JPH01173157U - - Google Patents
Info
- Publication number
- JPH01173157U JPH01173157U JP6771388U JP6771388U JPH01173157U JP H01173157 U JPH01173157 U JP H01173157U JP 6771388 U JP6771388 U JP 6771388U JP 6771388 U JP6771388 U JP 6771388U JP H01173157 U JPH01173157 U JP H01173157U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- raw material
- pipe
- inner tube
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6771388U JPH01173157U (enExample) | 1988-05-23 | 1988-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6771388U JPH01173157U (enExample) | 1988-05-23 | 1988-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173157U true JPH01173157U (enExample) | 1989-12-08 |
Family
ID=31293072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6771388U Pending JPH01173157U (enExample) | 1988-05-23 | 1988-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173157U (enExample) |
-
1988
- 1988-05-23 JP JP6771388U patent/JPH01173157U/ja active Pending
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