JPH01232694A - Multi-color electroluminescent panel and manufacture thereof - Google Patents

Abstract

PURPOSE:To realize luminescence display of colors and neutral colors between them at a low cost easily by arranging cells for the colors in the same surface, putting them between a common electrode and electrodes for the color cells, and applying an AC voltage selectively changing its size. CONSTITUTION:A base plate 10 is formed by forming a transparent electrode 12 for a common electrode and a layer of dielectric on a transparent substrate 11. A base part 21a of a growing device is kept vacuum, and gases 25R, 25G, 25B including substances relating to light emission of red, green and blue respectively are supplied from tubes 24 (24R, 24G, 24B) through valves 27 (27R, 27G, 27B) controlled by a flow controller 26. Ion beams for each light emitting substance through an ion generator 29, an acceleration electron lens system 31, and a sector magnet 34 are throttled by a focus deflection electron lens 36 to a micro-diameter to be disposed on the base plate 10 to form active layers 14R, 14G, 14B. By forming a layer 15 of dielectric and back electrodes 16R, 16G, 16B separated for each color cell in the active layer on it, the titled device can be manufactured easily with a reduced number of layers.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a multicolor EL panel that performs multicolor light emitting display using EL (electroluminescence), and a method for manufacturing the same.

"Prior Art" A conventional multicolor EL panel is formed by laminating light emitting layers of each color on a transparent substrate made of glass or the like.

Specifically, in the case of a dot matrix structure having red, green, and blue light emitting layers, for example, as shown in FIG. 3, transparent electrodes 52 are formed on a transparent substrate 51 and arranged in one direction.
A dielectric layer 53R is formed on the transparent electrode 52, and the dielectric layer 53R is formed on the transparent electrode 52.
i! A red active layer 54R is formed on the active layer 53R.
A dielectric layer 55R is formed on the dielectric layer 55R, and transparent electrodes 56 are formed on the dielectric layer 55R in a direction perpendicular to the direction in which the transparent electrodes 52 are arranged.
In addition, a dielectric layer 53G is formed on the transparent electrode 56, a green active layer 54G is formed on the dielectric layer 53G, and a dielectric layer N5 is formed on the active layer 54G.
5G is formed, transparent electrodes 57 are arranged on the dielectric layer 55G in the direction in which the transparent electrodes 52 are arranged, a green light-emitting layer is formed between the transparent electrodes 56 and 57, and A dielectric layer 53B is formed on the electrode 57, a blue active layer 54B is formed on the dielectric layer 53B, and an active layer 54B is formed on the dielectric layer 53B.
A dielectric layer 55B is formed on the dielectric layer 54B. 55B
Rear electrodes 58 are formed on the transparent electrodes 56 and arranged in the direction in which the transparent electrodes 56 are arranged, and a blue light emitting layer is formed between the transparent electrodes 57 and the rear electrodes 58.
Between transparent electrode 56 and transparent electrode 57, and between transparent electrode 57
By selectively applying an alternating current voltage between the transparent electrodes 52 and 57, the transparent electrode 56, and the rear electrode 58, and changing the magnitude of the voltage, red, In each display cell in which green and blue light-emitting layers are laminated, light-emission display of any color including red, green, blue, or an intermediate color thereof is performed.

``Problems to be Solved by the Invention'' However, since the conventional multicolor EL panel as shown in FIG. The wiring of the electrodes becomes complicated, which lowers the yield of the product.In addition, when forming a light-emitting layer of three primary colors as in the example in Fig. 3, a total of 13 layers are formed, and a light-emitting layer of three primary colors is required. Even in the case of forming , it is necessary to form a large number of layers (9 layers in total), which has the drawback of complicating the manufacturing process and increasing the manufacturing cost.

Therefore, in a multicolor EL panel, even when using a dot matrix configuration, the wiring of each electrode can be easily routed and the product yield can be improved. can be formed reliably and easily, and the manufacturing process as a whole is simplified and the manufacturing cost of the product is reduced.

"Means for Solving the Problems" In the multicolor EL panel of the present invention, active layers of each color are arranged and formed on the same surface, and rear electrodes or transparent electrodes are arranged on the same surface in correspondence with the active layers of each color. An array is formed.

That is, the multicolor EL panel of the present invention includes active layers of each color arranged and formed on the same surface, a pair of dielectric layers common to the active layers of each color sandwiching the active layer of each color, and a pair of dielectric layers common to the active layers of each color, which sandwich the active layer of each color. It has a transparent electrode and a rear electrode on both sides of the dielectric layer, one of the rear electrode and the transparent electrode is divided corresponding to the active layer of each color, and the other of the rear electrode and the transparent electrode is divided into the active layer of each color. This is a common structure for layers.

In the manufacturing method of the present invention, at the same time as the base material of the active layer of each color is formed on the portion of the substrate where the active layer of each color is to be formed, a beam focused to a minute diameter is applied onto the portion to emit light of each color. Transporting substances to form active layers of each color.

In this case, the base material for the active layer of each color is formed by transporting the substance that will become the base material of the active layer of each color onto the part of the substrate where the active layer of each color is to be formed using a beam focused to a minute diameter. It can be carried out.

"Function" In the above-mentioned multicolor EL panel of the present invention, the color cells of each color are arranged and formed on the same surface, and the color cells of each color are divided into a common transparent electrode or rear electrode and a color cell of each color. By selectively applying an alternating current voltage between the rear electrode or the transparent electrode, and changing the magnitude of the voltage, each color and Light emitting display of intermediate colors between them is performed.

Embodiment FIG. 1 shows an example of a multicolor EL panel according to the present invention, which has a dot matrix structure having red, green, and blue color cells.

A transparent electrode 12 made of ITO (indium tin oxide) or the like is placed on a transparent substrate 11 made of glass or the like.
are arranged in one direction, and Y
A dielectric material 71513 made of z O3 or the like, which has a large dielectric constant and is stable against the environment, is formed, and the dielectric material F! 13, red, green, and blue active layers 14R and 14G each have a composition as described below.

14B are sequentially and alternately arranged in a direction perpendicular to the arrangement direction of the transparent electrodes 12, and the active layers 14R, 114G, 14
A dielectric 115 similar to the dielectric layer 13 is formed on the dielectric layer 13, and rear electrodes 16R, 16G, and 16B each made of a metal such as aluminum are formed on the dielectric layer i15.
R, 14G.

The active IWs 14R, 14G, and 14B are sequentially and alternately arranged in the arrangement direction corresponding to the active IWs 14B.

Red active N14R has ZnS as a base material and has SmF3 dispersed therein as a substance that participates in light emission, or Ca.
The green active layer 14G is made of Zn as a base material, and Eu is dispersed therein as a substance that participates in light emission.
S is the base material, and TbF is added as a substance that participates in light emission.
The blue active layer 14B is made of
ZnS is used as a base material, and T is added as a substance that participates in light emission.
Examples include those in which mF 3 is dispersed, and those in which SrS is used as a base material and CeCls is dispersed therein as a substance that participates in light emission.

In the multicolor EL panel described above, a red color cell is constituted by the active [14R], the dielectric layers 13 and 15 sandwiching it, and the transparent electrode 12 and rear electrode 16R on both sides of the dielectric layers 13 and 15. The active layer 114G, the dielectrics N13 and 15 sandwiching it, and the dielectric layers 13 and 1
The transparent electrodes 12 and the rear electrodes 16G on both sides of the active Jil 4B constitute a green color cell, the active Jil 4B, the dielectrics N13 and 15 sandwiching it, and the dielectric layers 13 and 1
A blue color cell is constituted by the transparent electrode 12 and the rear electrode 16B on both sides of the transparent electrode 12 and the rear electrode 16B.
By selectively applying an alternating current voltage between R, 160, and 16B, and changing the magnitude of the voltage, each display cell consisting of adjacent red, green, and blue color cells. , red, green, black, and colors intermediate thereto.

Contrary to the above example, the transparent electrode on the transparent substrate 11 side is the active layer 14R like the above-mentioned rear electrodes 16R, 16G, 16B.
, 14G, 14B, active layers 14R, 14G, 1
4B, and the rear electrode is formed in the active layer L4R, 14G, 14B like the transparent electrode 12 described above.
They may be arranged in a direction perpendicular to the direction in which they are arranged.

According to the above-described multicolor EL panel of the present invention, even when using a don-to-matrix configuration, wiring for each electrode can be easily routed, and the product yield can be improved.

FIG. 2 shows an example of the method for forming the above-mentioned active layer in the manufacturing method of the present invention.
This is a case where the base material of 14G and 14B is common and the base material is formed without using a beam narrowed to a minute diameter.

A substrate holder 22 is attached to the base 21a of the growth device 2I, and a substrate 10 on which active layers 14R114G and 14B are to be formed is placed on the substrate holder 22. If the multicolor EL panel to be manufactured is shown in Figure 1,
The substrate 10 has a transparent electrode 12 formed on a three-layer substrate 11,
A dielectric layer 13 is formed on a transparent electrode 12.

The inside of the base 2Ja of the grower 21 is kept in a vacuum by a vacuum pump 23.

Gases 25R, 25G, and 25B containing substances that participate in red, green, and blue light emission are supplied to the tubes 24R, 24G, and 24B, respectively. Gas 2 supplied to pipes 24R, 24G, and 24B
5R, 25G, and 25B are flow rate controllers 2, respectively.
After controlling the flow rate to an appropriate level using the valves 27R, 27G, and 27B controlled by the ion generator 6, the ion generator 21 is supplied to the ion source 29, whose interior is kept at an appropriate reduced pressure by the vacuum pump 28 at the top of the growth chamber 21. At 29, gases 25R, 25G, and 25B are decomposed and ionized to generate ions including ions of substances that participate in red, green, and blue light emission, respectively.

Each ion obtained from this ion source 29 is extracted by an extraction acceleration electron lens system 31 as beams 32R, 32G, and 32B and accelerated to have the necessary energy, and the beams 32R, 32G are
, 32B are passed through a sector magnet 34 whose vicinity is maintained at an appropriate reduced pressure by a vacuum pump 33, and only ions of substances that participate in red, green, and blue light emission are extracted.

The ion beams 35R, 35C;, 35B of substances that participate in the red, green, and blue light emission are each narrowed down to minute diameters by a focusing/deflecting electron lens system 36, and the champion is
1 of the active layers 14R, 140, 14B formed on this above
The board 1 is placed at a distance equal to the width of the book.
The beam 35
R, 350, 35B are active 1!1 on the substrate 10, respectively.
When scanning the portion where 14R, 14G, and 14B are to be formed, the shutter controller 4 beyond the gate valve 37
1 to open the shutter 42 controlled by beam 3
5R, 35G, and 35B are active FJs on the substrate 10, respectively.
14R, 14G.

14B onto the part to be formed. At this time, an appropriate voltage is applied to the substrate holder 22 from the power supply 38 to control the substrate 1.
The kinetic energy of ions incident on zero is made appropriate.

Further, an electron beam evaporation source 3 is provided in the base 21a of the growth chamber 21.
9 will be activated by electron beam irradiation.
! A common substance serving as a base material for 114R, 140, and 14B is evaporated and supplied onto the substrate 10.

Thus, the active Ji14R on the substrate 10, 140°14
In this example, red, green, and blue active layers 14R, 14G are formed on the portion where B is to be formed, using a common substance as a base material, and in which substances that participate in red, green, and blue light emission are dispersed, respectively. 1
4B is formed.

However, in this case, beams 35R and 35G.

Depending on the scanning speed of 35B, there is a portion where the substance participating in light emission onto the substrate 10 is transported after the base material has already been formed on the substrate 10.

In that case, although not shown in the drawings, a mask is applied to the substrate 10 for supplying the base material only to the width of the three active layers 14R, 14G, and 14B to be formed on the substrate 10.
The active layer 14 of the beams 35R935G and 35B is disposed above.
The mask is moved to the active layer 1i 114 in synchronization with the scanning in the direction in which the active layers 14R, 14G, and 14B are arranged and the movement in the longitudinal direction of the active layers 14R, 14G, and 14B.
R.

The direction in which 14G and 14B are arranged and the active layer 14
What is necessary is to move it in the longitudinal direction of R, 14G, and 14B.

Active J! Even when the base materials of 14R, 14G, and 14B are common, instead of providing the electron beam evaporation source 39 as in the above example, the beams 35R, 135G, and 35B for the substance that participates in the above-mentioned light emission for the base material 'JjyJa' are used. A beam system similar to the system may be provided to transport the parent material onto the substrate IO.

Of course, in this case, the above-mentioned mask is not necessary.

In addition, if two of the active layers 14R, 14G, and 14B have a common base material, or if the base materials of the active layers 14R, 14G, and 14B are all different, the above-mentioned light emission may occur depending on the base material. Beams 35R and 35G regarding the participating substances
, 35B, two or three beam systems similar to those of systems 35B may be provided to transport the respective base materials onto the substrate 10.

According to the production method of the present invention described above, the active [14R
, 14G, and 14B can be formed reliably and easily. Moreover, the multicolor EL panel of this invention has a five-layer structure and is made of active FJ14R.

Since 14G and 14B can be formed at the same time as described above,
Overall, manufacturing is easier and the product is cheaper to manufacture.

"Effects of the Invention" As mentioned above, according to the multicolor EL panel of the present invention,
Even in the case of a dot matrix configuration, wiring for each electrode is simplified, and product yield is improved.

Further, according to the manufacturing method of the present invention, active layers of each color can be formed reliably and easily, and the manufacturing process as a whole becomes simple and the manufacturing cost of the product is reduced.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an example of a multicolor EL panel of the present invention, FIG. 2 is a view showing an example of a method for forming an active layer in the manufacturing method of this invention, and FIG. 3 is a perspective view of a conventional multicolor EL panel. It is a perspective view showing an example.

Claims (3)

[Claims] (1) A multicolor EL panel comprising: active layers of each color arranged and formed on the same surface; and electrodes arranged and formed on the same surface corresponding to the active layers of each color. (2) At the same time as forming the base material of the active layer of each color on the part of the substrate where the active layer of each color is to be formed, the substance that will participate in the light emission of each color is transported onto the said part by a beam focused to a minute diameter. 2. The method for manufacturing a multicolor EL panel according to claim 1, wherein active layers of each color are formed by forming active layers of each color. (3) On the part of the substrate where the active layer of each color is to be formed,
3. The manufacturing method according to claim 2, wherein the material serving as the base material of the active layer of each color is transported by a beam focused to a minute diameter to form the base material of the active layer of each color.