JPH01178285U - - Google Patents

Info

Publication number
JPH01178285U
JPH01178285U JP7454688U JP7454688U JPH01178285U JP H01178285 U JPH01178285 U JP H01178285U JP 7454688 U JP7454688 U JP 7454688U JP 7454688 U JP7454688 U JP 7454688U JP H01178285 U JPH01178285 U JP H01178285U
Authority
JP
Japan
Prior art keywords
valve
valve body
primary side
secondary side
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7454688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7454688U priority Critical patent/JPH01178285U/ja
Publication of JPH01178285U publication Critical patent/JPH01178285U/ja
Pending legal-status Critical Current

Links

JP7454688U 1988-06-03 1988-06-03 Pending JPH01178285U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7454688U JPH01178285U (zh) 1988-06-03 1988-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7454688U JPH01178285U (zh) 1988-06-03 1988-06-03

Publications (1)

Publication Number Publication Date
JPH01178285U true JPH01178285U (zh) 1989-12-20

Family

ID=31299655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7454688U Pending JPH01178285U (zh) 1988-06-03 1988-06-03

Country Status (1)

Country Link
JP (1) JPH01178285U (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8770221B2 (en) 2004-12-15 2014-07-08 Toyota Jidosha Kabushiki Kaisha Pressure regulating valve
WO2015064429A1 (ja) * 2013-10-30 2015-05-07 愛三工業 株式会社 減圧弁
WO2019009106A1 (ja) * 2017-07-04 2019-01-10 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8770221B2 (en) 2004-12-15 2014-07-08 Toyota Jidosha Kabushiki Kaisha Pressure regulating valve
US8985141B2 (en) 2004-12-15 2015-03-24 Toyota Jidosha Kabushiki Kaisha Pressure regulating valve
WO2015064429A1 (ja) * 2013-10-30 2015-05-07 愛三工業 株式会社 減圧弁
JP2015087925A (ja) * 2013-10-30 2015-05-07 愛三工業株式会社 減圧弁
US9983599B2 (en) 2013-10-30 2018-05-29 Aisan Kogyo Kabushiki Kaisha Pressure reducing valve
WO2019009106A1 (ja) * 2017-07-04 2019-01-10 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置
KR20200014812A (ko) * 2017-07-04 2020-02-11 가부시키가이샤 후지킨 액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치
JPWO2019009106A1 (ja) * 2017-07-04 2020-04-30 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置
US11047503B2 (en) 2017-07-04 2021-06-29 Fujikin Incorporation Actuator, valve device, and fluid supply system

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