JPH01171027U - - Google Patents
Info
- Publication number
- JPH01171027U JPH01171027U JP1988068286U JP6828688U JPH01171027U JP H01171027 U JPH01171027 U JP H01171027U JP 1988068286 U JP1988068286 U JP 1988068286U JP 6828688 U JP6828688 U JP 6828688U JP H01171027 U JPH01171027 U JP H01171027U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thickness change
- notch
- wafer boat
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068286U JPH01171027U (enrdf_load_stackoverflow) | 1988-05-24 | 1988-05-24 | |
| KR1019880008741A KR910007105B1 (ko) | 1988-05-24 | 1988-07-14 | 웨이퍼보드 반송용치구(治具) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068286U JPH01171027U (enrdf_load_stackoverflow) | 1988-05-24 | 1988-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01171027U true JPH01171027U (enrdf_load_stackoverflow) | 1989-12-04 |
Family
ID=31293612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988068286U Pending JPH01171027U (enrdf_load_stackoverflow) | 1988-05-24 | 1988-05-24 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH01171027U (enrdf_load_stackoverflow) |
| KR (1) | KR910007105B1 (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120319A (ja) * | 1984-07-09 | 1986-01-29 | Toshiba Ceramics Co Ltd | 石英ガラス製ウエハボ−ト搬送治具 |
-
1988
- 1988-05-24 JP JP1988068286U patent/JPH01171027U/ja active Pending
- 1988-07-14 KR KR1019880008741A patent/KR910007105B1/ko not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120319A (ja) * | 1984-07-09 | 1986-01-29 | Toshiba Ceramics Co Ltd | 石英ガラス製ウエハボ−ト搬送治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR890017792A (ko) | 1989-12-18 |
| KR910007105B1 (ko) | 1991-09-18 |