JPH01174935U - - Google Patents

Info

Publication number
JPH01174935U
JPH01174935U JP7227688U JP7227688U JPH01174935U JP H01174935 U JPH01174935 U JP H01174935U JP 7227688 U JP7227688 U JP 7227688U JP 7227688 U JP7227688 U JP 7227688U JP H01174935 U JPH01174935 U JP H01174935U
Authority
JP
Japan
Prior art keywords
carrier
wafer
semiconductor wafers
base portion
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7227688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7227688U priority Critical patent/JPH01174935U/ja
Publication of JPH01174935U publication Critical patent/JPH01174935U/ja
Pending legal-status Critical Current

Links

JP7227688U 1988-05-30 1988-05-30 Pending JPH01174935U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7227688U JPH01174935U (US20100056889A1-20100304-C00004.png) 1988-05-30 1988-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7227688U JPH01174935U (US20100056889A1-20100304-C00004.png) 1988-05-30 1988-05-30

Publications (1)

Publication Number Publication Date
JPH01174935U true JPH01174935U (US20100056889A1-20100304-C00004.png) 1989-12-13

Family

ID=31297449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7227688U Pending JPH01174935U (US20100056889A1-20100304-C00004.png) 1988-05-30 1988-05-30

Country Status (1)

Country Link
JP (1) JPH01174935U (US20100056889A1-20100304-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389675A (en) * 1977-01-19 1978-08-07 Hitachi Ltd Jig pair for wafer transfer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389675A (en) * 1977-01-19 1978-08-07 Hitachi Ltd Jig pair for wafer transfer

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