JPH01200681A - Electrostrictive effect porcelain composition - Google Patents
Electrostrictive effect porcelain compositionInfo
- Publication number
- JPH01200681A JPH01200681A JP63023769A JP2376988A JPH01200681A JP H01200681 A JPH01200681 A JP H01200681A JP 63023769 A JP63023769 A JP 63023769A JP 2376988 A JP2376988 A JP 2376988A JP H01200681 A JPH01200681 A JP H01200681A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- amount
- composition
- electrostrictive
- porcelain composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 28
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 7
- 230000000694 effects Effects 0.000 title description 6
- 150000002736 metal compounds Chemical class 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 7
- 230000003647 oxidation Effects 0.000 claims abstract description 4
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 4
- 238000002156 mixing Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 38
- 239000000654 additive Substances 0.000 abstract description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- 230000000996 additive effect Effects 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 239000004332 silver Substances 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract 2
- 239000002245 particle Substances 0.000 abstract 2
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 abstract 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 description 20
- 239000000919 ceramic Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 5
- 229920003254 poly(benzobisthiazole) Polymers 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101100145155 Escherichia phage lambda cIII gene Proteins 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
近年、半導体素子などの集積化が進む中で、その製造工
程においてミクロンオーダーの変位量を制御する技術が
切望されるようになってきた。圧電／電歪効果を利用す
るアクチュエータは、こうした次世代のマイクロ・メカ
トロニクスの中心を担う機械要素になると期待されてい
る。例えば、光学、天文学あるいは精密加工などの分野
においてサブミクロンのオーダーで光路長や位置を調整
する変位素子が所望されるようになってきた。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] In recent years, as semiconductor devices and the like have become more integrated, there has been a strong desire for technology to control displacements on the micron order in their manufacturing processes. Actuators that utilize piezoelectric/electrostrictive effects are expected to become central mechanical elements in next-generation micromechatronics. For example, in fields such as optics, astronomy, and precision processing, displacement elements that adjust optical path length and position on the order of submicrons have become desired.
従来のアクチュエータとしては、電磁力で働くモータ、
この電磁モータを歯車によって直進的な動きに変換する
ものや、電磁コイルとバネを組み合わせたボイスコイル
等が代表的なところとしてあげられる。高速の連続回転
や位置決めなど、これらのアクチュエータはあらゆる機
械において広く用いられているが、光学、精密機械等の
分野を中心として次第に新しい変位素子へのニーズが急
増してきている。例えば、レーザやカメラ等の光学機器
の加工精度や、半導体製造装置における位置決め精度に
対する要求は、既に１ミクロン以下のレベルに達してお
り、その要求は今後も益々シビアなものとなっていく。Conventional actuators include motors that operate using electromagnetic force,
Typical examples include those that convert this electromagnetic motor into linear motion using gears, and voice coils that combine an electromagnetic coil and a spring. These actuators are widely used in all kinds of machines, such as for high-speed continuous rotation and positioning, but the need for new displacement elements is rapidly increasing, mainly in fields such as optics and precision machinery. For example, requirements for processing accuracy of optical equipment such as lasers and cameras, and positioning accuracy for semiconductor manufacturing equipment have already reached a level of 1 micron or less, and these requirements will continue to become more severe.
これまでのように電磁モータを利用した位置決めでは構
造、制御共に複雑になるばかりで、また、ボイスコイル
では発生力や応答速度の点でそれぞれ問題がある。この
ような状況のもと、最近電磁力を使わない新アクチュエ
ータとして電歪アクチュエータかにわかに庭先を浴びて
おり、エレクトロニクスセラミックス市場においても新
たなジャンルを拡大すべくその将来性に対して大きな期
待がかけられている。このような変位素子に要求される
一般的な条件としては、１．変位量が大きい（最大電圧
における変位量）、２．履歴（最大電圧の半分における
変位量差を最大変位で割った値と定義する）が小さい、
３、応答速度が速い、４．温度特性が良い、５゜低エネ
ルギで駆動できる、６１発生応力が大きい、７、サイズ
、重量が小さい、８．使用における劣化がない、等であ
る。固体変位素子材料は変位量が外部指令により制御可
能でなければならずその外部要因として温度、磁界、電
界等が考えられる。Positioning using electromagnetic motors as in the past has only complicated the structure and control, and voice coils have their own problems in terms of generated force and response speed. Under these circumstances, electrostrictive actuators have recently become popular as new actuators that do not use electromagnetic force, and there are great expectations for their future potential as they expand into a new genre in the electronics ceramics market. It is being The general conditions required for such a displacement element are: 1. 2. The amount of displacement is large (the amount of displacement at maximum voltage). The history (defined as the value obtained by dividing the displacement difference at half the maximum voltage by the maximum displacement) is small,
3. Fast response speed 4. Good temperature characteristics, 5. Can be driven with low energy, 61 Generated stress is large, 7. Small size and weight, 8. There is no deterioration during use, etc. The amount of displacement of the solid-state displacement element material must be controllable by external commands, and temperature, magnetic field, electric field, etc. can be considered as external factors.
そのなかで、温度変化を利用する変位素子は大きなエネ
ルギを要し、また応答が遅いという欠点を有する。磁界
を利用する磁歪材料は変位量が小さく稼働用コイルが必
要で装置の大型化につながる欠点を有する。これに対し
、電界を利用して変位を得る材料として圧電材料、電歪
材料がある。圧電材料とは例えばＰＺＴなどで最大変位
量は１０ｋｖ／ｃｍの電圧に対し０．０６％の伸びが認
められるが、変位の履歴が１５〜３０％と大きく、フィ
ードバック制御を行なわないと精密位置決めが困難であ
る。Among these, displacement elements that utilize temperature changes require a large amount of energy and have the drawbacks of slow response. Magnetostrictive materials that utilize a magnetic field have the disadvantage that the amount of displacement is small and an operating coil is required, leading to an increase in the size of the device. On the other hand, there are piezoelectric materials and electrostrictive materials as materials that obtain displacement using an electric field. Piezoelectric materials, such as PZT, have a maximum displacement of 0.06% for a voltage of 10kv/cm, but the displacement history is as large as 15-30%, and accurate positioning is difficult unless feedback control is performed. Have difficulty.
電歪材料とは例えばＰＭＮなどで、最大変位量は１０
ｋｖ／ｃｍの電圧に対し０．０６％、変位の履歴は５〜
１０％と満足されるが往々にして誘電率が大きいため駆
動電力の増加をもたらし省エネルギの側面からの改良が
望まれている。このように最大変位量が小さいという問
題点が近年の研究で少しづつ克服されつ−あるが未だ充
分なレベルに到達していないのが現状である。また、電
歪材料は圧電材料と比較して履歴が少ない、電界分極処
理の必要がない、苛酷な使用条件での劣化に対して強い
、などの利点がある。ＰＭＮ以外の電歪材料として、（
Ｐｂ、Ｂａ）（Ｚｒ、Ｔｉ）０３ （以下ＰＢＺＴと
略す）系セラミックスがある。この系については既にＨ
ＡＮＥＹ ＷＥＬＬ社のに、Ｍ、ＬＥｔｌＮＧらによっ
て調べられている。 （Ｆｅｒｒｏｅｌｅｃｔｒｉｃｓ
、 １９８０． ＶＯＬ。The electrostrictive material is, for example, PMN, and the maximum displacement is 10
0.06% for voltage of kv/cm, displacement history is 5~
Although a dielectric constant of 10% is satisfactory, the dielectric constant is often large, resulting in an increase in driving power, and improvements in terms of energy saving are desired. Although the problem of the small maximum displacement has been gradually overcome through recent research, the current situation is that it has not yet reached a sufficient level. Furthermore, electrostrictive materials have advantages over piezoelectric materials, such as having a shorter history, not requiring electric field polarization treatment, and being resistant to deterioration under harsh usage conditions. As an electrostrictive material other than PMN, (
There are Pb, Ba) (Zr, Ti) 03 (hereinafter abbreviated as PBZT) ceramics. Regarding this system, H
It has been investigated by M. LEtlNG et al. of ANEY WELL. (Ferroelectrics
, 1980. VOL.
２７、ｐｐ、４ｌ−４３）
Ｋ、Ｍ、ＬＩｌｉＵＮＧらは論文の中で、Ｐ ｂ ｏ、
ｔｓ Ｂ ａ ｏ、 ｚｔＢ ｉ ｏ、 ｏｔＺ ｒ
ｏ、 ｔｏＴ ｉ ｏ、 ５ｏｏｚの組成について研
究しているが、最大変位量は１０ ｋν八−の電圧に対
し０．０６％と小さい。27, pp, 4l-43) In their paper, K., M., LIliUNG et al.
ts B ao, ztB io, otZ r
Although the compositions of 0, toTio, and 5ooz are being studied, the maximum displacement is as small as 0.06% for a voltage of 10 kν8.
また、特開昭６０−１４４９８４においてＰＢＺＴ＋Ｐ
ｂ−Ｂａ−Ｂｉ−Ｗ系の特許が公開されているが、（Ｐ
ｂＸＢａ＋−ｘ ）（Ｚｒｙ Ｔｉｔ−ｙ’ ）Ｏｚ
なる組成式において、特許請求の範囲等に規定されたＸ
、ｙの範囲は０．７５≦Ｘ≦０．８３．０．５３≦ｙ≦
０．５５であり、組成上本発明とは明らかに区別される
。また履歴についての記載はされていないが非常に大き
いことが予想される。またＰＺＴに各種金属を添加する
特許は数多く出願されているが、ＰＺＴのｐｂをアルカ
リ金属、アルカリ土類金属で置換する置換量は３０％以
下であるため本発明とは明らかに異なる。本発明はまた
アルカリ土類金属をＢａに限定するものである。以上の
ように圧電／電歪材料で大変位でかつミクロンオーダー
の変位を精密に制御できるものは未だ現存しないのが実
際のところである。Also, in JP-A-60-144984, PBZT+P
Although patents for the b-Ba-Bi-W system have been published, (P
bXBa+-x)(Zry Tit-y')Oz
In the compositional formula, X defined in the claims etc.
, the range of y is 0.75≦X≦0.83.0.53≦y≦
0.55, and is clearly distinguished from the present invention in terms of composition. Also, although there is no description of the history, it is expected that it will be very large. Furthermore, although many patents have been filed for adding various metals to PZT, the amount of substitution of an alkali metal or alkaline earth metal for pb in PZT is 30% or less, which is clearly different from the present invention. The present invention also limits the alkaline earth metal to Ba. As described above, the reality is that there is still no piezoelectric/electrostrictive material that can produce large displacements and precisely control displacements on the micron order.
上述の欠点を改良するために、従来品に比べ変位量が大
きくかつ履歴が小さい材料の開発を鋭意検討の結果、組
成が（ＰｂｘＢａｔ−、〕 （Ｚｒ。In order to improve the above-mentioned drawbacks, as a result of intensive study to develop a material with a larger displacement and smaller history than conventional products, we found that the composition was (PbxBat-,] (Zr.
Ｔ ｉ ＋−ｙ ） ０ヨ （但し、ｘ、ｙの範囲が０
．５５≦Ｘ≦０．７０．０．４５≦ｙ≦０．８０であり
、２は各元素の酸化状態により定まる数値をとる。）で
表される磁器組成物に２価、４価、５価又は６価の金属
化合物を添加することにより、最大変位量が０．０６％
以上、歪みの履歴が１５％以下となることを見出し、本
発明を完成するに至った。T i +-y) 0yo (However, if the range of x and y is 0
．． 55≦X≦0.70.0.45≦y≦0.80, and 2 takes a value determined by the oxidation state of each element. ) By adding a divalent, tetravalent, pentavalent or hexavalent metal compound to the ceramic composition, the maximum displacement is 0.06%.
As described above, it has been found that the strain history is 15% or less, and the present invention has been completed.
本発明で開発した電歪材料は、歪み量及び履歴において
これまでの圧電材料とは明らかに異なるものである。こ
れまでの圧電材料に比べ伸び率は２倍に、履歴は約半分
に減少している。このように従来品とは比較にならない
ほど最大歪み量が大きく、履歴の小さい材料の応用分野
は非常に広いと思われる。（例えば、精密機械加工、イ
ンクドツトプリンタ、トンネル顕微鏡の位置移動機構等
）〔問題点を解決するための手段〕
本発明は、ＰＢＺＴ電歪磁器の基本組成において、組成
が（ＰｂＸＢａｔ−ｘ ）（Ｚｒｙ Ｔｌ＋−ｙ ）０
、（但し、ｘ、ｙの範囲が０．５５≦Ｘ≦０．７０．０
゜４５≦ｙ≦０．８０であり、２は各元素の酸化状態に
より定まる数値をとる。）で表される磁器組成物に金属
成分の配合比が０．１〜１０ ｍｏ１％となるよう２価
、４価、５価又は６価の金属化合物を添加することを特
徴とする電歪効果磁器組成物である。この電歪効果磁器
組成物は、最大変位量が０．０６％以上、変位の履歴が
１５％以下となることを特徴とするものである。The electrostrictive material developed in the present invention is clearly different from conventional piezoelectric materials in terms of strain amount and history. Compared to conventional piezoelectric materials, the elongation rate is twice as high, and the hysteresis is approximately half that of conventional piezoelectric materials. In this way, the application fields of materials with a small history and a maximum strain that is incomparably large compared to conventional products are thought to be very wide. (For example, precision machining, ink dot printers, position movement mechanisms of tunneling microscopes, etc.) [Means for solving the problem] The present invention provides that, in the basic composition of PBZT electrostrictive porcelain, the composition is (PbXBat-x) (Zry Tl+-y)0
, (However, the range of x and y is 0.55≦X≦0.70.0
°45≦y≦0.80, and 2 takes a value determined by the oxidation state of each element. ) An electrostrictive effect characterized by adding a divalent, tetravalent, pentavalent, or hexavalent metal compound to the ceramic composition represented by It is a porcelain composition. This electrostrictive ceramic composition is characterized by a maximum displacement of 0.06% or more and a displacement history of 15% or less.
本発明でいう２価、４価、５価、６価の金属化合物とは
２価ではＣｕ、Ｍｇ、Ｎｉ、Ｚｎなど、４価ではＣｅ、
Ｇｅ、 Ｈｆ、 Ｍｎ、 Ｎｂ、 Ｓｎ。In the present invention, the divalent, tetravalent, pentavalent, and hexavalent metal compounds include Cu, Mg, Ni, Zn, etc. for divalent metal compounds, Ce, and Ce for tetravalent metal compounds.
Ge, Hf, Mn, Nb, Sn.
Ｔｅ、Ｔｈなど、５価ではＢｌ、Ｃｒ、Ｍｎ、Ｎｂ、Ｓ
ｂ、Ｔａなど、６価ではＣｒ、Ｍｎ、Ｍｏ。Te, Th, etc., pentavalent Bl, Cr, Mn, Nb, S
b, Ta, etc., and hexavalent ones such as Cr, Mn, and Mo.
Ｗなどの化合物である。金属化合物は酸化物、窒化物、
フン化物など種類を問わない。添加量は０．１〜１０
ｓｏ１％が最適である。０．１１１ｏ１％以下であると
添加効果を示さない、 １０ ｍｏ１％以上であると伸
び、履歴に悪い影響を及ぼす。Ｘの範囲を０．５５〜０
．７０に限定した理由はｘ＜０．５５では本発明の特徴
とする大変位が得られない。またｘ＞０．７０であると
、本発明の特徴とする履歴が小さくならない。It is a compound such as W. Metal compounds include oxides, nitrides,
Regardless of the type, such as feces. The amount added is 0.1 to 10
so1% is optimal. If it is less than 0.111o1%, the addition effect will not be shown, and if it is more than 10mo1%, it will elongate and have a bad influence on the history. Set the range of X to 0.55 to 0
．． The reason why it is limited to 70 is that when x<0.55, the large displacement that is a feature of the present invention cannot be obtained. Further, if x>0.70, the history, which is a feature of the present invention, does not become small.
このため、０．５５≦Ｘ≦０．７０という範囲に限定し
た。Therefore, the range was limited to 0.55≦X≦0.70.
またｙの範囲を０．５０〜０．８０に限定した理由は、
ｙ＜０．５０であると、履歴が小さくならない。またｙ
＞０．８０であると大変位が得られない。このため０゜
５０≦ｙ≦０．８０という範囲に限定した。また本発明
でいう履歴とは５ ｋｖ／ｃｒａのときの変位量差を１
０ｋｖ八閣での変位置で割った値をいう。また本発明で
いう歪み量とは１０ｋｖ／ｃ＋＋＋の電界を印加したと
きの伸びをサンプルの厚さで割った値をいう。The reason for limiting the range of y to 0.50 to 0.80 is
If y<0.50, the history will not become smaller. Also y
>0.80, a large displacement cannot be obtained. For this reason, the range was limited to 0°50≦y≦0.80. In addition, the history referred to in the present invention is defined as the difference in displacement at 5 kv/cra.
It is the value divided by the displacement position at 0kv Hakaku. Further, the amount of strain in the present invention refers to the value obtained by dividing the elongation when an electric field of 10 kv/c+++ is applied by the thickness of the sample.
ＰｂＯ，ＢａＣ０，、Ｚｒ（Ｌ 、Ｔ ｉｏｇ及び金属
添加物の各原料を秤量配合しボールミルで１０時間混合
する。そして、得られた混合物を８００〜９００°Ｃで
２時間仮焼する。その後、再度ボールミルで微粉砕し乾
燥後２トン／ｃＩＩＩ！の圧力で円板状に成型する。こ
れを１２００〜１３５０″Ｃで３時間焼結する。焼結し
た円板を厚さ０．５ｍｍに切断し、その表面に銀電極を
焼き付ける。この様にして得られた試料について、両端
に電界を印加し１０ｋｖ／ｃ−での伸び及び変位の履歴
を測定した。変位量及び変位の履歴の測定はボテンシジ
メータにより行なった。The raw materials for PbO, BaC0, Zr(L), Tiog, and metal additives are weighed and mixed in a ball mill for 10 hours.The resulting mixture is then calcined at 800 to 900°C for 2 hours.After that, The powder is pulverized again using a ball mill, dried, and then molded into a disk shape under a pressure of 2 tons/cIII!. This is sintered at 1200 to 1350"C for 3 hours. The sintered disk is cut into 0.5 mm thick pieces. Then, a silver electrode was baked on the surface of the sample. An electric field was applied to both ends of the sample thus obtained, and the elongation and displacement history at 10 kv/c- were measured. The displacement amount and displacement history were measured by This was done using a potentiometer.
測定結果の一例を次表に示す。An example of the measurement results is shown in the table below.
金属添加物としてＮｂ酸化物を２１１０ ］ ／％添加
する。Nb oxide is added as a metal additive at a concentration of 2110]/%.
＊は本発明範囲外のものである。* indicates outside the scope of the present invention.
上述したように、本発明のＰＢＺＴ系の組成領域は、こ
れまでは伸び率が小さい領域であるとして、研究されて
いなかった０本発明者らはこの組成領域に注目し、伸び
率を大きくする目的で各種金属化合物を添加したところ
履歴を半減してなおかつ伸び率が従来品の２倍弱近くも
増大した組成物を発見した。本発明の最大の特長は、変
位量がこれまでの圧電材料に比べて非常に大きいことに
加えて、履歴が小さい事である。従来の圧電材料におい
て履歴は２０〜２５％程度あるとされていたが、これを
１５％以下に小さくしたばかりでなく、変位量を２倍近
くまで増大させたことは驚くべきことである６本発明は
前記のような組成の電歪効果磁器組成物であるから、変
位量が大きく、履歴が小さいという優れた効果を奏する
ものであり、それ故にアクチュエータ等の変位素子用材
料として最適な電歪組成物である。As mentioned above, the composition range of the PBZT system of the present invention has not been studied so far as it is a region where the elongation rate is small. When various metal compounds were added for this purpose, a composition was discovered that reduced the history by half and increased the elongation rate by nearly twice that of conventional products. The greatest feature of the present invention is that the amount of displacement is much larger than that of conventional piezoelectric materials, and the history is small. Conventional piezoelectric materials are said to have a history of about 20 to 25%, but it is surprising that we have not only reduced this to less than 15%, but also increased the amount of displacement to nearly double.6 Since the invention is an electrostrictive ceramic composition having the above-mentioned composition, it has excellent effects such as a large amount of displacement and a small history. Therefore, it is an electrostrictive ceramic composition that is optimal as a material for displacement elements such as actuators. It is a composition.
Claims (1)
＿１＿−＿ｙ〕Ｏ＿ｚ（但し、ｘ，ｙの範囲が０．５５
≦ｘ≦０．７０，０．４５≦ｙ≦０．８０であり、ｚは
各元素の酸化状態により定まる数値をとる。）で表され
る磁器組成物に金属成分の配合比が０．１〜１０ｍｏｌ
％となるよう２価、４価、５価又は６価の金属化合物を
添加することを特徴とする電歪効果磁器組成物。[Claims] The composition is [Pb_xBa_1_-_x] [Zr_yTi
_1_-_y]O_z (However, if the range of x, y is 0.55
≦x≦0.70, 0.45≦y≦0.80, and z takes a value determined by the oxidation state of each element. ) The blending ratio of the metal component to the porcelain composition is 0.1 to 10 mol.
% of a divalent, tetravalent, pentavalent or hexavalent metal compound.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023769A JP2579334B2 (en) | 1988-02-05 | 1988-02-05 | Electrostrictive material |
| DE8989300937T DE68902930T2 (en) | 1988-02-05 | 1989-01-31 | ELECTROSTRICTIVE ELEMENT AND CERAMIC MATERIAL THEREOF. |
| EP89300937A EP0328290B1 (en) | 1988-02-05 | 1989-01-31 | Electrostriction element and ceramic material therefor |
| KR1019890001282A KR920009913B1 (en) | 1988-02-05 | 1989-02-03 | Materials of piezo electric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023769A JP2579334B2 (en) | 1988-02-05 | 1988-02-05 | Electrostrictive material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01200681A true JPH01200681A (en) | 1989-08-11 |
| JP2579334B2 JP2579334B2 (en) | 1997-02-05 |
Family
ID=12119552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63023769A Expired - Lifetime JP2579334B2 (en) | 1988-02-05 | 1988-02-05 | Electrostrictive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2579334B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0779030A (en) * | 1993-07-27 | 1995-03-20 | Man Roland Druckmas Ag | Preparation of pzt layer |
| JP2007259700A (en) * | 2006-07-26 | 2007-10-04 | Ngk Insulators Ltd | Piezoelectric/electrostrictive element, piezoelectric/electrostrictive ceramic composite, and piezoelectric motor |
| CN110981498A (en) * | 2019-12-22 | 2020-04-10 | 贵州振华红云电子有限公司 | Method for improving quality of piezoelectric ceramic buzzer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5379299A (en) * | 1976-12-24 | 1978-07-13 | Nippon Telegr & Teleph Corp <Ntt> | Porcelain composition of high inductivity |
-
1988
- 1988-02-05 JP JP63023769A patent/JP2579334B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5379299A (en) * | 1976-12-24 | 1978-07-13 | Nippon Telegr & Teleph Corp <Ntt> | Porcelain composition of high inductivity |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0779030A (en) * | 1993-07-27 | 1995-03-20 | Man Roland Druckmas Ag | Preparation of pzt layer |
| JP2007259700A (en) * | 2006-07-26 | 2007-10-04 | Ngk Insulators Ltd | Piezoelectric/electrostrictive element, piezoelectric/electrostrictive ceramic composite, and piezoelectric motor |
| CN110981498A (en) * | 2019-12-22 | 2020-04-10 | 贵州振华红云电子有限公司 | Method for improving quality of piezoelectric ceramic buzzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2579334B2 (en) | 1997-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4929522B2 (en) | Piezoelectric ceramic composition | |
| JP3296640B2 (en) | Piezoelectric ceramics | |
| JPH04130682A (en) | Piezoelectric ceramic composition for actuator | |
| KR930002641B1 (en) | Ferroelectric ceramics | |
| JPH01200681A (en) | Electrostrictive effect porcelain composition | |
| KR100197150B1 (en) | Piezoelectric ceramic composition for actuator | |
| JP3214055B2 (en) | Piezoelectric ceramic composition for actuator | |
| JP2543569B2 (en) | Electrostrictive element for fine positioning | |
| JP2543570B2 (en) | Electrostrictive element for fine positioning | |
| EP0328290B1 (en) | Electrostriction element and ceramic material therefor | |
| JP2543571B2 (en) | Electrostrictive element for fine positioning | |
| JP2543568B2 (en) | Electrostrictive element for fine positioning | |
| JP2543572B2 (en) | Electrostrictive element for fine positioning | |
| US5171484A (en) | Piezoelectric ceramic composition for actuator | |
| JP3670473B2 (en) | Piezoelectric ceramic composition | |
| JPH0558729A (en) | Piezoelectric ceramic composition | |
| JPH107460A (en) | Piezoelectric porcelain composition | |
| JP2839253B2 (en) | Piezoelectric ceramic composition for actuator | |
| JPH03147381A (en) | Large displacement electrostrictive element | |
| JPH08217541A (en) | Piezoelectric ceramic composition | |
| JP3259321B2 (en) | Piezoelectric ceramic composition for actuator | |
| JPH0624841A (en) | Piezo-electric ceramic composition for actuator | |
| JPH09241072A (en) | Electric field induction strain material | |
| JP3161175B2 (en) | Piezoelectric ceramic composition | |
| KR100250207B1 (en) | Piezoelectric ceramic composition for bimorph actuator |