JPH01174921U - - Google Patents
Info
- Publication number
- JPH01174921U JPH01174921U JP7136588U JP7136588U JPH01174921U JP H01174921 U JPH01174921 U JP H01174921U JP 7136588 U JP7136588 U JP 7136588U JP 7136588 U JP7136588 U JP 7136588U JP H01174921 U JPH01174921 U JP H01174921U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- semiconductor wafer
- semiconductor
- insulating film
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000007664 blowing Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7136588U JPH01174921U (en, 2012) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7136588U JPH01174921U (en, 2012) | 1988-05-30 | 1988-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01174921U true JPH01174921U (en, 2012) | 1989-12-13 |
Family
ID=31296573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7136588U Pending JPH01174921U (en, 2012) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01174921U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61296726A (ja) * | 1985-06-25 | 1986-12-27 | Nec Corp | 半導体装置の製造方法 |
| JPS62228472A (ja) * | 1986-03-31 | 1987-10-07 | Canon Inc | 堆積膜形成法 |
-
1988
- 1988-05-30 JP JP7136588U patent/JPH01174921U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61296726A (ja) * | 1985-06-25 | 1986-12-27 | Nec Corp | 半導体装置の製造方法 |
| JPS62228472A (ja) * | 1986-03-31 | 1987-10-07 | Canon Inc | 堆積膜形成法 |