JPH01196979A - Alignment device for solid-state image pickup element - Google Patents

Abstract

PURPOSE:To obtain an alignment device adjusted with high accuracy by using a laser light and aligning a solid-state image pickup element. CONSTITUTION:A laser light of each color irradiated from laser oscillators 5, 7 is synthesized on the same axis, led to a color separation prism 1, the laser light is separated into each color and irradiated onto solid-state image pickup elements 3a-3c to cause a diffracted light. Then the diffracted light is subject to Fourier transformation by a Fourier transformation lens 14, + or -1st order diffracted light is selected by a spatial filter 15, the result is subject to inverse Fourier transformation by an inverse Fourier transformation lens 16 and the result is irradiated to the reference diffraction grating 17. Then the solid-state image pickup elements 3a-3c are adjusted so as to make the diffracted light brightest caused in this case for the alignment. Thus, the solid- state image pickup elements 3a-3c are aligned with high accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a solid-state imaging device positioning device for adjusting the relative position between solid-state imaging devices.

2. Description of the Related Art Conventionally, a configuration as shown in FIG. 2 has been known as a positioning apparatus for a solid-state image sensor of this type. Hereinafter, a conventional positioning apparatus for a solid-state image sensor will be described with reference to FIG. 2.

As shown in FIG. 2, a support plate 52 is attached to one side of the support stand 51, and the support plate 52 is made up of three prisms.
A color separation prism 53 is attached that divides the incident light into three optical paths and outputs it, and an imaging lens 5 is installed in front of it.
4 is installed. A moving device 55 is attached to the supporting plate 52 on each output surface side of the color separation prism 53, and a solid-state image sensor 56 is attached to the tip of each moving device 55 facing each output surface of the color separation prism 53. There is. A support plate 57 is attached to the other side of the support stand 51, and a resolution measurement chart 58 is supported on the support plate 57. The signals output from each solid-state image pickup device 56 are processed by a signal processing circuit 59, and an image is output to a monitor 60, and is also sent to a measuring device 61.

Next, the operation of the above conventional example will be explained.

The resolution measurement chart 58 is captured by the solid-state image pickup device 56 through the imaging lens 54, the output thereof is processed by the signal processing circuit 59, and the image is output to the monitor 60.

On the other hand, the signal processed by the signal processing circuit 59 is also sent to the measuring device 61.

Then, using the information from the monitor 60 and the measuring device 61, each solid-state image sensor 56 is moved and adjusted by the moving device 55.

In this way, even with the above-described conventional positioning apparatus for solid-state image sensors, positioning can be performed while viewing the output of each solid-state image sensor 56.

Problems to be Solved by the Invention However, in the above-mentioned conventional positioning apparatus for a solid-state image sensor, the resolution measurement chart 58 is attached to the imaging lens 54.
Since the image is captured by the solid-state image sensor 56 through
etc., and the imaging lens 54 and the resolution measurement chart 58 require time and effort to adjust and have problems such as difficulty in achieving accuracy.

The present invention solves these conventional problems, and makes it possible to mechanically adjust the position of a solid-state image sensor by using a laser beam, thereby making it possible to adjust the position of the solid-state image sensor with high precision. The purpose of this invention is to provide a matching device.

Means for Solving the Problems In order to achieve the above object, the present invention provides a moving device that moves a solid-state image sensor on each output surface side of a color separation prism that divides incident light into a plurality of optical paths and outputs the light. , a laser oscillator that emits green and red laser beams; an optical system that coaxially combines the laser beams of each color emitted from the laser oscillator and guides them to a color separation prism; Fourier transform lenses are sequentially installed on the optical path of the diffracted light obtained by reflection from the image sensor,
It is equipped with a spatial filter for selecting diffracted light, an inverse Fourier transform lens, a reference diffraction grating, and a detector that detects the intensity of the diffracted light from this diffraction grating.

Effects The present invention has the following effects due to the above configuration. That is, laser beams of each color emitted from a laser oscillator are coaxially combined and guided to a color separation prism.The color separation prism separates the laser beam into each color and irradiates the solid-state image sensor to generate diffracted light. After this diffracted light is subjected to Fourier transformation using a Fourier transformation lens, ±1st-order diffracted light is selected using a spatial filter. Furthermore, this is subjected to inverse Fourier transform using an inverse Fourier transform lens, and is irradiated onto a reference diffraction grating. By adjusting the solid-state image sensor so that the diffracted light generated at this time becomes the brightest, alignment can be performed.

EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. FIG. 1 shows the configuration of an embodiment of the present invention.

In FIG. 1, reference numeral 11 denotes a color separation prism, which is composed of three prisms 2a, 2b, and 2c, and is capable of dividing incident light into three optical paths and emitting the same.

3a, 3b, 3c are solid-state image pickup devices disposed so as to correspond to each exit surface of each prism 2a, 2b, 2c of the color separation prism 1; 4a, 4b, 4;
G is a moving device for each of the solid-state image sensors 3a, 3b, and 3c; 5 is a laser oscillator that emits a red laser beam 6; 7 is a laser oscillator that emits blue and green laser beams 8; 9 is a total reflection mirror; The blue and green laser beams 8 emitted from the oscillator 7 are reflected. 10 is a half mirror, which transmits the blue and green laser beams 8 reflected by the total reflection mirror 9, reflects the red laser beam 6 emitted from the laser oscillator 5, and coaxially transmits the laser beams 6 and 8 of each color. Combine on top. 11 is a half mirror 113 that reflects the combined laser beam 12 and makes it enter the input box of the color separation prism 1; half mirrors 114, 15 are provided between the half mirror 11 and the input surface of the color separation prism 1;
Reference numerals 16 and 17 denote a Fourier transform lens, a spatial filter for selecting the diffracted light, an inverse Fourier transform lens 16, and a reference lens, which are sequentially provided on the optical path of the diffracted light obtained by reflection from each solid-state image sensor 3a, 3b, and 3c. As the diffraction grating 17, a solid-state image sensor of the same type as the adjustment target is used. A mirror 18 is provided between the spatial filter I5 and the inverse Fourier transform lens 16, and reflects light that is irradiated onto the solid-state image sensor 17 and diffracted. 19
A light intensity detector detects the intensity of light reflected by the mirror 18, and a magnifying glass 20 uses the half mirror 13 to roughly adjust the solid-state image sensors 3a, 3b, and 3c.

Next, the operation of the above embodiment will be explained.

First, while looking at the magnifying glass 20, look at the solid-state image sensor 3a.

Make rough adjustments to 3b and 3c. Next, the laser oscillators 7 and 5 emit blue and green laser beams 8 and red laser beams 6, respectively. Blue and green laser beams 8 are guided to a half mirror 10 by a total reflection mirror 9. On the other hand, the red laser beam 6 emitted from the laser oscillator 5 is also guided to the half mirror 10 and combined coaxially with the blue and green laser beams 8.

The combined laser beam 12 is reflected by the half mirror 11, transmitted through the half mirror 13, and guided to the color separation prism 1. The combined laser beam 12 is separated into red, blue, and green laser beams by the color separation prism 1, and is irradiated to the solid-state image sensors 3a, 3b, and 3C, respectively. The diffracted light generated here passes through the color separation prism 1, half mirrors 13 and 11, undergoes Fourier transformation by the Fourier transform lens 14, and is then subjected to Fourier transformation by the spatial filter 15, which selects two diffracted lights of the ±1st order. This light is subjected to inverse Fourier transform by an inverse Fourier transform lens 16, and is irradiated onto a solid-state image sensor 17, which serves as a reference.

Here, the two diffracted lights are diffracted again in the same direction and cause interference. This light is reflected by the mirror 18, its intensity is detected by the light intensity detector 19, and the positions of the solid-state image sensors 3a, 3b, 3c are adjusted by the moving devices 4a, 4b, 4c so that the intensity becomes maximum. .

Effects of the Invention As described above, according to the present invention, laser beams of each color emitted from a laser oscillator are combined on the same axis and guided to a color separation prism.The color separation prism separates the laser beam into each color and performs solid-state imaging. The element is irradiated to generate diffracted light, this diffracted light is Fourier-transformed by a Fourier transform lens, the ±1st-order diffracted light is selected by a spatial filter, and this is inversely Fourier-transformed by an inverse Fourier lens to be used as a reference. Positioning is performed by illuminating the diffraction grating and adjusting the solid-state imaging device so that the diffracted light generated at this time becomes the brightest. Therefore, a signal processing circuit that processes signals from a solid-state image sensor as in the past,
There is no need for a measuring device, a resolution measurement chart, an imaging lens, etc., and the positioning of the solid-state image sensor can be performed with high precision.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a positioning device for a solid-state image sensor according to an embodiment of the present invention, and FIG. 2 is a schematic perspective view showing a conventional positioning device for a solid-state image sensor. ■...Color separation prism, 3a, 3b, 3c・
... Solid-state image sensor, 4a, 4b, 4c... Moving device, 5, 7... Laser oscillator, 14... Fourier transform lens, 15... Spatial filter, 16... Inverse Fourier transform lens, 17 ... Diffraction grating (solid-state image sensor), 19... Light intensity detector, 20... Magnifying glass. Name of agent: Patent attorney Toshio Nakao 1 person @l
rM 4C Figure 2

Claims (1)

[Claims] A moving device that moves a solid-state image sensor on each output surface side of a color separation prism that divides incident light into multiple optical paths and outputs it; an oscillator that emits blue, green, and red laser light; An optical system that coaxially combines the laser beams of each color and guides them to a color separation prism, and an optical system that is installed in sequence on the optical path of the diffracted light that is separated by the color separation prism and reflected from the solid-state image sensor, respectively. A solid-state image sensor comprising a Fourier transform lens, a spatial filter for selecting diffracted light, an inverse Fourier transform lens, a reference diffraction grating, and a detector that detects the intensity of the diffracted light from the diffraction grating. alignment device.