JPH01205582A - Piezoelectric displacement device - Google Patents
Piezoelectric displacement deviceInfo
- Publication number
- JPH01205582A JPH01205582A JP63030281A JP3028188A JPH01205582A JP H01205582 A JPH01205582 A JP H01205582A JP 63030281 A JP63030281 A JP 63030281A JP 3028188 A JP3028188 A JP 3028188A JP H01205582 A JPH01205582 A JP H01205582A
- Authority
- JP
- Japan
- Prior art keywords
- displacement device
- electrodes
- piezo
- displacement
- piezomaterial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 23
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract 4
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims abstract 4
- 239000000463 material Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 7
- 238000001259 photo etching Methods 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 3
- 230000005294 ferromagnetic effect Effects 0.000 abstract 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- WAKZZMMCDILMEF-UHFFFAOYSA-H barium(2+);diphosphate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O WAKZZMMCDILMEF-UHFFFAOYSA-H 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910002112 ferroelectric ceramic material Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Impact Printers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はドツト・プリンター・ヘッド等に用いられるピ
エゾ変位装置の電、積構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric structure of a piezo displacement device used in a dot printer head or the like.
従来、ピエゾ変位装置は、第５図に示す如く、ピエゾ材
２１と電極２２を多層に積層して、大きな変位量と力を
得る様にするのが通例であった。Conventionally, as shown in FIG. 5, piezo displacement devices have typically had piezo materials 21 and electrodes 22 laminated in multiple layers to obtain a large amount of displacement and force.
しかし、上記従来技術によると、ピエゾ材膜と電極材膜
との多層重ね合わせに工数を要し、コスト高になると云
う問題点があった。However, according to the above-mentioned conventional technology, there is a problem in that it takes a lot of man-hours to stack the piezo material film and the electrode material film in multiple layers, resulting in high costs.
本発明は、かかる従来技術の問題点をなくし、少ない工
数で製作出来、低コスト化できるピエゾ変位装置の電極
１７／Ｊ造を提供する事を目的とする。It is an object of the present invention to provide an electrode 17/J structure for a piezo displacement device that eliminates the problems of the prior art, can be manufactured with fewer man-hours, and can be manufactured at a lower cost.
上紀間顆点をＩ’ｌ’ｌ＝決するために、本発明はピエ
ゾ材表面にはストライプ状に電極を形成する手段をとる
事、及びピエゾ材表面にはストライプ状に溝を形成し、
該溝部に電極を形成する手段をとる事を基本とする。In order to determine the superior intercondylar point, the present invention takes means to form electrodes in stripes on the surface of the piezo material, and to form grooves in stripes on the surface of the piezo material,
Basically, a method is taken to form an electrode in the groove.
本発明によるストライプ状電極の作用はピエゾ材表面に
水平方向に電界を印力■して表面変位させる作用があり
、積層型ピエゾ変位装置と同様に、ストライブ状電極の
本数と間隔によりその変位量と変位力を変える事もでき
る作用がある。The action of the striped electrodes according to the present invention is to apply an electric field horizontally to the surface of the piezo material to cause the surface to be displaced.Similar to the stacked piezo displacement device, the number and spacing of the striped electrodes determine the displacement. It also has the ability to change the amount and displacement force.
以下、実施例により本発明を詳述する。 Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図は本発明の一実施例を示すストライブ電極ピエゾ
変位装置の断面模式図である。すなわちチタ、ン酸バリ
ウム等の強誘電性セラミック利から成るピエゾ材１の表
面には、電極２がストライブ状に蒸着とホト・エツチン
グ法により形成されて成る。隣接する電極間に′電界を
印加するとピエゾ材表面は伸縮する事となる。尚、′電
極は一主面に限らず他の［頂にも形成されても良い事は
１′うまでもない。FIG. 1 is a schematic cross-sectional view of a stripe electrode piezo displacement device showing an embodiment of the present invention. That is, electrodes 2 are formed in stripes on the surface of a piezo material 1 made of a ferroelectric ceramic material such as titanium or barium phosphate by vapor deposition and photo-etching. When an electric field is applied between adjacent electrodes, the surface of the piezo material expands and contracts. It goes without saying that the 'electrode is not limited to one main surface, but may also be formed on other tops.
第２図は本発明の他の実施例を示す溝型′成極ピエゾ変
位装置の断面模式図である。すなわち、ピエゾ材１１の
表面には、ホト・エツチング法により溝がストライブ状
に形成され、該溝内に、蒸着及びホト・エツチング法等
により電極１２がストライブ状に形成されて成る。線方
式によるピエゾ変位装置は表＋Ｈｊ変位になる事は前記
例と同様であるが、それがやや深いところ迄及ぶ事が前
記例と異なる。溝型電極は、ピエゾ材の一主面に限らず
他の面にも形成されても良い事は前記例と同様である。FIG. 2 is a schematic cross-sectional view of a groove-type polarized piezo displacement device showing another embodiment of the present invention. That is, grooves are formed in stripes on the surface of the piezo material 11 by photo-etching, and electrodes 12 are formed in stripes in the grooves by vapor deposition, photo-etching, and the like. The piezo displacement device using the wire method is similar to the above example in that it provides a front +Hj displacement, but differs from the above example in that it extends to a slightly deeper position. As in the previous example, the groove-shaped electrodes may be formed not only on one main surface of the piezo material but also on other surfaces.
本発明によると、ホト・エツチング法と云う微細加工に
通常用いられている方法により開学な工程により、低コ
ストでピエゾ変位装置を製作できる効果がある。According to the present invention, it is possible to manufacture a piezo displacement device at low cost by a simple process using a photo-etching method, which is a method commonly used for microfabrication.
第１図は本発明の一実施例を示ずストライプ状電極ピエ
ゾ変位装置の断面模式図であり、第２図は、本発明の他
の実施例を示す溝型電極ピエゾ変位装置の断面模式図で
ある。第６図は従来技術による積層型ピエゾ変位装置の
断面模式図である。
１．１１．２１・・・・・・ピエゾ材
２．１２，２２・・・・・電 極
以上
出願人 セイコーエプソン株式会社FIG. 1 is a schematic cross-sectional view of a striped electrode piezo displacement device, not showing one embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of a groove-type electrode piezo displacement device showing another embodiment of the present invention. It is. FIG. 6 is a schematic cross-sectional view of a stacked piezo displacement device according to the prior art. 1.11.21... Piezo material 2.12, 22... Electrode and above Applicant Seiko Epson Corporation
Claims (2)
はストライプ状に電極が形成されて成る事を特徴とする
ピエゾ変位装置。(1) A piezo displacement device characterized in that electrodes are formed in stripes on the surface of a ferroelectric piezo material such as barium titanate.
はストライプ状に溝が形成され、該溝部に電極が形成さ
れて成る事を特徴とするピエゾ変位装置。(2) A piezo displacement device characterized in that striped grooves are formed on the surface of a ferroelectric piezo material such as barium titanate, and electrodes are formed in the grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63030281A JPH01205582A (en) | 1988-02-12 | 1988-02-12 | Piezoelectric displacement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63030281A JPH01205582A (en) | 1988-02-12 | 1988-02-12 | Piezoelectric displacement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01205582A true JPH01205582A (en) | 1989-08-17 |
Family
ID=12299337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63030281A Pending JPH01205582A (en) | 1988-02-12 | 1988-02-12 | Piezoelectric displacement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01205582A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003233983A (en) * | 2001-12-05 | 2003-08-22 | Korea Advanced Inst Of Science & Technol | Method of controlling magnetization easy axis in ferromagnetic films using voltage and magnetic memory using this method and its information recording method |
| CN104359617A (en) * | 2014-11-24 | 2015-02-18 | 中国工程物理研究院总体工程研究所 | Device for analyzing characteristics of flexible piezomagnetic sensor array |
-
1988
- 1988-02-12 JP JP63030281A patent/JPH01205582A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003233983A (en) * | 2001-12-05 | 2003-08-22 | Korea Advanced Inst Of Science & Technol | Method of controlling magnetization easy axis in ferromagnetic films using voltage and magnetic memory using this method and its information recording method |
| CN104359617A (en) * | 2014-11-24 | 2015-02-18 | 中国工程物理研究院总体工程研究所 | Device for analyzing characteristics of flexible piezomagnetic sensor array |
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