JPH01173744U - - Google Patents

Info

Publication number
JPH01173744U
JPH01173744U JP1988070544U JP7054488U JPH01173744U JP H01173744 U JPH01173744 U JP H01173744U JP 1988070544 U JP1988070544 U JP 1988070544U JP 7054488 U JP7054488 U JP 7054488U JP H01173744 U JPH01173744 U JP H01173744U
Authority
JP
Japan
Prior art keywords
support frame
pellicle
adhesive
flexible sheet
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988070544U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0624839Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988070544U priority Critical patent/JPH0624839Y2/ja
Publication of JPH01173744U publication Critical patent/JPH01173744U/ja
Application granted granted Critical
Publication of JPH0624839Y2 publication Critical patent/JPH0624839Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1988070544U 1988-05-28 1988-05-28 ペリクル収納容器 Expired - Lifetime JPH0624839Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070544U JPH0624839Y2 (ja) 1988-05-28 1988-05-28 ペリクル収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070544U JPH0624839Y2 (ja) 1988-05-28 1988-05-28 ペリクル収納容器

Publications (2)

Publication Number Publication Date
JPH01173744U true JPH01173744U (US06272168-20010807-M00014.png) 1989-12-11
JPH0624839Y2 JPH0624839Y2 (ja) 1994-06-29

Family

ID=31295780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070544U Expired - Lifetime JPH0624839Y2 (ja) 1988-05-28 1988-05-28 ペリクル収納容器

Country Status (1)

Country Link
JP (1) JPH0624839Y2 (US06272168-20010807-M00014.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007334069A (ja) * 2006-06-16 2007-12-27 Asahi Kasei Electronics Co Ltd ペリクル収納容器
JP2013145328A (ja) * 2012-01-16 2013-07-25 Shin Etsu Chem Co Ltd ペリクル収納容器及びペリクル保管方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007334069A (ja) * 2006-06-16 2007-12-27 Asahi Kasei Electronics Co Ltd ペリクル収納容器
JP2013145328A (ja) * 2012-01-16 2013-07-25 Shin Etsu Chem Co Ltd ペリクル収納容器及びペリクル保管方法

Also Published As

Publication number Publication date
JPH0624839Y2 (ja) 1994-06-29

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