JPH01193584A - Method and device for vacuum drying - Google Patents

Method and device for vacuum drying

Info

Publication number
JPH01193584A
JPH01193584A JP1465788A JP1465788A JPH01193584A JP H01193584 A JPH01193584 A JP H01193584A JP 1465788 A JP1465788 A JP 1465788A JP 1465788 A JP1465788 A JP 1465788A JP H01193584 A JPH01193584 A JP H01193584A
Authority
JP
Japan
Prior art keywords
vacuum
liquid
dried
vacuum container
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1465788A
Other languages
Japanese (ja)
Other versions
JP2565963B2 (en
Inventor
Masato Tanaka
正人 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chiyoda Manufacturing Corp
Original Assignee
Chiyoda Manufacturing Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyoda Manufacturing Corp filed Critical Chiyoda Manufacturing Corp
Priority to JP63014657A priority Critical patent/JP2565963B2/en
Publication of JPH01193584A publication Critical patent/JPH01193584A/en
Application granted granted Critical
Publication of JP2565963B2 publication Critical patent/JP2565963B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To evaporate liquid, adhered to an article efficiently, by a method wherein, the article to be dried is received in a first vacuum vessel, a second vacuum vessel is evacuated and both of the vacuum vessels are communicated to evacuate the first vacuum vessel rapidly and disperse the liquid adhered to the article under ebullition, further, the first vacuum vessel is evacuated to vaporize the liquid. CONSTITUTION:An article 17 to be dried is received in a first vacuum vessel 18, a first solenoid opening and closing valve 23 is closed and a second solenoid opening and closing valve 24 is opened to evacuate a second vacuum vessel 21 by a vacuum pump 5. When a pressure is reduced to a pressure P4, the solenoid opening and closing valve 24 is closed and the solenoid opening and closing valve 23 is opened to evacuate the vacuum vessel 18. The vacuum vessel 18 is evacuated to a pressure near a pressure P2, then, the vacuum pump 5 is stopped and the solenoid opening and closing valve 24 is opened. A pressure in the vacuum vessel 18 is reduced suddenly and liquid, adhered to the article 17 to be dried is subjected to ebullition while the liquid, not evaporated yet, is separated from the article 17 to be dried. When the pressures in both vacuum vessels 18, 21 have achieved an equilibrium at a pressure P3, the solenoid opening and closing valve 24 is closed and the vacuum vessel 18 is evacuated further. The liquid, remaining on the surface of the article 17 to be dried, is evaporated from the article 17 to be dried.

Description

【発明の詳細な説明】 a1発明の目的 (産業上の利用分野) 本発明は、洗浄作業等に伴なって、水等の液体が付着し
た状態の、金属等の物品を乾燥する為の方法及び装置に
関し、特に、内部に複雑な空隙を有しており、この空隙
内に洗浄液等の液体が残溜している物品の乾燥を行なう
場合に有効な、真空乾燥方法及び装置を提供するもので
ある。
[Detailed Description of the Invention] a1 Purpose of the Invention (Field of Industrial Application) The present invention provides a method for drying an article such as a metal to which liquid such as water is attached during cleaning work or the like. To provide a vacuum drying method and device, which are particularly effective for drying articles that have complicated internal voids and in which liquid such as cleaning liquid remains. It is.

(従来の技術) 金属等の物品を洗浄する事で、水等の液体によって濡れ
たままの状態の各種物品を乾燥させる為に、従来から種
々の乾燥方法及び装置が提案され、使用されている。
(Prior Art) Various drying methods and devices have been proposed and used in the past in order to dry various objects that remain wet from liquids such as water by cleaning metal objects. .

この様な従来から知られている乾燥方法及び装置として
は、例えばエアブロ−を用いて被乾燥物に付着した液体
を吹き飛ばす方法、熱風により上記被乾燥物を乾燥させ
る方法、或は被乾燥物を遠赤外線により加熱し、被乾燥
物に付着した液体を煮沸蒸発させる方法等が知られてい
る。
Such conventionally known drying methods and devices include, for example, a method of using an air blower to blow away the liquid attached to the object to be dried, a method of drying the object to be dried with hot air, or a method of drying the object to be dried with hot air. A method of boiling and evaporating a liquid adhering to an object to be dried by heating with far infrared rays is known.

しかしながら、エアブロ−を用いた乾燥方法に於いては
、多孔質金属等の様に、被乾燥物の内部に複雑な空隙が
存在する場合、被乾燥物の内部に入り込んだ液体を吹き
飛ばす事は出来ず、十分な乾燥を行なう事が出来ない。
However, in drying methods using air blow, if there are complex voids inside the object to be dried, such as porous metals, it is not possible to blow away the liquid that has entered the object. Therefore, sufficient drying cannot be performed.

又、熱風或は遠赤外線を使用した乾燥方法の場合も、被
乾燥物の内部に入り込んだ液体を乾燥させるのに長時間
を要し、しかも被乾燥物の温度が上昇してしまう為、場
合によっては、乾燥作業終了後、次の行程に移る前に、
被乾燥物を冷却する行程が必要となる。
Also, in the case of drying methods that use hot air or far infrared rays, it takes a long time to dry the liquid that has entered the inside of the material to be dried, and the temperature of the material to be dried increases. In some cases, after the drying process is completed, before moving on to the next process,
A process of cooling the material to be dried is required.

上述の様な不都合を解消する為に、減圧した真空容器内
で被乾燥物を乾燥させる、所謂真空乾燥方法が提案され
、又実際に使用されている。
In order to eliminate the above-mentioned disadvantages, a so-called vacuum drying method has been proposed and is actually used, in which the material to be dried is dried in a vacuum container under reduced pressure.

第3図は、この様な真空乾燥方法を実施する為の装置を
略伝したものであるが、以下この第3図に基づいて真空
乾燥方法に就いて説明する。
FIG. 3 schematically shows an apparatus for implementing such a vacuum drying method, and the vacuum drying method will be explained below based on FIG. 3.

1は真空容器であり、この真空容器1は、上端が開口す
る有底筒状の本体2と、この本体2の上端開口を開閉自
在な蓋体3とから構成されている。本体2の上端縁と蓋
体3の下端縁とには、それぞれ外向フランジ状部2a、
3aを形成すると共に、これら外向フランジ状部2a、
3aの間にはバッキング4を設けて、上記蓋体3により
真空容器1の上端開口を気密に塞げる様にしている。
Reference numeral 1 denotes a vacuum container, and the vacuum container 1 is composed of a bottomed cylindrical main body 2 with an open upper end, and a lid 3 that can freely open and close the upper end of the main body 2. The upper end edge of the main body 2 and the lower end edge of the lid body 3 each have an outward flange-shaped portion 2a,
3a, and these outward flange-like portions 2a,
A backing 4 is provided between 3a so that the top opening of the vacuum container 1 can be hermetically closed with the lid 3.

5は真空ポンプであり、この真空ポンプ5に一端を接続
した管6の他端は真空容器1の内部に密に接続している
5 is a vacuum pump, and one end of a tube 6 is connected to the vacuum pump 5, and the other end of a tube 6 is tightly connected to the inside of the vacuum container 1.

上述の様に構成される真空乾燥装置を用いて被乾燥物を
乾燥する場合、先ず真空容器1の本体2内に被乾燥物1
7を収納し、蓋体3を閉じた後、真空ポンプ5を運転す
る事で真空容器1内の空気を管6を介して排出し、真空
容器1内を減圧する。
When drying an object to be dried using the vacuum drying apparatus configured as described above, first, the object to be dried 1 is placed inside the main body 2 of the vacuum container 1.
7 is housed and the lid body 3 is closed, the vacuum pump 5 is operated to exhaust the air inside the vacuum container 1 through the tube 6, and the pressure inside the vacuum container 1 is reduced.

この結果、被乾燥物17に付着の液体の沸点が低下し、
この液体は上記被乾燥物17から熱を奪って蒸発する。
As a result, the boiling point of the liquid adhering to the material to be dried 17 decreases,
This liquid takes heat from the material to be dried 17 and evaporates.

上記被乾燥物17は、液体の蒸発に伴って奪われた熱量
分だけ温度が下がる為、乾燥終了後の上記被乾燥物17
の温度は、乾燥前の温度よりも低くなり、乾燥作業終了
後は、冷却作業を行なう事な(、直ちに次の作業(寸法
検査、組立て等)を開始する事が出来る様になる。
The temperature of the material to be dried 17 decreases by the amount of heat taken away as the liquid evaporates, so the material to be dried 17 after drying is finished.
The temperature becomes lower than the temperature before drying, and after the drying operation is completed, the next operation (dimensional inspection, assembly, etc.) can be started immediately without performing the cooling operation.

尚、第4図は、上記した真空乾燥装置と洗浄装置とを組
み合わせる事で、真空容器1内で洗浄作業と乾燥作業と
を行なえる様にした、洗浄乾燥装置の1例を示している
Incidentally, FIG. 4 shows an example of a washing/drying apparatus in which washing and drying operations can be performed within the vacuum container 1 by combining the above-mentioned vacuum drying apparatus and washing apparatus.

この洗浄乾燥装置に於いては、真空容器1内の上部と底
部とに設け、洗浄液やすすぎ液を噴出するノズル7.7
に、洗浄液タンク8に一端を接続し、途中で分岐した接
続管9の他端を接続すると共に、すすぎ液タンク14に
一端を接続した接続管9aの他端を、上記接続管9の途
中に接続して、ノズル7.7に、洗浄液又はすすぎ液を
供給自在としている。第4図中、12.12aは送液ポ
ンプ、15.15aは洗浄液及びすすぎ液を加熱する為
のヒータ、16.16aは洗浄液及びすすぎ液の温度を
検知して上記ヒータ15.15aの通電量を制御する制
御器である。
In this washing/drying apparatus, nozzles 7.7 are provided at the top and bottom of the vacuum container 1 and eject washing liquid and rinsing liquid.
Then, connect one end to the cleaning liquid tank 8, connect the other end of the connecting pipe 9 branched in the middle, and connect the other end of the connecting pipe 9a, which has one end connected to the rinsing liquid tank 14, to the middle of the connecting pipe 9. In connection, the nozzle 7.7 can be supplied with cleaning or rinsing liquid. In Fig. 4, 12.12a is a liquid sending pump, 15.15a is a heater for heating the cleaning liquid and rinsing liquid, and 16.16a is the amount of current applied to the heater 15.15a by detecting the temperature of the cleaning liquid and rinsing liquid. It is a controller that controls the

上述の様に構成される洗浄乾燥装置を用いて物品を洗浄
、乾燥する場合、真空容器1内に、洗浄すべき物品を収
納してから蓋体3を密に閉じた後、接続管9.9aの途
中に設けた弁を適当に開閉した状態で、送液ポンプ12
を運転し、洗浄液をノズル7.7から噴出させて、上記
物品を洗浄する。
When cleaning and drying articles using the cleaning and drying apparatus configured as described above, the articles to be cleaned are placed in the vacuum container 1, the lid 3 is tightly closed, and then the connecting tube 9. With the valve provided in the middle of 9a opened and closed appropriately, the liquid feeding pump 12
is operated, and the cleaning liquid is jetted from the nozzle 7.7 to clean the article.

物品の洗浄を終えたならば、送液ポンプ12を停止し、
真空容器1内の洗浄液を排出した後、再び弁を適当に開
閉して送液ポンプ12aを運転し、ノズル7.7からす
すぎ液を噴出させて、上記洗浄液の場合と同様にして物
品のすすぎを行なう。
After cleaning the article, stop the liquid pump 12,
After the cleaning liquid in the vacuum container 1 is discharged, the valve is opened and closed appropriately again to operate the liquid supply pump 12a, and the rinsing liquid is spouted from the nozzle 7.7, and the article is rinsed in the same manner as in the case of the above-mentioned cleaning liquid. Do this.

物品のすすぎを終えたならば、真空容器1内からすすぎ
液を排出した後、開閉弁11a、13aを閉じ、次の乾
燥行程に移る。
After rinsing the article, the rinsing liquid is discharged from the vacuum container 1, the on-off valves 11a and 13a are closed, and the next drying process is started.

この乾燥行程は、前述した様に真空ポンプ5を運転して
真空容器1内の空気を排出し、減圧した状態の下で上記
物品自身の熱により、この物品に付着した液体(この場
合に於いてはす′すぎ液)を蒸発させる事で行なう。
In this drying step, as described above, the vacuum pump 5 is operated to exhaust the air in the vacuum container 1, and under the reduced pressure state, the liquid adhering to the article (in this case) is removed by the heat of the article itself. This is done by evaporating the rinsing liquid.

この乾燥行程の際、上記物品は、この物品に付着した液
体が蒸発する為の蒸発熱(気化熱)を奪われる為、乾燥
後の物品の温度は、乾燥前の物品の温度よりも低くなる
。従って、真空容器1内の圧力や乾燥前の物品の温度を
適宜制御する事で、乾燥終了後の物品の温度を所望の温
度にする事が可能となる。
During this drying process, the article is deprived of the heat of evaporation (heat of vaporization) for the evaporation of the liquid attached to the article, so the temperature of the article after drying becomes lower than the temperature of the article before drying. . Therefore, by appropriately controlling the pressure inside the vacuum container 1 and the temperature of the article before drying, it is possible to bring the temperature of the article after drying to a desired temperature.

(発明が解決しようとする問題点) ところが、上述した様な真空乾燥方法に於いても、被乾
燥物(乾燥すべき物品)17に多量の液体が付着してい
たり、上記被乾燥物17の温度があまり高くない場合、
上記液体を完全に蒸発させる事が出来ず、乾燥不良とな
り易い。
(Problems to be Solved by the Invention) However, even in the vacuum drying method as described above, a large amount of liquid may adhere to the object to be dried (article to be dried) 17, or the object to be dried may have a large amount of liquid attached to it. If the temperature is not too high,
The liquid cannot be completely evaporated and drying tends to be insufficient.

即ち、被乾燥物17に多量の液体が付着していた場合、
この被乾燥物17が与える熱量が上記液体総てが蒸発す
るのに必要な熱量を下回り、真空ポンプ5の運転を長時
間継続しない限り、この液体を完全に蒸発させる事が出
来ない。
That is, if a large amount of liquid adheres to the material to be dried 17,
The amount of heat given by the material to be dried 17 is less than the amount of heat required to evaporate all of the liquid, and unless the vacuum pump 5 continues to operate for a long time, the liquid cannot be completely evaporated.

又、被乾燥物17の温度が低い場合も、同様の理由によ
り、この被乾燥物17に付着した液体を完全に蒸発させ
難い。特に前述した従来の乾燥方法の場合と同様、被乾
燥物17が焼結金属等の様に、内部に微細な空隙を有す
るものであり、この空隙内も乾燥する必要性があるもの
の場合、液体がこの空隙内に残溜し易くなる。
Furthermore, even when the temperature of the material to be dried 17 is low, it is difficult to completely evaporate the liquid adhering to the material to be dried 17 for the same reason. In particular, as in the case of the conventional drying method described above, when the material to be dried 17 has minute voids inside, such as sintered metal, and it is necessary to dry the inside of these voids, the liquid is likely to remain in this void.

本発明は、上述の様な不都合を解消し、乾燥すべき物品
に付着した液体の蒸発を効率良く行なえる真空乾燥方法
及び装置を提供するものである。
The present invention solves the above-mentioned disadvantages and provides a vacuum drying method and apparatus that can efficiently evaporate liquid adhering to an article to be dried.

b 発明の構成 (問題を解決するための手段) 本発明の真空乾燥方法及び装置の内、真空乾燥方法は、
乾燥すべき物品を第一の真空容器内に収納すると共に、
第二の真空容器内を減圧した後、第一、第二の両翼空容
器同士を連通ずる事で、この第一の真空容器内を急速に
減圧し、上記液体を突沸させる事で飛散させる。
b. Structure of the invention (means for solving the problem) Among the vacuum drying method and apparatus of the present invention, the vacuum drying method includes:
Storing the article to be dried in a first vacuum container, and
After the pressure inside the second vacuum container is reduced, the first and second wing containers are communicated with each other to rapidly reduce the pressure inside the first vacuum container, causing the liquid to bump and scatter.

上記第一の真空容器内の圧力と第二の真空容器内の圧力
とが平衡に達したならば、第一の真空容器内を更に減圧
し、物品の有する熱によって上記液体を蒸発させる。
When the pressure in the first vacuum container and the pressure in the second vacuum container reach equilibrium, the pressure in the first vacuum container is further reduced, and the liquid is evaporated by the heat of the article.

又、上記方法の実施に使用する真空乾燥装置は、開口を
気密に閉基自在な蓋体を有する第一の真空容器と、第二
の真空容器とを、接続管により接続すると共に、この接
続管の途中から、真空ポンプに通じる管を分岐させ、第
一、第二の真空容器同士の連通と、真空ポンプと第一の
真空容器との連通と、真空ポンプと第二の真空容器との
連通とを切り換える弁機構を設ける事で構成されている
In addition, the vacuum drying apparatus used to carry out the above method connects a first vacuum container having a lid whose opening can be closed airtight and a second vacuum container by a connecting pipe, and The pipe leading to the vacuum pump is branched from the middle of the pipe to provide communication between the first and second vacuum containers, communication between the vacuum pump and the first vacuum container, and communication between the vacuum pump and the second vacuum container. It is constructed by providing a valve mechanism that switches between communication and communication.

(作  用) 上述の様に構成される本発明の真空乾燥装置により、被
乾燥物を乾燥するには、次の様に行なう。
(Function) In order to dry an object to be dried using the vacuum drying apparatus of the present invention configured as described above, the following procedure is performed.

先ず弁機構を、真空ポンプと第二の真空容器とを連通さ
せる状態に切り換えて、真空ポンプを運転し、第二の真
空容器内を減圧する。
First, the valve mechanism is switched to a state where the vacuum pump and the second vacuum container are communicated with each other, and the vacuum pump is operated to reduce the pressure inside the second vacuum container.

次に、弁機構の切り換えに基づいて、第一、第二の両翼
空容器同士を連通させ、第一の真空容器内を急速に減圧
する。被乾燥物を収納した第一の真空容器内の圧力が急
に低下する結果、被乾燥物に付着した液体が突沸し、そ
の勢いで未蒸発の液体が吹き飛ばされる。
Next, based on switching of the valve mechanism, the first and second winged empty containers are communicated with each other, and the pressure inside the first vacuum container is rapidly reduced. As a result of the sudden drop in the pressure in the first vacuum container containing the object to be dried, the liquid adhering to the object to be dried causes bumping, and the unevaporated liquid is blown away by the force.

第一、第二の両翼空容器内の圧力が平衡に達したならば
、第一の真空容器内と真空ポンプとを連通させた状態で
真空ポンプを運転し、第一の真空容器内を更に減圧して
、上記液体を完全に蒸発させる。
When the pressure in the first and second double-winged empty containers reaches equilibrium, the vacuum pump is operated with the first vacuum container and the vacuum pump communicating with each other, and the inside of the first vacuum container is further increased. Apply vacuum to completely evaporate the liquid.

(実施例) 次に図示の実施例を説明しつつ本発明を更に詳しく説明
する。
(Example) Next, the present invention will be explained in more detail while explaining the illustrated embodiment.

第1図は本発明の真空乾燥装置を示す略縦断面図である
FIG. 1 is a schematic longitudinal sectional view showing a vacuum drying apparatus of the present invention.

被乾燥物17を収納する第一の真空容器18は、上端が
開口した有底円筒状の本体19と、この本体19の上端
開口を気密に塞ぐ蓋体20とから成り、前述した従来の
真空乾燥装置の真空容器と同様に、本体19の上端に形
成した外向フランジ状部19aと蓋体20の下端に形成
した外向フランジ状部20aとの間にバッキング4を設
けて、蓋体20を閉じた際の気密保持を図っている。 
− 21は第二の真空容器であり、上記第一の真空容器18
よりも大きな内容積を有している。
The first vacuum container 18 that stores the material to be dried 17 is composed of a bottomed cylindrical main body 19 with an open upper end and a lid 20 that airtightly closes the upper end opening of the main body 19. Similar to the vacuum container of the drying device, the backing 4 is provided between the outward flange-like part 19a formed at the upper end of the main body 19 and the outward-directed flange-like part 20a formed at the lower end of the lid body 20, and the lid body 20 is closed. The aim is to maintain airtightness when
- 21 is a second vacuum container, which is connected to the first vacuum container 18;
It has a larger internal volume.

これら第一の真空容器18と第二の真空容器21とは、
接続管22によって互いに接続しているが、この接続管
22は、第二の真空容器21内の負圧を急速に第一の真
空容器18内に導入するのに十分な大きさの断面積を有
している。
These first vacuum container 18 and second vacuum container 21 are
They are connected to each other by a connecting pipe 22, which has a cross-sectional area large enough to rapidly introduce the negative pressure in the second vacuum container 21 into the first vacuum container 18. have.

この接続管22の途中には、第一の真空容器18側から
順に、共に開放速度の速い第一の電磁開閉弁23と第二
の電磁開閉弁24とを設けると共に、これら第一の電磁
開閉弁23と第二の電磁開閉弁24との間に、管6を介
して真空ポンプ5を接続している。
In the middle of this connecting pipe 22, a first electromagnetic on-off valve 23 and a second electromagnetic on-off valve 24, both of which have a fast opening speed, are provided in order from the first vacuum vessel 18 side. A vacuum pump 5 is connected between the valve 23 and the second electromagnetic on-off valve 24 via a pipe 6.

図中、25は吸入管、26は第三の電磁開閉弁で、第一
、第二の両翼空容器18.21内に外気を導入し、両翼
空容器18.21内を大気圧に戻す為に使用される。
In the figure, 25 is a suction pipe, and 26 is a third electromagnetic on-off valve, which introduces outside air into the first and second wing containers 18.21 and returns the insides of the wing containers 18.21 to atmospheric pressure. used for.

上述の様に構成される本発明の真空乾燥装置により、被
乾燥物を乾燥する場合、次の様に行なう。
When drying an object to be dried using the vacuum drying apparatus of the present invention configured as described above, it is carried out as follows.

先ず、第一の真空容器18の本体19内に被乾燥物17
を収納し、この本体19の開口を蓋体20により気密に
塞ぐ。
First, the material to be dried 17 is placed in the main body 19 of the first vacuum container 18.
The opening of the main body 19 is hermetically closed with a lid 20.

次いで、第一の電磁開閉弁23を閉じた状態で第二の電
磁開閉弁24を開け、真空ポンプ5を運転して、第二の
真空容器21内を減圧する。この際、第二の真空容器2
1に設けた圧力計27を観測しつつ、上記被乾燥物17
に付着した液体の温度に於ける、この液体の蒸気圧(第
2図のP2)を下回る所定の圧力P4に迄、第二の真空
容器21内を減圧する(第2図の区間T1に於ける鎖線
イ参照)。
Next, with the first electromagnetic on-off valve 23 closed, the second electromagnetic on-off valve 24 is opened, and the vacuum pump 5 is operated to reduce the pressure inside the second vacuum container 21. At this time, the second vacuum container 2
While observing the pressure gauge 27 provided in
The pressure inside the second vacuum container 21 is reduced to a predetermined pressure P4 that is lower than the vapor pressure of the liquid (P2 in FIG. 2) at the temperature of the liquid adhering to the liquid (in section T1 in FIG. 2). (See dashed line a).

第二の真空容器21内の圧力がP4に迄低下したならば
、第二の電磁開閉弁24を閉じ、第一の電磁開閉弁23
を開いた状態で真空ポンプ5を運転し、第一の真空容器
18内を減圧する。
When the pressure inside the second vacuum container 21 drops to P4, the second electromagnetic on-off valve 24 is closed, and the first electromagnetic on-off valve 23 is closed.
The vacuum pump 5 is operated in an open state to reduce the pressure inside the first vacuum container 18.

この場合は、第二の真空容器21内を減圧する場合と同
様に、第一の真空容器18に設けた圧力計28を観測し
つつ、前記した蒸気圧P2  (第2図参照)程度に迄
、第一の真空容器18内を減圧する(第2図の区間T2
に於ける実線口参照)。
In this case, as in the case of reducing the pressure inside the second vacuum vessel 21, while observing the pressure gauge 28 provided in the first vacuum vessel 18, the vapor pressure is reduced to about the above-mentioned vapor pressure P2 (see Fig. 2). , the pressure inside the first vacuum container 18 is reduced (section T2 in FIG.
(See the solid line entry).

第一の真空容器18内を、圧力P2付近に迄減圧したな
らば、真空ポンプ5を停止して第二の電磁開閉弁24を
開き、第二の真空容器21内の負圧を第一の真空容器1
8内に導入する。
Once the pressure inside the first vacuum container 18 has been reduced to around pressure P2, the vacuum pump 5 is stopped and the second electromagnetic on-off valve 24 is opened to reduce the negative pressure inside the second vacuum container 21 to the first level. Vacuum container 1
It will be introduced within 8.

第一、第二の両翼空容器18.21を接続する接続管2
2は、十分に大きな内径を有している為、第二の真空容
器21内の負圧は、急速に第一の真空容器18内に導入
され、その結果、第一の真空容器18内の圧力は急速に
低下する。予め圧力P2付近に迄減圧されていた第一の
真空容器18内の被乾燥物17に付着した液体は、沸騰
寸前であった為、第一の真空容器18内の圧力がP2か
ら更に低下する事で、被乾燥物17に付着した液体は突
沸し、その勢いで未蒸発の液体も被乾燥物17から分離
して、周囲に飛散する(第2図の区間T、参照)。
Connecting pipe 2 connecting the first and second wing empty containers 18.21
2 has a sufficiently large inner diameter, the negative pressure in the second vacuum container 21 is quickly introduced into the first vacuum container 18, and as a result, the negative pressure in the first vacuum container 18 is Pressure drops rapidly. Since the liquid adhering to the dried material 17 in the first vacuum container 18, which had been previously depressurized to around pressure P2, was on the verge of boiling, the pressure in the first vacuum container 18 further decreased from P2. As a result, the liquid adhering to the material to be dried 17 bumps, and the unevaporated liquid is also separated from the material to be dried 17 and scattered around (see section T in FIG. 2).

第一、第二の両翼空容器18.21が圧力P3で平衡に
達したならば、第二の電磁開閉弁24を閉じ、真空ポン
プ5を運転して第一の真空容器18内を更に減圧する。
When the first and second wing empty containers 18 and 21 reach equilibrium at the pressure P3, the second electromagnetic on-off valve 24 is closed and the vacuum pump 5 is operated to further reduce the pressure inside the first vacuum container 18. do.

この真空ポンプ5の運転により、第一の真空容器18内
の圧力は第2図の区間T4に於ける実線口に示す様に徐
々に低下するが、この過程で、被乾燥物17の表面に残
っていた液体は、被乾燥物17から熱を奪い、蒸発する
As the vacuum pump 5 operates, the pressure inside the first vacuum container 18 gradually decreases as shown by the solid line in section T4 in FIG. The remaining liquid removes heat from the material to be dried 17 and evaporates.

上記の様に、本発明の真空乾燥装置は、被乾燥物17に
付着の液体を先ず突沸により飛散させ、次いで、従来の
真空乾燥と同様、減圧下で上記液体を蒸発させる為、多
孔質の被乾燥物17の内部に存在する液体を含めて、被
乾燥物17に付着した液体を確実に蒸発させ、この被乾
燥物17を完全に乾燥する事が出来る。
As described above, the vacuum drying apparatus of the present invention first scatters the liquid adhering to the material to be dried 17 by bumping, and then evaporates the liquid under reduced pressure, similar to conventional vacuum drying, so it The liquid adhering to the object to be dried 17, including the liquid present inside the object to be dried 17, can be reliably evaporated, and the object to be dried 17 can be completely dried.

更に、被乾燥物17に付着した液体を蒸発させる為の熱
は、被乾燥物17から得る為、乾燥終了後の被乾燥物1
7の温度は、乾燥前よりも低い温度となる。その為、乾
燥前の被乾燥物17の温度を予め適宜に定めておけば、
乾燥終了後に冷却作業を行なう事なく被乾燥物17を直
ちに次の作業行程へ送り出す事が出来る。
Furthermore, since the heat for evaporating the liquid adhering to the drying object 17 is obtained from the drying object 17, the drying object 1 after drying is completed.
The temperature at No. 7 is lower than that before drying. Therefore, if the temperature of the material to be dried 17 before drying is determined appropriately in advance,
After completion of drying, the material to be dried 17 can be immediately sent to the next work step without performing cooling work.

被乾燥物17の乾燥行程を終了したならば、真空ポンプ
5を停止し、第三の電磁開閉弁26を開いて、吸入管2
5から第一の真空容器18内に大気を導入する。
When the drying process of the material to be dried 17 is completed, the vacuum pump 5 is stopped, the third electromagnetic on-off valve 26 is opened, and the suction pipe 2 is opened.
Atmospheric air is introduced into the first vacuum container 18 from 5.

尚、図示の実施例の場合、接続管22の途中に2個の電
磁開閉弁23.24を設ける事により、第一、第二の真
空容器18.21内士の連通、並びに両真空容器18.
21と真空ポンプ5との連通を切り換える様に構成して
いるが、2個の電磁開閉弁に代えて、接続管22と管6
との分岐部に、1個の電磁式三方弁を設けても良い。
In the case of the illustrated embodiment, by providing two electromagnetic on-off valves 23 and 24 in the middle of the connecting pipe 22, communication between the insides of the first and second vacuum vessels 18 and 21 and both vacuum vessels 18 are established. ..
21 and the vacuum pump 5, but instead of the two electromagnetic on-off valves, the connection pipe 22 and the pipe 6 are connected.
One electromagnetic three-way valve may be provided at the branching point between the two.

又、第一の真空容器18内に第4図で示した様なノズル
7.7を設け、この第一の真空容器18内で物品の洗浄
、すすぎを行ない、更に乾燥する様に構成する事も出来
る。
Further, a nozzle 7.7 as shown in FIG. 4 is provided in the first vacuum container 18, and the article is configured to be washed, rinsed, and further dried in the first vacuum container 18. You can also do it.

C1発明の効果 本発明の真空乾燥装置は、上述の様に構成され作用する
ので、乾燥すべき物品が内部に複雑な空隙を有する場合
でも、この物品に付着した液体を迅速に除去する事が可
能となると共に、乾燥作業終了後は、冷却作業を行なう
事なく、直ちに次の作業を行なう事が出来る。
C1 Effects of the Invention The vacuum drying apparatus of the present invention is configured and operates as described above, so even if the article to be dried has complex internal voids, it is possible to quickly remove liquid adhering to the article. In addition, after the drying work is completed, the next work can be carried out immediately without cooling work.

【図面の簡単な説明】[Brief explanation of the drawing]

第一1図は、本発明の真空乾燥装置の1例を示す略縦断
面図、第2図は第一、第二の両真空容器内の圧力変化を
示す線図、第3図は従来の真空乾燥装置を示す略縦断面
図、第4図は第3図の真空乾燥装置を用いた洗浄乾燥装
置を示す、略縦断面図である。 1:真空容器、2:本体、2a+外向フランジ状部、3
.蓋体、3a:外向フランジ状部、4:パッキング、5
:真空ポンプ、6・管、7:ノズル、8:洗浄液タンク
、9.9a:接続管、12.12a:送液ポンプ、14
:すすぎ液タンク、15.15a・ヒータ、16.16
a:制御器、17:被乾燥物、18:第一の真空容器、
19:本体、19a:外向フランジ状部、20:M体、
20a:外向フランジ状部、21:第二の真空容器、2
2:接続管、23:第一の電磁開閉弁、24:第二の電
磁開閉弁、25:吸入管、26:第三の電磁開閉弁、2
7.28:圧力計。 特許出願人 株式会社千代田製作所 代  理  人  小 山 欽造(ほか1名)第1図 箆2図
FIG. 11 is a schematic vertical sectional view showing one example of the vacuum drying apparatus of the present invention, FIG. 2 is a diagram showing pressure changes in both the first and second vacuum containers, and FIG. FIG. 4 is a schematic longitudinal cross-sectional view showing a vacuum drying device; FIG. 4 is a schematic vertical cross-sectional view showing a washing and drying device using the vacuum drying device of FIG. 3; 1: Vacuum container, 2: Main body, 2a + outward flange, 3
.. Lid body, 3a: outward flange-shaped portion, 4: packing, 5
: Vacuum pump, 6/pipe, 7: Nozzle, 8: Cleaning liquid tank, 9.9a: Connection pipe, 12.12a: Liquid pump, 14
: Rinse liquid tank, 15.15a/heater, 16.16
a: Controller, 17: Material to be dried, 18: First vacuum container,
19: Main body, 19a: Outward flange-shaped part, 20: M body,
20a: outward flange, 21: second vacuum container, 2
2: Connection pipe, 23: First electromagnetic on-off valve, 24: Second electromagnetic on-off valve, 25: Suction pipe, 26: Third electromagnetic on-off valve, 2
7.28: Pressure gauge. Patent applicant: Chiyoda Seisakusho Co., Ltd. Managing Director: Kinzo Koyama (and one other person) Figure 1, Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)乾燥すべき物品を第一の真空容器内に収納すると
共に、第二の真空容器内を減圧した後、これら第一、第
二の両真空容器同士を連通し、上記第一の真空容器内を
急速に減圧する事で、上記物品に付着した液体を突沸、
飛散させ、第一、第二の両真空容器の圧力が平衡に達し
た後に、更に第一の真空容器内を減圧して、上記液体を
蒸発させる真空乾燥方法。
(1) After storing the article to be dried in the first vacuum container and reducing the pressure in the second vacuum container, the first and second vacuum containers are communicated with each other, and the first vacuum container is By rapidly reducing the pressure inside the container, the liquid adhering to the above items can be brought to boiling point.
After the liquid is dispersed and the pressures in both the first and second vacuum containers reach equilibrium, the pressure inside the first vacuum container is further reduced to evaporate the liquid.
(2)開口を気密に閉基自在な蓋体を有する第一の真空
容器と第二の真空容器とを、接続管により気密に接続す
ると共に、この接続管の途中から、真空ポンプに通じる
管を分岐させ、第一、第二の真空容器同士の連通と、真
空ポンプと第一の真空容器との連通と、真空ポンプと第
二の真空容器との連通とを切り換える弁機構を設けて成
る真空乾燥装置。
(2) The first vacuum container and the second vacuum container, each having a lid whose opening can be closed airtight, are airtightly connected by a connecting pipe, and a pipe is connected from the middle of the connecting pipe to the vacuum pump. A valve mechanism is provided that branches the first and second vacuum containers and switches communication between the first and second vacuum containers, communication between the vacuum pump and the first vacuum container, and communication between the vacuum pump and the second vacuum container. Vacuum drying equipment.
JP63014657A 1988-01-27 1988-01-27 Vacuum drying equipment Expired - Lifetime JP2565963B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63014657A JP2565963B2 (en) 1988-01-27 1988-01-27 Vacuum drying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63014657A JP2565963B2 (en) 1988-01-27 1988-01-27 Vacuum drying equipment

Publications (2)

Publication Number Publication Date
JPH01193584A true JPH01193584A (en) 1989-08-03
JP2565963B2 JP2565963B2 (en) 1996-12-18

Family

ID=11867283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63014657A Expired - Lifetime JP2565963B2 (en) 1988-01-27 1988-01-27 Vacuum drying equipment

Country Status (1)

Country Link
JP (1) JP2565963B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992020984A1 (en) * 1991-05-24 1992-11-26 Nikku Industry Co., Ltd. Vacuum drying apparatus
JP2012197979A (en) * 2011-03-22 2012-10-18 Shin Ootsuka Kk Device for drying workpiece, and device for cleaning and drying workpiece

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4992850B2 (en) * 2008-07-25 2012-08-08 トヨタ自動車株式会社 Liquid adhesion amount measuring apparatus and liquid adhesion amount measuring method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61196529U (en) * 1985-05-22 1986-12-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61196529U (en) * 1985-05-22 1986-12-08

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992020984A1 (en) * 1991-05-24 1992-11-26 Nikku Industry Co., Ltd. Vacuum drying apparatus
US5377425A (en) * 1991-05-24 1995-01-03 Nikku Industry Co., Ltd. Vacuum drying apparatus
JP2012197979A (en) * 2011-03-22 2012-10-18 Shin Ootsuka Kk Device for drying workpiece, and device for cleaning and drying workpiece

Also Published As

Publication number Publication date
JP2565963B2 (en) 1996-12-18

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