JPH01200317A - Optical switch - Google Patents
Optical switchInfo
- Publication number
- JPH01200317A JPH01200317A JP2404488A JP2404488A JPH01200317A JP H01200317 A JPH01200317 A JP H01200317A JP 2404488 A JP2404488 A JP 2404488A JP 2404488 A JP2404488 A JP 2404488A JP H01200317 A JPH01200317 A JP H01200317A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical waveguide
- diaphragm
- light
- propagating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 144
- 230000001902 propagating effect Effects 0.000 claims description 38
- 230000000903 blocking effect Effects 0.000 claims description 5
- 230000000644 propagated effect Effects 0.000 abstract description 10
- 238000006073 displacement reaction Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 240000008168 Ficus benjamina Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、伝搬する光の光路の切り替え、または遮断の
ために用いられる光スイッチに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an optical switch used for switching or blocking the optical path of propagating light.
（従来の技術）
従来より、伝搬する光の光路を切り替えたり、または遮
断したりするために種々の構造の光スイッチが提案され
、開発・実用化されている。これら光スイッチは、機械
的にプリズム・ミラーや光導波路等の部品を移動させて
光路を切り替えたり、または遮断したりする構造のもの
が多い。(Prior Art) Optical switches with various structures have been proposed, developed, and put into practical use for switching or blocking the optical path of propagating light. Many of these optical switches have a structure in which optical paths are switched or interrupted by mechanically moving components such as prisms, mirrors, and optical waveguides.
これら機械的な光スイッチの中で、ｒＫ、 Ｅ、 Ｐｃ
ｔｃｒｓｃｎ、Ｄｙｎａａ＋Ｉｃ Ｍｌｃｒｏｓｃｃｈ
ａｎｌｃｓ ｏｎ ５ｉｌｉｃｏｎ ：ＴｃｅｈｎＩｑ
ｕｅｓ ａｎｄ Ｄｅｖ１ｅｃｓ″、 ＩＥＥＥ Ｔｒ
ａｎｓａｃｔＩｏｎｓｏｎ ｅｌｅｃｔｒｏｎ ｄｅｖ
ｉｃｅｓ、 Ｖｏｌ、 ＥＤ−２５，Ｎｏ、１０． Ｏ
ｃＬ。Among these mechanical optical switches, rK, E, Pc
tcrscn, Dynaa+Ic Mlcroscch
anlcs on 5ilicon: TcehnIq
ues and Dev1ecs'', IEEE Tr
ansactIonson electron dev
ices, Vol, ED-25, No, 10. O
cL.
ｂａｒ、 １９７８ Ｊに開示されているような、振動
板をで静電力で変位させることによって光路を切り替え
る光スイッチが知られており、第２図は上記文献に開示
されている従来の光スイッチを示すものであり、第２図
（ａ）は従来の光スイッチを示す斜視図、第２図（ｂ）
は第２図（ａ）の動作原理を説明するための図である。An optical switch that switches the optical path by displacing a diaphragm using electrostatic force is known, as disclosed in J. Bar, 1978 J. Fig. 2 shows the conventional optical switch disclosed in the above document. FIG. 2(a) is a perspective view showing a conventional optical switch, and FIG. 2(b) is a perspective view showing a conventional optical switch.
2(a) is a diagram for explaining the operating principle of FIG. 2(a).
第２図（ａ）において、１はＳ ｉ Ｏ２表面に５０Ｏ
ＡでＣｒ−Ａｕを蒸着した振動板で、入射してきた光を
その表面１ａで反射するようになっている。２は導電部
材、例えばＰ 層からなる平板、３はＰ−Ｓｔ層、４は
Ｐ−８ｉ基板、５は電気スイッチ、６は振動板１と平板
２の間に電圧を印加するための電源である。第２図（ｂ
）によれば、振動板１と平板２の間に電圧を印加すると
両者間で静電力が働き、振動板１は第２図（ｂ）中実線
で示すように変位する。振ｉ板１は表面１ａで入射して
きた光を反射するようになっているので、振動板１が変
位することによって、第２図（ｂ）に示すように入射お
よび出射する光の条件が変化し、伝搬光の光路を切り替
えることができる。In Fig. 2(a), 1 is 50O on the S i O2 surface.
This is a diaphragm on which Cr--Au is vapor-deposited in A, and the incident light is reflected on its surface 1a. 2 is a conductive member, for example, a flat plate made of a P layer, 3 is a P-St layer, 4 is a P-8i substrate, 5 is an electric switch, and 6 is a power source for applying voltage between the diaphragm 1 and the flat plate 2. be. Figure 2 (b
), when a voltage is applied between the diaphragm 1 and the flat plate 2, an electrostatic force acts between them, and the diaphragm 1 is displaced as shown by the solid line in FIG. 2(b). Since the diaphragm 1 is designed to reflect the incident light on the surface 1a, by displacing the diaphragm 1, the conditions of the incident and emitted light change as shown in Fig. 2(b). However, the optical path of propagating light can be switched.
第３図は、第２図（ａ）に示した従来の光スイッチで光
導波路を伝搬する光の光路を切り替える場合を説明する
ための図である。第３図において、１は振動板、２はＰ
＋層からなる平板、３はｐ−３ｉ層、４はＰ−８ｉ基板
、７−１〜７−３は光導波路、８−１〜８−３はレンズ
であり、実線が印加電圧をオンにしたときの振動板１の
状態（変位）を示し、二点鎖線が印加電圧をオフにした
ときの振動板１の状態を示している。第３図によれば、
光導波路７−１を伝搬する光を光導波路７−２に導波す
るには、振動板１と平板２間への印加電圧をオフにし、
振動板１を二点鎖線で示す状態とし、光導波路７−１か
ら出射された光を振動板１の表面１ａで反射させて光導
波路７−２に導波させる。一方、伝搬光の光路を切り替
えるときには、振動板１と平板２間への印加電圧をオン
にして振動板１を実線で示すように変位させて光導波路
７−３に光を導波させていた。FIG. 3 is a diagram for explaining a case where the conventional optical switch shown in FIG. 2(a) switches the optical path of light propagating through an optical waveguide. In Figure 3, 1 is a diaphragm, 2 is a P
3 is a p-3i layer, 4 is a p-8i substrate, 7-1 to 7-3 are optical waveguides, 8-1 to 8-3 are lenses, and the solid line indicates when the applied voltage is turned on. The state (displacement) of the diaphragm 1 when the applied voltage is turned off is shown by the two-dot chain line. According to Figure 3,
In order to guide the light propagating through the optical waveguide 7-1 to the optical waveguide 7-2, the voltage applied between the diaphragm 1 and the flat plate 2 is turned off.
The diaphragm 1 is in the state shown by the two-dot chain line, and the light emitted from the optical waveguide 7-1 is reflected by the surface 1a of the diaphragm 1 and guided to the optical waveguide 7-2. On the other hand, when switching the optical path of the propagating light, the voltage applied between the diaphragm 1 and the flat plate 2 is turned on, the diaphragm 1 is displaced as shown by the solid line, and the light is guided to the optical waveguide 7-3. .
また、このような光スイッチは、第１に第３図に示すよ
うにセットされた光ファイバのような個別な光導波路を
伝搬してきた光の光路の切り替えを行う場合と、第２に
、半導体等の同一の基板上に予め第３図に示すような配
置で作製された光導波路を伝搬する光の光路を切り替え
る場合等に適用されている。In addition, such an optical switch is used to switch the optical path of light propagating through an individual optical waveguide such as an optical fiber set as shown in Fig. 3. This method is applied to cases where the optical path of light propagating through optical waveguides prepared in advance in the arrangement shown in FIG. 3 on the same substrate is switched.
（発明が解決しようとする課題）
しかしながら、通常、光導波路で光が伝搬するコアの部
分は最大でも５０μｍ程度である。従って上記第１の適
用方法の場合、光軸と光導波路の軸ずれや角度ずれが光
導波路７−２や光導波路７−３に入射する光の効率に大
きく影響し、この軸ずれや角度ずれの影響を緩和ｌ。１
、効率よく光導波路７−２や光導波路７−３に光を入射
させるためには、第３図に示すように！ノノズ８−１〜
８−３を振動板１と光導波路７−１〜７−３間に挿入す
る必要があり、さらには、これら光導波路７−１〜７−
３、レンズ８−１〜８−３、振動板１を微動台等を用い
て高精度に位置合わせすることも必要となるため、切り
替え部の構造が複雑化するとともに大型化してしまうと
いう問題点があった。(Problem to be Solved by the Invention) However, normally, the core portion of the optical waveguide through which light propagates is about 50 μm at maximum. Therefore, in the case of the first application method, the axial misalignment and angular misalignment between the optical axis and the optical waveguide greatly affect the efficiency of light incident on the optical waveguide 7-2 and the optical waveguide 7-3. Mitigating the effects of l. 1
In order to efficiently input light into the optical waveguide 7-2 and the optical waveguide 7-3, as shown in FIG. 3! Nonozu 8-1~
8-3 must be inserted between the diaphragm 1 and the optical waveguides 7-1 to 7-3.
3. It is also necessary to align the lenses 8-1 to 8-3 and the diaphragm 1 with high precision using a fine movement table, etc., which makes the structure of the switching part complicated and large. was there.
また、振動板１の変位量は小さいため、光導波路７−２
．７−３を振動板１に近ずけて配置すると、例えば、振
動板１を変位させて、光導波路７−３に光が導波するよ
うにしても、光導波路７−２には光導波路７−３から光
が漏れ込んでしまい、このため、消光比は大きく取れな
いという問題点があり、これを解決するために消光比を
大きく取ろうとすると、振動板と光導波路の距離を大き
く取る必要があり、これもまた切り替え部の大型化につ
ながるという問題点があった。Furthermore, since the amount of displacement of the diaphragm 1 is small, the optical waveguide 7-2
．． If 7-3 is placed close to the diaphragm 1, for example, even if the diaphragm 1 is displaced so that light is guided to the optical waveguide 7-3, there is no optical waveguide in the optical waveguide 7-2. There is a problem in that light leaks from 7-3, and as a result, it is not possible to obtain a large extinction ratio.To solve this problem, in order to obtain a large extinction ratio, the distance between the diaphragm and the optical waveguide must be increased. This also led to the problem of increasing the size of the switching section.
また、上記Ｔｓ２の適用方法の場合は、同一の基板上に
第２図（ａ）に示す光スイッチを振動板１が変位するよ
うに固定し、しかも光導波路と振動板１の位置合わせは
高精度に行なうことができる構造にする必要があり、こ
のため、構造を複雑化し、さらに光導波路等の作製時の
工程が増加するという問題点があった。In addition, in the case of the application method of Ts2 above, the optical switch shown in FIG. It is necessary to have a structure that can be precisely formed, which poses the problem of complicating the structure and increasing the number of steps for manufacturing optical waveguides and the like.
本発明の目的は上記問題点に鑑み、レンズ及び高精度な
位置合わせが必要なくなり、光路の切り替え部の構造の
簡素化、小型化を図れ、しかも光路の切り替え、遮断を
容易に行なえる光スイッチを提供することにある。In view of the above-mentioned problems, an object of the present invention is to provide an optical switch that eliminates the need for lenses and highly accurate positioning, simplifies and downsizes the structure of the optical path switching section, and allows easy switching and blocking of optical paths. Our goal is to provide the following.
（課題を解決するための手段）
本発明は、上記目的を達成するため、印加電圧のオン、
オフにより変位する振動部材を備えた光スイッチにおい
て、前記振動部材の先端に該振動部材が変位することに
より伝搬光の光路途中に出入りし伝搬光を反射または遮
断するエレメントを設けた。また、複数本の光導波路の
交差部に間隙を設け、変位することにより前記間隙に出
入し光導波路の伝搬光を反射または遮断し、かつ、一の
光導波路の伝搬光を他の光導波路に導波するように前記
エレメントを配設することは、光路の切り替えに効果的
である。(Means for Solving the Problems) In order to achieve the above object, the present invention provides
In an optical switch equipped with a vibrating member that is displaced when turned off, an element is provided at the tip of the vibrating member to move in and out of the optical path of propagating light when the vibrating member is displaced, and to reflect or block the propagating light. In addition, a gap is provided at the intersection of multiple optical waveguides, and by moving in and out of the gap, the propagating light of the optical waveguide is reflected or blocked, and the propagating light of one optical waveguide is transferred to the other optical waveguide. Arranging the elements so as to guide waves is effective in switching the optical path.
（作 用）
本発明によれば、振動部材への印加電圧をオン、オフす
ることにより振動部材は変位し、これに伴ない振動部材
の先端に設けたエレメントも変位し、エレメントは変位
することにより伝搬光の光路途中に出入りし伝搬光を反
射または遮断する。(Function) According to the present invention, the vibrating member is displaced by turning on and off the applied voltage to the vibrating member, and the element provided at the tip of the vibrating member is also displaced accordingly. The light enters and exits the optical path of the propagating light and reflects or blocks the propagating light.
また、エレメントを複数本の光導波路の交差部に設けら
れた間隙中に変位時に入り込むように配設することによ
り、光導波路の伝搬光を反射または遮断できるとともに
、一の光導波路の伝搬光を他の光導波路に導波すること
ができる。In addition, by arranging the element so that it enters the gap provided at the intersection of multiple optical waveguides when displaced, it is possible to reflect or block the propagating light of the optical waveguides, and also to block the propagating light of one optical waveguide. It can be guided to other optical waveguides.
（実施例）
第１図は、本発明による光スイッチの一実施例を示す斜
視図である。第１図において、１０は導電性材料、例え
ばＣｒ−ＡｕをＳ ｉＯ２表面に厚さ５００Ａ蒸むした
振動板、１１は振動板１０の先端に振動板１０の変位方
向に突出する如く設けられ、伝搬光を反射または遮断す
るエレメント、１２は振動板１１とは異なる導電性材料
、例えばＰ＋層を振動板１１面に対向する如く平行にか
つ隣接して配置された平板、１３は半導体または絶縁体
、例えばＰ−Ｓｉ層よりなる絶縁層、１４はＰ−８ｔ基
板、１５は電気スイッチ、１６は振動板１１と平板１２
間に電圧を印加するための電源、１７は振動板１０の後
一端側を絶縁層１２上に固定するための振動板固定部で
ある。(Embodiment) FIG. 1 is a perspective view showing an embodiment of an optical switch according to the present invention. In FIG. 1, 10 is a diaphragm made of a conductive material such as Cr-Au steamed to a thickness of 500A on the SiO2 surface, 11 is provided at the tip of the diaphragm 10 so as to protrude in the direction of displacement of the diaphragm 10, An element that reflects or blocks propagating light; 12 is a flat plate made of a conductive material different from that of the diaphragm 11, such as a P+ layer arranged parallel to and adjacent to the surface of the diaphragm 11; 13 is a semiconductor or an insulator; , for example, an insulating layer made of a P-Si layer, 14 a P-8t substrate, 15 an electric switch, 16 a diaphragm 11 and a flat plate 12.
17 is a diaphragm fixing part for fixing one rear end of the diaphragm 10 onto the insulating layer 12.
このような構成を有する光スイッチの動作原理を第４図
（ａ） 、 （ｂ）に基づいて説明すると、第４図（ａ
）に示すように、振動板１０及びエレメント１１が定常
状態のとき、即ち振動板１０と平板１２の間への印加電
圧がオフのときは、例えば空気中を伝搬してきた光（図
中、実線で示す）はエレメント１１により、図中破線で
示すように反射または遮断される。The operating principle of an optical switch having such a configuration will be explained based on FIGS. 4(a) and (b).
), when the diaphragm 10 and the element 11 are in a steady state, that is, when the voltage applied between the diaphragm 10 and the flat plate 12 is off, for example, light propagating in the air (in the figure, the solid line ) is reflected or blocked by the element 11 as shown by the broken line in the figure.
一方、光路を切り替えるときには、振動板１０と平板１
２間への印加電圧をオンにし、両者間に働く静電力によ
って振動板１０及びエレメント１１を第４図（ｂ）の状
態に変位させる。これにより、第４図（Ｌ＋）に示すよ
うに、空気中を伝搬してきた光はエレメント１１に当た
ることなくそのまま直進する。このように第１図に示す
光スイッチは、エレメント１１を振動板１０と平板１２
間へ印加する電圧をオン、オフして変位させることによ
り、伝搬する光の光路を切り替えられるようになってい
る。On the other hand, when switching the optical path, the diaphragm 10 and the flat plate 1
2, and the diaphragm 10 and element 11 are displaced to the state shown in FIG. 4(b) by the electrostatic force acting between them. As a result, as shown in FIG. 4 (L+), the light that has propagated through the air travels straight without hitting the element 11. In this way, the optical switch shown in FIG.
The optical path of the propagating light can be switched by turning on and off the voltage applied between the two.
第５図は、本発明による光スイッチを光導波路を伝搬す
る光の切り替えに適用した第１の例を示す図である。第
５図において、２０−１．２０−２は光導波路で、第１
図で示した振動板１０の先端に設けられてエレメント１
１が、光導波路２０−１と光導波路２０−２の間に設け
られて°間隙２１中を変位することにより出入できるよ
うに配設しである。即ち、光スイッチの振動板１０と平
板１２間に印加する電圧をオン、オフすることによりエ
レメント１１が光導波路２０−１と光導波路２０−２の
間に設けられた間隙２１中で変位し、例えば光導波路２
０−１から光導波路２０−２への光路を開閉するように
なっている。第５図によれば、エレメント１１が間隙２
１中にある場合には、例えば光導波路２０−１を伝搬し
てきた光はエレメント１１により反射または遮断される
。逆に、エレメント１１が間隙２１中にない場合には、
光導波路２０−１を伝搬してきた光は光導波路２０−２
に導波される。このように、印加電圧をオン、オフし、
エレメント１１を変位させることで、入射側である光導
波路２０−２を伝搬する光を制御することができる。FIG. 5 is a diagram showing a first example in which the optical switch according to the present invention is applied to switching light propagating through an optical waveguide. In Fig. 5, 20-1 and 20-2 are optical waveguides, and the first
Element 1 is provided at the tip of the diaphragm 10 shown in the figure.
1 is provided between the optical waveguide 20-1 and the optical waveguide 20-2, and is arranged so that it can be moved in and out by being displaced in the gap 21. That is, by turning on and off the voltage applied between the diaphragm 10 and the flat plate 12 of the optical switch, the element 11 is displaced in the gap 21 provided between the optical waveguide 20-1 and the optical waveguide 20-2, For example, optical waveguide 2
The optical path from the optical waveguide 20-1 to the optical waveguide 20-2 is opened and closed. According to FIG.
1, the light propagating through the optical waveguide 20-1 is reflected or blocked by the element 11, for example. Conversely, if the element 11 is not in the gap 21,
The light propagated through the optical waveguide 20-1 is transferred to the optical waveguide 20-2.
The wave is guided by the In this way, the applied voltage is turned on and off,
By displacing the element 11, it is possible to control the light propagating through the optical waveguide 20-2 on the incident side.
また、第６図は、本発明による光スイッチを光導波路を
伝搬する光の切り替えに適用した第２の例を示す図であ
る。第６図において、３０は光導波路基板、３１−１〜
３１−４は光導波路基板３０上に交差するように作製さ
れた光導波路で、第１図で示した振動板１０の先端に設
けられたエレメント１１が、光導波路３１−１〜３１−
４の交差部に設けられた間隙３２中を変位することによ
り出入りできるように配設しである。即ち、印加電圧を
オン、オフすることにより、エレメント１１が光導波路
３１−１．３１−４と光導波路３１−２．３１−３との
交差部に設けられた間隙３２中で変位し、光路を開閉す
るようになっている。第６図によれば、エレメント１１
が間隙中にない場合には、例えば、光導波路３１−１を
伝搬してきた光（図中、細い実線の矢印で示す）は光導
波路３１−４に、光導波路３１−３を伝搬してきた光（
図中、細い破線の矢印で示す）は光導波路３１−２に導
波される。逆に、エレメント１１が間隙３２中にある場
合には、光導波路３１−１及び光導波路３１−３を伝搬
してきた光はエレメント１１によって反射または遮断さ
れる。ここで、エレメント１１の両面が入射してきた光
を反射する構造であれば、光導波路３１−１を伝搬して
きた光（図中、太い実線の矢印で示す）は光導波路３１
−２に、光導波路３１−３を伝搬してきた光（図中、太
い破線の矢印で示す）は光導波路３１−４に導波される
。したがって、本例では印加電圧をオン、オフしエレメ
ント１１を変位させることにより光導波路を伝搬する光
の光路の切り替え、遮断が可能となっている。Further, FIG. 6 is a diagram showing a second example in which the optical switch according to the present invention is applied to switching light propagating through an optical waveguide. In FIG. 6, 30 is an optical waveguide substrate, 31-1 to
Reference numeral 31-4 denotes an optical waveguide fabricated to intersect with the optical waveguide substrate 30, and the element 11 provided at the tip of the diaphragm 10 shown in FIG.
It is arranged so that it can be moved in and out by displacement in a gap 32 provided at the intersection of the two. That is, by turning the applied voltage on and off, the element 11 is displaced in the gap 32 provided at the intersection of the optical waveguides 31-1, 31-4 and 31-2, 31-3, and the optical path is changed. It is designed to open and close. According to FIG. 6, element 11
For example, if the light propagating through the optical waveguide 31-1 (indicated by a thin solid arrow in the figure) is not in the gap, the light propagating through the optical waveguide 31-3 is transferred to the optical waveguide 31-4. (
(indicated by a thin broken line arrow in the figure) is guided to the optical waveguide 31-2. Conversely, when the element 11 is located in the gap 32, the light propagating through the optical waveguides 31-1 and 31-3 is reflected or blocked by the element 11. Here, if both surfaces of the element 11 have a structure that reflects the incident light, the light propagating through the optical waveguide 31-1 (indicated by the thick solid arrow in the figure) will pass through the optical waveguide 31-1.
-2, the light that has propagated through the optical waveguide 31-3 (indicated by a thick broken line arrow in the figure) is guided to the optical waveguide 31-4. Therefore, in this example, by turning on and off the applied voltage and displacing the element 11, it is possible to switch or block the optical path of light propagating through the optical waveguide.
本実施例によれば、振動板１０の先端に振動板１０の変
位方向に突出したエレメント１１を設け、振動板１０と
平板１２間に印加する電圧をオン。According to this embodiment, an element 11 that protrudes in the direction of displacement of the diaphragm 10 is provided at the tip of the diaphragm 10, and a voltage applied between the diaphragm 10 and the flat plate 12 is turned on.
オフすることによりエレメント１１を変位させ、空気ま
たは光導波路を伝搬する光を反射または遮断できるよう
にしたので、光路、例えば光導波路の途中に設けた間隙
中をエレメント１１が出入りできるように配設するだけ
で、レンズ及び高精度な位置合わせを必要とすることな
く光路の切り替え、遮断が容易にでき、光路の切り替え
部の構造の簡素化、小型化を実現できる。By turning off the element 11, the element 11 is displaced and can reflect or block light propagating through the air or the optical waveguide. Therefore, the element 11 is arranged so that it can enter and exit the optical path, for example, through a gap provided in the middle of the optical waveguide. By simply doing so, the optical path can be easily switched and blocked without requiring lenses or highly accurate positioning, and the structure of the optical path switching section can be simplified and miniaturized.
尚、本実施例では振動板１０としてＳ ｉｏ ２表面に
Ｃｒ−Ａｕを蒸むしたものとし、平板１２をＰ 層とし
て説明したが、゛これに限定されるものではなく、両者
間に静電力が働く材料であれば良い。同様に、半導体ま
たは絶縁体からなる絶縁層１３をＰ−８ｉ層として説明
したが、これに限定されるものではなく振動板１０、平
板１２に電流が流れないものであれば良く、同様に基板
１４もＰ−８ｉ層に限定されるものでない。さらに、文
献”Ｄｙｎａｓｉｃ Ｍｌｃｒｏｍｅｃｈａｎｉｃｓ
ｏｎ ５ｉｌｉｃｏｎ ：Ｔｅｃｈｎｉｑｕｃｓ ａｎ
ｄ Ｄｅｖｉｃｅｓ”に示されているように振動板を蒸
着・エツチング技術を用いて作製すれば、１７の振動板
固定部は必要がなくなる。In this embodiment, the diaphragm 10 is made by steaming Cr-Au on the surface of the Sio2, and the flat plate 12 is described as a P layer. However, the present invention is not limited to this. Any material that works is fine. Similarly, although the insulating layer 13 made of a semiconductor or an insulator has been described as a P-8i layer, it is not limited to this and may be any layer as long as no current flows through the diaphragm 10 or the flat plate 12. 14 is also not limited to the P-8i layer. Furthermore, the document “Dynamic Mlcromechanics
on 5ilicon: Techniques an
If the diaphragm is manufactured using a vapor deposition/etching technique as shown in ``D Devices'', the diaphragm fixing part 17 is no longer necessary.
また、振動板１０の先端に設けられたエレメント１１は
、振動板１０の先端を屈曲させ、この屈曲部に蒸着等の
処理を施したものでも、蒸着等の処理が施されたものを
先端に取り付けたものでもどちらでも良い。In addition, the element 11 provided at the tip of the diaphragm 10 may be made by bending the tip of the diaphragm 10 and applying a process such as vapor deposition to the bent part, or by applying a process such as vapor deposition to the tip. It doesn't matter which one you have installed.
（発明の効果）
以上説明したように、本発明によれば、印加電圧のオン
、オフにより変位する振動部材を備えた光スイッチにお
いて、前記振動部材の先端に振動部材が変位方向に突出
し、変位することにより伝搬光の光路途中に出入し伝搬
光を反射または遮断するエレメントを設けたので、エレ
メントが伝搬光の光路途中に出入りするだけで光路の切
り替えまたは遮断が容易にでき、しかもレンズおよび高
精度な位置合わせが必要なく、切り替え部の構造が簡単
で小型できるという利点がある。さらに、本発明の光ス
イッチは電流駆動タイプでないため、発熱による構成部
品の劣化がなく、低電力で駆動できる利点も有している
。(Effects of the Invention) As described above, according to the present invention, in an optical switch provided with a vibrating member that is displaced by turning on and off an applied voltage, the vibrating member protrudes from the tip of the vibrating member in the displacement direction, and By doing so, we provided an element that goes in and out of the optical path of the propagating light and reflects or blocks the propagating light.The element can easily switch or block the optical path by simply moving the element in and out of the optical path of the propagating light. This has the advantage that precise positioning is not required and the structure of the switching section is simple and compact. Furthermore, since the optical switch of the present invention is not a current drive type, it has the advantage that there is no deterioration of components due to heat generation and that it can be driven with low power.
また、複数本の光導波路の交差部に間隙を設け、変位す
ることにより前記間隙に出入りし、光導波路の伝搬光を
反射または遮断し、かつ、一の光導波路の伝搬光を他の
光導波路に導波するように前記エレメントを配設するこ
とにより、一の光導波路を伝搬した光と他の光導波路に
導波し伝搬させることが容易に行なえる利点がある。In addition, a gap is provided at the intersection of a plurality of optical waveguides, and the optical waveguides move in and out of the gap, reflecting or blocking the propagating light of the optical waveguide, and transferring the propagating light of one optical waveguide to the other optical waveguide. By arranging the elements so as to guide the light into the optical waveguide, there is an advantage that the light propagated through one optical waveguide can be easily guided and propagated through the other optical waveguide.
【図面の簡単な説明】
第１図は本発明による光スイッチの一実施例を示す斜視
図、第２図（ａ）は従来の光スイッチを示す斜視図、第
２図（ｂ）は第２図（ａ）の動作原理を説明するための
図、第３図は従来の光スイッチを光導波路の光路の切り
替えに適用した場合の説明図、第４図は第１図の動作原
理を説明するための図、第５図は本発明による光スイッ
チを光導波路の光路の切り替えに適用した第１の例を示
す図、第６図は本発明による光スイッチを光導波路の光
路の切り替えに適用した第２の例を示す図である。
図中、１０・・・振動板、１１・・・エレメント、１２
・・・平板、１３・・・絶縁層、１４・・・基板、１５
・・・電気スイッチ、１６・・・電源、１７・・・振動
板固定部、２０−１〜２０−２．３１−１〜３１−４・
・・光導波路、３０・・・光導波路基板。
特 許 出 願 人 日本電信電話株式会社代理人
弁理士 吉 １）精 孝
第２図
エレメント
（ａ）
（ｂ）
第１図の動作原理Σ説明するための図
第４図[Brief Description of the Drawings] Fig. 1 is a perspective view showing an embodiment of the optical switch according to the present invention, Fig. 2(a) is a perspective view showing a conventional optical switch, and Fig. 2(b) is a perspective view showing an embodiment of the optical switch according to the present invention. A diagram for explaining the operating principle in Figure (a), Figure 3 is an explanatory diagram when a conventional optical switch is applied to switching the optical path of an optical waveguide, and Figure 4 explains the operating principle in Figure 1. FIG. 5 is a diagram showing a first example in which the optical switch according to the present invention is applied to switching the optical path of an optical waveguide, and FIG. 6 is a diagram showing the first example in which the optical switch according to the present invention is applied to switching the optical path in an optical waveguide. It is a figure which shows the 2nd example. In the figure, 10... diaphragm, 11... element, 12
... Flat plate, 13 ... Insulating layer, 14 ... Substrate, 15
... Electric switch, 16... Power supply, 17... Vibration plate fixing part, 20-1 to 20-2. 31-1 to 31-4.
... Optical waveguide, 30... Optical waveguide substrate. Patent applicant: Agent for Nippon Telegraph and Telephone Corporation
Patent Attorney Yoshi 1) Takashi Sei Diagram 2 Elements (a) (b) Diagram 4 for explaining the operating principle Σ of Figure 1
Claims (2)
備えた光スイッチにおいて、 前記振動部材の先端に該振動部材が変位することにより
伝搬光の光路途中に出入りし伝搬光を反射または遮断す
るエレメントを設けた ことを特徴とする光スイッチ。(1) In an optical switch equipped with a vibrating member that is displaced by turning on and off an applied voltage, the vibrating member is displaced at the tip of the vibrating member to move in and out of the optical path of the propagating light, reflecting or blocking the propagating light. An optical switch characterized by having an element.
ることにより前記間隙に出入りし光導波路の伝搬光を反
射または遮断し、かつ、一の光導波路の伝搬光を他の光
導波路に導波するように前記エレメントを配設した請求
項１記載の光スイッチ。(2) A gap is provided at the intersection of a plurality of optical waveguides, and by moving in and out of the gap, the propagating light of the optical waveguide is reflected or blocked, and the propagating light of one optical waveguide is transferred to the other optical waveguide. 2. The optical switch according to claim 1, wherein said element is arranged so as to guide a wave.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404488A JPH01200317A (en) | 1988-02-05 | 1988-02-05 | Optical switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2404488A JPH01200317A (en) | 1988-02-05 | 1988-02-05 | Optical switch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01200317A true JPH01200317A (en) | 1989-08-11 |
Family
ID=12127483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2404488A Pending JPH01200317A (en) | 1988-02-05 | 1988-02-05 | Optical switch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01200317A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5321774A (en) * | 1993-07-30 | 1994-06-14 | National Research Council Of Canada | Polarization independent transmissive/reflective optical switch |
| US6389189B1 (en) | 1998-10-23 | 2002-05-14 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
| US6404942B1 (en) | 1998-10-23 | 2002-06-11 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
| US6643426B1 (en) | 1999-10-19 | 2003-11-04 | Corning Incorporated | Mechanically assisted release for MEMS optical switch |
| WO2004005997A1 (en) * | 2002-07-09 | 2004-01-15 | Ntt Electronics Corporation | Cantilever, light beam control device, variable light attenuator, and variable light attenuating device |
-
1988
- 1988-02-05 JP JP2404488A patent/JPH01200317A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5321774A (en) * | 1993-07-30 | 1994-06-14 | National Research Council Of Canada | Polarization independent transmissive/reflective optical switch |
| US6389189B1 (en) | 1998-10-23 | 2002-05-14 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
| US6404942B1 (en) | 1998-10-23 | 2002-06-11 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
| US6643426B1 (en) | 1999-10-19 | 2003-11-04 | Corning Incorporated | Mechanically assisted release for MEMS optical switch |
| WO2004005997A1 (en) * | 2002-07-09 | 2004-01-15 | Ntt Electronics Corporation | Cantilever, light beam control device, variable light attenuator, and variable light attenuating device |
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