above apparatus, air (10o1/brs) containing 1100PP of dichlorodifluoromethane was introduced into the decomposition reaction vessel from the inlet of i7, and the ozone generated by passing oxygen through the ozone generator. (Amount generated: 0.59/
hrs) was introduced into the decomposition reaction vessel.
８のガス排出口から排出されるガス成分をガスクロマト
グラムにより分析した結果、−酸化炭素。As a result of gas chromatogram analysis of the gas components discharged from the gas outlet of No. 8, - carbon oxide.
二酸化炭素、メタン、水および１２ＰＰＭのジクロロジ
フロロメタンであった。オゾン発生器に供給する酸素流
量を調節しオゾン生成量を１ダ／ ｈｒｓにした以外は
他の条件を同様にして、排出ガス中に含まれるジクロロ
ジフロロメタンの量を、測定すると５Ｐ ＰＭに減少し
ていた。このような反応装置を多段に設置か、オゾン供
給量を増やせば効率よく分解することが可能であるのは
自明である。Carbon dioxide, methane, water and 12 PPM dichlorodifluoromethane. The amount of dichlorodifluoromethane contained in the exhaust gas was measured to be 5P PM under the same conditions except that the oxygen flow rate supplied to the ozone generator was adjusted to make the ozone generation amount 1 Da/hrs. It was decreasing. It is obvious that efficient decomposition can be achieved by installing such reactors in multiple stages or by increasing the amount of ozone supplied.
（実施例２）
実施例１の条件で、ジクロロジフロロメタンを供給し、
オゾン生成量を１９／ｂｒｓ設定し、２の低圧水銀ラン
プを点灯し分解を行った。ジクロロジフロロメタンの量
を測定すると０．Ｉ Ｐ Ｐ Ｍに減少していた。(Example 2) Dichlorodifluoromethane was supplied under the conditions of Example 1,
The ozone production amount was set at 19/brs, and the low pressure mercury lamp No. 2 was turned on to carry out decomposition. When the amount of dichlorodifluoromethane is measured, it is 0. It had decreased to I P P M.
（比較例）
実施例２と同様の条件で、オゾンの供給を停止し、低圧
水銀ランプのみで実験を行うと、ジクロロジフロロメタ
ンの排出量［６０ＰＰＭであった。(Comparative Example) When an experiment was conducted under the same conditions as in Example 2, with ozone supply stopped and only a low-pressure mercury lamp used, the amount of dichlorodifluoromethane discharged was 60 PPM.
オゾンに加え紫外線を照射することにより、高い分解率
を得ることが可能であるのは、オゾンがジクロロジフロ
ロメタンに作用し、紫外線により分解しやすい酸化物あ
るいは過酸化物を生成し、それら化合物が紫外線を吸収
し分解する過程があるものと推定される。The reason why it is possible to obtain a high decomposition rate by irradiating ozone with ultraviolet rays is that ozone acts on dichlorodifluoromethane to generate oxides or peroxides that are easily decomposed by ultraviolet rays, and these compounds It is presumed that there is a process in which the particles absorb ultraviolet light and decompose.
ジクロロジフロロメタンについて説明したが。I explained about dichlorodifluoromethane.
他のハロゲン化非環式炭化水素化合物においても、有効
であることは自明である。また反応槽を多段にし分解率
を向上させることも可能である。さらに、紫外光照射手
段について、内部に取り付ける方式を説明したが、外部
より導入する方法においても同様の分解を行うことは可
能である。It is obvious that other halogenated acyclic hydrocarbon compounds are also effective. It is also possible to increase the decomposition rate by using multiple stages of reaction vessels. Further, although a method of installing the ultraviolet light irradiation means internally has been described, it is also possible to carry out similar decomposition by introducing the ultraviolet light irradiation means from the outside.
発明の効果
以上のように本発明の装置によれば、ハロゲン化非環式
炭化水素化合物を高い効率で分解することが可能である
。また、ハロゲン化非環式炭化水素化合物を洗浄工程に
使用する半導体工場などにおいて用いれば、排ガス中に
含まれる前述の化合物を処理することが可能となり、成
層圏におけるオゾン層破壊に歯止めをかけることが可能
となるなど産業上極めて有益である。Effects of the Invention As described above, according to the apparatus of the present invention, it is possible to decompose halogenated acyclic hydrocarbon compounds with high efficiency. Furthermore, if halogenated acyclic hydrocarbon compounds are used in semiconductor factories, etc., which use them in cleaning processes, it will be possible to treat the aforementioned compounds contained in exhaust gas, and it will be possible to stop the depletion of the ozone layer in the stratosphere. This is extremely useful for industry.
図面は本発明の一実施例に用いた分解装置の略図である
。
１・・・・・・分解反応容器、２・・・・・・低圧水銀
ランプ。
３・・・・・・オゾン発生器、４・・・・・・供給口、
６・・・・・・スクラバー、６・・・・・・中和槽、７
・・・・・・ガス取入口、８・・・・・・ガス排出口。The drawing is a schematic diagram of a disassembly apparatus used in an embodiment of the present invention. 1... Decomposition reaction vessel, 2... Low pressure mercury lamp. 3... Ozone generator, 4... Supply port,
6... Scrubber, 6... Neutralization tank, 7
...Gas intake port, 8...Gas discharge port.
Claims (2)
入するガス取入口、分解生成ガスを排出するガス排出口
と、オゾンを導入する導入口を持ちハロゲン化非環式炭
化水素化合物を含む気体の分解空間となる分解反応容器
と、前記分解反応容器に供給するオゾンを発生する手段
と、前記排出口から排出される分解生成ガス中に含まれ
る有害物質を除去する手段とを備えたことを特徴とする
ハロゲン化非環式炭化水素化合物の分解装置。(1) Has a gas intake port for introducing gas containing a halogenated acyclic hydrocarbon compound, a gas outlet port for discharging decomposition product gas, and an inlet port for introducing ozone, which contains a halogenated acyclic hydrocarbon compound. A decomposition reaction vessel serving as a gas decomposition space, a means for generating ozone to be supplied to the decomposition reaction vessel, and a means for removing harmful substances contained in the decomposition product gas discharged from the discharge port. A decomposition device for halogenated acyclic hydrocarbon compounds, characterized by:
特徴とする請求項１に記載のハロゲン化非環式炭化水素
化合物の分解装置。(2) The apparatus for decomposing a halogenated acyclic hydrocarbon compound according to claim 1, further comprising means for irradiating the decomposition space with ultraviolet light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63061038A JPH01236925A (en) | 1988-03-15 | 1988-03-15 | Apparatus to decompose halogenated acyclic hydrocarbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63061038A JPH01236925A (en) | 1988-03-15 | 1988-03-15 | Apparatus to decompose halogenated acyclic hydrocarbon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01236925A true JPH01236925A (en) | 1989-09-21 |
Family
ID=13159698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63061038A Pending JPH01236925A (en) | 1988-03-15 | 1988-03-15 | Apparatus to decompose halogenated acyclic hydrocarbon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01236925A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH067474A (en) * | 1992-06-27 | 1994-01-18 | Makoto Ogose | Decomposing method for halide and decomposing device therefor |
| US6423882B1 (en) * | 1999-09-21 | 2002-07-23 | Steril-Aire, Usa, Inc. | Airborne gas phase sorption enhancement using ultraviolet light |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110174A (en) * | 1974-07-15 | 1976-01-27 | Sumitomo Chemical Co | Haigasuchuno harogenkafuhowatankasuisono jokyoho |
-
1988
- 1988-03-15 JP JP63061038A patent/JPH01236925A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110174A (en) * | 1974-07-15 | 1976-01-27 | Sumitomo Chemical Co | Haigasuchuno harogenkafuhowatankasuisono jokyoho |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH067474A (en) * | 1992-06-27 | 1994-01-18 | Makoto Ogose | Decomposing method for halide and decomposing device therefor |
| US6423882B1 (en) * | 1999-09-21 | 2002-07-23 | Steril-Aire, Usa, Inc. | Airborne gas phase sorption enhancement using ultraviolet light |
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