JPH01180653U - - Google Patents
Info
- Publication number
- JPH01180653U JPH01180653U JP7111588U JP7111588U JPH01180653U JP H01180653 U JPH01180653 U JP H01180653U JP 7111588 U JP7111588 U JP 7111588U JP 7111588 U JP7111588 U JP 7111588U JP H01180653 U JPH01180653 U JP H01180653U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide rod
- acoustic emission
- test object
- sensor
- fins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
第１図はこの考案にかかるアコーステイツクエ
ミツシヨン計測装置の概略斜視図、第２図は導波
棒の取付延長を具体的に示す図、第３図および第
４図はこの考案の他の実施例を示す図、第５図は
従来の実施例を示す図である。
１……被検体、２……センサ、３ａ〜３ｃ……
導波棒、５ａ〜５ｄ……フイン、６，７……取付
座、１４ａ，１４ｃ……ネジ接続部。
Fig. 1 is a schematic perspective view of an acoustic emission measuring device according to this invention, Fig. 2 is a diagram specifically showing the installation extension of a waveguide rod, and Figs. 3 and 4 are other figures of this invention. FIG. 5 is a diagram showing a conventional embodiment. 1... Subject, 2... Sensor, 3a to 3c...
Waveguide rod, 5a to 5d...Fin, 6, 7...Mounting seat, 14a, 14c...Screw connection part.
Claims (1)
体の測定値を電気的信号に変えるアコーステイツ
クエミツシヨン計測装置において、導波棒にフイ
ンを設けるとともに、導波棒の端部にネジ接続部
を形成することを特徴とするアコーステイツクエ
ミツシヨン計測装置。 In an acoustic emission measurement device that has a sensor installed on a waveguide rod that stands upright on the test object and converts the measured value of the test object into an electrical signal, the waveguide rod is provided with fins and a sensor is installed on the end of the waveguide rod. An acoustic emission measuring device characterized by forming a threaded connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111588U JPH01180653U (en) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111588U JPH01180653U (en) | 1988-05-31 | 1988-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01180653U true JPH01180653U (en) | 1989-12-26 |
Family
ID=31296326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7111588U Pending JPH01180653U (en) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01180653U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022594A (en) * | 2012-07-19 | 2014-02-03 | Tokyo Electron Ltd | Film crack detector and deposition apparatus |
-
1988
- 1988-05-31 JP JP7111588U patent/JPH01180653U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022594A (en) * | 2012-07-19 | 2014-02-03 | Tokyo Electron Ltd | Film crack detector and deposition apparatus |
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