JPH01173930U - - Google Patents

Info

Publication number
JPH01173930U
JPH01173930U JP6898188U JP6898188U JPH01173930U JP H01173930 U JPH01173930 U JP H01173930U JP 6898188 U JP6898188 U JP 6898188U JP 6898188 U JP6898188 U JP 6898188U JP H01173930 U JPH01173930 U JP H01173930U
Authority
JP
Japan
Prior art keywords
gas
furnace
wafer heat
furnace body
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6898188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6898188U priority Critical patent/JPH01173930U/ja
Publication of JPH01173930U publication Critical patent/JPH01173930U/ja
Pending legal-status Critical Current

Links

JP6898188U 1988-05-25 1988-05-25 Pending JPH01173930U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6898188U JPH01173930U (US06589383-20030708-C00041.png) 1988-05-25 1988-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6898188U JPH01173930U (US06589383-20030708-C00041.png) 1988-05-25 1988-05-25

Publications (1)

Publication Number Publication Date
JPH01173930U true JPH01173930U (US06589383-20030708-C00041.png) 1989-12-11

Family

ID=31294273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6898188U Pending JPH01173930U (US06589383-20030708-C00041.png) 1988-05-25 1988-05-25

Country Status (1)

Country Link
JP (1) JPH01173930U (US06589383-20030708-C00041.png)

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