JPH01201140A - Surface flaw inspection device - Google Patents

Surface flaw inspection device

Info

Publication number
JPH01201140A
JPH01201140A JP2379288A JP2379288A JPH01201140A JP H01201140 A JPH01201140 A JP H01201140A JP 2379288 A JP2379288 A JP 2379288A JP 2379288 A JP2379288 A JP 2379288A JP H01201140 A JPH01201140 A JP H01201140A
Authority
JP
Japan
Prior art keywords
light
rotating body
curved
curved rotating
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2379288A
Other languages
Japanese (ja)
Other versions
JP2525846B2 (en
Inventor
Motoyuki Suzuki
基之 鈴木
Shigeki Tezuka
手塚 繁樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP63023792A priority Critical patent/JP2525846B2/en
Publication of JPH01201140A publication Critical patent/JPH01201140A/en
Application granted granted Critical
Publication of JP2525846B2 publication Critical patent/JP2525846B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To improve the accuracy of surface flaw inspection by making reflected light from a curved rotary body incident on a camera with the nearly uniform quantity of light entirely in the direction of the center axis of the rotary body. CONSTITUTION:The bent part of the surface of the curved rotary body 1 consists of three parts L1-L3 approximated to straight lines in a direction parallel to the center O of rotation. Then three light sources 11-13 are arranged corresponding to those three parts and installed at specific angles so that their light beams are reflected by the respective parts L1-L3 and light incident on the linear camera 3 becomes a regular reflecting surface. Consequently, the output of the sensor in the camera 3 is entirely uniform corresponding to the position along the center axis O, so when there is a flaw such as a recessed part and a scratch in the surface, it appears as a dark part in the reflected light from the part.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は自動車部品等のように表面が湾曲した曲線回転
体を被検査物とし、この表面における傷等の表面欠陥を
検査するための表面欠陥検査装置に関する。
Detailed Description of the Invention (Field of Industrial Application) The present invention uses a curved rotating body with a curved surface, such as an automobile part, as an object to be inspected, and a surface for inspecting surface defects such as scratches on the surface. Related to defect inspection equipment.

(従来の技術) 自動車部品等の種々の部品の中には、表面が湾曲した曲
線回転体があり、これらの部品の表面に切削加工や研削
加工を施した後に、表面が所定の精度で加工されたか否
か、つまり表面に傷等の欠陥が発生したか否かを自動的
に検査するために、表面欠陥検査装置が用いられている
(Prior art) Among various parts such as automobile parts, there are curved rotating bodies with curved surfaces, and after cutting or grinding the surfaces of these parts, it is necessary to process the surfaces to a predetermined accuracy. A surface defect inspection device is used to automatically inspect whether defects such as scratches have occurred on the surface.

第3図は上述のような曲線回転体の表面欠陥を検査する
ために従来用いられていた表面欠陥検査装置を示す図で
ある。図示しない回転軸によって回転自在となった曲線
回転体1には、1つの光源2から面状となった光が所定
の角度で照射されるようになっており、この面光源2か
ら曲線回転体1で反射した光を受光するための一次元カ
メラ3が、曲線回転体1に対向して配置されている。こ
の−次元カメラ3の内部には、CCD等からなる光電セ
ンサ、つまりラインセンサが組込まれている。
FIG. 3 is a diagram showing a surface defect inspection apparatus conventionally used for inspecting surface defects of a curved rotating body as described above. A curved rotating body 1, which is rotatable by a rotating shaft (not shown), is irradiated with planar light from one light source 2 at a predetermined angle. A one-dimensional camera 3 for receiving the light reflected by the curved rotating body 1 is arranged facing the curved rotating body 1. Inside the -dimensional camera 3, a photoelectric sensor made of a CCD or the like, that is, a line sensor is incorporated.

この−次元カメラ3に入射する反射光は、回転体1の表
面が回転方向には円形となっているために、曲線回転体
1の表面で光源1がらの光が接する部分で線状となって
入射する。
Since the surface of the rotating body 1 is circular in the rotation direction, the reflected light incident on the -dimensional camera 3 becomes linear at the part of the curved rotating body 1 surface where the light from the light source 1 touches. incident.

(発明が解決しようとする問題点) このような従来の表面欠陥検査装置にあっては、回転体
1の表面が回転体1の回転中心軸Oと平行な方向には湾
曲しており、線状となって一次元カメラ3内に入射する
光は、前記回転中心軸Oに対して大きく傾斜した部分は
光軸からずれる部分程、反射光量が減少することになる
。図示する形状の被検査物における反射光量に対応した
センサ出力と、被検査物である回転体1の軸方向の位置
との関係を示すと第3図の通りである。
(Problems to be Solved by the Invention) In such a conventional surface defect inspection device, the surface of the rotating body 1 is curved in the direction parallel to the rotation center axis O of the rotating body 1, and the Regarding the light that enters the one-dimensional camera 3 in the form of a shape, the amount of reflected light decreases as the portion deviates from the optical axis in a portion that is largely inclined with respect to the rotation center axis O. FIG. 3 shows the relationship between the sensor output corresponding to the amount of reflected light on the object to be inspected having the illustrated shape and the axial position of the rotating body 1, which is the object to be inspected.

図示するようなセンサ出力信号によって、被検査物1の
表面の欠陥状態を検査するには、センサ出力信号によっ
て得られた影像波形信号から、被検査物1の表面が適性
な状態となっているが否かの基準となるスレッショルド
レベル、つまり閾値を求め、このスレッシシルトレベル
よりも影像信号波形が高ければ、表面が適性な状態とな
っていると判定される。逆に、低ければその部分に傷等
の表面欠陥が存在すると判定される。これらの判定は自
動的になされ、被検査物1の回転位置と、中心軸0にお
ける位置とが記憶媒体に記憶されることになる。
In order to inspect the defect state of the surface of the object to be inspected 1 using the sensor output signal as shown in the figure, the surface of the object to be inspected 1 must be in an appropriate state from the image waveform signal obtained from the sensor output signal. A threshold level, that is, a threshold value, is determined as a reference for determining whether or not the image signal is generated.If the image signal waveform is higher than this threshold level, it is determined that the surface is in an appropriate state. Conversely, if it is low, it is determined that a surface defect such as a scratch exists in that area. These determinations are made automatically, and the rotational position of the inspection object 1 and the position on the central axis 0 are stored in the storage medium.

しかしながら、上述したような、従来の表面欠陥検査装
置にあっては、センサからの出力信号自体が、被検査物
1の湾曲状態に応じて、中心軸Oに平行な方向の位置に
よっては、図示するようにセンサ出力が変化することに
なる。このなめに、反射光量が少ない部分では、表面に
発生した傷等の欠陥部分と、正常な部分とでコントラス
トが減り、表面欠陥検出精度が低下してしまうという問
題点があった。
However, in the conventional surface defect inspection apparatus as described above, the output signal from the sensor itself may vary depending on the position in the direction parallel to the central axis O depending on the curved state of the inspected object 1. The sensor output will change accordingly. For this reason, in areas where the amount of reflected light is small, there is a problem in that the contrast between defects such as scratches on the surface and normal areas is reduced, resulting in a decrease in surface defect detection accuracy.

本発明は上記従来技術の問題点に鑑みてなされたもので
あり、湾曲した曲線回転体の表面からの反射光が曲線回
転体の回転中心軸に沿う方向の全体に渡りほぼ均一な光
量で一次元カメラに入射するようにして、表面欠陥検査
精度を向上させることを目的とする。
The present invention has been made in view of the above-mentioned problems of the prior art, and the present invention has been made in view of the above-mentioned problems of the prior art. The purpose is to improve surface defect inspection accuracy by making the light incident on the original camera.

(問題点を解決するための手段) 上記目的を達成するための本発明は、表面に湾曲面を有
する曲線回転体に光源からの光を照射し、前記曲線回転
体を介して線状に反射゛する反射光を受光する一次元カ
メラを前記曲線回転体に対向して配置して前記曲線回転
体の表面を検査するようにした表面欠陥検査装置におい
て、前記曲線回転体の表面を回転中心と平行な方向にそ
れぞれほぼ直線に近似させた複数の部分に区分し、それ
ぞれの前記部分に対応させてこれらに所定の角度で光を
照射する光源を前記曲線回転体に隣接して配置してなる
表面欠陥検査装置である。
(Means for Solving the Problems) The present invention to achieve the above object irradiates light from a light source to a curved rotating body having a curved surface on the surface, and reflects the light linearly through the curved rotating body. In the surface defect inspection apparatus, a one-dimensional camera that receives reflected light that is reflected from the curved body is arranged opposite to the curved body of rotation to inspect the surface of the curved body of rotation, and the surface of the curved body of rotation is set as the center of rotation. The curved rotating body is divided into a plurality of sections in parallel directions, each of which is approximated to a straight line, and a light source that irradiates light at a predetermined angle to each of the sections is arranged adjacent to the curved rotating body. This is a surface defect inspection device.

(作用) 光源から被検査物である曲線回転体に照射される光は、
前記曲線回転体の表面にほぼ直線に近似させて区分され
た複数の部分に所定の光量で所定の角度で入射すること
になり、それぞれの部分から一次元カメラに入射する光
は、被検査物の反射部分の全体で同一の光量で一次元カ
メラのセンサ内に入射することになる。これにより、前
記センサでは表面に欠陥があった場合とない場合とでは
明瞭に区別され、表面欠陥検出精度が向上することとな
った。
(Function) The light irradiated from the light source to the curved rotating body, which is the object to be inspected, is
A predetermined amount of light is incident at a predetermined angle on a plurality of sections that are approximately straight-lined on the surface of the curved rotating body, and the light that enters the one-dimensional camera from each section is connected to the object to be inspected. The same amount of light is incident on the sensor of the one-dimensional camera throughout the reflected portion. As a result, the sensor can clearly distinguish between cases where there is a defect on the surface and cases where there is no defect, and the surface defect detection accuracy is improved.

(実施例) 以下、図示する本発明の一実施例に基いて本発明の詳細
な説明する。
(Example) Hereinafter, the present invention will be described in detail based on an example of the present invention illustrated in the drawings.

第1図は本発明の第1実施例に係る表面欠陥検査装置を
示す図であり、この図において、前記従来の装置におけ
る部位と共通する部位には同一の符号を付しである。
FIG. 1 is a diagram showing a surface defect inspection apparatus according to a first embodiment of the present invention, and in this figure, parts common to those in the conventional apparatus are given the same reference numerals.

表面が湾曲した形状の曲線回転体1は図示しない軸によ
り回転自在となっており、この曲線回転体1に対向して
一次元カメラ3が配置されている。
A curved rotating body 1 having a curved surface is rotatable about a shaft (not shown), and a one-dimensional camera 3 is arranged opposite to this curved rotating body 1.

この−次元カメラ3の構造は、上述した場合と同様であ
り、内部にCCD素子からなるラインセンサが組込まれ
ている。
The structure of this -dimensional camera 3 is similar to that described above, and a line sensor made of a CCD element is incorporated inside.

図示する形状の曲線回転体1の場合には、この回転体1
の表面はその湾曲した部分を回転中心Oと平行な方向に
それぞれほぼ直線に近似させfS3つの部分し1〜L3
に区分しである。これらの部分にそれぞれ別々に光を照
射すべく、区分された3つの部分に対応した3つの光源
11〜1−3がそれぞれ被検査物である曲線回転体1に
対向して配置されている。それぞれの光源11〜13は
、3つの部分L1〜L3で反射して一次元カメラ3に入
射する光が、それぞれ正反射面となるように、所定の角
度で設置されている。
In the case of a curved rotating body 1 having the shape shown in the figure, this rotating body 1
The surface of is divided into three parts fS by approximating its curved parts to almost straight lines in the direction parallel to the center of rotation O, 1 to L3.
It is divided into In order to irradiate these portions with light separately, three light sources 11 to 1-3 corresponding to the three divided portions are arranged facing the curved rotating body 1, which is the object to be inspected. Each of the light sources 11 to 13 is installed at a predetermined angle so that the light reflected by the three portions L1 to L3 and incident on the one-dimensional camera 3 becomes a specular reflection surface.

したがって、上述のような本発明の表面欠陥検査装置に
あっては、−次元カメラ3内のセンサに入射する反射光
によって得られるこのセンサの出力は、第1図に示すよ
うに、被検査物1の中心軸○に沿う方向の位置に応じて
全体的に均一なものとなる。これにより、表面に四部や
傷等の欠陥が存在した場合には、その部分からの反射光
は、他の部分に比較して、明瞭に暗部となって現れ、セ
ンサによって確実に欠陥部が検出されることになる。た
だし、複数に区分されたそれぞれの部分では、入射角つ
まり正反射率が異なることになるので、光源11〜13
毎に照射させる光量を変化させ、センサ出力が第1図に
おいて、全体的に均一となるようにする必要がある。
Therefore, in the surface defect inspection apparatus of the present invention as described above, the output of the sensor obtained by the reflected light incident on the sensor in the -dimensional camera 3 is as shown in FIG. It becomes uniform as a whole depending on the position in the direction along the central axis ◯ of 1. As a result, if there is a defect such as a crack or scratch on the surface, the reflected light from that area will appear as a clearly dark area compared to other areas, and the sensor will reliably detect the defective area. will be done. However, since the incident angles, that is, the regular reflectances are different in each of the plurality of sections, the light sources 11 to 13
It is necessary to change the amount of light irradiated each time so that the sensor output becomes uniform throughout as shown in FIG.

尚、被検査物である曲線回転体1の形状によっては、4
つ或いはこれ以上の部分に区分するようにしても良い。
Note that depending on the shape of the curved rotating body 1 that is the object to be inspected,
It may be divided into one or more parts.

第2図は本発明の第2実施例に係る表面欠陥検査装置を
示す図であり、この場合には1つの光源14を用いて、
この光源と曲線回転体1との間に、3つに区分された各
部分に相互に相違した所定の角度で光を照射させるため
に、フィルターが一体となった3つの反射ミラー15〜
17が配置されている。前記フィルターは曲線回転体1
に向かう光の址を調整するためのものであり、各々の部
分L1〜L3に所定の光度でかつ所定の角度で光源14
からの光が照射されることになる。この場合には、1つ
の光源と3つの反射ミラー15〜17を含めて、3つの
部分L1〜L3に相互に相違した角度で被検査物に対し
て照射する光源が形成されている。
FIG. 2 is a diagram showing a surface defect inspection apparatus according to a second embodiment of the present invention, in which one light source 14 is used.
Between this light source and the curved rotating body 1, there are three reflecting mirrors 15 to 15 with integrated filters in order to irradiate light at different predetermined angles to each of the three divided parts.
17 are arranged. The filter is a curved rotating body 1
This is to adjust the direction of light directed toward the light source 14 at a predetermined luminous intensity and at a predetermined angle to each portion L1 to L3.
It will be illuminated by light from In this case, light sources that irradiate the object to be inspected at different angles are formed in three portions L1 to L3, including one light source and three reflecting mirrors 15 to 17.

(発明の効果) 以上のように、本発明によれば、曲線回転体の表面を回
転中心と平行な方向にそれぞれほぼ直線に近似させた複
数の部分に区分し、それぞれの前記部分に対応させてこ
れらに所定の角度で光を照射する光源を前記曲線回転体
に隣接して配置したので、表面湾曲面を有する曲線回転
体からの反射光は全体的に一定の光量で一次元カメラ内
のセンサに入射することになり、曲線回転体の表面に傷
等の表面欠陥が発生していた場合には、センサ内にはそ
の部分が暗部として明瞭に現れ、表面欠陥検査の精度が
大幅に向上することとなった。
(Effects of the Invention) As described above, according to the present invention, the surface of the curved rotating body is divided into a plurality of portions that are each approximated to a straight line in a direction parallel to the center of rotation, and Since a light source that irradiates light onto these objects at a predetermined angle is placed adjacent to the curved rotating body, the light reflected from the curved rotating body having a curved surface has a constant amount of light as a whole and is reflected within the one-dimensional camera. If there is a surface defect such as a scratch on the surface of the curved rotating body, that area will clearly appear as a dark area within the sensor, greatly improving the accuracy of surface defect inspection. I decided to do it.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例に係る表面欠陥検査装置の概
略構造を示す斜視図、第2図は本発明の他の実施例に係
る表面欠陥検査装置の概略構造を示す斜視図、第3図は
従来の表面欠陥検査装置の概略構造を示す斜視図である
。 1・・・曲線回転体、3・・・−次元カメラ、11−1
−4・・・光源。 特許出願人     日産自動車株式会社代理人 弁理
士   八 1)幹 雄(ほか1名)第1図
FIG. 1 is a perspective view showing a schematic structure of a surface defect inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a schematic structure of a surface defect inspection apparatus according to another embodiment of the present invention. FIG. 3 is a perspective view showing the schematic structure of a conventional surface defect inspection device. 1... Curved rotating body, 3...-dimensional camera, 11-1
-4...Light source. Patent applicant Nissan Motor Co., Ltd. agent Patent attorney 8 1) Mikio (and 1 other person) Figure 1

Claims (1)

【特許請求の範囲】[Claims] 表面に湾曲面を有する曲線回転体に光源からの光を照射
し、前記曲線回転体を介して線状に反射する反射光を受
光する一次元カメラを前記曲線回転体に対向して配置し
て前記曲線回転体の表面を検査するようにした表面欠陥
検査装置において、前記曲線回転体の表面を回転中心と
平行な方向にそれぞれほぼ直線に近似させた複数の部分
に区分し、それぞれの前記部分に対応させてこれらに所
定の角度で光を照射する光源を前記曲線回転体に隣接し
て配置してなる表面欠陥検査装置。
A one-dimensional camera that irradiates light from a light source to a curved rotating body having a curved surface and receives reflected light linearly reflected through the curved rotating body is arranged opposite to the curved rotating body. In the surface defect inspection device for inspecting the surface of the curved rotating body, the surface of the curved rotating body is divided into a plurality of portions that are each approximated to a straight line in a direction parallel to the center of rotation, and each of the portions is A surface defect inspection device comprising: a light source arranged adjacent to the curved rotating body to irradiate light at a predetermined angle to correspond to the curved rotating body.
JP63023792A 1988-02-05 1988-02-05 Surface defect inspection equipment Expired - Lifetime JP2525846B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63023792A JP2525846B2 (en) 1988-02-05 1988-02-05 Surface defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63023792A JP2525846B2 (en) 1988-02-05 1988-02-05 Surface defect inspection equipment

Publications (2)

Publication Number Publication Date
JPH01201140A true JPH01201140A (en) 1989-08-14
JP2525846B2 JP2525846B2 (en) 1996-08-21

Family

ID=12120175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63023792A Expired - Lifetime JP2525846B2 (en) 1988-02-05 1988-02-05 Surface defect inspection equipment

Country Status (1)

Country Link
JP (1) JP2525846B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030024615A (en) * 2001-09-18 2003-03-26 가부시키가이샤 도쿄 웰드 Method and apparatus for examining appearance of chip component

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (en) * 1965-08-28 1969-03-05
JPS53127783A (en) * 1977-04-13 1978-11-08 Omron Tateisi Electronics Co Projection and reception system in optical surface inspection of spherical objects
JPS62229050A (en) * 1986-03-31 1987-10-07 Mitsubishi Metal Corp Surface detect inspection of object

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (en) * 1965-08-28 1969-03-05
JPS53127783A (en) * 1977-04-13 1978-11-08 Omron Tateisi Electronics Co Projection and reception system in optical surface inspection of spherical objects
JPS62229050A (en) * 1986-03-31 1987-10-07 Mitsubishi Metal Corp Surface detect inspection of object

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030024615A (en) * 2001-09-18 2003-03-26 가부시키가이샤 도쿄 웰드 Method and apparatus for examining appearance of chip component

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