JPH01172289A - Paste - Google Patents
PasteInfo
- Publication number
- JPH01172289A JPH01172289A JP32694287A JP32694287A JPH01172289A JP H01172289 A JPH01172289 A JP H01172289A JP 32694287 A JP32694287 A JP 32694287A JP 32694287 A JP32694287 A JP 32694287A JP H01172289 A JPH01172289 A JP H01172289A
- Authority
- JP
- Japan
- Prior art keywords
- paste
- pattern
- wiring
- derivative
- fluorescent material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000007689 inspection Methods 0.000 abstract description 18
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 4
- 239000001856 Ethyl cellulose Substances 0.000 abstract description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 abstract description 3
- QCWPXJXDPFRUGF-UHFFFAOYSA-N N1C=2C=C(N=3)C=CC=3C=C(N3)C=CC3=CC(=N3)C=CC3=CC1=CC=2C1=CC=CC=C1 Chemical class N1C=2C=C(N=3)C=CC=3C=C(N3)C=CC3=CC(=N3)C=CC3=CC1=CC=2C1=CC=CC=C1 QCWPXJXDPFRUGF-UHFFFAOYSA-N 0.000 abstract description 3
- 229920001249 ethyl cellulose Polymers 0.000 abstract description 3
- 235000019325 ethyl cellulose Nutrition 0.000 abstract description 3
- 150000002790 naphthalenes Chemical class 0.000 abstract description 3
- 150000002989 phenols Chemical class 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract description 2
- IOHPVZBSOKLVMN-UHFFFAOYSA-N 2-(2-phenylethyl)benzoic acid Chemical compound OC(=O)C1=CC=CC=C1CCC1=CC=CC=C1 IOHPVZBSOKLVMN-UHFFFAOYSA-N 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 14
- 239000000843 powder Substances 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical class O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003909 pattern recognition Methods 0.000 description 3
- 150000001558 benzoic acid derivatives Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000006862 quantum yield reaction Methods 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、パターン形成用のペーストに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a paste for pattern formation.
近年1回路基板の小型化、高信頼性化という点から、ア
ルミナ、低融点ガラス、ムライト等をそれぞれ主成分と
するセラミック配線基板がICチップや電子部品を搭載
する基板として広く用いられている。In recent years, from the viewpoint of downsizing and increasing the reliability of single circuit boards, ceramic wiring boards whose main components are alumina, low-melting glass, mullite, etc. have been widely used as boards on which IC chips and electronic components are mounted.
セラミック配線基板の素材は、セラミック粉末を樹脂で
結合したグリーンシートまたは焼結済セラミック板、金
属粉末を主成分とする配線導体用ペースト、絶縁性粉末
を主成分とする絶縁ペーストである。The materials for the ceramic wiring board are a green sheet or sintered ceramic plate made of ceramic powder bonded with resin, a wiring conductor paste containing metal powder as its main component, and an insulating paste containing insulating powder as its main component.
セラミック配線基板の製造方法は、上記素材を用いてグ
リーンシート上に配線パターンを形成した後、−括焼成
する。またはセラミック板上に導体層を印刷・焼成、続
いて絶縁層を印刷・焼成。The method for manufacturing a ceramic wiring board involves forming a wiring pattern on a green sheet using the above-mentioned material, and then firing the green sheet. Alternatively, a conductor layer is printed and fired on a ceramic plate, followed by an insulating layer.
さらにこれらを繰り返すことによって作製される。It is produced by repeating these steps further.
しかしながら、電子機器の発達に伴い、セラミック配線
基板にも、益々配線の高密度化が要求されるようになっ
た。その結果、新たに、次のような問題点が生じてきた
。それは、セラミック配線基板の回路の高密度化ととも
に、配線パターンも急速に微細化してきたことに伴う問
題である。すなわち、配線パターンを印刷したグリーン
シートおよびセラミック板の概観検査、特に配線の断線
や短絡の検査は、従来は目視で行ってきたが、この方法
は配線パターンの微細化に対応できなくなり、検査の自
動化が現在盛んに進められている。However, with the development of electronic devices, ceramic wiring boards are also required to have increasingly higher wiring densities. As a result, the following new problems have arisen. This is a problem caused by the rapid miniaturization of wiring patterns as the circuit density of ceramic wiring boards increases. In other words, the general appearance inspection of green sheets and ceramic boards on which wiring patterns are printed, especially inspections for disconnections and short circuits, has traditionally been done visually, but this method is no longer compatible with the miniaturization of wiring patterns, and inspections have become more difficult. Automation is currently being actively promoted.
そしてその検査方法の原理は、光の反射、散乱を利用し
てグリーンシート上およびセラミック板上の配線パター
ンを検査するものである。しかしながら、光の反射、散
乱は、配線パターン中の金属粒子のみならず、グリーン
シートおよびセラミック板によっても起こるため、配線
パターンのみを明確に分離しに<<、検査工程に長時間
を要する、また検出ミスが起こる等の欠点がある。さら
に今後ますます微細化することが予想される配線パター
ンの検査に対し、上記した現在の方法では追従できなく
なると考えられる。The principle of this inspection method is to inspect wiring patterns on green sheets and ceramic plates by utilizing reflection and scattering of light. However, since light reflection and scattering occur not only by metal particles in the wiring pattern but also by green sheets and ceramic plates, it takes a long time to inspect the wiring pattern, and There are drawbacks such as detection errors. Furthermore, it is thought that the current methods described above will no longer be able to keep up with the inspection of wiring patterns, which are expected to become increasingly finer in the future.
本発明の目的は、上述した従来技術の欠点をなくし、配
線パターンの検査が容易なパターン形成用ペーストを提
供することにある。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art described above and to provide a pattern forming paste that facilitates inspection of wiring patterns.
C問題点を解決するための手段〕 以下に本発明の基本的な考えについて述べる。Measures to solve problem C] The basic idea of the present invention will be described below.
それは、配線層パターンの検査を、従来は可視光を用い
て行っていたのに対し、パターンを形成するペーストに
蛍光材料を混合することによって、紫外光を用いて配線
層パターンの検査を可能にすることである。Conventionally, wiring layer patterns were inspected using visible light, but by mixing a fluorescent material into the paste that forms the pattern, it is now possible to inspect wiring layer patterns using ultraviolet light. It is to be.
すなわち蛍光材料を添加したペーストでパターンを形成
したグリーンシートおよびセラミック板に紫外光を照射
すると、パターンからは蛍光を発するが、グリーンシー
トおよびセラミック板からは蛍光が発しない。That is, when ultraviolet light is irradiated onto a green sheet and a ceramic plate in which a pattern is formed using a paste containing a fluorescent material, the pattern emits fluorescence, but no fluorescence is emitted from the green sheet or the ceramic plate.
その結果、配線層パターンの濃淡が明確になり、配線層
パターンの検査が容易になる。As a result, the shading of the wiring layer pattern becomes clearer, making it easier to inspect the wiring layer pattern.
添加する蛍光材料の量は、後述するような理由から、ペ
ースト100部に対して10分の1部を越えない量とす
る。The amount of the fluorescent material to be added is determined not to exceed 1/10 part based on 100 parts of the paste for reasons described later.
また、蛍光材料としては、やはり後述するような理由か
ら、安息香酸誘導体、ナフタレン誘導体。In addition, as fluorescent materials, benzoic acid derivatives and naphthalene derivatives are used for the reasons described later.
フェノール誘導体、フェニルポルフィリン誘導体。Phenol derivatives, phenylporphyrin derivatives.
フルオレッセイン誘導体のなかの1種または複数種から
なるものが好ましい。Preferably, it consists of one or more fluorescein derivatives.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
(実施例1)
配線用導体ペーストとして、タングステンペーストを用
い、アルミナグリーンシート上に配線パターンを形成す
る場合について述べる。(Example 1) A case will be described in which a wiring pattern is formed on an alumina green sheet using tungsten paste as a conductor paste for wiring.
始めに、配線パターンを形成するためのタングステン粉
末を用いたタングステンペーストの作製方法について述
べる。タングステン粉末としては、0.5μm粉末と3
.0μm粉末とを重量比で3ニアの割合で混合した粉末
を80重量%、ペースト用バインダとしてエチルセルロ
ースを2.5重量%、ジエチレングリコールを17.5
重量%を混合したちの100部に対し、フルオレッセイ
ン粉末を100分の1部を加え合わせ、アルミナ製の乳
鉢と乳棒からなるらいかい機で3時間混練する。First, a method for producing a tungsten paste using tungsten powder for forming a wiring pattern will be described. As tungsten powder, 0.5 μm powder and 3
.. 80% by weight of powder mixed with 0 μm powder at a weight ratio of 3, 2.5% by weight of ethyl cellulose as a binder for paste, and 17.5% of diethylene glycol.
1/100 part of fluorescein powder was added to 100 parts by weight of the mixture, and the mixture was kneaded for 3 hours using a mortar and pestle made of alumina.
続いて、この混合物をアルミナ張りをした3本ロールに
て、ギャップ30μmで30分間混線後、nブチルカル
ピトールアセテートを加えて粘度を調整し、印刷用ペー
ストとする。Subsequently, this mixture was mixed with three rolls lined with alumina for 30 minutes with a gap of 30 μm, and then n-butylcarpitol acetate was added to adjust the viscosity to obtain a printing paste.
次に、−船釣なドクタープレイド型キャスティング装置
で作製した0、3■厚のアルミナグリーンシート(セラ
ミック生シート)を外形寸法200m角に切断し、配線
印刷用のグリーンシートとした。続いて、前記のように
作製した蛍光剤入りタングステンペーストを用い、スク
リーン印刷法にて、検査テスト用の配線パターンを形成
した。Next, an alumina green sheet (ceramic raw sheet) with a thickness of 0.3 mm was produced using a Dr. Plaid type casting device, and was cut into pieces of 200 m square in external dimension to obtain a green sheet for wiring printing. Subsequently, a wiring pattern for an inspection test was formed by screen printing using the fluorescent agent-containing tungsten paste prepared as described above.
続いて、パターン認識型の検査装置を用いて。Next, using a pattern recognition type inspection device.
テスト配線パターンの検査を行った。The test wiring pattern was inspected.
また、比較例として、蛍光材料を添加しないタングステ
ンペーストを用いて、前述と同様の方法でグリーンシー
ト上に検査テスト用の配線パターンを形成し、パターン
認識型の検査装置を用いて検査を行った。In addition, as a comparative example, a wiring pattern for inspection testing was formed on a green sheet in the same manner as described above using tungsten paste without the addition of fluorescent material, and inspection was performed using a pattern recognition type inspection device. .
検査条件としては、蛍光材料混合ペーストの配線パター
ンに対しては紫外光を、また従来の蛍光材料を含有しな
いペーストの配線パターンに対しては可視光を用いた。As for the inspection conditions, ultraviolet light was used for the wiring pattern of the fluorescent material mixed paste, and visible light was used for the wiring pattern of the conventional paste containing no fluorescent material.
測定に用いたサンプル数はそれぞれ100である。検査
結果を表1に示す。The number of samples used for each measurement was 100. The test results are shown in Table 1.
表1から明らかなように1本発明による蛍光材料を混合
したペーストを用いた方が配線パターンの検査精度が高
い。As is clear from Table 1, the accuracy of wiring pattern inspection is higher when the paste containing the fluorescent material according to the present invention is used.
また、上記実施例においては、蛍光材料の含有量を10
0分の1部(ペースト100部に対し)としたが、含有
量としては100万分の1部程度あれば、十分な検出精
度が得られる。しかしながら、含有量が10分の1部を
越えると、ペーストの焼成時に悪影響を及ぼし、配線導
体としての特性劣化(比抵抗増加、密着強度低下)が起
こる。In addition, in the above example, the content of the fluorescent material was reduced to 10
Although the content is about 1/100 parts (relative to 100 parts of paste), sufficient detection accuracy can be obtained if the content is about 1/1,000,000 parts. However, if the content exceeds 1/10 part, it will have an adverse effect on the firing of the paste, resulting in deterioration of the properties as a wiring conductor (increase in specific resistance, decrease in adhesion strength).
さらに1本実施例においては、蛍光材料としてフルオレ
ッセインを用いたが、芳香族化合物であれば良い。それ
らには、例えば蛍光量子収率が比較的高く、蒸気圧の高
いもの、安息香酸誘導体。Furthermore, in this example, fluorescein was used as the fluorescent material, but any aromatic compound may be used. These include, for example, those with relatively high fluorescence quantum yields and high vapor pressures, benzoic acid derivatives.
ナフタレン誘導体、フェノール誘導体等、また蛍光量子
収率が極めて高く分子量の比較的大きなもの、フェニル
ポルフィリン誘導体、フルオレッセイン誘導体等がある
。前者は、蒸気圧が高いので容易に取り除かれ、焼成時
に障害とならないこと、また後者は、微量ですむため焼
成時の障害とならないこと、等の特長がある。There are naphthalene derivatives, phenol derivatives, etc., and those with extremely high fluorescence quantum yields and relatively large molecular weights, phenylporphyrin derivatives, fluorescein derivatives, etc. The former has the advantage of being easily removed due to its high vapor pressure and does not cause any hindrance during firing, and the latter having only a small amount and not causing any hindrance during firing.
(実施例2)
パターン形成用ペーストとして、A g / P dペ
ーストを用い、焼結済アルミナ板に配線パターンを形成
する場合について述べる。(Example 2) A case will be described in which a wiring pattern is formed on a sintered alumina plate using Ag/Pd paste as a pattern forming paste.
AgとPdの割合が8=2で、かつ、平均粒径が0.2
μmの混合粉末70重量%に対して、有機ビヒクル(エ
チルセルロース5%のα−テレピネオール溶液)を30
重量%混合したちの100部に対して、フルオレッセイ
ン粉末を100分の1部加えて混練しペースト状とした
。The ratio of Ag and Pd is 8=2, and the average particle size is 0.2
Organic vehicle (5% ethyl cellulose α-terpineol solution) was added at 30% by weight to 70% μm mixed powder.
One-hundredth part of fluorescein powder was added to 100 parts by weight of the mixture and kneaded to form a paste.
また、上記と同様の方法にて、蛍光材料を加えないペー
ストも作製した。In addition, a paste to which no fluorescent material was added was also prepared in the same manner as above.
続いて、実施例1と同様の方法にて、上記2種類のペー
ストを用いてアルミナ板上に配線パターンを形成して、
パターン認識型の検査装置を用いてパターン検査を行っ
た。検査条件は、蛍光材料混合ペーストに対しては紫外
光を、また蛍光材料を含有していないペーストに対して
は可視光を用いた。検査結果を表2に示す。Subsequently, a wiring pattern was formed on the alumina board using the above two types of paste in the same manner as in Example 1,
Pattern inspection was performed using a pattern recognition type inspection device. As for the inspection conditions, ultraviolet light was used for the fluorescent material mixed paste, and visible light was used for the paste that did not contain the fluorescent material. The test results are shown in Table 2.
表2
表2から明らかなように、蛍光材料を混合したペースト
を用いた方が配線パターンの検査精度が高い。Table 2 As is clear from Table 2, the accuracy of wiring pattern inspection is higher when a paste containing a fluorescent material is used.
実施例1,2の検査結果から、ペーストの組成とは無関
係に、ペーストに蛍光材料を添加するだけで検出精度が
向上することがわかる。すなわち。The test results of Examples 1 and 2 show that detection accuracy can be improved simply by adding a fluorescent material to the paste, regardless of the composition of the paste. Namely.
ペーストであれば適用可能である。It is applicable if it is a paste.
〔発明の効果〕
以上述べたように、本発明によればパターン形成用ペー
ストに蛍光材料を添加することにより、配線パターンの
検査を高精度に行うことが可能となる。[Effects of the Invention] As described above, according to the present invention, by adding a fluorescent material to a pattern forming paste, it becomes possible to inspect wiring patterns with high precision.
Claims (1)
の1部を越えない量の蛍光材料を含有することを特徴と
するペースト。1. A paste characterized in that it contains a fluorescent material in an amount not exceeding 1/10 part based on 100 parts of pattern-forming paste.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32694287A JPH01172289A (en) | 1987-12-25 | 1987-12-25 | Paste |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32694287A JPH01172289A (en) | 1987-12-25 | 1987-12-25 | Paste |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01172289A true JPH01172289A (en) | 1989-07-07 |
Family
ID=18193496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32694287A Pending JPH01172289A (en) | 1987-12-25 | 1987-12-25 | Paste |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01172289A (en) |
-
1987
- 1987-12-25 JP JP32694287A patent/JPH01172289A/en active Pending
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