JPH01173940U - - Google Patents

Info

Publication number
JPH01173940U
JPH01173940U JP6892788U JP6892788U JPH01173940U JP H01173940 U JPH01173940 U JP H01173940U JP 6892788 U JP6892788 U JP 6892788U JP 6892788 U JP6892788 U JP 6892788U JP H01173940 U JPH01173940 U JP H01173940U
Authority
JP
Japan
Prior art keywords
wafer
cassette
placement section
section
setter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6892788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6892788U priority Critical patent/JPH01173940U/ja
Publication of JPH01173940U publication Critical patent/JPH01173940U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP6892788U 1988-05-25 1988-05-25 Pending JPH01173940U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6892788U JPH01173940U (US06826419-20041130-M00005.png) 1988-05-25 1988-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6892788U JPH01173940U (US06826419-20041130-M00005.png) 1988-05-25 1988-05-25

Publications (1)

Publication Number Publication Date
JPH01173940U true JPH01173940U (US06826419-20041130-M00005.png) 1989-12-11

Family

ID=31294221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6892788U Pending JPH01173940U (US06826419-20041130-M00005.png) 1988-05-25 1988-05-25

Country Status (1)

Country Link
JP (1) JPH01173940U (US06826419-20041130-M00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04369243A (ja) * 1991-06-17 1992-12-22 Nissin Electric Co Ltd ウエ−ハ−搬送機構
US8500916B2 (en) 2004-11-05 2013-08-06 HGST Netherlands B.V. Method for aligning wafers within wafer processing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04369243A (ja) * 1991-06-17 1992-12-22 Nissin Electric Co Ltd ウエ−ハ−搬送機構
US8500916B2 (en) 2004-11-05 2013-08-06 HGST Netherlands B.V. Method for aligning wafers within wafer processing equipment

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