JPH0118580Y2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to dust-free clothing worn when working in a dust-free room, and particularly to dust-free clothing that prevents the sealing part from being broken against the body.

In general, when work is performed in a dust-free room where dust particles are extremely suppressed, such as semiconductor manufacturing work in a downstream type dust-free room, dust particles attached to the worker's body fall and become airborne. In order to prevent such inconveniences, it is essential to wear dust-free clothing and cover your body with it.

Fig. 1 shows an outline of dust-free clothing, in which an upper body part 1 and a lower body part 2 are made integrally, and a chest fastener part 3 provided on the upper body part 1 can be opened and closed. To wear. The collar portion 4, sleeve portion 5, and hem portion 6 are each provided with sealing members 7, 8, and 9 for sealing them against the body, and the sealing members 7, 8, and 9 are, for example, It consists of a hook-and-loop fastener, wide rubber, and narrow rubber.

By the way, the fabric of dust-free clothing has extremely low breathability and only allows a small amount of water vapor to pass through, which is necessary to prevent the passage of dust particles and ensure comfort for the body covered by dust-free clothing. It is desirable to use a material such as a polyester fiber material coated with a microporous polyurethane membrane, or a material in which two layers of polyester fiber material are sewn together to suppress air permeability.

As mentioned above, the fabric of dust-free clothing has almost no breathability, and the openings of the collar 4, sleeves 5, and hem 6 are sealed, so the air inside the dust-free clothing is , there is no escape. For this reason, the inside of the dust-free clothing may become locally high-pressure depending on the movement of the body during work, and this high-pressure state often breaks the seal at the opening. It was happening. As for the seal failure, since the tightening force is significantly restricted, the seal failure often occurs concentratedly at the collar portion 4 where the seal structure is the weakest.

In this way, if the seal of the opening is broken,
As the air inside the dust-free clothing flows out, dust particles that have adhered to the body are dispersed into the dust-free room, and these dust particles adhere to workpieces such as semiconductors and contaminate them. There was a drawback. Above all,
The dust particles emitted by the seal breaking at the collar 4 located at the top of the dust-free clothing flow downward into the clean air formed in a normal downstream type dust-free room (downstream ) and adhered to the workpiece below, making the contamination damage even more serious.

The purpose of this invention is to take into consideration the problems such as the seal breaking at the opening due to the structural limitations of the dust-free clothing based on the above-mentioned conventional technology, and by providing a breathable part at the hem of the lower body, It is an object of the present invention to eliminate the above-mentioned drawbacks and provide excellent dust-free clothing that does not have to worry about contaminating workpieces due to seal failure.

The structure of this invention in accordance with the above purpose is that a breathable part with a filter function is provided in the lower part of the dust-free clothing, that is, at the hem of the lower body, so that a part of the air inside the dust-free clothing passes downward. By discharging the dust-free clothing, the gist of the invention is to prevent the seal from being broken at the opening due to the occurrence of a localized high-pressure state within the dust-free clothing.

Next, an embodiment of this invention will be described below based on FIG.

In the figure, a breathable part 10 having a filter function is provided on the back side of the lower body part 2 and directly above the hem part 6. The breathable portion 10 is made of a material, for example, polyester fiber cloth, which is breathable but also has a filter function that prevents the passage of dust particles to a considerable extent.

In the above configuration, the air inside the dust-free clothes is naturally exhausted from the breathable part 10 of the hem 6 of the clothes, so even when there is movement of the body, a local high pressure state does not occur inside the clothes. There isn't. When air is naturally discharged downward from the breathable portion, passage of dust particles is considerably prevented.

Conversely, if a localized low pressure state is likely to occur within the dust-free clothing due to body movements, the air in the dust-free room will be naturally sucked into the dust-free clothing from the breathable section 10. There is no occurrence of such a low pressure state.

Regarding the filter function of the ventilation section 10 mentioned above, realistically it is not possible to expect a 100% dust collection rate, so a small amount of dust particles will pass through, but in actual design, Considering the balance between the internal pressure suppression effect in the dust-free clothing and the amount of dust particles leaking from the breathable part, the area of the breathable part and its dust particles are adjusted to minimize dust particle contamination on the workpiece. The collection rate is what is selected.

In the above embodiment, the breathable part 10 is provided on the back side of the hem part 6, but is not limited to this, and can be provided on the front side directly above the hem part 6, or on the inside or outside of the hem of the garment. It may be provided at an appropriate position in the portion 6.

As described above, according to this invention, the fabric is made of a fabric that has low breathability and only allows water vapor to pass through.
In dust-free clothes for downstream type dust-free rooms in which openings such as a collar part 4, sleeve parts 5, hem part 6, etc. are sealed, a breathable part 10 having a filter function is provided in the hem part 6 of the lower body part 2. With this structure, when a local high pressure state is likely to occur within the clothing due to body movement within the dust-free clothing, the air inside the clothing is naturally exhausted via the breathable part 10. , in order to avoid the occurrence of localized high pressure conditions within the garment, the natural discharge of air from the breathable part 10 is directed to the lowest part of the dust-free garment, i.e., to the floor of the downstream type dust-free chamber. Since it is carried out from nearby parts, it is necessary to prevent the generation of local high pressure inside the garment, and also to prevent the seals from breaking at the sealed collar 4, sleeves 5, and hem 6. Dust particles that would otherwise have to be discharged can be carried downstream in the downstream dust-free chamber and carried away below, close to the floor surface, so that the dust particles are typically considerably higher than the floor surface. An excellent effect is achieved in that the adverse effects of dust particles adhering to the workpiece occupying the position can be almost completely eliminated.

Furthermore, according to this invention, the hem of dust-free clothing is made of a fabric that has low breathability and only allows water vapor to pass through, such as polyester fiber material coated with a polyurethane microporous membrane. 6 is provided with a breathable part 10, from the viewpoint of ensuring the comfort of the body covered by the clothes, as was often done in the past, the air inside the clothes is passed through the inlet having a filter function. There is no need to forcibly take in air and exhaust it through an outlet with a filter function that is separate from the inlet, and water vapor originating from the body can be dissipated to the outside through the entire fabric of the clothing. Therefore, the breathable part 10 having a filter function provided in the hem part 6 of the clothes is
It is sufficient to cover the natural exhaustion of air from inside the clothes and the natural intake of air into the clothes, and not only does a device for forced ventilation not be required, but also a single ventilation section 10 can be used for natural exhaustion. It can be used both for natural intake and as a result, in addition to being extremely simple in construction, the amount of dust particles that would otherwise be forced to escape from the ventilation part 10 can be reduced by forced ventilation. In comparison, it also has the additional effect of being considerably reduced.

[Brief explanation of drawings]

FIG. 1 shows a conventional dust-free garment, and FIG. 2 is a partial view showing an embodiment of this invention. 1...Upper body part, 2...Lower body part, 4...Collar part, 5...Sleeve part, 6...Hem part, 7, 8, 9...Sealing member, 10...Breathable part.

Claims (1)

[Claims for Utility Model Registration] Made of a fabric with low breathability that only allows water vapor to pass through, the upper body part 1 and the lower body part 2 are made integrally, and the collar part 4, the sleeve part 5, and the hem part 6 for,
In a dust-free garment for a downstream type dust-free room, which is provided with sealing members 7, 8, and 9 for sealing these against the body to be covered, the hem portion 6 has a filter function to naturally discharge air. Dust-free clothing is characterized in that it is provided with a breathable part 10 which also serves as natural inhalation.