JPH01196905A - Surface acoustic wave device - Google Patents
Surface acoustic wave deviceInfo
- Publication number
- JPH01196905A JPH01196905A JP2110188A JP2110188A JPH01196905A JP H01196905 A JPH01196905 A JP H01196905A JP 2110188 A JP2110188 A JP 2110188A JP 2110188 A JP2110188 A JP 2110188A JP H01196905 A JPH01196905 A JP H01196905A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- base
- surface acoustic
- piezoelectric substrate
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000000853 adhesive Substances 0.000 claims abstract description 9
- 230000001070 adhesive effect Effects 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 3
- 238000000605 extraction Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 11
- 239000012774 insulation material Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910000484 niobium oxide Inorganic materials 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(発明の技術分野)
本発明は、朝立工程を簡素化した弾性表面波装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a surface acoustic wave device with a simplified morning stand-up process.
(発明の技術的背景とその問題点)
従来、ニオブ酸すチュウム、水晶等の圧電基板上に、た
とえばSAW共振子形の電極を形成して弾性表面波を伝
搬する弾性表面波装置が知られている。(Technical background of the invention and its problems) Conventionally, surface acoustic wave devices have been known in which surface acoustic waves are propagated by forming, for example, SAW resonator-shaped electrodes on a piezoelectric substrate made of niobium oxide, quartz, or the like. ing.
第2図は、従来のこの種の弾性表面波装置の一例を示す
斜視図で、金属ベース1にハーメガラス等で絶縁して一
対の端子2.2を植設する。FIG. 2 is a perspective view showing an example of a conventional surface acoustic wave device of this type, in which a pair of terminals 2.2 are implanted in a metal base 1 insulated with a hermetic glass or the like.
一方、水晶、ニオブ酸すチュウム等の圧電基板3の板面
に、たとえば図示するようなSAW共据 。On the other hand, on the surface of the piezoelectric substrate 3 made of crystal, niobium oxide, etc., for example, a SAW as shown in the figure is installed.
子形の電極4を形成し、この基板3を、たとえば樹脂な
どの接着剤5等により上記ベースlにダイボンディング
するようにしていた。A child-shaped electrode 4 was formed, and the substrate 3 was die-bonded to the base 1 using an adhesive 5 such as resin.
そして、上記SAW共振子形の電極4と上記端子2.2
の先端部との間を金属細線6で、たとえばワイヤボンデ
ィングによって接続するようにしていた。Then, the SAW resonator type electrode 4 and the terminal 2.2
A thin metal wire 6 is used to connect the tip of the metal wire 6 to the tip of the metal wire 6, for example, by wire bonding.
しかしながらこのようなものでは、圧電基板3をベース
lにダイボンディングする工程と、SAW共振子形の電
極4を端子2に接続するワイヤボンディング工程とを必
要とし、工数が2工程となりコストが高くなる問題があ
った。However, such a device requires a process of die bonding the piezoelectric substrate 3 to the base l and a wire bonding process of connecting the SAW resonator-shaped electrode 4 to the terminal 2, resulting in two steps and high cost. There was a problem.
さらに、ワイヤボンディングを行うと金属細線6がむき
出しになるために工程内の取扱には細心の注意を必要と
し、このようにしても金属細線6を損傷する事故は避け
られなかった。Furthermore, when wire bonding is performed, the thin metal wires 6 are exposed, so careful handling during the process is required, and even with this method, accidents that damage the thin metal wires 6 cannot be avoided.
(発明の目的)
本発明は、上記の事情に鑑みて成されたもので、工数を
削減することができ、しかも工程内の取扱も容易で、製
品の信頼性を向上することが出来る弾性表面波装置を提
供することを目的とするものである。(Object of the Invention) The present invention has been made in view of the above circumstances, and has an elastic surface that can reduce the number of man-hours, is easy to handle in the process, and can improve product reliability. The purpose is to provide a wave device.
(発明の概要)
圧電基板の板面に弾性表面波を励振する入出力電極を配
置するとともにこの入出力電極を端部へ引出し、この引
出し電極に対応してベースの板面に外部電極を形成し、
この引出し電極を上記ベースの外部電極に導電性接着剤
で固着して電気的に接続すると共に機械的に保持するこ
とを特徴とするものである。(Summary of the invention) Input/output electrodes that excite surface acoustic waves are arranged on the plate surface of a piezoelectric substrate, and the input/output electrodes are drawn out to the ends, and external electrodes are formed on the plate surface of the base in correspondence with the extracted electrodes. death,
This extraction electrode is fixed to the external electrode of the base with a conductive adhesive to electrically connect and mechanically hold it.
(実施例)
以下、本発明の一実施例を第2図と同一部分に同一符号
を付与して第1図に示す斜視図を参照して詳細に説明す
る。(Embodiment) Hereinafter, an embodiment of the present invention will be described in detail with reference to a perspective view shown in FIG. 1, in which the same parts as in FIG. 2 are given the same reference numerals.
図中1はセラミック等の絶縁材からなるベースで、その
板面にメタライズ等により外部電極12を形成している
。In the figure, reference numeral 1 denotes a base made of an insulating material such as ceramic, and external electrodes 12 are formed on the plate surface by metallization or the like.
一方、圧電基板°3の板面に形成したSAW共振子形の
電極4を引き出し電極11により圧電基板3の側端面に
導出している。On the other hand, a SAW resonator-shaped electrode 4 formed on the plate surface of the piezoelectric substrate 3 is led out to the side end surface of the piezoelectric substrate 3 by an extraction electrode 11.
そしてこの引き出し電極11をベースlの外部電極12
に、たとえば導電性接着剤I3で電気的に接続すると共
に機械的に保持するようにしている。Then, this extraction electrode 11 is connected to the external electrode 12 of the base l.
For example, the conductive adhesive I3 is used to electrically connect and mechanically hold.
このような構成であれば、電極の電気的な接続と圧電基
板の機械的な保持とを同時に行うことができ、工程を短
縮し、しかも金属細線が外部に露出することもないので
工程内の取扱時に損傷を受けることもなく信頼性を向上
することができる。With such a configuration, the electrical connection of the electrodes and the mechanical holding of the piezoelectric substrate can be performed at the same time, shortening the process, and since the thin metal wires are not exposed to the outside, Reliability can be improved without being damaged during handling.
なお、本発明はは上記実施例に限定されるものではなく
、例えばベースlはガラス等の絶縁材を用いるようにし
てもよいし、金属板の表面に絶縁膜を形成するようにし
てもよい。It should be noted that the present invention is not limited to the above embodiments; for example, the base l may be made of an insulating material such as glass, or an insulating film may be formed on the surface of a metal plate. .
また圧電基板に形成する電極もSAW共撮子形の電極に
限定することなく適宜な、弾性表面波をそう受信する電
極を形成することが可能であり、また外部に導出する外
部電極も一対に限定されるものではない。Furthermore, the electrodes formed on the piezoelectric substrate are not limited to SAW co-photograph type electrodes, and it is possible to form appropriate electrodes that receive surface acoustic waves in this way. It is not limited.
また、上記実施例では圧電基板の側端部に導出した引出
し電極とベースの外部電極とを導電性接着剤で接続する
ようにしているが、圧電基板の板厚が薄い場合は、端部
板面に導出した引出し電極を導電性接着剤で接続するよ
うにしてもよい。In addition, in the above embodiment, the extraction electrode led out to the side end of the piezoelectric substrate and the external electrode of the base are connected with a conductive adhesive, but if the thickness of the piezoelectric substrate is thin, the end The extraction electrodes drawn out onto the surface may be connected using a conductive adhesive.
さらに、引出し電極の導出方向は圧電基板上の弾性表面
波の伝搬方向に対して直角方向とすることが弾性表面波
の伝搬特性を損なわないので好ましい。Furthermore, it is preferable that the lead-out direction of the extraction electrode be perpendicular to the propagation direction of the surface acoustic wave on the piezoelectric substrate, since this does not impair the propagation characteristics of the surface acoustic wave.
(発明の効果)
以上詳述したように、本発明によれば組立工程の簡素化
が可能でしかも信頼性を向とすることができいる弾性表
面波装置を提供することができる。(Effects of the Invention) As described in detail above, according to the present invention, it is possible to provide a surface acoustic wave device that can simplify the assembly process and improve reliability.
第1図は本考案の一実施例を示す斜視図、第2図は従来
の弾性表面波装置の一例を示す斜視図である。
l・・・・ベース
3・・・・圧電基板
4・・・・SAW共振子形の電極
11・・・引出し電極
12・・・外部電極
13・・・導電性接着剤FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a perspective view showing an example of a conventional surface acoustic wave device. l... Base 3... Piezoelectric substrate 4... SAW resonator-shaped electrode 11... Leading electrode 12... External electrode 13... Conductive adhesive
Claims (4)
るとともにこの入出力電極を端部へ引出し電極として導
出した圧電基板と、 上記引出し電極に対応して板面に外部電極を形成したベ
ースと、 上記引出し電極を上記ベースの外部電極に固着して電気
的に接続すると共に機械的に保持する導電性接着剤とを
具備することを特徴とする弾性表面波装置。(1) A piezoelectric substrate in which input and output electrodes for exciting surface acoustic waves are arranged on the plate surface, and these input and output electrodes are led out to the ends as extraction electrodes, and external electrodes are formed on the plate surface in correspondence with the extraction electrodes. A surface acoustic wave device comprising: a base; and a conductive adhesive that fixes and electrically connects the extraction electrode to an external electrode of the base and mechanically holds the extraction electrode.
る特許請求の範囲第1項記載の弾性表面波装置。(2) The surface acoustic wave device according to claim 1, wherein the base is made of ceramic.
を特徴とする特許請求の範囲第1項記載の弾性表面波装
置。(3) The surface acoustic wave device according to claim 1, wherein the base has a metal surface coated with an insulating film.
直角方向に導出したことを特徴とする特許請求の範囲第
1項記載の弾性表面波装置。(4) The surface acoustic wave device according to claim 1, wherein the extraction electrode is led out in a direction perpendicular to the propagation path of the surface acoustic wave.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110188A JPH01196905A (en) | 1988-01-31 | 1988-01-31 | Surface acoustic wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110188A JPH01196905A (en) | 1988-01-31 | 1988-01-31 | Surface acoustic wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01196905A true JPH01196905A (en) | 1989-08-08 |
Family
ID=12045480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2110188A Pending JPH01196905A (en) | 1988-01-31 | 1988-01-31 | Surface acoustic wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01196905A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599632B2 (en) * | 1979-06-25 | 1984-03-03 | 東ソー株式会社 | electrolytic cell |
JPS60230710A (en) * | 1984-04-28 | 1985-11-16 | Fujitsu Ltd | Method of mounting elastic wave element |
-
1988
- 1988-01-31 JP JP2110188A patent/JPH01196905A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599632B2 (en) * | 1979-06-25 | 1984-03-03 | 東ソー株式会社 | electrolytic cell |
JPS60230710A (en) * | 1984-04-28 | 1985-11-16 | Fujitsu Ltd | Method of mounting elastic wave element |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3265889B2 (en) | Surface acoustic wave device and method of manufacturing the same | |
JPH0884043A (en) | Composite electronic parts and their manufacturing method | |
US6414415B1 (en) | Surface acoustic wave device and method for manufacturing the same | |
JP2001094390A (en) | Surface acoustic wave device and its manufacturing method | |
JPH01196905A (en) | Surface acoustic wave device | |
JP2003283289A (en) | Surface acoustic wave device | |
JPH05335878A (en) | Surface installation type surface acoustic wave element | |
JPH09162693A (en) | Surface acoustic wave element | |
JPH10163800A (en) | Surface acoustic wave device and its production | |
JPH08330894A (en) | Surface acoustic wave device | |
JPH0946164A (en) | Surface acoustic wave device | |
JPS5824501Y2 (en) | Atsudenshindoushi | |
JP3736226B2 (en) | SAW device | |
JP2000341081A (en) | Semiconductor device | |
JP2001094388A (en) | Saw device and its manufacturing method | |
JPH089935Y2 (en) | Quartz crystal electrode structure | |
JP2645455B2 (en) | Surface acoustic wave filter | |
JPS5857810A (en) | Crystal oscillator | |
JPS587694Y2 (en) | Support device for tuning fork-shaped piezoelectric vibrator | |
JPH0422567Y2 (en) | ||
JPS6120409A (en) | Manufacture of surface acoustic wave element | |
JPS63275215A (en) | Saw resonator | |
JPH03196710A (en) | Lead connection structure for piezoelectric resonator | |
JPH0613834A (en) | Piezoelectric resonator | |
JPH0388373A (en) | Surface mounting piezoelectric vibrator |