JPH01180653U - - Google Patents
Info
- Publication number
- JPH01180653U JPH01180653U JP7111588U JP7111588U JPH01180653U JP H01180653 U JPH01180653 U JP H01180653U JP 7111588 U JP7111588 U JP 7111588U JP 7111588 U JP7111588 U JP 7111588U JP H01180653 U JPH01180653 U JP H01180653U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide rod
- acoustic emission
- test object
- sensor
- fins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111588U JPH01180653U (da) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111588U JPH01180653U (da) | 1988-05-31 | 1988-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01180653U true JPH01180653U (da) | 1989-12-26 |
Family
ID=31296326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7111588U Pending JPH01180653U (da) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01180653U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022594A (ja) * | 2012-07-19 | 2014-02-03 | Tokyo Electron Ltd | 膜割れ検出装置及び成膜装置 |
-
1988
- 1988-05-31 JP JP7111588U patent/JPH01180653U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022594A (ja) * | 2012-07-19 | 2014-02-03 | Tokyo Electron Ltd | 膜割れ検出装置及び成膜装置 |