JPH01173655U - - Google Patents

Info

Publication number

JPH01173655U

JPH01173655U JP7028788U JP7028788U JPH01173655U JP H01173655 U JPH01173655 U JP H01173655U JP 7028788 U JP7028788 U JP 7028788U JP 7028788 U JP7028788 U JP 7028788U JP H01173655 U JPH01173655 U JP H01173655U

Authority

JP

Japan

Prior art keywords

pedestal

pressure

sensitive

semiconductor

semiconductor element

Prior art date

1988-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 11
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 229910052710 silicon Inorganic materials 0.000 claims 2
• 239000010703 silicon Substances 0.000 claims 2
• 239000011810 insulating material Substances 0.000 claims 1
• 238000000926 separation method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000011521 glass Substances 0.000 description 1
• 238000007789 sealing Methods 0.000 description 1

Cited By (1)