JPH01212336A - Apparatus for measuring surface pressure - Google Patents

Abstract

PURPOSE:To prevent the generation of a measuring error caused by a temp. change or the layout of a cycle, by emitting light to the reflecting part provided to one end of a balance rod supported in a rotatable manner from a light emitting part and measuring the quantity of the reflected light from the reflecting part. CONSTITUTION:A sensing member 450 is suspended from one end of a rod 440 and set at the position corresponding to the surface tension of a liquid to be measured and the surface pressure of the film on the surface of said liquid. A reflecting part 460 is mounted to the other end of said rod 400. A flux 470 of optical fiber cables is mounted to the lower part of the reflecting part 460 and the other end thereof is guided to a case 421 to be separated into fluxes 481, 491 which are, in turn, respectively mounted to a light emitting element 482 and a light detecting element 492. Light is emitted to the reflecting part 470 from the element 482 through the flux 481 and the quantity of the reflected light corresponding to the height of said reflecting part 470 is detected by the element 492 through the flux 491 to be displayed on a window part 423 in a numerical value. Since this quantity of the reflected light corresponds to the surface tension of the liquid and the surface pressure of the film corresponding to the position of the sensing member 450, by measuring the quantity of light detected by the element 492 in a measuring circuit 422, said tension or pressure can be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an apparatus for measuring the surface tension of a liquid or the surface pressure of a thin film on a liquid surface.

[Prior Art] A conventional surface pressure measurement device includes a rotatably supported balance rod, a sensing member suspended from one of the rods and intersecting the liquid level to be measured, and a sensing member suspended from one of the rods, and a sensing member suspended from the other rod. A high frequency transformer is provided with a connected movable core, a primary coil and a secondary coil wound around the outer periphery of the movable core so as not to interfere with the movement of the movable core, and a liquid It consisted of a measuring section that measures surface pressure.

[Problems to be Solved by the Invention] However, since the output voltage of a high-frequency transformer changes depending on temperature changes, the output voltage of the Takaoka wave transformer changes depending on, for example, the usage time of the device or depending on the summer or winter season.

Furthermore, when a cable that supplies high frequency waves to a high frequency transformer is bent, the impedance of the cable changes, so the output voltage of the high frequency transformer changes depending on how the cable is routed.

In other words, conventional devices have the problem of errors occurring in surface pressure measurements due to changes in the temperature of the high-frequency transformer due to changes in operating time or environmental temperature, and due to the routing of the chi-pull.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a surface pressure measuring device in which errors in surface pressure measurement values do not occur due to temperature changes, cable routing, etc.

[Means for Solving the Problems] In order to achieve the above object, the present invention includes a rotatably supported balance rod and a sensing device suspended from one of the rods and intersecting the liquid level to be measured. a member, a reflecting part provided on the other side of the rod, a light emitting part that emits light toward the reflecting part, and a light receiving part that receives light emitted from the light emitting part and reflected by the reflecting part; The technical means includes a measuring section that measures the amount of light received by the light receiving section.

[Function] In the present invention having the above configuration, when the surface tension of the liquid to be measured is low or when the surface pressure of the membrane on the liquid surface is high, the force of the liquid surface to lift the sensing member is large; Conversely, when the surface tension of the liquid is high or when the surface pressure of the film on the liquid surface is low, the force of the liquid surface lifting the sensing member is small.

In other words, the sensing member is positioned in accordance with the surface pressure.

As a result, the rod is tilted in accordance with the surface pressure, and the height of the reflective portion provided on the rod changes depending on the tilt of the rod.

Light is emitted from the light emitting part to the reflecting part, and the light receiving part has the height of the reflecting part (distance M between the light emitting part, the reflecting part and the light receiving part).
Receives the amount of light according to the amount of light. The amount of light received by this light receiving section corresponds to the surface tension of the liquid and the surface pressure of the film on the liquid surface. The surface tension of a liquid surface or the surface pressure of a film on a liquid surface can be measured.

[Effects of the Invention] According to the present invention, since the angle of the rod on which the sensing member is suspended is optically measured, unlike the conventional method, the angle of the rod on which the sensing member is suspended is measured. It is not affected by such things.

As a result, the surface tension of the liquid and the surface pressure of the film on the liquid surface can be accurately measured without being affected by temperature changes, cable routing, etc.

[Example] Next, a description will be given based on an example in which the surface pressure measuring device of the present invention is installed in a multilayer cumulative film (LB film) film forming apparatus, which is a monomolecular film forming apparatus.

2 to 4 show a multilayer cumulative film forming apparatus 10G.

The multilayer cumulative film forming apparatus 100 includes a trough 20G, a movable barrier 300, and a surface pressure measuring device 4 of the present invention that measures the surface pressure of the monomolecule IN formed within the movable barrier 300.
00, the blade 50G and the substrate 60 within the movable barrier 300.
0 in the vertical direction.

The trough 20G is formed in a substantially rectangular shape with an appropriate depth,
A solution such as pure water is stored inside it. Also,
At the bottom of the trough 20G, as shown in FIG.
The water in the trough 200 is circulated with a heating device (not shown) to keep the temperature of the solution in the trough 200 constant.

The movable barrier 300 uses a tape 310 made of synthetic resin to adjust the liquid level in the trough 200 (indicated by the sea urchin point! rI line in Figure 2).
The width of the tape 310 is A.
A moving plate that moves the tape 310 while keeping it constant, and moves toward the other end while ensuring the width of the tape 310 provided at one longitudinal end of the trough 200. 320, and a tape winding section 330 that winds up both ends of the tape 310 provided at the other longitudinal end of the trough 200.

The moving plate 320 is driven by a drive device (not shown) such as a motor, and is provided so as to move along a groove 321 formed on the side surface. Also, moving plate 3
The end of the tape 2G is provided with two tape holding parts 322 that support the tape 31G, and the interval between the two tape holding parts 322 is adjusted to the width of the substrate 600 used.

The tape winding section 330 winds up both ends of the case 310 using two motors 332 and a pulley 333 (see FIG. 4) attached to a fixed plate 331. The board 60
A regulation plate 334 is attached to regulate the width to zero. Note that two grooves 335 are provided on the side of the regulation plate 334 on which the substrate 600 is disposed for removing air bubbles.

As described above, the moving plate 320 moves to the tape winding section 330 side, and both ends of the tape 310 are moved to the tape winding section 330 side.
By winding up the tape 310, the liquid surface surrounded by the tape 310 is compressed.

As shown in FIG. 1, the surface pressure measurement bag Z 400 includes a detection section 410 that detects the surface pressure of the monomolecular film formed within the movable barrier 300, and a detection section 410 that detects the surface pressure of the monomolecular film formed within the movable barrier 300. Display unit 420 that displays surface pressure as a numerical value
It is broadly divided into.

The detection unit 410 is covered by a case 430 fixed to the ``-'' side of the mobile player 320. A balance rod 440 whose middle portion is rotatably supported by a wire 441 is disposed inside the case 430.

This wire 441 has one end fixed to the case 430,
The other end is rotatable by an adjuster knob 444 via a worm wheel 442 and a ohm gear 443.

A plate-shaped sensing member 450 is suspended from one end of the rod 440 via a hook 451 so as to cross the surface of the solution surrounded by the tape 31G to be measured.

Further, at the other end of the rod 440, a reflecting section 460 whose lower surface is finished with a mirror surface is attached.

An end portion of a bundle 470 of optical fiber cables made of quartz glass or the like is attached to the lower portion of the reflecting portion 460 so as to face the lower surface of the reflecting portion 460. The other end of this optical fiber cable bundle 470 is connected to the display section 42G.
Case 421 leads to two east 481.4
It is divided into 91 parts. One bundle 481 is attached toward a light emitting element 482 such as a light emitting diode or a lamp, and the other bundle 491 is attached to a light emitting element 482 such as a photodiode or a lamp.
It is attached toward a light sensitive element 492 such as a phototransistor.

The one bundle 481 and the light emitting element 482 constitute the light emitting section 480 of the present invention, and the light emitted by the light emitting element 482 is radiated to the reflecting part 470 via the one bundle 481. The other bundle 491 and the photosensitive element 492 constitute a light receiving section 49G of the present invention, and the photosensitive element 492 detects the amount of light received at the end of the bundle 491.

The display section 420 includes a circuit 422 that constitutes a measuring section that measures the amount of light received by the photosensitive element 492, and displays the amount of light measured by the measuring section as a numerical value on the window section 423. Note that 4 provided on the display section 420
24 is a power switch, 425 is a pilot lamp, 42
6 is gain m! The knob 427 is a zero adjustment knob.

The blade 500 has a width of a substrate 600 with a sharp cutting edge at the lower end.
It has a rectangular shape that is the same width as, or slightly longer than,
Two grooves 510 are provided.

The substrate 600 is, for example, a glass plate, and the lower surface to which the monomolecular film is attached has been treated to be smooth and has been subjected to hydrophobic treatment so that the monomolecular film formed on the liquid surface can easily adhere to it. There is.

The vertical drive unit 700 moves the blade 500 perpendicularly to the liquid level.
Alternatively, it includes a slide member 710 having an arm 711 that is held in a substantially vertical state, and an actuator 730 that moves the slide member 710 up and down along the rail 72G. Furthermore, an arm 750 that holds a suction cup 740 that sucks and holds the substrate 600 is attached to the slide member 710. This arm 750 holds the suction cup 740 so that the lower surface of the substrate 600 is located slightly above the lower end of the blade 500 and the substrate 600 is parallel or almost parallel to the liquid level. .

This causes the actuator 730 to move toward the slide member 71.
By moving the blade 5 up and down along the rail 720, the blade 5
00 intersects the liquid level perpendicularly, and the lower surface of the substrate 600 is flush with the liquid level.

Next, along with the operation of the multilayer film forming apparatus 100,
The operation of the surface pressure measuring device 400 of the present invention will be explained.

First, power on the surface pressure measuring device 400, adjust the adjuster knob 444, and adjust the sensing member 4.
50 intersects the liquid surface surrounded by tape 310,
Adjust the angle of the rod 440.

Next, amphiphilic organic molecules (single molecules) mixed with a solvent such as chloroform are developed on the liquid surface of the trough 200 surrounded by the tape 31G. Then, the chloroform spread out on the liquid surface evaporates, leaving only a single molecule on the liquid surface.

Next, the movable barrier 300 (movement play) 32G is moved to the tape winding section 330 side, and the tape 310 is wound up by the tape winding section 330. As a result, the monomolecules spread on the liquid surface are The monomolecular film is compressed by the tape 310 on the liquid surface, and the surface pressure of the monomolecular film on the liquid surface increases.

When the surface pressure of the monomolecular film increases, the force that lifts the sensing member 450 increases, the rod 440 shown in FIG. 1 rotates to the left, and the height of the reflective section 460 provided on the rod 440 decreases.

Since the light emitted by the light emitting element 412 is emitted from the end of one bundle 481 of the bundle 470 of optical fiber cables to the reflective part 460, when the height of the reflective part 46G decreases, the light from the reflective part 460 and the light The distance of fiber cable bundle 470 is shortened, and the amount of light received at the end of the other bundle 491 in fiber optic cable bundle 410 is increased. The amount of light received at the end of the other bundle 491 is detected by a photosensitive element 492 in the display section 420, and a numerical value corresponding to the amount of received light is displayed on the window section 423 of the display section 420.

When the value displayed on the window 423 of the display section 420 indicates the pressure value when a single molecule forms a uniform thin film at the liquid level, the moving plate 32Q is automatically or manually moved.
, and the winding of the tape 310 by the tape winding section 330 is also stopped.

Next, actuator 730 lowers slide member 710 along rail 720. As a result, the blade 500
perpendicularly intersects the monomolecular film within the tape 310 and cuts the monomolecular film within the tape 310 into a size corresponding to the shape of the substrate 600.

After cutting the monomolecular film with the blade 500, the actuator 73G moves the slide member 110 down along the rail 720 without restricting the movement of the monomolecular film on the liquid surface with the blade 500, so that the bottom surface of the substrate 600 is It is bonded to the upper surface of the monomolecular film cut into the shape of the substrate 60G.

When the lower surface of the substrate 60G is bonded to the negative surface of the monomolecular film, the monomolecular film is uniformly attached to the entire lower surface of the substrate 600.

Thereafter, the actuator 730 raises the slide member 710 along the rail 720, thereby raising the blade 500 and the substrate 60G above the water surface. At this time, the board 60G
The monomolecular film attached to the lower surface of remains attached to the substrate 60G.

When laminating a monomolecular film, each time the above operation is repeated, the monomolecular film is laminated over the entire lower surface of the substrate 60G.

As shown in the above embodiment, in order to optically measure the angle of the rod 440 on which the sensing member 450 is suspended, it is compared to the conventional device that measures the angle of the rod using a high frequency differential transformer. It is not affected by changes in environmental temperature, temperature changes due to usage time, or cable routing, etc. As a result, surface pressure can be measured accurately without being affected by temperature changes or cable routing, etc. .

It should be noted that the surface pressure measuring device shown in the above embodiment is merely an example, and the present invention is not limited to such an example. , measuring the surface pressure of the liquid, changing the sensing member to a cylindrical or rod-like shape, and controlling the device, for example, according to the measured amount of received light, instead of the measuring part generating output to display a numerical value. In the specific implementation, such as generating an output for the rotation, rotatably supporting the rod with a spiral spring, and adjusting the angle of the rod by rotating the spiral spring, it is possible to do so without departing from the gist of the invention. It can be changed in various ways.

[Brief explanation of the drawing]

Figure 1 is a schematic diagram of the surface pressure measuring device, Figure 2 is a perspective view of the multilayer cumulative film forming apparatus, Figure 3 is a top view of the multilayer cumulative film forming apparatus, and Figure 4 is the multilayer cumulative film forming apparatus. FIG.

Claims (1)

[Claims] 1) (a) a rotatably supported balance rod; (b)
a sensing member suspended from one of the rods and intersecting the liquid surface to be measured; (c) a reflecting section provided on the other side of the rod; and (d) emitting light toward the reflecting section. A surface pressure measuring device comprising: a light emitting section; (e) a light receiving section that receives light emitted from the light emitting section and reflected by the reflecting section; and (f) a measuring section that measures the amount of light received by the light receiving section. .