JPH01210878A - Variable type mechanism isolation apparatus - Google Patents
Variable type mechanism isolation apparatusInfo
- Publication number
- JPH01210878A JPH01210878A JP3640688A JP3640688A JPH01210878A JP H01210878 A JPH01210878 A JP H01210878A JP 3640688 A JP3640688 A JP 3640688A JP 3640688 A JP3640688 A JP 3640688A JP H01210878 A JPH01210878 A JP H01210878A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- signal
- magnetic sensor
- iris
- strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 title abstract description 4
- 230000007246 mechanism Effects 0.000 title description 3
- 230000005291 magnetic effect Effects 0.000 claims abstract description 58
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 3
- 229910000889 permalloy Inorganic materials 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 3
- 230000008859 change Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000002887 superconductor Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 229910000595 mu-metal Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は可変型磁気遮断装置に関するものである。[Detailed description of the invention] (Industrial application field) The present invention relates to a variable magnetic isolation device.
(従来の技術)
いろいろな磁気的計測に用いられる磁気センサーは、検
出すべき磁気信号の大きさ、変化量そして測定精度に応
じて多様なものが使われている。(Prior Art) Various types of magnetic sensors are used for various magnetic measurements, depending on the magnitude, amount of change, and measurement accuracy of the magnetic signal to be detected.
高感度な磁気センサーとしては、超伝導量子干渉計(以
下5QUIDとよぶ)、フラックスゲート、ホール素子
などがある。現存する磁気センサーで最も高感度なもの
は5QUIDでありその感度は磁束にして10−”G−
cI11程の検出も可能となっている。Highly sensitive magnetic sensors include superconducting quantum interferometers (hereinafter referred to as 5QUID), flux gates, and Hall elements. The most sensitive existing magnetic sensor is the 5QUID, whose sensitivity is 10-"G- in terms of magnetic flux.
It is also possible to detect cI11.
(発明が解決しようとする課題)
一方このセンサーでは数ガウス以上の大きな磁気信号の
時間変化を検出することは極めて困難である。一般に磁
気センサーの感度調節は、検出した出力信号を電気的に
増幅あるいは減衰させて行っているがそれにも限度があ
り、特にS口旧りでは許容以上の大きな時間変化の信号
には検出側が応答できず電気的な処理では対処できない
問題である。このように特に高感度の磁気センサーで変
化量の大きな信号を検出すること、言い替えるとセンサ
ーの検出レベルの範囲を極端に広げることは電気的な方
法では出来にくいという欠点があった。(Problem to be Solved by the Invention) On the other hand, with this sensor, it is extremely difficult to detect a temporal change in a large magnetic signal of several Gauss or more. Generally, the sensitivity of a magnetic sensor is adjusted by electrically amplifying or attenuating the detected output signal, but there is a limit to this, especially in the case of the old S-port, the detection side responds to signals with larger than permissible changes over time. This is a problem that cannot be solved by electrical processing. In this way, there is a drawback that it is difficult to detect a signal with a large amount of change using a particularly highly sensitive magnetic sensor, or in other words, it is difficult to extremely expand the detection level range of the sensor using an electrical method.
それ故に、本発明は、センサーの検出レベルの範囲を容
易に可能ならしめることを技術的課題とする。Therefore, the technical problem of the present invention is to easily enable a range of sensor detection levels.
(発明の構成]
(課題を解決するための手段)
上記した技術的課題を解決するために本発明において講
じた技術的手段は、磁気センサー、前記磁気センサーを
包囲し且つ形状が可変の磁気遮断体および前記磁気セン
サーと連結され前記磁気センサーからの信号を処理する
装置を備える可変型磁気遮断装置を構成したことである
。(Structure of the Invention) (Means for Solving the Problems) The technical means taken in the present invention to solve the above-mentioned technical problems include a magnetic sensor, a magnetic shield that surrounds the magnetic sensor and has a variable shape. The present invention provides a variable magnetic cutoff device including a device that is connected to the body and the magnetic sensor and processes a signal from the magnetic sensor.
(作用)
この構成においては、磁気センサーを包囲する磁気遮断
体の形状が可変となっているので、磁気センサーの遮断
レベルを調節することができる。(Function) In this configuration, since the shape of the magnetic shield surrounding the magnetic sensor is variable, the shielding level of the magnetic sensor can be adjusted.
従って磁気センサーが検知する信号の強度もまた可変と
なり、信号の相対的変化量の測定を行うに当たり、対象
信号の計測可能な強度範囲を著しく広げることが出来る
。Therefore, the intensity of the signal detected by the magnetic sensor is also variable, and the measurable intensity range of the target signal can be significantly expanded when measuring the relative amount of change in the signal.
(実施例)
以下、本発明の実施例を、添付図面に基づいて説明する
。(Example) Hereinafter, an example of the present invention will be described based on the accompanying drawings.
第1図および第2図に本発明の基本的な構造を示す。第
1図において、磁気遮蔽体2.3の材料としては、パー
マロイ(μメタル)などの強磁性体か、或いは超伝導体
を用いる。遮蔽装置の形状及びその遮蔽レベルの調節方
法について以下に述べる。遮蔽体の形状は磁気センサー
の検出部1をほぼ中心軸としてその周囲を覆う形で円筒
或いは多角形筒状の側面部2を持ち、さらに測定信号源
側に開口部5を持った底板3を設けている。1 and 2 show the basic structure of the present invention. In FIG. 1, the magnetic shield 2.3 is made of a ferromagnetic material such as permalloy (μ metal) or a superconductor. The shape of the shielding device and the method of adjusting its shielding level will be described below. The shape of the shield is such that it has a cylindrical or polygonal cylindrical side surface 2 that surrounds the detecting section 1 of the magnetic sensor as its central axis, and a bottom plate 3 that has an opening 5 on the measurement signal source side. It is set up.
遮蔽レベルの調節は側面2及び底板3の形状を変化させ
ることで行う。即ち第1図に示すように側面2はスライ
ド動作が可能な構造になっており、筒形の全長り、を可
変にしている。The shielding level is adjusted by changing the shapes of the side surfaces 2 and the bottom plate 3. That is, as shown in FIG. 1, the side surface 2 has a structure that allows sliding movement, and the total length of the cylinder shape is variable.
また、底板3は第2図に示すように扇形の薄板4数片を
環のように組み合わせて中央にほぼ円形の開口部5を持
つ形状で、その周辺部のリング6などを回すことでその
間口径dを自由に変えられるいわゆる写真機の虹彩絞り
と同様の機構となっている。一般に筒状の磁気遮蔽の内
部の遮蔽効果はその中心軸上では、開口端からの深さL
2及び開口径dのふたつのパラメタで大きく変化する。As shown in Fig. 2, the bottom plate 3 has a shape in which four pieces of fan-shaped thin plates are assembled like a ring and has an approximately circular opening 5 in the center. It has a mechanism similar to the so-called iris diaphragm in a camera, which allows you to freely change the aperture d. Generally, the internal shielding effect of a cylindrical magnetic shield is measured at a depth L from the open end on its central axis.
2 and the aperture diameter d.
従って本発明のような磁気遮蔽体の可変機構及び材料を
適当に選ぶことで、非常に広範囲な磁気信号強度に対す
る感度調節を、内部に収納した磁気センサー1に対して
行うことが出来る。Therefore, by appropriately selecting the variable mechanism and material of the magnetic shield according to the present invention, it is possible to adjust the sensitivity of the magnetic sensor 1 housed within a very wide range of magnetic signal intensities.
また、特に磁気遮蔽剤が超伝導体の場合には、遮蔽体に
接するように電気ヒータ線などを巻き、それに通電して
遮蔽体の温度をその超伝導転移温度以上に上げることで
磁気遮蔽能力をなくすことでも遮蔽効果の調節は行うこ
とができる。このヒータによる調節はヒータと複数部分
に分割することでそのどの部分のヒータに通電するかを
選ぶことできめの綱かい調節も可能になる。In addition, especially when the magnetic shielding material is a superconductor, the magnetic shielding ability can be improved by winding an electric heater wire or the like so that it is in contact with the shielding material and increasing the temperature of the shielding material above its superconducting transition temperature by energizing it. The shielding effect can also be adjusted by eliminating. This heater adjustment can be done by dividing the heater into multiple parts, and by selecting which part of the heater is energized, it is possible to make tight adjustments.
第3図は本発明の磁気遮蔽装置を5QUIDを用いた磁
気計測装置に適用した例である。この例では5QUID
7は液体ヘリウム温度の4.2にで働くものとしてあ
り、ヘリウムデユワ−11内に貯められた液体ヘリウム
12中に浸されている。検出された磁界変動に因る5Q
UIDからの電気信号は室温部に置かれた高周波増幅器
16やその他の検出用エレクトロニクス機器17を通し
て目的に応じた出力形態(例えばブラウン管、記録紙な
ど)で出力される。一般的に5QUID 7は直接対象
とする磁気信号にさらされることはなく、第3図のよう
に超伝導体による磁気遮蔽9によって完全に外来の磁気
雑音から遮蔽されている。測定対象からの磁気信号は5
QUIDへの信号入力コイル8と超伝導的につながった
検出コイルlOに直接与えられる。本発明の遮蔽装置は
この検出コイル10の周囲に設置されている。この実施
例ではほぼ室温部に置かれた(低温部に設置も可)パー
マロイのスライド型円筒13、虹彩絞り14と絞り調節
リング15(第2図示のものと同一構造)によって遮蔽
装置は構成されている。磁気信号源18は図のように絞
りの下方に位置し、その信号強度に応じて絞りの開口径
及び円筒部の長さを調節することで検出コイルに検知さ
れる信号の強度を自由に調節できる。FIG. 3 is an example in which the magnetic shielding device of the present invention is applied to a magnetic measuring device using 5QUID. In this example 5QUID
7 is designed to work at a liquid helium temperature of 4.2, and is immersed in liquid helium 12 stored in a helium dewar 11. 5Q due to detected magnetic field fluctuations
The electrical signal from the UID is outputted in a desired output format (for example, a cathode ray tube, recording paper, etc.) through a high frequency amplifier 16 and other detection electronics equipment 17 placed at room temperature. Generally, the 5QUID 7 is not directly exposed to the target magnetic signal, but is completely shielded from external magnetic noise by a magnetic shield 9 made of superconductor as shown in FIG. The magnetic signal from the measurement target is 5
The signal input to the QUID is directly applied to the detection coil IO superconductingly connected to the input coil 8. The shielding device of the present invention is installed around this detection coil 10. In this embodiment, the shielding device is composed of a permalloy sliding cylinder 13 placed at approximately room temperature (it can also be placed in a low temperature area), an iris diaphragm 14, and an iris adjustment ring 15 (same structure as that shown in the second figure). ing. The magnetic signal source 18 is located below the aperture as shown in the figure, and the intensity of the signal detected by the detection coil can be freely adjusted by adjusting the aperture diameter and the length of the cylindrical part of the aperture according to the signal strength. can.
要するに、本発明においては、磁気センサー自身をある
程度外来信号から磁気的に遮断し、その遮断レベルを調
整することにより、磁気センサーの感度と被検出磁気信
号の相対的な大きなに応じた検出感度の調節を可能にし
たことである。In short, in the present invention, by magnetically shielding the magnetic sensor itself from external signals to some extent and adjusting the level of shielding, the detection sensitivity is adjusted according to the sensitivity of the magnetic sensor and the relative magnitude of the magnetic signal to be detected. This allows for adjustment.
〔発明の効果]
以上述べたように、本発明においては、磁気センサーを
包囲する磁気遮断体の形状を可変ならしめたので、磁気
センサーの遮断レベルを調節することができる。従って
磁気センサーが検知する信号の強度もまた可変となり、
信号の相対的変化量の測定を行うに当たり、対象信号の
計測可能な強度範囲を著しく広げることが出来る。[Effects of the Invention] As described above, in the present invention, since the shape of the magnetic shield surrounding the magnetic sensor is made variable, the shielding level of the magnetic sensor can be adjusted. Therefore, the strength of the signal detected by the magnetic sensor is also variable.
When measuring the amount of relative change in a signal, the measurable intensity range of the target signal can be significantly expanded.
第1図は本発明の原理を示す断面図、第2図は第1図A
方向矢示図および第3図は本発明を磁気計測装置に適用
した場合を示す断面図である。
1.7・・・磁気センサー。
2.3,13.14・・・磁気遮断体。
17・・・信号処理装置。Figure 1 is a sectional view showing the principle of the present invention, Figure 2 is Figure 1A
The direction arrow diagram and FIG. 3 are cross-sectional views showing the case where the present invention is applied to a magnetic measuring device. 1.7...Magnetic sensor. 2.3, 13.14...Magnetic shield. 17...Signal processing device.
Claims (1)
変の磁気遮断体および前記磁気センサーと連結され前記
磁気センサーからの信号を処理する装置を備える可変型
磁気遮断装置。A variable magnetic shielding device comprising a magnetic sensor, a magnetic shielding body surrounding the magnetic sensor and having a variable shape, and a device connected to the magnetic sensor and processing a signal from the magnetic sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3640688A JPH01210878A (en) | 1988-02-18 | 1988-02-18 | Variable type mechanism isolation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3640688A JPH01210878A (en) | 1988-02-18 | 1988-02-18 | Variable type mechanism isolation apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01210878A true JPH01210878A (en) | 1989-08-24 |
Family
ID=12468958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3640688A Pending JPH01210878A (en) | 1988-02-18 | 1988-02-18 | Variable type mechanism isolation apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01210878A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001035327A (en) * | 1999-07-22 | 2001-02-09 | Sumitomo Metal Ind Ltd | Capacitance type proximity sensor |
JP2018025413A (en) * | 2016-08-08 | 2018-02-15 | 富士通株式会社 | Magnetic measuring device and geological exploration system |
-
1988
- 1988-02-18 JP JP3640688A patent/JPH01210878A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001035327A (en) * | 1999-07-22 | 2001-02-09 | Sumitomo Metal Ind Ltd | Capacitance type proximity sensor |
JP2018025413A (en) * | 2016-08-08 | 2018-02-15 | 富士通株式会社 | Magnetic measuring device and geological exploration system |
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