JPH01197992A - Electric element and manufacture thereof - Google Patents
Electric element and manufacture thereofInfo
- Publication number
- JPH01197992A JPH01197992A JP63022491A JP2249188A JPH01197992A JP H01197992 A JPH01197992 A JP H01197992A JP 63022491 A JP63022491 A JP 63022491A JP 2249188 A JP2249188 A JP 2249188A JP H01197992 A JPH01197992 A JP H01197992A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electric element
- insulating oil
- aging
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000032683 aging Effects 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 abstract description 6
- 230000002950 deficient Effects 0.000 abstract description 4
- 229920002545 silicone oil Polymers 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 230000020169 heat generation Effects 0.000 abstract description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 2
- 230000006866 deterioration Effects 0.000 abstract description 2
- 229910052731 fluorine Inorganic materials 0.000 abstract description 2
- 239000011737 fluorine Substances 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 10
- 235000019198 oils Nutrition 0.000 description 10
- 238000007789 sealing Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 206010027146 Melanoderma Diseases 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010775 animal oil Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は固体表示素子、コンデンサー、半導体素子等の
電気素子およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to electric devices such as solid-state display devices, capacitors, and semiconductor devices, and methods for manufacturing the same.
固体表示素子、コンデンサー、半導体素子等の１ｆｔ気
素子にあって、製品としての信頼性、安定性等を確保す
るため、定格ψ軸電圧以上の電圧を一定時間印加したり
するエージング処理が従来より行われている。In order to ensure the reliability and stability of 1ft chemical elements such as solid-state display elements, capacitors, and semiconductor elements, aging treatment has traditionally been applied, in which a voltage higher than the rated ψ-axis voltage is applied for a certain period of time. It is being done.
例えば固体表示素子の一例として、従来のエレクトロル
ミネッセンス表示索子におけるエージング処理は、以下
のようにして行われている。まずガラス等からなる基板
とに透明電極、絶１ｔｆｆｉ、発光層、絶縁！ゼ、体向
電極をＩＩＩＩＩ次積層し、ざらにガラスキャップや合
成樹脂を用いてその背面を防湿封止してエレクトロルミ
ネッセンス表示素子を作成する。そして、このエレクト
ロルミネッセンス表示素子の透明電極および対向′Ｗ１
４５！の端部に導線あるいはプリント配線板の端子部を
半田付けして、該表示素子をプリント配線に取り付け、
この導線またはプリント配線板の導体部に該表示素子の
定格電圧の２倍程度の電圧を一定時間加え、該表示素子
の透明電極および対向電極間にエージング電圧を印加す
ることにより行われている。For example, as an example of a solid-state display element, the aging process for a conventional electroluminescent display element is performed as follows. First, a substrate made of glass or the like, a transparent electrode, a light emitting layer, and insulation! Next, the facing electrodes are laminated one after another, and the back surface thereof is sealed against moisture using a rough glass cap or a synthetic resin to produce an electroluminescent display element. The transparent electrode of this electroluminescent display element and the opposing 'W1
45! Attach the display element to the printed wiring by soldering a conductive wire or a terminal part of a printed wiring board to the end of the
This is carried out by applying a voltage approximately twice the rated voltage of the display element to the conductive wire or the conductor portion of the printed wiring board for a certain period of time, and applying an aging voltage between the transparent electrode and the counter electrode of the display element.
この際、絶縁層、発光層にピンホール、異物等の欠陥部
があると、この欠陥部を起点として透明電極と対抗電極
との間がショートし、この時の発熱によフて絶縁破壊が
発生し発光層が破壊される。At this time, if there is a defect such as a pinhole or foreign object in the insulating layer or light emitting layer, a short circuit will occur between the transparent electrode and the counter electrode starting from this defect, and the heat generated at this time will cause dielectric breakdown. The light emitting layer is destroyed.
そして、この破壊部の大きさが１０−１５μｍ以下の非
常に小さい場合は、破壊部を肉眼で視認できないが、そ
の大きさが１００μｍ以上になると非発光の黒点として
視認され、不良品とされる。If the size of this broken part is very small, 10-15 μm or less, it cannot be seen with the naked eye, but if the size is 100 μm or more, it is visible as a non-luminous black spot and is considered a defective product. .
他にも共誘電性セラミック材等を用いたコンデンサーや
各種ＩＣ、ダイオード、センサー等の半導体素子におい
ても同様のエージング電圧を印加する処理がおこなわれ
ている。A similar process of applying an aging voltage is also applied to other semiconductor devices such as capacitors, various ICs, diodes, and sensors using co-dielectric ceramic materials.
〔発明が解決しようとする！！’ｄ）
このような電気素子および製造方法にあっては、エージ
ング中刃−不良品が発生した場合、防湿封止済の電気業
子を対称としているため、完成品の電気素子がそのまま
不良となることになり、防湿封止のための材料やその加
工等が無駄となって経済的に大きな損失となる。[Invention tries to solve! ! 'd) With this type of electrical element and manufacturing method, if a defective product occurs during aging, the electrical element is moisture-proof and sealed, so the electrical element of the finished product may be considered defective as it is. As a result, materials for moisture-proof sealing, processing thereof, etc. are wasted, resulting in a large economic loss.
このため、防湿封止をおこなう前に電気素子に対してエ
ージングすることも考えられる。しかしながら、この場
合電気素子が防湿構造となってはいないため、大気中の
湿度の影響を受け、電極間に挟持されている素材・部材
等が劣化し素子寿命が短くなってしまうという問題があ
り、特に固体表示素子においては絶縁破壊が発生した時
の熱発散が防湿材料が存在しないため不十分となり、破
壊現象がこの熱によって連鎖的に進行し、破壊部が大き
く拡大し、黒点となって肉眼で見えるようになって表示
品位が悪くなる等の問題があり、防湿封止をおこなう前
に電気素子を対象としてエージング処理を施すことはむ
ずかしかった。For this reason, it is conceivable to age the electrical elements before performing moisture-proof sealing. However, in this case, since the electric element does not have a moisture-proof structure, there is a problem that the material and components sandwiched between the electrodes deteriorate due to the influence of atmospheric humidity, shortening the life of the element. In particular, in solid-state display elements, when dielectric breakdown occurs, heat dissipation is insufficient due to the absence of moisture-proof material, and the breakdown phenomenon progresses in a chain reaction due to this heat, causing the broken area to expand greatly and become a black spot. There are problems such as deterioration of display quality as it becomes visible to the naked eye, and it has been difficult to perform aging treatment on electrical elements before performing moisture-proof sealing.
本発明はこのような事情に鑑み、前記ｒＲＨを解決した
電気素子およびその製造方法を提供することを目的する
。In view of these circumstances, it is an object of the present invention to provide an electric element that solves the rRH problem and a method for manufacturing the same.
上記目的を達成するために、本発明の電気素子は、少な
くとも複数個の電極を具備した電気素子本体を絶縁オイ
ル中に浸漬しつつ、前記電極間にエージング電圧を印加
したことを特徴とするものである。In order to achieve the above object, the electric element of the present invention is characterized in that an electric element body equipped with at least a plurality of electrodes is immersed in insulating oil, and an aging voltage is applied between the electrodes. It is.
また、本発明の電気素子の製造方法は、少なくとも複数
個の電極を具備した電気素子本体を絶縁オイル中に浸漬
しつつ、前記電極間にエージング電圧を印加することを
特徴とするものである。Further, the method for manufacturing an electric element of the present invention is characterized in that an aging voltage is applied between the electrodes while the electric element main body having at least a plurality of electrodes is immersed in insulating oil.
ここで用いられる絶縁オイルとしては、絶縁性を有する
ものならば何でもよく、植物油、動物油、合成油等を単
一又は混合して用いる。エージング電圧を印加した際に
は発熱が伴うため、好ましくは熱電導性の良いフッ素オ
イルやシリコーンオイルが良く、発生した熱を速く放出
拡散させて、発熱による不良発生を未然に防止すること
ができる。The insulating oil used here may be any insulating oil, and vegetable oils, animal oils, synthetic oils, etc. may be used singly or in combination. Since heat is generated when an aging voltage is applied, it is preferable to use fluorine oil or silicone oil, which has good thermal conductivity, and can quickly release and diffuse the generated heat to prevent defects caused by heat generation. .
この電気素子は絶縁オイル中でのエージング処理が施さ
れているので、湿度による影響を受けず素子構成材料の
劣化が生じないため、駆動時の安定性や信頼性に優れて
いる。Since this electric element is subjected to aging treatment in insulating oil, it is not affected by humidity and the element constituent materials do not deteriorate, resulting in excellent stability and reliability during operation.
またこの電気素子の製造方法は作成された電気素子本体
の防湿封止工程前に絶縁オイル中でニー０ソング処理を
施すので、不良が早く光漏されてムダがなく、駆動時の
安定性と信頼性に優れた電気素子を安価に歩留り良く製
造することができる。In addition, in this method of manufacturing electric elements, knee-0 song treatment is performed in insulating oil before the moisture-proof sealing process of the electric element body, so defects are quickly leaked, eliminating waste, and improving stability during operation. Electrical elements with excellent reliability can be manufactured at low cost and with good yield.
（実施例１）
ＩＴＯ（インジウム−スズ酸化物）膜からなる透明電極
を形成したガラス製基板上にＴａ２０５からなる絶縁層
、マンガンを付活した硫化亜鉛からなる発光層、Ｔａ２
０５からなる絶縁層を順次スパッタリング法によって積
層して形成し、さらにその玉にアルミニウムからなる対
向電極をパターン形成し、エレクトロルミネッセンス表
示素子本体を作製した。(Example 1) An insulating layer made of Ta205, a light emitting layer made of zinc sulfide activated with manganese, and a Ta2
Insulating layers made of 05 were sequentially laminated by sputtering, and counter electrodes made of aluminum were further patterned on the balls to produce an electroluminescent display element body.
ざらに、このエレクトロルミネッセンス表示素子本体に
透明電極と対向電極との両端子に各々リード線をとりつ
け、該表示素子本体をシリコーンオイル中に浸漬し、２
７０Ｖの電圧を２．５時間連続して印加した。Roughly, lead wires are attached to both terminals of the transparent electrode and the counter electrode to the electroluminescent display element body, and the display element body is immersed in silicone oil.
A voltage of 70V was continuously applied for 2.5 hours.
その後、エレクトロルミネッセンス表示素子本体を溶剤
で洗浄してシリコーンオイルを完全に除去した。そして
リード線をはずし、ガラスキャップをかぶせて防湿封止
をおこない、通常の定格電圧で駆動させたところ、安定
に動作し、また表示品位も優れていた。Thereafter, the electroluminescent display element body was washed with a solvent to completely remove the silicone oil. When the lead wires were removed, a glass cap was placed over the device to seal it against moisture, and the device was driven at the normal rated voltage, it operated stably and the display quality was excellent.
（実験例２）
エレクトロルミネッセンス表示素子本体のかわりに通常
のコンデンサー本体を作製し、定格電圧の２倍程の電圧
で前記と同様のエージング処理をおこない、防湿封止を
してコンデンサーを作製し、前記と同様に定格電圧で駆
動させたところ安定な動作を示した。(Experimental Example 2) A normal capacitor body was produced in place of the electroluminescent display element body, and subjected to the same aging treatment as above at a voltage approximately twice the rated voltage, and moisture-proof sealed to produce a capacitor. When driven at the rated voltage in the same manner as above, stable operation was demonstrated.
（実験例３）
エレクトロルミネッセンス表示素子本体のかわりに通常
のＩＣチップ本体を作製し、定格電圧の２倍程の電圧で
前記と同様のエージング処理をおこない、防湿封止をし
てＩＣチップを作製し、前記と同様に定格電圧で駆動さ
せたところ安定な動作を示した。(Experiment Example 3) A normal IC chip body was produced in place of the electroluminescent display element body, and the same aging treatment as above was performed at a voltage approximately twice the rated voltage, followed by moisture-proof sealing to produce an IC chip. However, when driven at the rated voltage in the same manner as above, it showed stable operation.
本発明は、以上説明したように構成されているので、以
下に記載されるような効果を奏する。Since the present invention is configured as described above, it produces the effects described below.
この電気素子は絶縁オイル中でのエージング処理が施さ
れているので、湿度による影響を受けず素子構成材料の
劣化が生じないため、駆動時の安定性や信頼性に優れて
いる。Since this electric element is subjected to aging treatment in insulating oil, it is not affected by humidity and the element constituent materials do not deteriorate, resulting in excellent stability and reliability during operation.
またこの電気素子の製造方法は作製された電気素子本体
の防湿封止工程前に絶縁オイル中でエージング処理を施
すので、不良が早く発屈されてムダがなく、駆動時の安
定性を信頼性に優れた電気素子を安価に歩留り良く製造
することができる。In addition, in this method of manufacturing electrical devices, aging treatment is performed in insulating oil before the moisture-proof sealing process of the fabricated electrical device body, so defects are quickly detected, eliminating waste, and improving stability and reliability during operation. Electrical elements with excellent properties can be manufactured at low cost and with high yield.
Claims (2)
を絶縁オイル中に浸漬しつつ、前記電極間にエージング
電圧を印加したことを特徴とする電気素子。(1) An electric element characterized in that an electric element body having at least a plurality of electrodes is immersed in insulating oil, and an aging voltage is applied between the electrodes.
を絶縁オイル中に浸漬しつつ、前記電極間にエージング
電圧を印加することを特徴とする電気素子の製造方法。(2) A method for manufacturing an electric element, which comprises immersing an electric element body provided with at least a plurality of electrodes in insulating oil, and applying an aging voltage between the electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63022491A JPH0754747B2 (en) | 1988-02-02 | 1988-02-02 | Method for manufacturing electroluminescent display element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63022491A JPH0754747B2 (en) | 1988-02-02 | 1988-02-02 | Method for manufacturing electroluminescent display element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01197992A true JPH01197992A (en) | 1989-08-09 |
| JPH0754747B2 JPH0754747B2 (en) | 1995-06-07 |
Family
ID=12084201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63022491A Expired - Fee Related JPH0754747B2 (en) | 1988-02-02 | 1988-02-02 | Method for manufacturing electroluminescent display element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754747B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1020635C2 (en) * | 2002-05-21 | 2003-11-24 | Otb Group Bv | Method for manufacturing a polymeric OLED. |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50351A (en) * | 1973-05-08 | 1975-01-06 | ||
| JPS5627913A (en) * | 1979-08-14 | 1981-03-18 | Nissin Electric Co Ltd | Method of manufacturing gasssealed condenser |
-
1988
- 1988-02-02 JP JP63022491A patent/JPH0754747B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50351A (en) * | 1973-05-08 | 1975-01-06 | ||
| JPS5627913A (en) * | 1979-08-14 | 1981-03-18 | Nissin Electric Co Ltd | Method of manufacturing gasssealed condenser |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1020635C2 (en) * | 2002-05-21 | 2003-11-24 | Otb Group Bv | Method for manufacturing a polymeric OLED. |
| WO2003098716A1 (en) * | 2002-05-21 | 2003-11-27 | Otb Group B.V. | Method for manufacturing a polymer oled |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0754747B2 (en) | 1995-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960030391A (en) | Electronic package | |
| US5667417A (en) | Method for manufacturing an electroluminescent lamp | |
| WO2011004874A1 (en) | Anti-fuse element | |
| RU2082285C1 (en) | Method for manufacturing of luminescent indication board and luminescent indication board | |
| KR100646569B1 (en) | Light emitting device package and method for fabricating the same | |
| US3430088A (en) | Wire terminal electroluminescent device and manufacture | |
| JPH07211596A (en) | Electronic component and its manufacture | |
| JPH09306702A (en) | Electronic part | |
| JPH01197992A (en) | Electric element and manufacture thereof | |
| JP5454839B2 (en) | Antifuse element | |
| KR900702752A (en) | Electroluminescent lamp and method for manufacturing same | |
| KR20090102675A (en) | Solid electrolytic capacitor device and manufacturing method of the same | |
| CA2352529A1 (en) | Thin-film electroluminescent device | |
| JPS59154054A (en) | Wire and semiconductor device using it | |
| JPH06176868A (en) | Manufacture of el display panel | |
| KR970053697A (en) | Semiconductor device and manufacturing method thereof | |
| JP3761303B2 (en) | Electrolytic capacitor inspection method | |
| KR950004785Y1 (en) | Taping structure of lead wire in electrolytic condenser | |
| JPS63248091A (en) | Manufacture of thin film el device | |
| KR970007453A (en) | Active matrix substrate and inspection method thereof | |
| JPH0233949A (en) | Semiconductor fuse element | |
| KR100244475B1 (en) | Electrostatic chuck and manufacturing method thereof | |
| JPS62238641A (en) | Method of coating insulating film onto separating surface of semiconductor pellet | |
| JP2006120844A (en) | Semiconductor light-emitting device | |
| US3622390A (en) | Process for improving capacitors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |