JPH01216120A - Linear guide - Google Patents
Linear guideInfo
- Publication number
- JPH01216120A JPH01216120A JP3902488A JP3902488A JPH01216120A JP H01216120 A JPH01216120 A JP H01216120A JP 3902488 A JP3902488 A JP 3902488A JP 3902488 A JP3902488 A JP 3902488A JP H01216120 A JPH01216120 A JP H01216120A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- guide
- magnet
- air
- linear guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 abstract description 6
- 239000000696 magnetic material Substances 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005422 blasting Methods 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005553 drilling Methods 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/12—Arrangements for adjusting play
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
【発明の目的〕
（産業上の利用分野）
この発明は、半導体製造′＃Ｍ置あるいは検査装置等に
使用されるＸ−Ｙステージ用リニアガイドに関する。DETAILED DESCRIPTION OF THE INVENTION OBJECTS OF THE INVENTION (Industrial Application Field) The present invention relates to a linear guide for an X-Y stage used in semiconductor manufacturing equipment or inspection equipment.
（従来の技術）
従来、半導体製造装置あるいは検査装置等のＸ・Ｙステ
ージにはリニアガイドとボールネジを組み合わせたもの
が多く用いられている。また、より高精度化のために空
気軸受を用いたガイドとりニアモータで構成されるＸ−
Ｙステージも用いられるようになった。従来の空気軸受
を用いたリニアガイドは第１図に示すごとくスライダ■
がガイドレールωを取り囲むよう構成され、しかもスラ
イダ■の内面とガイドレール■との間にはほんのわずか
、たとえば数−〜数１０．のすき間を設けている。この
すき間に給気孔■より加圧した空気あるいは窒素を供給
することで軸受面が構成され、スライダ■はガイドレー
ルωに対し非接触で可動することができる。ここで上記
ガイドレール■の真直度はＸ−Ｙステージの位置決め精
度に直接影響を与えるため高精度に仕上げられている。(Prior Art) Conventionally, a combination of a linear guide and a ball screw is often used in the X/Y stage of semiconductor manufacturing equipment, inspection equipment, etc. In addition, for higher precision, the X-
The Y stage also came into use. A conventional linear guide using an air bearing is a slider as shown in Figure 1.
is constructed so as to surround the guide rail ω, and there is only a small distance between the inner surface of the slider ■ and the guide rail ■, for example, several to several tens of degrees. A gap is provided. A bearing surface is formed by supplying pressurized air or nitrogen from the air supply hole (2) to this gap, and the slider (2) can move without contacting the guide rail (ω). Here, the straightness of the guide rail (2) is finished with high accuracy because it directly affects the positioning accuracy of the XY stage.
（発明が解決しようとする課題）
しかしながら上記に示したようなリニアガイドにおいて
は、各対向面に対し軸受すき間を一定に保つためにガイ
−トレールωの各面の形状および寸法をバランスよく非
常に高精度に加工する必要がある。またこのようなリニ
アガイドを用いてＸ・Ｙステージ等を構成した場合、比
較的大型なものになってしまう問題もある。さらにこの
リニアガイドに不具合が生じた場合、リニアガイドを取
り出すのに周辺の構成部材を広範囲に分解しなければな
らず再度の組立調整に多大な時間と手間がかかるという
問題がある。(Problem to be Solved by the Invention) However, in the linear guide as shown above, in order to maintain a constant bearing clearance with respect to each opposing surface, the shape and dimensions of each surface of the guide-rail ω must be carefully balanced. It is necessary to process with high precision. Furthermore, when an X/Y stage or the like is configured using such a linear guide, there is also the problem that the stage becomes relatively large. Furthermore, if a problem occurs with this linear guide, there is a problem in that in order to take out the linear guide, it is necessary to disassemble a wide range of surrounding components, and it takes a lot of time and effort to reassemble and adjust it.
この発明は上記点に対処してなされたもので。This invention was made in response to the above points.
高精度のリニアガイドを単純な構成にならしめ、なおか
つコンパクトにおさめることができる効果を得るリニア
ガイドを提供することである。To provide a linear guide which has the effect of making a highly accurate linear guide simple in structure and being able to be stored compactly.
（課題を解決するための手段）
この発明は、ガイド側面に対向した移動体に空気軸受を
設け、この空気軸受の浮上刃と釣合う力で上記ガイド側
面と移動体とをマグネットで吸着する如く構成したこと
を特徴とする。(Means for Solving the Problems) This invention provides an air bearing on the moving body facing the guide side surface, and uses a force balanced with the floating blade of the air bearing to attract the guide side surface and the moving body with a magnet. It is characterized by having been configured.
（作用効果） ガイド側面に対向した移動体に空気軸受を設け。(effect) An air bearing is installed on the moving body facing the side of the guide.
この空気軸受の浮上刃と釣合う力で上記ガイド側面と移
動体とをマグネットで吸着する如く構成したととにより
、高精度のリニアガイドを単純な構成にでき、なおかつ
コンパクトにおさめることを可能とした効果が得られる
。By configuring the side surface of the guide and the movable body to be attracted to each other by magnets using a force balanced with the floating blade of the air bearing, a highly accurate linear guide can be constructed in a simple manner and can be kept compact. You can get the same effect.
特に、このリニアガイドをＸ−Ｙステージに使用した場
合、トラブルが発生しても、調整や組立を容易に行うこ
とが可能となる。In particular, when this linear guide is used in an X-Y stage, even if trouble occurs, adjustment and assembly can be easily performed.
（実施例）
次に本発明を、半導体製造装置や検査装置等に用いられ
るＸ−Ｙステージ用リニアガイドに適用した一実施例を
図面を参照して説明する。(Example) Next, an example in which the present invention is applied to a linear guide for an X-Y stage used in semiconductor manufacturing equipment, inspection equipment, etc. will be described with reference to the drawings.
このリニアガイド（１１）は第１図に示すように、変形
率の低い材質例えばみかげ石からなるガイドレール（１
２）を設置する。このガイドレール（１２）の−側面は
、後で説明するスライダー（１３）を直線方向に移動さ
せるために高精度に加工されたガイド面（１２ａ）とな
っていて、このガイド面（１２ａ）に直線性を出すため
に、ガイドレール（１２）は、ガイド面（１２ａ）に対
して厚さ例えば４０ｍ程度に構成されている。上記ガイ
ド面（１２ａ）には、磁性体例えば軟鉄等からなる厚さ
例えば４ｍｍの吸着板（１４）が固定されている。この
固定は第２図に示すように、ガイドレール（１２）のガ
イド面（１２ａ）の所定の数箇所に穴（１５）をあけ、
この穴（１５）にネジを切った金属（１６）を夫々埋設
し、この金属（１６）と上記吸着板（１４）に設けられ
た貫通孔（１７）を夫々位置合わせして、各位置をネジ
（１８）止めして固定する。この時ネジ（１８）が、吸
着板（１４）表面から突出しないようにサラネジにする
。このように吸着板（１４）が固定されたガイドレール
（１２）のガイド面（１２ａ）と対向する位置に非磁性
体例えばアルミニウム製のスライダー（１３）を配設す
る。このスライダー（１３）には上記ガイド面（１２ａ
）と対向するように例えば２箇所に空気軸受（１９）が
設置されている。この各空気軸受（１９）には、外部か
らの空気を供給する給気孔（２０）が設けられていて、
この給気孔（２０）に供給された空気をガイドレール（
１２）のガイド面（１２ａ）に対して吹き付ける如く空
気軸受（１９）の所定の例えば３箇所に空気排出口（図
示せず）が設けられている。又、スライダー（１３）の
上記ガイドレール（１２）に固定された吸着板（１４）
の対向する位置に。As shown in Fig. 1, this linear guide (11) is made of a material with a low deformation rate, such as granite.
2). The side surface of this guide rail (12) is a highly precisely machined guide surface (12a) for linearly moving a slider (13), which will be described later. In order to achieve linearity, the guide rail (12) is configured to have a thickness of, for example, about 40 m with respect to the guide surface (12a). A suction plate (14) made of a magnetic material such as soft iron and having a thickness of, for example, 4 mm is fixed to the guide surface (12a). This fixing is done by drilling holes (15) at several predetermined locations on the guide surface (12a) of the guide rail (12), as shown in Figure 2.
A threaded metal (16) is buried in each hole (15), and each position is Secure by tightening the screws (18). At this time, the screws (18) are flat screwed so that they do not protrude from the surface of the suction plate (14). A slider (13) made of a non-magnetic material such as aluminum is disposed at a position facing the guide surface (12a) of the guide rail (12) to which the adsorption plate (14) is fixed in this manner. This slider (13) has the guide surface (12a
), air bearings (19) are installed at two locations, for example, to face the bearings (19). Each air bearing (19) is provided with an air supply hole (20) for supplying air from the outside.
The air supplied to this air supply hole (20) is transferred to the guide rail (
Air exhaust ports (not shown) are provided at predetermined, for example, three locations on the air bearing (19) so as to blow air against the guide surface (12a) of the air bearing (12). Also, a suction plate (14) fixed to the guide rail (12) of the slider (13)
in the opposite position.
例えば永久磁石であるマグネット（２１）が設けられて
いる。又、このマグネット（２１）は、吸着板（１４）
とギャップ間隔を調整可能なようにスライダー（１３）
に設置されている。即ち第３図に示すように、マグネッ
ト（２１）は治具（２２）に固定されていて、との治具
（２２）に設けられた支持棒（２３）が、スライダー
（１３）に設けられた貫通孔（２４）に挿入され、この
状態で支持棒（２３）を調節することにより、上記ギャ
ップ間隔が調節可能とされている。For example, a magnet (21), which is a permanent magnet, is provided. In addition, this magnet (21) is attached to the adsorption plate (14).
and slider (13) to adjust the gap interval.
It is installed in That is, as shown in FIG. 3, the magnet (21) is fixed to a jig (22), and the support rod (23) provided on the jig (22) is attached to the slider.
The gap interval can be adjusted by inserting the support rod (23) into the through hole (24) provided in the support rod (13) and adjusting the support rod (23) in this state.
次に動作作用を説明する。Next, the operation effect will be explained.
まず１図示を省略したが、スライダー（１３）の下面の
エアベアリング手段により、スライダー（１３）を浮上
状態とする。この状態で空気軸受（１９）の給気孔（２
０）に例えば２〜３ｋｇｆ／ａ（の空気を例えば０．２
Ｑ ／ｗｉｎ程度供給する。このことにより各空気軸
受（１９）の排出口からガイドレール（１２）のガイド
面（１２ａ）に向けて空気が吹き付けられて、空気軸受
（１９）がガイド面（１２ａ）から離隔する。即ち、ガ
イドレール（１２）の吸着板（１４）とスライダー（１
３）のマグネット（２１）の磁気作用により接面してい
た空気軸受（１９）とガイド面（１２ａ）を、エアベア
リング手段により離隔させ、たちのである。この時エア
ベアリング手段による浮上刃とマグネット（２１）の吸
着力をバランスよく釣合うように予めマグネット（２１
）と吸着板（１４）とのギャップ間隔を調節しておく、
上記のような状態でスライダー（１３）に矢印（２５）
に示す方向に例えばモータ等により駆動を加えると、ス
ライダー（１３）が滑らかに精度よく直線的に移動する
。First, although not shown, the slider (13) is brought into a floating state by air bearing means on the lower surface of the slider (13). In this state, the air supply hole (2) of the air bearing (19)
0), for example, 2 to 3 kgf/a (for example, 0.2
Supply about Q/win. As a result, air is blown from the outlet of each air bearing (19) toward the guide surface (12a) of the guide rail (12), and the air bearing (19) is separated from the guide surface (12a). That is, the suction plate (14) of the guide rail (12) and the slider (1
3) The air bearing (19) and the guide surface (12a), which were in contact with each other due to the magnetic action of the magnet (21), are separated by the air bearing means. At this time, the magnet (21) is prepared in advance so that the adsorption force between the floating blade and the magnet (21) by the air bearing means is well balanced.
) and the suction plate (14).
In the above state, click the arrow (25) on the slider (13)
When the slider (13) is driven, for example, by a motor or the like in the direction shown in , the slider (13) moves smoothly and linearly with high precision.
上記説明したリニアガイド（１１）を使用したＸ・Ｙス
テージ（２６）について次に説明する。Next, the X/Y stage (26) using the linear guide (11) described above will be described.
このＸ−Ｙステージ（２６）は第４図に示すように、高
精度の平面をもつベース部材（２７）が設置されている
。このベース部材（２７）の予め定められた位置に、ガ
イド面（１２ａ）に吸着板（１４）が取付けられたガイ
ドレール（１２）を固定する。このガイドレール（１２
）のガイド面（１２ａ）と対向する如く、２系統の空気
軸受（１９）とマグネット（２１）が取付けられたＬ字
状のスライダー（１３ａ）がＹ方向（２８）にスライド
自在に設けられている。上記り字状のスライダー（１３
ａ）の下面には空気軸受（２９）が、ベース部材（２７
）と対向して例えば３系統設けられている。又、上記り
字状のスライダー（１３ａ）のＸ面は、Ｘ方向（３０）
のスライダー（３１）のガイド面（３２）となっている
。As shown in FIG. 4, this X-Y stage (26) is provided with a base member (27) having a highly accurate plane. A guide rail (12) having a suction plate (14) attached to the guide surface (12a) is fixed to a predetermined position of the base member (27). This guide rail (12
), an L-shaped slider (13a) to which two systems of air bearings (19) and a magnet (21) are attached is provided so as to be slidable in the Y direction (28) so as to face the guide surface (12a) of the slider. There is. The above letter-shaped slider (13
a) An air bearing (29) is mounted on the lower surface of the base member (27).
), for example, three systems are provided facing each other. Moreover, the X plane of the above-mentioned cross-shaped slider (13a) is in the X direction (30)
This serves as a guide surface (32) for the slider (31).
ここで、このガイド面（３２）に吸着板（３３）を取付
け、この吸着板（３３）と対向したスライダー（３１）
の面にマグネット（３４）が取付けられている。さらに
スライダー（３１）には、ガイド面（３２）と対向する
如く空気軸受（３５）が２系統設けられていて、なおか
つスライダー（３１）の下面には、空気軸受（３６）が
、ベース部材（２７）と対向して例えば３系統設けられ
ている。このようなスライダー（３１）は、ベース部材
（２７）上に設けられたＸ方向（３０）用の駆動モータ
（３７）とＹ方向（２８）用の駆動モータ（３８）と、
夫々係合しており、このスライダー（３１）上に、被載
置体の載置台（図示せず）を配設し、Ｘ−Ｙステージ（
２６）が構成されている。Here, a suction plate (33) is attached to this guide surface (32), and a slider (31) facing this suction plate (33) is attached.
A magnet (34) is attached to the surface. Furthermore, the slider (31) is provided with two systems of air bearings (35) so as to face the guide surface (32), and an air bearing (36) is provided on the lower surface of the slider (31) with a base member (35). 27), for example, three systems are provided facing each other. Such a slider (31) includes a drive motor (37) for the X direction (30) and a drive motor (38) for the Y direction (28), which are provided on the base member (27).
A mounting table (not shown) for the object to be mounted is disposed on the slider (31), and an X-Y stage (
26) is configured.
次に上述したＸ−Ｙステージ（２６）の動作作用を説明
する。Next, the operation and effect of the above-mentioned X-Y stage (26) will be explained.
まず、Ｙ方向（２８）用のスライダー（１３ａ）とＸ方
向（３０）用のスライダー（３１）に設けられた各空気
軸受（２９） （３６）に例えば２〜３ ｋｇｆ／ｄの
空気を例えば０．２ Ｑ ／ｓｉｎ程度供給する。この
ことにより、各スライダー（１３ａ）（３１）とベース
部材（２７）の間に空気流膜が発生し、離隔する。この
ことと同時に、Ｙ方向（２８）用のガイドレール（１２
）のガイド面（１２ａ）に対向したスライダー（１３ａ
）の空気軸受（１９）およびスライダー（１３ａ）のＸ
方向（３０）用のガイド面（３２）に対向したスライダ
ー（３１）の空気軸受（３５）に夫々上記同様の圧縮空
気を供給する。このことにより各ガイド面（１２ａ）
（３２）と各スライダー（１３ａ） （３１）の間には
空気流膜が発生し１機械的摩擦部分がなくなる。このよ
うな状態で各モータ（３７） （３８）を選択的に又は
同時に駆動して、各スライダー（１３ａ） （３１）を
スライド移動させる。即ち、スライダー（３１）に被載
置体の載置台を配設した場合、上記動作により、載置台
がＸ−Ｙ方向（３０）（２８）の所望の方向に滑らかな
スライド移動が可能となる。First, for example, 2 to 3 kgf/d of air is applied to each air bearing (29) (36) provided on the slider (13a) for the Y direction (28) and the slider (31) for the X direction (30). Supply approximately 0.2 Q/sin. As a result, an air flow film is generated between each slider (13a) (31) and the base member (27), and they are separated. At the same time, the guide rail (12) for the Y direction (28)
) facing the guide surface (12a) of the slider (13a)
) air bearing (19) and slider (13a)
Compressed air similar to the above is supplied to the air bearings (35) of the slider (31) facing the guide surface (32) for direction (30). As a result, each guide surface (12a)
An air flow film is generated between (32) and each slider (13a) (31), eliminating one mechanical friction part. In this state, the motors (37) and (38) are driven selectively or simultaneously to slide the sliders (13a) and (31). That is, when a mounting table for the object to be placed is arranged on the slider (31), the above operation enables the mounting table to smoothly slide in the desired direction in the X-Y direction (30) (28). .
上記のようにＸ−Ｙステージ（２６）を構成すると同一
面上にＸ方向およびＹ方向のスライダーを設置できるの
で、ｘ−Ｙステージ機構をコンパクトに形成でき高精度
に調整可能とする。特に、位置合わせ精度を数ミクロン
−サブミクロン以下に設定する必要がある半導体製造装
置の例えばステッパーや検査装置であるプローブ装置や
レーザブローバなどには最適である。By configuring the X-Y stage (26) as described above, sliders in the X and Y directions can be installed on the same surface, so the x-Y stage mechanism can be formed compactly and can be adjusted with high precision. In particular, it is most suitable for semiconductor manufacturing equipment such as steppers, inspection equipment such as probe devices and laser blowbars, which require alignment accuracy to be set to several microns to submicrons or less.
この発明は上記実施例に限定されるものではなく、Ｘ−
Ｙステージにおいて、Ｘ方向用のスライダーにＸ方向用
の駆動モータを係合し、Ｙ方向用のスライダーにＹ方向
用の駆動モータを係合して、各スライダーを駆動しても
良い。This invention is not limited to the above embodiments, but
In the Y stage, each slider may be driven by engaging an X-direction drive motor with an X-direction slider and engaging a Y-direction drive motor with a Y-direction slider.
第１図は本発明の一実施例を説明するためのリニアガイ
ドの説明図、第２図は第１図のガイドレールに吸着板を
取付ける説明図、第３図は第１図のマグネットと吸着板
のギャップ間隔調節のための説明図、第４図は第１図の
リニアガイドを使用したＸ−Ｙステージの説明図、第５
図は従来のリニアガイドの説明図である。
１１・・・リニアガイド １２・・・ガイドレー
ル１２ａ・・・ガイド面 １３・・・スライ
ダー１４・・・吸着板 １９・・・空気軸
受２０・・・吸気孔 ２１・・・マグネッ
ト２６・・・Ｘ−ＹステージFig. 1 is an explanatory diagram of a linear guide to explain one embodiment of the present invention, Fig. 2 is an explanatory diagram of attaching a suction plate to the guide rail of Fig. 1, and Fig. 3 is an explanatory diagram of the magnet and suction plate of Fig. 1. An explanatory diagram for adjusting the gap distance between the plates. Figure 4 is an explanatory diagram of the X-Y stage using the linear guide shown in Figure 1.
The figure is an explanatory diagram of a conventional linear guide. DESCRIPTION OF SYMBOLS 11... Linear guide 12... Guide rail 12a... Guide surface 13... Slider 14... Adsorption plate 19... Air bearing 20... Intake hole 21... Magnet 26... X-Y stage
Claims (1)
空気軸受の浮上刃と釣合う力で上記ガイド側面と移動体
とをマグネットで吸着する如く構成したことを特徴とす
るリニアガイド。A linear guide characterized in that an air bearing is provided on the movable body facing the guide side surface, and the guide side surface and the movable body are attracted by a magnet with a force balanced with the floating blade of the air bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039024A JPH086747B2 (en) | 1988-02-22 | 1988-02-22 | Inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039024A JPH086747B2 (en) | 1988-02-22 | 1988-02-22 | Inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01216120A true JPH01216120A (en) | 1989-08-30 |
| JPH086747B2 JPH086747B2 (en) | 1996-01-29 |
Family
ID=12541541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63039024A Expired - Fee Related JPH086747B2 (en) | 1988-02-22 | 1988-02-22 | Inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086747B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03177617A (en) * | 1989-12-06 | 1991-08-01 | Sumitomo Heavy Ind Ltd | Vertical movable bearing system and vertical movable stage system using the same |
| JP2007127281A (en) * | 2007-01-09 | 2007-05-24 | Nsk Ltd | Linear guide bearing device |
| US20110290161A1 (en) * | 2010-05-27 | 2011-12-01 | Valley Precision, Inc. | Stage with magnetic loading |
| CN105666149A (en) * | 2016-02-29 | 2016-06-15 | 西安交通大学 | Opening type precise gas static pressure guide rail assembly for ultra-precise milling and grinding machine tool |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6125742A (en) * | 1984-07-11 | 1986-02-04 | Ntn Toyo Bearing Co Ltd | Guide device |
-
1988
- 1988-02-22 JP JP63039024A patent/JPH086747B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6125742A (en) * | 1984-07-11 | 1986-02-04 | Ntn Toyo Bearing Co Ltd | Guide device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03177617A (en) * | 1989-12-06 | 1991-08-01 | Sumitomo Heavy Ind Ltd | Vertical movable bearing system and vertical movable stage system using the same |
| JP2007127281A (en) * | 2007-01-09 | 2007-05-24 | Nsk Ltd | Linear guide bearing device |
| US20110290161A1 (en) * | 2010-05-27 | 2011-12-01 | Valley Precision, Inc. | Stage with magnetic loading |
| CN105666149A (en) * | 2016-02-29 | 2016-06-15 | 西安交通大学 | Opening type precise gas static pressure guide rail assembly for ultra-precise milling and grinding machine tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH086747B2 (en) | 1996-01-29 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |