JPH01172624A - Rotary supporting mechanism - Google Patents

Abstract

PURPOSE:To prevent the breakage of the holding surfaces of the first and second members and improve durability by alternately arranging the large diameter balls and the small diameter balls between the first and second members. CONSTITUTION:A plurality of balls 13 are arranged between the first and second members 11 and 12 arranged on a same shaft. These balls 13 consist of the large and small diameter balls 13a and 13b, and arranged alternately in a holding part 14 which is formed by the first and second member 11 and 12. In this constitution, when one among the first and second members 11 and 12 is revolved, the large diameter ball 13a revolves, keeping a proper interval in the holding part 14, and the small diameter ball 13b is pressed onto the large diameter ball 13a, and rolls on the second member 12 through light rubbing. Therefore, the squeaking and rubbing which are generated between the contiguous large diameter ball 13a and the small diameter ball 13b is mitigated.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a rotation support mechanism for rotatably supporting various rotating members, for example, a rotation support mechanism for rotatably supporting a substrate holder in a vacuum evaporation apparatus. It is used for etc.

(Prior Art) As shown in FIGS. 6 and 7, a conventional rotation support mechanism includes a plurality of balls having the same diameter between a first member a and a second member a, each of which is formed in an annular shape. C... is interposed, and a first member a connected to an appropriate rotating member is rotatably held with respect to a second member provided on a fixed member d.

(Problems to be Solved by the Invention) However, in the conventional rotation support mechanism described above, the balls C interposed between the first member a and the second member a are all formed to have the same diameter. When the first member a is rotating as shown in Fig. 7, these balls C are restrained from above and below by the first member a and the second member and rotate in the same direction. Therefore, the adjacent balls c and c rotate while squeaking and rubbing with strong force. This causes a problem in that the surface of the ball C and the holding surfaces of both members a and b that hold the ball C are worn and damaged, resulting in poor durability.

(Means for Solving the Problems) In the rotation support mechanism of the present invention, a plurality of balls or rollers are interposed on the same circumference between the first member and the second member, and the first
In a rotation support mechanism in which one of the member and the second member is a rotating body and is supported rotatably relative to the other, the balls or rollers are large-diameter balls or rollers. and balls or rollers with at least a smaller diameter than the larger diameter balls or rollers, and these balls or rollers with different diameters are arranged alternately.

(Function) By alternately arranging large-diameter balls or rollers and small-diameter balls or rollers on the same circumference between the first member and the second member, large-diameter balls or rollers ( In other words, only the rollers rotate while being restrained from above and below by the first and second members, and the small-diameter balls placed on the large-diameter dirt floor rotate under the action of the large-diameter balls. , to reduce the wear that acts on these adjacent large-diameter balls and small-diameter balls.

(Example) Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a vacuum evaporation apparatus in which a rotation support mechanism according to the present invention is applied.

In the vacuum deposition apparatus, a substrate holder 2 is provided in the upper part of a vapor deposition chamber 1, and a source heating source 3 is provided in the lower part thereof. The substrate holder 2 is formed into a dome shape and is installed with its opening facing downward. This substrate holder 2 is rotatably supported by a rotation support mechanism 10 according to the present invention.

The rotation support mechanism 10 will be explained below.

As shown in FIG.
A member 11, a second member 12 disposed coaxially with the first member 11 on a fixed member 6 fixed in the vapor deposition chamber 1, and a second member 12 disposed between the first member 11 and the second member 12. 1 member 11
and a plurality of balls 13 interposed on the same circumference around the axis of the second member 12, and the first member 11 is rotatably supported with respect to the second member 12. There is.

As shown in FIGS. 3 and 4, the ball 13 has a large diameter lower 1
3a and a small-diameter ball 13b smaller in diameter than the larger-diameter lower 13a.
are arranged alternately within. That is, the large diameter lower part 13a rolls with its upper and lower parts contacting the holding surfaces of the first member 11 and the second member 12 that constitute the holding part 14, whereas the small diameter ball 13b is affected by the large diameter lower part 13a. and rolls on the holding surface of the second member 12. Here, the diameter φd2 of the small diameter ball 13b is dz = d+, where the diameter of the large diameter lower ball 13a is φd1.
d+/100 is preferred.

A gear 15 is formed on the outer periphery of the first member 11, and as shown in FIG. has been done. The drive motor M and the gear 16 are connected to the deposition chamber 1.
Appropriate sealing means 17 so that the inside is not affected by outside air
are connected via.

Therefore, when the drive motor M is driven, the gear 16 rotates, and the first member 11 rotates accordingly.
The substrate holder 2 connected to the substrate holder 1 rotates.

During the rotation operation of the rotation support mechanism 10, first, if the large-diameter lower 13a and the small-diameter ball 13b are rotating in the holding part 14 in an ideal state without any rotational unevenness due to precision, etc., as shown in FIG. As shown, the large-diameter lower balls 13a rotate while maintaining appropriate intervals when arranged in the holding part 14, and the small-diameter balls 13b are pushed by the large-diameter lower balls 13a and lightly rub against the second member. Roll on 12. In addition, the large diameter lower portion 13a and the small diameter ball 13b may rotate unevenly, causing the front and rear large diameter lower portions 13a to
If the two are in contact with each other via the small diameter ball 13b and are rotating under pressure from each other, then the large diameter lower 13a.

The small diameter ball 13b sandwiched between the balls 13a rolls while being reversed with respect to the large diameter lower part 13a. As a result, compared to the conventional rotation support mechanism 10 described above, the large diameter lower 13a and the small diameter ball 13
Since b rolls smoothly, it is possible to alleviate the squeaks and rubbing that occur between the adjacent large-diameter balls 13a and small-diameter balls 13b,
The surfaces of the large-diameter balls 13a and the small-diameter balls 13b, and the holding portion 14
The 1st. Damage to each holding surface of the second member 11.12 can be prevented.

In this example, a plurality of balls 13 are interposed between the first member 11 and the second member 12, but the ball 1
3. It is not limited to 3... and may be a roller. Further, the rotation support mechanism 10 of the present invention is not limited to being applied to the vacuum evaporation apparatus described in this example, but can be applied to other apparatuses as long as they rotatably support a rotating member. The scope of application is wide. For example, as shown in FIG. 5, it can be applied to a composite bearing 21.21 that supports the upper and lower ends of the shaft body 20, and in this case, the balls 22 of the composite bearing 21...
・may be configured and arranged as described above.

(Effects of the Invention) As described above, according to the present invention, since the balls or rollers interposed between the first member and the second member roll smoothly, wear of the balls or rollers is reduced, and The surface of the ball or roller, or the first part that holds the ball or roller. Damage to each holding surface of the second member can be prevented and durability can be improved.

[Brief explanation of the drawing]

1 to 4 show an embodiment of the rotation support mechanism according to the present invention, FIG. 1 is a block diagram showing the configuration of a vacuum evaporation apparatus using the rotation support mechanism, and FIG. 2 is a diagram showing an example of the rotation support mechanism. 3 and 4 are enlarged longitudinal sectional views showing the first member and the second member.
5 is a sectional view showing the arrangement and state of the balls interposed between the members; FIG. 5 is a side view showing another application example of the rotation support mechanism;
6 and 7 show the configuration of a conventional rotation support mechanism, and FIG. 6 is an enlarged vertical sectional view showing a part of the rotation support device;
FIG. 7 is a sectional view showing the arrangement and state of the balls. 11... First member 12... Second member 13.
・・Ball (or Koru)

Claims (1)

[Claims] 1) A plurality of balls or rollers are interposed between the first member and the second member on the same circumference, and one of the first member and the second member is used as a rotating body. , in a rotating support mechanism configured to be rotatably supported relative to the other, the balls or rollers include a large-diameter ball or roller and a ball with a diameter at least smaller than the large-diameter ball or roller. A rotating support mechanism characterized by balls or rollers having different diameters arranged alternately.