JPH01174844U - - Google Patents
Info
- Publication number
- JPH01174844U JPH01174844U JP7111988U JP7111988U JPH01174844U JP H01174844 U JPH01174844 U JP H01174844U JP 7111988 U JP7111988 U JP 7111988U JP 7111988 U JP7111988 U JP 7111988U JP H01174844 U JPH01174844 U JP H01174844U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage device
- sample stage
- rotary table
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111988U JPH01174844U (ar) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7111988U JPH01174844U (ar) | 1988-05-31 | 1988-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01174844U true JPH01174844U (ar) | 1989-12-12 |
Family
ID=31296330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7111988U Pending JPH01174844U (ar) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01174844U (ar) |
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1988
- 1988-05-31 JP JP7111988U patent/JPH01174844U/ja active Pending