JPH01177267U - - Google Patents

Info

Publication number
JPH01177267U
JPH01177267U JP1988072444U JP7244488U JPH01177267U JP H01177267 U JPH01177267 U JP H01177267U JP 1988072444 U JP1988072444 U JP 1988072444U JP 7244488 U JP7244488 U JP 7244488U JP H01177267 U JPH01177267 U JP H01177267U
Authority
JP
Japan
Prior art keywords
substrate
target
thin film
superconducting thin
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988072444U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988072444U priority Critical patent/JPH01177267U/ja
Publication of JPH01177267U publication Critical patent/JPH01177267U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
JP1988072444U 1988-05-31 1988-05-31 Pending JPH01177267U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988072444U JPH01177267U (enrdf_load_stackoverflow) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988072444U JPH01177267U (enrdf_load_stackoverflow) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01177267U true JPH01177267U (enrdf_load_stackoverflow) 1989-12-18

Family

ID=31297612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988072444U Pending JPH01177267U (enrdf_load_stackoverflow) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01177267U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0211757A (ja) * 1988-06-28 1990-01-16 Shimadzu Corp スパッタリング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0211757A (ja) * 1988-06-28 1990-01-16 Shimadzu Corp スパッタリング装置

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