JPH01173933U - - Google Patents
Info
- Publication number
- JPH01173933U JPH01173933U JP7042388U JP7042388U JPH01173933U JP H01173933 U JPH01173933 U JP H01173933U JP 7042388 U JP7042388 U JP 7042388U JP 7042388 U JP7042388 U JP 7042388U JP H01173933 U JPH01173933 U JP H01173933U
- Authority
- JP
- Japan
- Prior art keywords
- wafer processing
- partition plate
- tank
- grooves parallel
- processing tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 5
- 238000003672 processing method Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005406 washing Methods 0.000 description 3
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988070423U JPH083000Y2 (ja) | 1988-05-30 | 1988-05-30 | ウエハ処理槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988070423U JPH083000Y2 (ja) | 1988-05-30 | 1988-05-30 | ウエハ処理槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173933U true JPH01173933U (OSRAM) | 1989-12-11 |
| JPH083000Y2 JPH083000Y2 (ja) | 1996-01-29 |
Family
ID=31295666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988070423U Expired - Lifetime JPH083000Y2 (ja) | 1988-05-30 | 1988-05-30 | ウエハ処理槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083000Y2 (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106136A (ja) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | 薄板状体の洗浄装置 |
-
1988
- 1988-05-30 JP JP1988070423U patent/JPH083000Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106136A (ja) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | 薄板状体の洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH083000Y2 (ja) | 1996-01-29 |