JPH01174594U - - Google Patents

Info

Publication number
JPH01174594U
JPH01174594U JP7069888U JP7069888U JPH01174594U JP H01174594 U JPH01174594 U JP H01174594U JP 7069888 U JP7069888 U JP 7069888U JP 7069888 U JP7069888 U JP 7069888U JP H01174594 U JPH01174594 U JP H01174594U
Authority
JP
Japan
Prior art keywords
pump body
magnetic bearing
control circuit
turbo
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7069888U
Other languages
English (en)
Japanese (ja)
Other versions
JP2527246Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988070698U priority Critical patent/JP2527246Y2/ja
Publication of JPH01174594U publication Critical patent/JPH01174594U/ja
Application granted granted Critical
Publication of JP2527246Y2 publication Critical patent/JP2527246Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988070698U 1988-05-27 1988-05-27 制御形磁気軸受タ−ボ分子ポンプ Expired - Lifetime JP2527246Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070698U JP2527246Y2 (ja) 1988-05-27 1988-05-27 制御形磁気軸受タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070698U JP2527246Y2 (ja) 1988-05-27 1988-05-27 制御形磁気軸受タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH01174594U true JPH01174594U (enrdf_load_stackoverflow) 1989-12-12
JP2527246Y2 JP2527246Y2 (ja) 1997-02-26

Family

ID=31295928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070698U Expired - Lifetime JP2527246Y2 (ja) 1988-05-27 1988-05-27 制御形磁気軸受タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP2527246Y2 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617044U (enrdf_load_stackoverflow) * 1979-07-17 1981-02-14
JPS6140510U (ja) * 1984-08-16 1986-03-14 セイコー精機株式会社 磁気軸受装置
JPS61277896A (ja) * 1985-05-31 1986-12-08 Shimadzu Corp タ−ボ分子ポンプの磁気軸受装置
JPH056418U (ja) * 1991-07-15 1993-01-29 三菱プレシジヨン株式会社 訓練装置用望遠鏡

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617044U (enrdf_load_stackoverflow) * 1979-07-17 1981-02-14
JPS6140510U (ja) * 1984-08-16 1986-03-14 セイコー精機株式会社 磁気軸受装置
JPS61277896A (ja) * 1985-05-31 1986-12-08 Shimadzu Corp タ−ボ分子ポンプの磁気軸受装置
JPH056418U (ja) * 1991-07-15 1993-01-29 三菱プレシジヨン株式会社 訓練装置用望遠鏡

Also Published As

Publication number Publication date
JP2527246Y2 (ja) 1997-02-26

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