JPH01171560U - - Google Patents

Info

Publication number
JPH01171560U
JPH01171560U JP6686488U JP6686488U JPH01171560U JP H01171560 U JPH01171560 U JP H01171560U JP 6686488 U JP6686488 U JP 6686488U JP 6686488 U JP6686488 U JP 6686488U JP H01171560 U JPH01171560 U JP H01171560U
Authority
JP
Japan
Prior art keywords
reduction gear
electric motor
view
lubricant
lubricant support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6686488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6686488U priority Critical patent/JPH01171560U/ja
Publication of JPH01171560U publication Critical patent/JPH01171560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Details Of Gearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP6686488U 1988-05-23 1988-05-23 Pending JPH01171560U (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6686488U JPH01171560U (pl) 1988-05-23 1988-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6686488U JPH01171560U (pl) 1988-05-23 1988-05-23

Publications (1)

Publication Number Publication Date
JPH01171560U true JPH01171560U (pl) 1989-12-05

Family

ID=31292252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6686488U Pending JPH01171560U (pl) 1988-05-23 1988-05-23

Country Status (1)

Country Link
JP (1) JPH01171560U (pl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014104557A (ja) * 2012-11-29 2014-06-09 Ebara Corp 基板保持装置および研磨装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014104557A (ja) * 2012-11-29 2014-06-09 Ebara Corp 基板保持装置および研磨装置

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