JPH01216241A - Defect inspecting method - Google Patents
Defect inspecting methodInfo
- Publication number
- JPH01216241A JPH01216241A JP63040863A JP4086388A JPH01216241A JP H01216241 A JPH01216241 A JP H01216241A JP 63040863 A JP63040863 A JP 63040863A JP 4086388 A JP4086388 A JP 4086388A JP H01216241 A JPH01216241 A JP H01216241A
- Authority
- JP
- Japan
- Prior art keywords
- unit element
- defect
- camera
- band
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 2
- 238000009825 accumulation Methods 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 abstract description 2
- 230000000007 visual effect Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N21/8903—Optical details; Scanning details using a multiple detector array
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はシート状物体、円筒状物体などに存在する、主
として帯状の欠陥を検査する方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of inspecting mainly band-shaped defects present in sheet-like objects, cylindrical objects, etc.
主として帯状の欠陥を検査する従来の方法は一単位素子
の縦横形状比が、略１：１であるリニアアレーイメージ
センサを有するカメラを撮像カメラとしていた。通常被
検査シート状物体は走行し、帯状の欠陥は走行方向に平
行である。In the conventional method of mainly inspecting band-shaped defects, a camera having a linear array image sensor in which the aspect ratio of one unit element is approximately 1:1 is used as an imaging camera. Usually, the sheet-like object to be inspected travels, and the band-like defects are parallel to the traveling direction.
従来の技術は略１：１である一単位素子の出力信号を帯
状欠陥の方向に電子加算するものであった。The conventional technique is to electronically add the output signals of one unit element, which is approximately 1:1, in the direction of the band-shaped defect.
〔発明の目的〕 ゛
本発明は前記電子加算に伴う検出性能の低さを解消し、
淡く光学的コントラストの低い、主として帯状欠陥の検
出性能を向上させることを目的とするものである。[Object of the invention] ゛The present invention eliminates the poor detection performance associated with the electronic addition,
The purpose is to improve the detection performance of mainly band-shaped defects that are faint and have low optical contrast.
本発明は上記目的を達成するために、−単位素子が１：
５０以上であるリニアアレーイメージセンサをセンサと
して電子加算ではなく光学加算で、主として帯状欠陥の
検出性能を向上させるものである。In order to achieve the above object, the present invention has the following features: - unit element is 1:
Using a linear array image sensor with a size of 50 or more as a sensor, optical addition rather than electronic addition is used to mainly improve the detection performance of strip defects.
以下、本発明の一実施例を図面を併用して説明する。第
１図に於てＩＡは一単位素子の縦横形状比が１：５０以
上であるリニアアレーイメージセンサ、８は撮像レンズ
２を介して得られるリニアアレーイメージセンサの等価
視野で、被検査走行シート３上の像である。リニアアレ
−イメージセンナＩＡの一単位素子６Ａの像は従って被
検査走行シート上では一単位素子等価視野７となる。本
発明に於て検出しようとする欠陥とは、主として、帯状
欠陥４、線状欠陥５、楕円状欠陥１０などである。これ
らの欠陥は走行シートの走行方向９に沿って長いことが
特徴である。欠陥の種類としては汚れ、カキキズ、変色
、異物、コートムラ、ストリーク、ドクターすじ等であ
る。An embodiment of the present invention will be described below with reference to the drawings. In Fig. 1, IA is a linear array image sensor in which the aspect ratio of one unit element is 1:50 or more, 8 is the equivalent field of view of the linear array image sensor obtained through the imaging lens 2, and the traveling sheet to be inspected is This is the image above. Therefore, the image of one unit element 6A of the linear array image sensor IA becomes one unit element equivalent field of view 7 on the traveling sheet to be inspected. The defects to be detected in the present invention are mainly band-shaped defects 4, linear defects 5, elliptical defects 10, and the like. These defects are characterized by being long along the running direction 9 of the running sheet. Types of defects include dirt, scratches, discoloration, foreign matter, uneven coating, streaks, doctor lines, etc.
第２図に於てＩＢは一単位素子が略１：１であるリニア
アレーイメージセンサであり、従来は略正方形−単位素
子６Ｂの出力信号を、被検査材の走行方向に電子加算す
る、信号処理方式をとっていた。電子加算する理由は一
般的に検出すべき欠陥の光学的コントラストが低く一視
野のみの判断では安定な欠陥判別ができず走行方向の多
数の視野の加算平均で欠陥判別能力を向上させようとす
るものであった。ＩＡは本発明に使う、−単位素子の縦
横形状比が１：５０以上であるリニアアレーイメージセ
ンサであυ、長方形−単位素子６Ａの多数の集合体であ
る。In FIG. 2, IB is a linear array image sensor in which each unit element has a ratio of approximately 1:1. Conventionally, the output signal of approximately square unit element 6B is electronically added in the traveling direction of the inspected material. A processing method was used. The reason for electronic addition is that the optical contrast of the defects to be detected is generally low and stable defect discrimination cannot be achieved by judging only one field of view, so the defect discrimination ability is improved by adding and averaging multiple fields of view in the running direction. It was something. IA is a linear array image sensor used in the present invention, in which the aspect ratio of unit elements is 1:50 or more, and is an aggregation of a large number of rectangular unit elements 6A.
長方形−単位素子を使う本発明に於ては第１図から明ら
かなように、走行方向に長い欠陥に関しては、光学的に
加算されている。従って電子加算に帰因する誤差累積、
欠陥判別能力低下がない。また一般に一単位素子間の感
度のバラツキは一単位素子の面積が小さい程大きい。理
由は一単位素子の感度は面積に比例するからである。従
って一単位素子の面積が大きいＩＪ ニアアレーイメー
ジセンサＩＡが面積が小さいＩＢより感度のバラツキが
小さく、従って欠陥検出能力が良い。In the present invention using rectangular unit elements, as is clear from FIG. 1, defects that are long in the running direction are optically added. Therefore, the error accumulation due to electronic addition,
There is no decline in defect discrimination ability. Generally, the variation in sensitivity between unit elements becomes larger as the area of the unit element becomes smaller. The reason is that the sensitivity of one unit element is proportional to its area. Therefore, the IJ near array image sensor IA, which has a larger area per unit element, has smaller variations in sensitivity than the IB, which has a smaller area, and therefore has better defect detection ability.
なお本発明は被検査材が走行していす、静止している被
検材でも適用できることは第１図から明らかでおる。一
方従来技術では走行していないものについては適用でき
なかった。また走行方向が第１図の矢印方向と直角方向
でも適用可能であることも明らかであり、同じ〈従来技
術では対応不可能であることも明らかである。It is clear from FIG. 1 that the present invention can be applied to moving objects or stationary objects. On the other hand, the conventional technology cannot be applied to vehicles that are not running. It is also clear that the present invention can be applied even if the running direction is perpendicular to the direction of the arrow in FIG.
−単位素子の縦横形状比が１＝１．１：１０．１：２０
，１：５０．１ ： １００のリニアアレーイメージセ
ンサを帯状欠陥に適用してその信号対雑音比、即ち欠陥
信号量と背景地合信号量との比率を測定したところ、そ
れぞれ、 １．０１．１．１゜１．１５、λ５．２６で
あった。従って一単位素子の縦横形状比が１：５０以上
が有効である。- The vertical and horizontal shape ratio of the unit element is 1 = 1.1:10.1:20
, 1:50.1:100 linear array image sensor was applied to a band-shaped defect to measure the signal-to-noise ratio, that is, the ratio of the defect signal amount to the background signal amount, and the result was 1.01. It was 1.1°1.15 and λ5.26. Therefore, it is effective that the aspect ratio of one unit element is 1:50 or more.
以上の説明はシート状物体に於ける欠陥検出についてで
あるが、被検材形状が円筒ドラム状などでも有効である
ことは明らかである。Although the above explanation is about defect detection in a sheet-like object, it is clear that the present invention is also effective even when the shape of the object to be inspected is a cylindrical drum shape or the like.
以上説明したように本発明によれば、主として帯状欠陥
等の検出能力が改善される。As explained above, according to the present invention, the ability to detect band defects and the like is mainly improved.
第１＠は本発明に係わる欠陥検査方法の一実施例の模式
図、第２図はＩＪ ニアアレーイメージセンサの比較図
である。
１・・・・・・リニアアレーイメージセンサ、２・・・
・・・撮像レンズ、３・・・・・・被検査走行シート、
４・・・・・・帯状欠陥、５・・、・・・・線状欠陥。
特許出願人 株式会社 ヒユーチック第１図
第２図Figure 1 is a schematic diagram of an embodiment of the defect inspection method according to the present invention, and Figure 2 is a comparison diagram of an IJ near array image sensor. 1... Linear array image sensor, 2...
... Imaging lens, 3... Traveling sheet to be inspected,
4... Band defect, 5... Line defect. Patent applicant: Hyutic Co., Ltd. Figure 1 Figure 2
Claims (1)
レーイメージセンサを有するカメラを撮像カメラとした
ことを特徴とする欠陥検査方法。A defect inspection method characterized in that a camera having a linear array image sensor in which the aspect ratio of one unit element is 1:50 or more is used as an imaging camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63040863A JPH01216241A (en) | 1988-02-25 | 1988-02-25 | Defect inspecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63040863A JPH01216241A (en) | 1988-02-25 | 1988-02-25 | Defect inspecting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01216241A true JPH01216241A (en) | 1989-08-30 |
Family
ID=12592370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63040863A Pending JPH01216241A (en) | 1988-02-25 | 1988-02-25 | Defect inspecting method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01216241A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5452079A (en) * | 1992-06-26 | 1995-09-19 | Central Glass Company, Limited | Method of and apparatus for detecting defect of transparent sheet as sheet glass |
| CN113686881A (en) * | 2021-09-23 | 2021-11-23 | 云智汇（深圳）高新科技服务有限公司 | Visual all-angle imaging device in high-reflection mirror surface environment |
-
1988
- 1988-02-25 JP JP63040863A patent/JPH01216241A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5452079A (en) * | 1992-06-26 | 1995-09-19 | Central Glass Company, Limited | Method of and apparatus for detecting defect of transparent sheet as sheet glass |
| CN113686881A (en) * | 2021-09-23 | 2021-11-23 | 云智汇（深圳）高新科技服务有限公司 | Visual all-angle imaging device in high-reflection mirror surface environment |
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