JPH01178120A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01178120A JPH01178120A JP134088A JP134088A JPH01178120A JP H01178120 A JPH01178120 A JP H01178120A JP 134088 A JP134088 A JP 134088A JP 134088 A JP134088 A JP 134088A JP H01178120 A JPH01178120 A JP H01178120A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- magnetic layer
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 74
- 239000010408 film Substances 0.000 claims abstract description 36
- 239000000314 lubricant Substances 0.000 claims abstract description 24
- 239000011148 porous material Substances 0.000 claims abstract description 19
- 238000005260 corrosion Methods 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000007743 anodising Methods 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000010407 anodic oxide Substances 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 abstract description 8
- 239000003112 inhibitor Substances 0.000 abstract 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract 3
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 229910020598 Co Fe Inorganic materials 0.000 description 2
- 229910002519 Co-Fe Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QGLWBTPVKHMVHM-KTKRTIGZSA-N (z)-octadec-9-en-1-amine Chemical compound CCCCCCCC\C=C/CCCCCCCCN QGLWBTPVKHMVHM-KTKRTIGZSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020674 Co—B Inorganic materials 0.000 description 1
- 229910020708 Co—Pd Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- 229910020514 Co—Y Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910002593 Fe-Ti Inorganic materials 0.000 description 1
- OZLGRUXZXMRXGP-UHFFFAOYSA-N Fluo-3 Chemical compound CC1=CC=C(N(CC(O)=O)CC(O)=O)C(OCCOC=2C(=CC=C(C=2)C2=C3C=C(Cl)C(=O)C=C3OC3=CC(O)=C(Cl)C=C32)N(CC(O)=O)CC(O)=O)=C1 OZLGRUXZXMRXGP-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229940057995 liquid paraffin Drugs 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体に係り、特に耐久性ならびに耐食
性に優れた強磁性金属薄膜を磁性層とする磁気記録媒体
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a magnetic recording medium whose magnetic layer is a ferromagnetic metal thin film having excellent durability and corrosion resistance.
現在、一般に流通している多くの磁気記録媒体は、磁性
粉をバインダ中に分散させて、基板上に塗布することに
よって作製した塗布型の磁気記録媒体である。この塗布
型の磁気記録媒体は磁性粉を含んだバインダ中に潤滑剤
を含有せしめることにより良好な耐久性を保持している
。Many magnetic recording media that are currently in circulation are coated magnetic recording media that are manufactured by dispersing magnetic powder in a binder and coating it on a substrate. This coating type magnetic recording medium maintains good durability by containing a lubricant in a binder containing magnetic powder.
例えば、エポキシフェノール系の熱硬化性樹脂と無機粒
子とで構成される多孔質化された磁性層に潤滑剤を含浸
させた磁気記録媒体(特開昭53−104202号公報
)、流動パラフィンなどの有機添加物質を磁性塗料中に
添加し、塗膜硬化時に添加物を熱分解・蒸発させて多孔
質の潤滑性に優れた磁性層を得る方法(特開昭56−3
435号公報、同59−96701号公報)、また最近
、フロッピーディスクなどに適した熱可塑性樹脂を用い
た高密度磁気記録媒体に関し、潤滑剤を下塗り層に含有
させる磁気記録媒体(特開昭61−73235号公報)
など、数多くの提案がなされている。For example, magnetic recording media in which a porous magnetic layer composed of an epoxyphenol-based thermosetting resin and inorganic particles is impregnated with a lubricant (Japanese Patent Application Laid-Open No. 104202/1982), liquid paraffin, etc. A method for obtaining a porous magnetic layer with excellent lubricity by adding organic additives to magnetic paint and thermally decomposing and evaporating the additives during the coating film curing (Japanese Patent Laid-Open No. 56-3
435, No. 59-96701), and recently, regarding high-density magnetic recording media using thermoplastic resin suitable for floppy disks, a magnetic recording medium in which a lubricant is contained in the undercoat layer (Japanese Patent Laid-Open No. 61 -73235 publication)
Many other proposals have been made.
これに対し、近年、高密度磁気記録に適した優れた磁気
特性を持つゆえに、研究開発が活発に進められ実用化が
推進されている強磁性金属薄膜型の磁気記録媒体は、磁
気記録層(磁性層)が金属質であるために磁性層中に潤
滑剤を含有させることができない。このため、磁性層の
表面に各種の潤滑剤などを塗布して磁気記録媒体の耐久
性の向上をはかっている。しかし、潤滑剤の塗布だけで
は磁気ヘッドとの摺接によって潤滑剤層が剥がれてしま
い充分な耐久性を得ることができなかった。In contrast, in recent years, ferromagnetic metal thin film magnetic recording media, which have been actively researched and put into practical use because they have excellent magnetic properties suitable for high-density magnetic recording, have a magnetic recording layer ( Since the magnetic layer (magnetic layer) is made of metal, a lubricant cannot be contained in the magnetic layer. For this reason, various lubricants and the like are applied to the surface of the magnetic layer in an attempt to improve the durability of the magnetic recording medium. However, by simply applying lubricant, the lubricant layer peels off due to sliding contact with the magnetic head, making it impossible to obtain sufficient durability.
上述したごとく、従来の強磁性金属薄膜型の磁気記録媒
体は磁性層表面に潤滑剤や防請剤などを安定して保持さ
せることが難しく、そのため耐久性に劣るという問題が
あった。As mentioned above, conventional ferromagnetic metal thin film type magnetic recording media have a problem in that it is difficult to stably retain lubricants, anti-corrosion agents, etc. on the surface of the magnetic layer, and as a result, durability is poor.
本発明の目的は、上記従来技術の問題点を解消し、潤滑
剤および防請剤の保持が極めて良好で、耐久性ならびに
耐食性に優れた信頼性の高い強磁性金属薄膜型の磁気記
録媒体を提供することにある。An object of the present invention is to solve the problems of the prior art described above, and to provide a highly reliable ferromagnetic metal thin film type magnetic recording medium that retains lubricant and anti-corrosion agent very well, has excellent durability and corrosion resistance, and is highly reliable. It is about providing.
上記本発明の目的は、非磁性の基板上に、アルミニウム
もしくはアルミニウム合金からなる薄膜を設け、これに
陽極酸化処理を施して微細な多数の細孔を有する陽極酸
化膜とした後、ベーパデポジション法によって強磁性金
属薄膜からなる磁性層を成膜して、磁性層に内径が50
〜2000人程度の微細な多数の細孔を形成させ、この
微細な多数の細孔中に潤滑剤もしくは防請剤を含侵させ
ることにより、達成される。The object of the present invention is to provide a thin film made of aluminum or an aluminum alloy on a non-magnetic substrate, perform an anodic oxidation treatment on the thin film to form an anodic oxide film having many fine pores, and then perform vapor deposition. A magnetic layer made of a ferromagnetic metal thin film is formed by a method, and the inner diameter of the magnetic layer is 50 mm.
This is achieved by forming a large number of fine pores of about 2,000 to 2,000 pores, and impregnating a lubricant or an anti-corrosion agent into the large number of fine pores.
すなわち、本発明の磁気記録媒体は、非磁性の基板上に
、直接もしくは非磁性下地層を介して、アルミニウムも
しくはアルミニウム合金からなる薄膜を、真空蒸着法、
スパッタリング法、イオンブレーティング法などのベー
パデポジション法によって形成し、これに陽極酸化処理
を施して、微細な多数の細孔を有するアルミニウムもし
くはアルミニウム合金からなる陽極酸化膜となし、この
陽極酸化膜上に、直接もしくはTi、Ge、Orなどの
磁性層の結晶配向制御膜を介して、ベーパデポジション
法によって強磁性金属薄膜よりなる磁性層を成膜するこ
とにより微細な多数の細孔を有する磁性層を形成させ、
上記微細な多数の細孔中に潤滑剤および防請剤のうちの
少なくとも1種を含侵させるか、もしくは上記磁性層の
上にSi。That is, in the magnetic recording medium of the present invention, a thin film made of aluminum or an aluminum alloy is deposited on a non-magnetic substrate directly or through a non-magnetic underlayer by vacuum evaporation,
It is formed by a vapor deposition method such as sputtering method or ion blasting method, and then anodized to form an anodic oxide film made of aluminum or aluminum alloy with many fine pores. A magnetic layer made of a ferromagnetic metal thin film is formed on top of the magnetic layer by a vapor deposition method, either directly or through a crystal orientation control film of a magnetic layer such as Ti, Ge, Or, etc., thereby forming a large number of fine pores. forming a magnetic layer;
At least one of a lubricant and an anti-corrosion agent is impregnated into the large number of fine pores, or Si is impregnated on the magnetic layer.
B、Cなどの硬質の保護膜を設けた後、上記微細な多数
の細孔中に潤滑剤または防請剤を含侵させた磁気記録媒
体とすることによって、磁気記録媒体の表面部に、常に
潤滑剤あるいは防請剤の適量が供給され、耐久性ならび
に耐食性が一段と向上することになる。After providing a hard protective film such as B or C, a magnetic recording medium is prepared in which a lubricant or anti-corrosion agent is impregnated into the large number of minute pores. An appropriate amount of lubricant or anti-corrosion agent is always supplied, further improving durability and corrosion resistance.
本発明の磁気記録媒体において、使用する潤滑剤および
防請剤は一般に用いられているものを好適に使用するこ
とができ、特にその種類を限定するものではない。In the magnetic recording medium of the present invention, commonly used lubricants and anti-corrosion agents can be suitably used, and the types thereof are not particularly limited.
本発明の磁気記録媒体において、磁性層を構成する強磁
性金属材料としては、Co、Ni、Feなどの単体金属
、もしくはこれらの合金、さらにFe−9i、Fe−R
h、Fe−V、Fe−Ti、Co−P、Co−B、Co
−Ti、Co−Fe、Co−Pd。In the magnetic recording medium of the present invention, the ferromagnetic metal material constituting the magnetic layer may include single metals such as Co, Ni, and Fe, or alloys thereof, as well as Fe-9i and Fe-R.
h, Fe-V, Fe-Ti, Co-P, Co-B, Co
-Ti, Co-Fe, Co-Pd.
Co−5i、Co−V、Co−Y、Co−3m、Co−
Mn、Go−Ni、Co−N1−P、Go−Ni−B。Co-5i, Co-V, Co-Y, Co-3m, Co-
Mn, Go-Ni, Co-N1-P, Go-Ni-B.
Co−Cr、Co−Ni−Cr、Co−Ni−Ag、C
o−Ni−Pd、Co−Ni−Zn、Co−Cu、Co
−Ni−Cu、Co−W、Co−N1−W、Co−Fe
−Cr。Co-Cr, Co-Ni-Cr, Co-Ni-Ag, C
o-Ni-Pd, Co-Ni-Zn, Co-Cu, Co
-Ni-Cu, Co-W, Co-N1-W, Co-Fe
-Cr.
Go−Mn−P、Go−8m−Cu、Co−N1−Zn
−P、Co−V−Crなどを好適に用いることができる
。Go-Mn-P, Go-8m-Cu, Co-N1-Zn
-P, Co-V-Cr, etc. can be suitably used.
また1本発明の磁気記録媒体は、ポリエチレンテレフタ
レート、ポリエステル、ポリイミド、ポリアミド、ポリ
塩化ビニルなどの合成樹脂フィルム、あるいはこれらの
中にSL、 Cu、 Ti、 Fe。Further, the magnetic recording medium of the present invention is a synthetic resin film such as polyethylene terephthalate, polyester, polyimide, polyamide, polyvinyl chloride, etc., or a film containing SL, Cu, Ti, or Fe in these.
AQ、Crの粒子、またはこれらの酸化物粒子、もしく
はグラファイト、二硫化モリブデン、炭素繊維などを混
入した基体、さらにはAQ、Af1合金、Ti、Ti合
金、CuまたはZnなどからなる基体、ガラスなどの無
機質材料を基体とするテープ。Substrates mixed with AQ, Cr particles, or their oxide particles, or graphite, molybdenum disulfide, carbon fiber, etc., as well as substrates made of AQ, Af1 alloy, Ti, Ti alloy, Cu, Zn, etc., glass, etc. Tape based on inorganic material.
シート、カード、ディスク、ドラムなど、磁気ヘッドな
どと摺接する構造の磁気記録媒体に適用することができ
る。It can be applied to magnetic recording media such as sheets, cards, disks, drums, etc. that have a structure that makes sliding contact with a magnetic head.
以下に本発明の一実施例を挙げ、図面を参照しながらさ
らに詳細に説明する。An embodiment of the present invention will be described below in more detail with reference to the drawings.
(実施例1)
第1図に示すフロッピーディスクを、以下に示す手順に
よって作製した。(Example 1) The floppy disk shown in FIG. 1 was manufactured by the procedure shown below.
99.9%の高純度AQを蒸発源材料として、バッチ式
真空蒸着法によって、厚さ50/711のポリイミド−
フィルムからなる基板6上に、厚さ0.2.mのAQ蒸
着膜を形成させた。この時の蒸着条件は、蒸着時の真空
度が5 X 10”” Torr、成膜速度が20人/
Sであった。ついで、5wt(重量)%水酸化ナトリウ
ム溶液中に浸漬して、上記AQ蒸着膜の表面酸化物層を
除去し、水洗後、5モル%の硝酸溶液で中和し、水洗し
た後、1モル/Qの濃度の硫酸に5g/Ωの硫酸アルミ
ニウムを加えた溶液中で陽極酸化処理を行い、厚さが0
.2−のAQの陽極酸化膜5を形成させた。これを、1
重量%のリン酸溶液中に浸漬して、AQの陽極酸化膜5
に形成された微細な孔のボア径の拡大処理を行った。つ
いで、バッチ式の真空蒸着法により、上記Aflの陽極
酸化膜5上に、99.9%の高純度Tiを蒸発源材料と
して、厚さ0.02−のTi下地層4を形成し。Using 99.9% high purity AQ as the evaporation source material, a polyimide film with a thickness of 50/711 was fabricated by a batch vacuum evaporation method.
A film with a thickness of 0.2. An AQ deposited film of m was formed. The evaporation conditions at this time were a vacuum level of 5 x 10” Torr and a film formation rate of 20 people/deposition.
It was S. Next, the surface oxide layer of the above AQ vapor-deposited film was removed by immersing it in a 5 wt% (weight) sodium hydroxide solution, and after washing with water, it was neutralized with a 5 mol% nitric acid solution, and after washing with water, a 1 mol. Anodizing was performed in a solution of sulfuric acid with a concentration of /Q and aluminum sulfate of 5 g/Ω, and the thickness was 0.
.. An anodic oxide film 5 of AQ 2- was formed. This is 1
The anodic oxide film 5 of AQ was immersed in a phosphoric acid solution of 5% by weight.
We carried out processing to enlarge the bore diameter of the fine holes formed in the . Next, by a batch vacuum evaporation method, a 0.02-thick Ti base layer 4 was formed on the Afl anodic oxide film 5 using 99.9% high purity Ti as an evaporation source material.
その上に、Co90 w t%−CrlOw t%金合
金蒸着源材料として、厚さ0.2.のCo80wt%−
Cr20wt%合金からなるCo−Cr磁性層3を形成
させ、さらにその上に、 99.9%の高純度Siを蒸
発源材料として、厚さ0.027mのSi保護膜2を形
成させた。On top of that, as a Co90 wt%-CrlOwt% gold alloy deposition source material, a thickness of 0.2. Co80wt%-
A Co--Cr magnetic layer 3 made of a 20 wt % Cr alloy was formed, and a Si protective film 2 with a thickness of 0.027 m was formed thereon using 99.9% high purity Si as an evaporation source material.
上記の成膜条件は、蒸着時の真空度5XIO−’T o
rr 、蒸着直前の基板温度が150℃、成膜速度は、
それぞれ10人/s、50人/s、10人/Sであった
。The above film forming conditions are as follows: degree of vacuum during evaporation: 5XIO-'T o
rr, the substrate temperature immediately before deposition is 150°C, and the film formation rate is:
They were 10 people/s, 50 people/s, and 10 people/s, respectively.
このように作製した磁性フィルムを、潤滑剤であるフオ
ンブリン(Fow+brin) DOL (モンテフロ
ース(MONTE FLUO3)社製商品名〕の0.1
wt%希釈液(溶媒としてフレオン使用)に浸漬し、上
記へΩの陽極酸化処理によって形成された微細な孔の中
に充分に浸透させた後、スピナで余剰の潤滑剤を振り落
として除去し、潤滑剤層1を形成させて、第1図に示す
断面構造を有する5インチ径のフロッピーディスクを作
製した。The magnetic film produced in this way was coated with 0.1% of the lubricant Fow+brin DOL (trade name manufactured by MONTE FLUO3).
After immersing the lubricant in wt% diluted solution (using Freon as a solvent) and allowing it to fully penetrate into the fine pores formed by the anodizing treatment of Ω above, remove the excess lubricant by shaking it off with a spinner. A 5-inch diameter floppy disk having a cross-sectional structure shown in FIG. 1 was prepared by forming a lubricant layer 1.
(実施例2)
第2図に示す真空蒸着装置によって、厚さ10゜のポリ
エチレンテレフタレートフィルムよりなる基板6上に、
厚さ0.2−のAQ蒸着膜を形成した。(Example 2) Using the vacuum evaporation apparatus shown in FIG.
A 0.2-thick AQ vapor deposited film was formed.
蒸着時の真空度は5 X 10−’ T orrで、成
膜速度は200人/Sであった0次に、このAQ蒸着膜
を、第3図に示す陽極酸化装置によって、厚さ0.2−
のAQの陽極酸化膜を形成させた。次に、上記第3図に
示す同じ陽極酸化装置を用いて、実施例1と同様の条件
で、AQの陽極酸化膜に形成された微細な孔のボア径の
拡大処理を行い、ついで第4図に示す真空蒸着装置によ
って、AQの陽極酸化膜上に、厚さ0.2−のCo80
w t%−N i20 w t%の磁性層を形成させ
た。蒸着時の真空度は5X10−’T orr +成膜
速度は1000人/Sであった。以上の手順で作製した
磁性フィルムを、オレイルアミンの0.5wt%希釈液
(溶媒としてメチルイソブチルケトンを使用)を塗布し
て、第5図に示す断面構造の磁気テープを作製した。The degree of vacuum during vapor deposition was 5 x 10-' Torr, and the film-forming rate was 200 people/s. Next, this AQ vapor-deposited film was processed to a thickness of 0.05 mm using the anodization apparatus shown in FIG. 2-
An anodic oxide film of AQ was formed. Next, using the same anodic oxidation apparatus shown in FIG. Using the vacuum evaporation apparatus shown in the figure, Co80 with a thickness of 0.2-
A magnetic layer of wt%-Ni20 wt% was formed. The degree of vacuum during vapor deposition was 5×10 −′ Torr + the film formation rate was 1000 people/S. A 0.5 wt % diluted solution of oleylamine (methyl isobutyl ketone was used as a solvent) was applied to the magnetic film produced by the above procedure to produce a magnetic tape having the cross-sectional structure shown in FIG. 5.
(比較例1)
Aの蒸着膜の陽極酸化処理およびボア径の拡大処理を行
わない他は、実施例1と同様にして5インチ径のフロッ
ピーディスクを作製した。(Comparative Example 1) A 5-inch diameter floppy disk was produced in the same manner as in Example 1, except that the anodic oxidation treatment of the deposited film of A and the bore diameter enlargement treatment were not performed.
(比較例2)
Aの蒸着膜の陽極酸化処理およびボア径の拡大処理を行
わない他は、実施例2と同様にして磁気テープを作製し
た。(Comparative Example 2) A magnetic tape was produced in the same manner as in Example 2, except that the anodic oxidation treatment of the deposited film of A and the bore diameter enlargement treatment were not performed.
以上の実施例および比較例において作製した磁気ディス
クおよび磁気テープについて、耐久性は。What is the durability of the magnetic disks and magnetic tapes produced in the above Examples and Comparative Examples?
市販の5インチ径のフロッピーディスク装置で繰り返し
摺動させた時に、再生出力が初期の値より2dB低下す
るまでの摺動回数によって評価し、耐食性は、温度が3
5℃、RHが75%で、5o21 PPmp H2S
0.5ppm、 NOx I PPm含む雰囲気中に1
00時間放置した時に、磁性層中に浸入した硫黄・量を
、XMA (X線マイクロアナライザー)分析により測
定し評価した。その結果を、第1表および第2表に示す
。Corrosion resistance is evaluated by the number of times a commercially available 5-inch diameter floppy disk is slid repeatedly until the playback output drops by 2 dB from the initial value.
5o21 PPmp H2S at 5°C and 75% RH
1 in an atmosphere containing 0.5 ppm, NOx I PPm
The amount of sulfur infiltrated into the magnetic layer after being left for 00 hours was measured and evaluated by XMA (X-ray microanalyzer) analysis. The results are shown in Tables 1 and 2.
第 1 表
第 2 表
第1表から明らかなごとく、本発明の5インチ径のフロ
ッピーディスクは摺動回数が著しく増大し、耐久性が一
段と優れていることが分がる。また、第2表からも明ら
かなごとく、本発明の磁気テープは、磁性層に浸入する
硫黄量が少なく、極めて耐食性に優れていることが分か
る。As is clear from Tables 1 and 2, it can be seen that the 5-inch diameter floppy disk of the present invention has a significantly increased number of sliding operations and is further superior in durability. Further, as is clear from Table 2, the magnetic tape of the present invention has a small amount of sulfur penetrating into the magnetic layer, and has extremely excellent corrosion resistance.
以上詳細に説明したごとく5本発明のアルミニウムもし
くはアルミニウム合金薄膜を陽極酸化させて形成した微
細な多数の細孔を有する陽極酸化膜上に、強磁性金属薄
膜を成膜することにより、微細な多数の細孔を有する磁
性層を形成させて、上記微細な多数の細孔中に、潤滑剤
あるいは防請剤を含浸させた強磁性金属薄膜よりなる磁
気記録媒体は、耐久性ならびに耐食性が一段と優れ、極
めて信頼性の高い磁気記録媒体が得られる。As explained in detail above, by forming a ferromagnetic metal thin film on the anodic oxide film having many fine pores formed by anodizing the aluminum or aluminum alloy thin film of the present invention, A magnetic recording medium made of a ferromagnetic metal thin film in which a magnetic layer with pores is formed, and a lubricant or an anti-corrosion agent is impregnated into the many fine pores has superior durability and corrosion resistance. , an extremely reliable magnetic recording medium can be obtained.
第1@は本発明の実施例1において作製したフロッピー
ディスクの断面構造を示す模式図、第2図は本発明の実
施例2において用いた真空蒸着装置の構造を示す模式図
、第3図は実施例2において用いたAQの陽極酸化装置
の構造を示す模式図、第4図は実施例2において用いた
真空蒸着装置の構造を示す模式図、第5図は実施例2に
おいて作製した磁気テープの断面構造を示す模式図であ
る。
1・・・潤滑剤 2・・・Si保護膜3・・・
Co−Cr磁性層 4・・・Ti下地層5・・・陽極酸
化膜 6・・・基板7・・・供給ロール 8・
・・補助ロール9・・・回転ドラム 10・・・巻
取ロール11・・・AQ蒸発源 12・・・電子銃
13・・・給電ロール 14・・・陰極板15−C
o−Ni蒸発源 16−Co−Ni磁性層17・・・防
請剤
代理人弁理士 中 村 純之助
第3図
第4図1@ is a schematic diagram showing the cross-sectional structure of the floppy disk manufactured in Example 1 of the present invention, FIG. 2 is a schematic diagram showing the structure of the vacuum evaporation apparatus used in Example 2 of the present invention, and FIG. A schematic diagram showing the structure of the AQ anodizing device used in Example 2, FIG. 4 is a schematic diagram showing the structure of the vacuum evaporation device used in Example 2, and FIG. 5 shows the magnetic tape produced in Example 2. FIG. 2 is a schematic diagram showing the cross-sectional structure of the 1...Lubricant 2...Si protective film 3...
Co-Cr magnetic layer 4...Ti underlayer 5...anodized film 6...substrate 7...supply roll 8.
... Auxiliary roll 9 ... Rotating drum 10 ... Winding roll 11 ... AQ evaporation source 12 ... Electron gun 13 ... Power supply roll 14 ... Cathode plate 15-C
o-Ni evaporation source 16-Co-Ni magnetic layer 17... Anti-contract agent Patent attorney Junnosuke Nakamura Figure 3 Figure 4
Claims (1)
して、アルミニウムもしくはアルミニウム合金薄膜を陽
極酸化することにより形成させた、微細な細孔を有する
陽極酸化膜を設け、該陽極酸化膜上に強磁性金属薄膜か
らなる磁性層を成膜することにより、微細な細孔を有す
る磁性層を形成させ、上記微細な細孔中に潤滑剤および
防請剤のうちの少なくとも1種を含浸させたことを特徴
とする磁気記録媒体。 2、陽極酸化膜上に、磁性層の結晶配向性を制御する結
晶配向制御膜を設けたことを特徴とする特許請求の範囲
第1項に記載の磁気記録媒体。 3、磁性層上に保護膜を設けたことを特徴とする特許請
求の範囲第1項または第2項に記載の磁気記録媒体。[Claims] 1. An anodic oxide film with fine pores formed on a non-magnetic substrate by anodizing an aluminum or aluminum alloy thin film directly or through a non-magnetic underlayer. By forming a magnetic layer made of a ferromagnetic metal thin film on the anodic oxide film, a magnetic layer having fine pores is formed, and a lubricant and anti-corrosion agent are added to the fine pores. A magnetic recording medium characterized in that it is impregnated with at least one kind of. 2. The magnetic recording medium according to claim 1, further comprising a crystal orientation control film for controlling crystal orientation of the magnetic layer provided on the anodic oxide film. 3. The magnetic recording medium according to claim 1 or 2, characterized in that a protective film is provided on the magnetic layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP134088A JPH01178120A (en) | 1988-01-08 | 1988-01-08 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP134088A JPH01178120A (en) | 1988-01-08 | 1988-01-08 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01178120A true JPH01178120A (en) | 1989-07-14 |
Family
ID=11498766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP134088A Pending JPH01178120A (en) | 1988-01-08 | 1988-01-08 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01178120A (en) |
-
1988
- 1988-01-08 JP JP134088A patent/JPH01178120A/en active Pending
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